CN109226721A - The method of smelting of ingot casting - Google Patents
The method of smelting of ingot casting Download PDFInfo
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- CN109226721A CN109226721A CN201710556196.6A CN201710556196A CN109226721A CN 109226721 A CN109226721 A CN 109226721A CN 201710556196 A CN201710556196 A CN 201710556196A CN 109226721 A CN109226721 A CN 109226721A
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- molten metal
- mold
- smelting
- vibration
- ingot casting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/08—Shaking, vibrating, or turning of moulds
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Abstract
A kind of method of smelting of ingot casting, comprising: mold is provided；Form molten metal；The molten metal is injected into the mold；Vibrate the molten metal in the mold to form ingot casting.By making the way that molten metal vibrates in the mold, plays the role of stirring molten metal, forms convection current, to promote the precipitation of dissolved gas, reduce residual gas, reduce stomatal limiting value；Temperature uniformity is improved, the formation of superficial film is avoided, shrinkage hole is reduced and is formed；The reduction of stomata and shrinkage hole can effectively reduce the defect of formed ingot casting, advantageously reduce the probability that ingot casting is scrapped, advantageously reduce the defect of formed sputtering target material.
Description
Technical field
The present invention relates to Metal Melting field, in particular to a kind of method of smelting of ingot casting.
Background technique
Sputtering target material is a kind of extremely important critical material necessary to manufacture semiconductor chip.Utilize sputtering target material shape
The technological principle of film forming layer is to be sputtered out the atom of target, in the form of a film using accelerated ion bombardment target
It deposits on substrate, ultimately forms the film layer in semiconductor chip.Using sputtering target material be formed by film layer it is high with uniformity,
Many advantages, such as controllability is strong is applied in the forming method of various semiconductor devices.
In the semiconductor technology that sputtering technology forms film layer, the quality of sputtering target material will have a direct impact on the formation film layer
Quality；And metal targets are the raw materials to form sputtering target material with ingot casting, so the quality of metal targets ingot casting is to being formed
The quality of film layer plays a key role.
Wherein superelevation fine copper is the raw material for manufacturing the ultra-pure copper sputtering target material of semiconductor chip.Ultra-pure copper ingot generally exists
After melting, by degasification, cast.According to the difference that sputtering target material size requires, ultra-pure copper ingot is used
Diameter is generally in 150mm to 250mm range.
It is higher and higher to the formation quality requirement of film layer with the rapid development of semiconductor device design and manufacturing technology,
The quality requirement of sputtering target material is also higher and higher.Correspondingly, the quality requirement to corresponding ingot casting also increases accordingly.
Often existing defects are more for existing method of smelting ingot casting obtained, and ingot material is be easy to cause to scrap or sputter
Inside target the problem of existing defects.
Summary of the invention
Problems solved by the invention is to provide a kind of method of smelting of ingot casting, to reduce the defects of obtained ingot casting, from
And ingot material utilization rate is improved, it prevents ingot material from scrapping, reduces the appearance of formed sputtering target material internal flaw, improve institute
Form the quality of sputtering target material.
To solve the above problems, the present invention provides a kind of method of smelting of ingot casting, comprising:
Mold is provided；Form molten metal；The molten metal is injected into the mold；Make the melting gold in the mold
Belong to vibration to form ingot casting.
Optionally, the mold, which is fixed on, bears on bracket；Made in the mold by the vibration for bearing bracket
Molten metal vibration.
Optionally, the bracket that bears is connected with cam vibration device, and the cam vibration device includes motor；Pass through institute
Stating motor makes described to bear mount vibration.
Optionally, after providing the mold, before the molten metal is injected the mold, start the mold
Vibration；Mold into vibration injects the molten metal.
Optionally, the molten metal is injected into the mold by several times；After mold is provided, for the first time into the mold
It injects before the molten metal, the mold starts to vibrate；The vibration of the mold continues to last time to inject melting gold
After category.
Optionally, it injects after the molten metal, the duration of the mold vibration is in 2min to 5min range.
Optionally, the direction of vibration of the mold includes at least one in first direction, second direction and third direction
Direction, the first direction is parallel with gravity direction, and the second direction is perpendicular to the first direction, the third direction
It is vertical with the first direction and the second direction.
Optionally, vibrate the molten metal by ultrasonic vibration apparatus.
Optionally, vibration frequency is in 40Hz to 200Hz range.
Optionally, Oscillation Amplitude is in 1.5mm to 2.5mm range.
Optionally, the molten metal injects the flow velocity of the mold within the scope of 0.5 Kilograms Per Second to 4.0 Kilograms Per Seconds.
Optionally, the mold is set in vacuum chamber；In vacuum environment, the molten metal is injected into the mold
In, and vibrate the molten metal in the mold to form ingot casting.
Optionally, the vacuum degree of the vacuum chamber is 10-2Pa to 10-3Within the scope of Pa.
Optionally, the molten metal includes one of copper, cobalt, nickel, platinum, Jin Heyin or a variety of.
Optionally, the molten metal is molten copper；Molten copper is formed by way of melting cathode copper.
Optionally, the molten metal is formed by way of vacuum induction melting.
Optionally, by mass percentage, the purity of the molten metal is 99.99% or more.
Compared with prior art, technical solution of the present invention has the advantage that
Make the way that molten metal vibrates in the mold, the stirring molten metal can be played the role of, makes described
Convection current is formed in molten metal；The stirring of molten metal can effectively promote the precipitation of dissolved gas, can be effectively reduced melting
The concentration of dissolved gas in metal reduces the residual gas in obtained ingot casting, reduces the formation of stomata；Convection current in molten metal
Formation, molten metal surface and internal temperature uniformity can be effectively improved, the molten metal surface and inside is made to become
It is solidified in simultaneously, avoids the formation of superficial film, reduce the formation of shrinkage hole；The reduction of stomata and shrinkage hole can effectively subtract
The defect of few formed ingot casting, advantageously reduces the probability that ingot casting is scrapped, to provide the utilization rate of ingot material；Be conducive to subtract
The defect of few formed sputtering target material, to improve the quality of formed sputtering target material.
In optinal plan of the present invention, the vibration by bearing bracket vibrates the mold, to make in the mold
Molten metal vibration；This way simple process, strong operability；And institute can be made without directly contacting the molten metal
It states molten metal and generates vibration, so as to avoid introducing impurity into the molten metal, be conducive to keep the melting gold
The purity of category is conducive to the quality for improving formed sputtering target material.
In optinal plan of the present invention, vibration frequency is in 40Hz to 200Hz range, and Oscillation Amplitude is in 1.5mm to 2.5mm model
In enclosing.Vibration frequency is unsuitable excessively high also unsuitable too low, and Oscillation Amplitude should not be too large also unsuitable too small；Vibration frequency is too low, vibrates
Amplitude is too small, then the molten metal is excessively gentle by the effect stirred, and convection current formed in the molten metal is excessively micro-
Weak, excessively gentle stirring is unfavorable for the precipitation of dissolved gas, is unfavorable for the reduction of residual gas, and excessively faint stirring is unfavorable
In the uniformity for improving molten metal temperature, it is unfavorable for that molten metal surface and inside is made to tend to solidify simultaneously；Vibration frequency mistake
It is high, Oscillation Amplitude is excessive, then molten metal may be made to shake out mold because of vibration, and cause waste of material and unnecessary
Process risk.
In optinal plan of the present invention, the mold is set in vacuum chamber；In vacuum environment, the molten metal is infused
Enter in the mold, and vibrates the molten metal in the mold to form ingot casting；The process environments of vacuum can effectively subtract
Solubility of the small gas in the dissolution metal, can effectively drive gas evolution, to advantageously reduce residual gas, have
Conducive to the formation for reducing stomata, the defect of obtained ingot casting is reduced；And the process environments of vacuum can also be effectively reduced it is described
The probability that molten metal is oxidized is conducive to the purity and yield that improve obtained ingot casting.
In optinal plan of the present invention, the molten metal is injected into the mold by several times；This injection mode can make elder generation
The molten metal of injection mold is sufficiently stirred, to reduce the difficulty of dissolved gas precipitation, advantageously reduces the melting
Residual gas in metal advantageously reduces the defects of described ingot casting.
Detailed description of the invention
Fig. 1 is a kind of the schematic diagram of the section structure of obtained ingot casting of method of smelting；
Fig. 2 is the flow diagram of one embodiment of ingot casting method of smelting of the present invention；
Fig. 3 is the structural schematic diagram of the used equipment of the embodiment of ingot casting method of smelting shown in Fig. 2.
Specific embodiment
It can be seen from background technology that, the prior art ingot casting obtained often more problems of existing defects.Now in conjunction with one kind
The method of smelting of ingot casting analyzes the reason of its defect problem.
Vacuum induction melting (Vacuum Induction Melting) is that one kind utilizes electromagnetic induction under vacuum conditions
Principle of heating carrys out the smithcraft processing procedure of smelting metal.Vacuum induction melting can generate eddy current during electromagnetic induction, make
Metal molten.This processing procedure can be used to refine the metal and alloy of high-purity.
With reference to Fig. 1, a kind of the schematic diagram of the section structure of obtained ingot casting of method of smelting is shown.
It should be noted that this is illustrated for sentencing the melting of ultrahigh-purity copper ingot casting, i.e. method of smelting shown in Fig. 1
Obtained ingot casting is casting in bronze ingot.
In the method for smelting, molten copper injects mold 10, obtains the casting in bronze ingot after cooling.Wherein, molten copper is electricity
Solution copper obtained through vacuum induction melting, therefore in molten copper institute's dissolved gas content it is relatively high.In general, it is electrolysed
In copper molten copper obtained, the concentration of dissolved gas can be up to tens ppm to hundreds of ppm.Melting obtains the molten copper
And the technical process of molten copper injection mold 10, in the process environments of vacuum, the gas in molten copper is due to environment under low pressure
And it is precipitated；But the gas flow being precipitated due to environment under low pressure is limited, is unable to satisfy the technique requirement of sputtering target material casting in bronze ingot
(sputtering target material is required in several ppm to be even less than 1ppm with the concentration of dissolved gas in casting in bronze ingot), it is residual in formed casting in bronze ingot
It is remaining to have more dissolved gas.Residual gas can form stomata 11 in being formed by casting in bronze ingot, to become the casting in bronze ingot
The defects of.
Further, since copper has preferable heating conduction, while cooling, the molten copper on surface has preferable dissipate to molten copper
Thermal environment, cooling velocity are very fast；The molten copper dissipating-heat environment of inside ingot is poor, and cooling velocity is slower.So molten copper is cold
When but forming casting in bronze ingot, the molten copper on surface takes the lead in solidifying, superficial film easy to form；It is solidified after internal molten copper, it is interior
Portion's molten copper can be due to expanding with heat and contract with cold and volume becomes smaller, to can make the superficial film that showing for local dent occur in solidification
As to form shrinkage hole.When gradation injection molten copper is to obtain casting in bronze ingot, preceding primary the obtained casting in bronze ingot of injection molten copper
The shrinkage hole on surface can be supplemented by the rear molten copper once injected, and be filled；But after last time injection molten copper,
Since will not molten copper be injected into the mold 10 again, so being formed by shrinkage hole (not indicating in figure) is unable to get melting
Copper supplement, is unable to get filling, so will form the shrinkage hole 12 of recess in the casting in bronze ingot surface finally obtained, lacks to become
It falls into.
Excessive residual gas can make stomata 11 in obtained casting in bronze ingot excessive, to cause defect in the casting in bronze ingot
Excessively；The difference of molten copper cooling velocity can make the shrinkage hole 12 of obtained casting in bronze ingot excessive, too deep, to cause to be obtained
Casting in bronze ingot surface defect is excessive.The excessive defect of casting in bronze ingot can be such that the casting in bronze ingot scraps, and influence the utilization rate of ingot material,
Formed sputtering target material defect may also be caused excessive, to influence the quality of formed sputtering target material.
To solve the technical problem, the present invention provides a kind of method of smelting of ingot casting, is melted in the mold by making
The way of metal vibration plays the role of stirring molten metal, forms convection current, to promote the precipitation of dissolved gas, reduces residual
Residual air body reduces stomatal limiting value；Temperature uniformity is improved, the formation of superficial film is avoided, shrinkage hole is reduced and is formed；Stomata and receipts
The reduction of shrinkage cavity can effectively reduce the defect of formed ingot casting, advantageously reduce the probability that ingot casting is scrapped, advantageously reduce institute
Form the defect of sputtering target material.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
With reference to Fig. 2, the flow diagram of one embodiment of ingot casting method of smelting of the present invention is shown.
In the present embodiment, the method for smelting of the ingot casting is comprised the following steps that
Step S100, provides mold；
Step S200 forms molten metal；
The molten metal is injected the mold by step S300；
Step S400 vibrates the molten metal in the mold to form ingot casting.
Make the way that molten metal vibrates in the mold, can play the role of stirring, the shape in the molten metal
At convection current, to may advantageously facilitate dissolved gas precipitation, is conducive to the reduction of residual gas in ingot casting, reduces the formation of stomata；
The temperature uniformity for also advantageously improving molten metal avoids the formation of superficial film, reduces the formation of shrinkage hole；Stomata and receipts
The reduction of shrinkage cavity can effectively reduce the defect of formed ingot casting, advantageously reduce the probability that ingot casting is scrapped, advantageously reduce institute
Form the defect of sputtering target material.
The specific embodiment of the invention is described further with reference to the accompanying drawing.
With reference to Fig. 3, the structural schematic diagram of the embodiment of ingot casting method of smelting shown in Fig. 2 is shown.
In conjunction with referring to figs. 2 and 3, step S100 is executed, mold 100 is provided.
The mold 100 is for installing molten metal, so that the formation for the ingot casting provides state space.
In the present embodiment, it is illustrated by taking the melting of ultrahigh-purity copper ingot casting as an example.So in the present embodiment, the mold
100 material is graphite.The fusing point of graphite is up to 3700 DEG C or more, so the mold 100 of graphite material has preferable resistance to height
Warm nature energy, so as to realize the installation of ingot casting in fusion process.
In the present embodiment, the mold 100 is cylinder, and the shape of 100 internal cavities of mold is also cylindrical, institute
It is cylinder with the shape of obtained ingot casting.In other embodiments of the invention, the shape of the mold and the inside ingot are empty
The shape of chamber may be other shapes.The shape of the mold and the shape of the inside ingot cavity are according to smelting technology ring
The processing request of the requirement in border and formed sputtering target material shape and set.
As shown in figure 3, the mold 100, which is fixed on, to be born on bracket 120 in the present embodiment, i.e., it is described to bear bracket 120
For providing mechanical support for the mold 100.
In the present embodiment, the material for bearing bracket 120 is stainless steel, and the mold 100 is held by bolt with described
Bracket 120 is put to be fixedly linked.Specifically, the ingot casting method of smelting carries out in vacuum technology environment in the present embodiment, so
The mold 100 is set in vacuum chamber 104.
It should be noted that the mold 100 is identical as mold in the prior art, details are not described herein by the present invention.
As shown in Figures 2 and 3, step S200 is executed, molten metal 110 is formed.
The molten metal 110 is the raw material of the ingot casting, forms the ingot casting after cooling.
It in the present embodiment, is illustrated by taking the melting of ultrahigh-purity copper ingot casting as an example, therefore the molten metal 110 is height
The molten copper of purity, by mass percentage, the purity of the molten metal 110 is 99.99% or more, i.e., the described molten metal
The mass percent of copper is 99.99% or more in 110.In other embodiments of the invention, the matter of the metal in the molten metal
Amount percentage even can achieve 99.999% or more, so as to effectively improve the material purity of formed sputtering target material, subtract
Impurity and defect in few target, are conducive to the quality for improving formed sputtering target material.
In other embodiments of the invention, the molten metal can also be one of copper, cobalt, nickel, platinum, Jin Heyin or more
Kind, i.e., the described molten metal can also be copper, cobalt, nickel, platinum, gold, silver and its alloy.
In the present embodiment, the molten metal 110 is formed by way of vacuum induction melting.Vacuum induction melting is logical
The principle for crossing electromagnetic induction carries out melting.So as shown in figure 3, the step of forming molten metal 110 includes: by raw material
It is placed in graphite crucible, the graphite crucible is set in vacuum chamber 140；By be set in graphite crucible periphery around
Group coil heats raw material in the graphite crucible, so that the melting to the raw material is realized, to form the molten metal
110。
In the present embodiment, the molten copper is formed by way of melting cathode copper, that is, is placed in the graphite earthenware
Raw material in crucible is cathode copper.Cathode copper is that slab is made as anode in advance in blister copper (cupric 99%), and fine copper is laminated
Make cathode, using the mixed liquor of sulfuric acid and copper sulphate as electrolyte；After energization, copper is moved at copper ion to cathode from anodic solution
It is dynamic, electronics is obtained after reaching cathode and in the copper of cathode precipitation.
Due to the limitation of technique, the content of dissolved gas is higher in cathode copper.Under normal circumstances, dissolved gas in cathode copper
Content within the scope of more than ten of ppm to hundreds of ppm, therefore by cathode copper be raw material and in the molten metal 110 that is formed it is molten
The content for solving gas is also relatively high.So the way of the molten metal 110 is formed by way of vacuum induction melting,
In addition to can effectively avoid the molten metal 110 from aoxidizing in fusion process, the molten metal is improved to reach
The purpose of 110 purity；And the graphite crucible is set in the vacuum chamber 140, the technique for forming the molten metal 110
Process is completed in the vacuum chamber 140, and the process environments of vacuum can reduce dissolution of the gas in the molten metal 110
Degree, is conducive to drive gas evolution, so as to effectively reduce the residual gas in the molten metal 110, is conducive to be obtained
Obtain the reduction of defect in ingot casting.
It should be noted that the vacuum degree of the vacuum chamber 140 is 10 in the present embodiment-2Pa to 10-3Within the scope of Pa.Institute
The vacuum degree for stating vacuum chamber 140 is unsuitable excessively high also unsuitable too low: if the vacuum degree of the vacuum chamber 140 is too low, i.e., described true
Air pressure is excessively high in cavity 140, then is unfavorable for the reduction of gas solubility in molten metal 110, may will affect gas from described
Precipitation in molten metal 110 is unfavorable for the reduction of residual gas；It is if the vacuum degree of the vacuum chamber 140 is excessively high, i.e., described
The problem of air pressure is too low in vacuum chamber 140, then technology difficulty increase, process costs may be caused to rise.
It should also be noted that, the step of molten metal 110 formation is same as the prior art, the present invention is herein no longer
It repeats.
With continued reference to Fig. 2 and Fig. 3, step S300 is executed, the molten metal 110 is injected in the mold 100；It executes
Step S400 vibrates the molten metal 110 in the mold 100, to form ingot casting (not shown).
Make the way that molten metal 110 vibrates in the mold 100, the work for stirring the molten metal 110 can be played
With making to form convection current in the molten metal 110.The stirring of the molten metal 110 can effectively promote the analysis of dissolved gas
Out, it can be effectively reduced the concentration of dissolved gas in the molten metal 110, reduce the residual gas in obtained ingot casting, subtract
The formation of few stomata；The formation of convection current in the molten metal 110 can effectively improve 110 surface of molten metal and interior
The temperature uniformity in portion makes 110 surface of molten metal and inside tend to solidify simultaneously, and even if the molten metal
110 surfaces form small-scale local film layer, and small range part film layer also can be under stirring action and convection action, by it
Remaining molten metal 110 and melt, avoid the formation of superficial film, reduce the formation of shrinkage hole.
So in the mold 100 molten metal 110 vibration, can achieve the purpose that reduce stomata and shrinkage hole, from
And the defect of formed ingot casting can be effectively reduced, the probability that ingot casting is scrapped is advantageously reduced, to provide the benefit of ingot material
With rate；The defect of formed sputtering target material is advantageously reduced, to improve the quality of formed sputtering target material.
As shown in figure 3, the mold 100 is fixed on and bears on bracket 120；So passing through the vibration for bearing bracket 120
It is dynamic to vibrate the mold 100, and then vibrate the molten metal 110 in the mold 100.
Pass through the way for bearing the vibration of bracket 120 and causing the vibration of molten metal 110 in the mold 100, technique letter
It is single, strong operability；And be not necessarily to directly contact the molten metal 110, the vibration of the molten metal 110 can be caused,
Therefore impurity will not be introduced in molten metal 110, is conducive to the purity for maintaining the molten metal 110, be conducive to improve institute
The purity for obtaining ingot casting, is conducive to the quality for improving obtained sputtering target material.
It should be noted that being caused in the mold 100 by the vibration for bearing bracket 120 and being melted in the present embodiment
The way for melting the vibration of metal 110 is only an example.In other embodiments of the invention, it can also be drawn by other modes such as ultrasonic waves
The vibration of molten metal in sending out mold described.The initiation method that the present invention vibrates molten metal 110 in the mold 100 is not done
It limits.
Specifically, being fixed with ultrasonic vibration apparatus on the side wall of the mold in other embodiments of the invention, pass through institute
Stating ultrasonic vibration apparatus vibrates the molten metal in the mold, to achieve the purpose that reduce stomata and shrinkage hole.
In the present embodiment, the vibration frequency for bearing bracket 120 is in 40Hz to 200Hz range.
The vibration frequency for bearing bracket 120 is unsuitable excessively high also unsuitable too low.The vibration frequency for bearing bracket 120
If too low, the molten metal 110 is excessively gentle by the effect stirred, convection current formed in the molten metal 110
Excessively faint, excessively gentle stirring is unfavorable for the precipitation of dissolved gas, is unfavorable for the reduction of residual gas, excessively faint pair
Stream is unfavorable for the raising of 110 temperature uniformity of molten metal, is unfavorable for that 110 surface of molten metal and inside is made to tend to coagulate simultaneously
Gu；If the vibration frequency for bearing bracket 120 is too high, it may make the molten metal 110 in the mold 100
Vibration it is excessively violent, increase the possibility that the molten metal 110 shakes out the mold 110, may cause waste of material,
The problem of process risk improves, it is also possible to will cause the damage and pollution of process equipment.
Specifically, as shown in figure 3, in the present embodiment, it is described to bear bracket 120 and cam vibration device (not indicating in figure)
It is connected, the cam vibration device includes variable-frequency motor 130；The bracket 120 that bears is set to shake by the variable-frequency motor 130
It is dynamic.Therefore by the setting of the variable-frequency motor 120, can make described in bear the vibration frequency of bracket 120 in the reasonable scope
It is continuously adjustable, it is possible to according to the capacity of molten metal 110 in the mold 100, the vibration of bracket 120 is born described in setting
Frequency, so as to realize the purpose for reducing stomata and shrinkage hole under the premise of controlling process risk.
In the present embodiment, the Oscillation Amplitude for bearing bracket 120 is in 1.5mm to 2.5mm range.
The Oscillation Amplitude for bearing bracket 120 should not it is too big also should not be too small.The Oscillation Amplitude for bearing bracket 120
If too small, the molten metal 110 is excessively gentle by the effect stirred, convection current formed in the molten metal 110
Excessively faint, excessively gentle stirring is unfavorable for the precipitation of dissolved gas, is unfavorable for the reduction of residual gas, excessively faint pair
Stream is unfavorable for the raising of 110 temperature uniformity of molten metal, is unfavorable for that 110 surface of molten metal and inside is made to tend to coagulate simultaneously
Gu；If the Oscillation Amplitude for bearing bracket 120 is too big, it may make the molten metal 110 in the mold 100
Vibration it is excessively violent, increase the possibility that the molten metal 110 shakes out the mold 110, may cause waste of material,
The problem of process risk improves, it is also possible to will cause the damage and pollution of process equipment.
The direction of vibration of the mold 100 includes at least one side in first direction x, second direction y and third direction z
To；The first direction x is parallel with gravity direction, and the second direction y is perpendicular to the first direction x, the third party
It is vertical to z and the first direction x and the second direction y.
In the present embodiment, the mold 100 y or third direction z vibration in a second direction, i.e., the mold 100 is in level
In plane vibration.This way, which can be realized effectively, to be stirred the molten metal 110, forms the purpose of convection current, but also can be kept away
Exempt from the shaking for causing the molten metal 110 excessively fierce, to guarantee safety.It is described but in other embodiments of the invention
The direction of vibration of mold can also be any combination of first direction, second direction or third direction.
In the present embodiment, after the mold 100 is provided, before the molten metal 110 is injected the mold 110,
The mold 110 is set to start to vibrate；Mold 100 into vibration injects the molten metal 110.Therefore the mold 100 exists
Vibration is had begun before the injection of molten metal 110, so the molten metal 110 is when injecting the mold 100
It can vibrate, so as to effectively improve the efficiency of gas evolution；And the molten metal 110 injects the mold
Start cooling after 100 to cooled and solidified, so starting the mold 100 i.e. before the molten metal 110 injection
Vibration, can effectively prevent the molten metal 110 i.e. appearance of solidification phenomenon before vibration, be advantageously implemented the abundant of gas
It is precipitated, also can be avoided the formation of 110 superficial film of molten metal, to advantageously reduce the formation of shrinkage hole.
As shown in figure 3, the molten metal 110 in the graphite crucible injects the mold 100 by several times in the present embodiment
In；So being injected for the first time into the mold 100 before the molten metal 110, the mold after providing mold 100
100 start to vibrate；The vibration of the mold 100 continues to last time to inject after molten metal 110.
The way for injecting the molten metal 110 by several times, can effectively improve molten metal 110 in the mold 100
Temperature uniformity is conducive to the quality for improving obtained mold；And the molten metal 110 is injected by several times, elder generation can also be made
The molten metal 110 for injecting the mold 100 is obtained sufficiently vibrating and is sufficiently stirred with realizing, to reduce dissolved gas precipitation
Difficulty is conducive to that dissolved gas is promoted sufficiently to be precipitated, so as to reduce the residual gas in obtained ingot casting, to reduce gas
The formation in hole.
It should be noted that ingot quality is influenced in order to avoid forming interface in formed ingot casting, in the present embodiment,
The adjacent interval time for injecting molten metal 110 into the mold 100 twice cannot be too long.Specifically, needing preceding primary
Before the molten metal 110 injected solidifies, molten metal 110 is re-injected into the mold 100.
In the present embodiment, the molten metal 110 injects the flow rate of the mold 100 in 0.5 Kilograms Per Second to 4.0
Within the scope of Kilograms Per Second.The molten metal 110 inject the speed in the mold 100 should not it is too fast also should not be too slow.
If it is too slow that the molten metal 110 injects the speed in the mold, it is low to be likely to result in production efficiency
The problem of, and to inject speed in the mold too slow for molten metal 110, the molten metal 110 can be made to cool down too fast, and it may
110 temperature of molten metal that will cause in the mold is too low, so that influence forms the ingot casting of high quality, it is also possible to will affect molten
Gas evolution is solved, the reduction of shrinkage hole is influenced；If it is too fast that the molten metal 110 injects the speed in the mold, institute
The molten metal 110 of injection possibly can not be filled up completely the mold, so that cavity is formed in being formed by ingot casting, and with
Too fast speed injects the molten metal 110 of high temperature in the mold into vibration, may will increase process risk, may will increase
Equipment, personnel damage risk.
It should be noted that the molten metal can inject the casting with one-time continuous in other embodiments of the invention
In mould.The processing step that the molten metal is injected into the mold is same as the prior art, and details are not described herein by the present invention.
In the present embodiment, the vibration of the mold 100 continues to the molten metal 100 to inject after the mold 100.
Specifically, the molten metal 110 is injected by several times in the mold 100, the vibration of the mold 100 continues to last time to infuse
After entering the molten metal 110.That is, during the molten metal 110 injects mold 100, it is described
Mold 100 is continuously in vibrational state.This way can be such that the molten metal 110 in the mold 100 realizes and sufficiently stir
It mixes, forms abundant convection current in the molten metal 110 and effectively improved so as to effectively promote the abundant precipitation of dissolved gas
The temperature uniformity of the molten metal 110, advantageously reduces the defects of formed ingot casting.
Specifically, injecting after the molten metal 110, the vibration duration of the mold 100 is in 2min to 5min
In range.
Since vibration can only reduce metal vent and shrinkage hole under molten condition, and formed ingot casting after solidification is not can be removed
Stomata and shrinkage hole, and in the present embodiment, the mold 100 is not heated, therefore the molten metal 110 is injecting
Start cooling down immediately to form ingot casting to solidify after the mold 100, so after injecting the molten metal 110, institute
State mold 100 vibration duration it is unsuitable it is too long also should not be too short.
If the vibration duration of the mold 100 is too short, it is unfavorable for dissolved gas and is sufficiently precipitated, is unfavorable for providing
110 temperature uniformity of molten metal, then may will affect the reduction of stomata and shrinkage hole, influence subtracting for formed casting defect
It is few；If the vibration duration of the mold 100 is too long, the molten metal 110 may solidify to form ingot casting, vibration
Dynamic can not persistently be further reduced defect, waste the process time instead, be unfavorable for the raising of formation efficiency.
It should be noted that the mold 100 is set in vacuum chamber 140 in the present embodiment；It, will in vacuum environment
The molten metal 110 injects in the mold 100, and vibrates the molten metal 110 in the mold 100 to form casting
Ingot.The process environments of vacuum can effectively reduce solubility of the gas in the dissolution metal 110, can effectively drive gas
It is precipitated, to advantageously reduce residual gas, advantageously reduces the formation of stomata, reduce the defect of obtained ingot casting；And it is true
The probability that the molten metal 110 is oxidized can also be effectively reduced in empty process environments, be conducive to improve obtained ingot casting
Purity and yield.
It should be noted that the molten metal 110 is formed by way of vacuum induction melting in the present embodiment
, therefore the graphite crucible for being contained with the molten metal 110 is also disposed in the vacuum chamber 140, i.e., the described graphite crucible
It is set in same vacuum chamber 140 with the mold 110, to realize 110 shape of molten metal in same vacuum chamber 140
At with the step injected in the mold 100, technology arrangement can be effectively reduced, improve process efficiency；It can also avoid described
Molten metal 110 aoxidizes, and is conducive to the purity for improving the molten metal 110.Therefore, the vacuum degree of the vacuum chamber 140 exists
10-2Pa to 10-3Within the scope of Pa, under the premise of guaranteeing that defect is reduced in formed ingot casting, technology difficulty and work are controlled
Skill cost.
To sum up, make the way that molten metal vibrates in the mold, the stirring molten metal can be played the role of, made
Convection current is formed in the molten metal；The stirring of molten metal can effectively promote the precipitation of dissolved gas, to reduce stomata
Formation；The formation of convection current in molten metal can effectively improve molten metal surface and internal temperature uniformity, to subtract
The formation of few shrinkage hole；So in the mold molten metal vibration, the defect of formed ingot casting can be effectively reduced, favorably
In the probability that reduction ingot casting is scrapped, to provide the utilization rate of ingot material；The defect of formed sputtering target material is advantageously reduced,
To improve the quality of formed sputtering target material.Moreover, the vibration by bearing bracket makes the casting in optinal plan of the present invention
Mould vibration, so that the molten metal in the mold be made to vibrate；This way, simple process, strong operability；And without straight
Contacting the molten metal can make the molten metal generate vibration, so as to avoid introducing into the molten metal
Impurity is conducive to the purity for keeping the molten metal, is conducive to the quality for improving formed sputtering target material.In addition, of the invention
In optinal plan, vibration frequency is in 40Hz to 200Hz range, and Oscillation Amplitude is in 1.5mm to 2.5mm range.The vibration
Frequency and the Oscillation Amplitude are arranged in the reasonable scope, so as to realize raising safety and reduce taking into account for defect.Separately
Outside, in optinal plan of the present invention, in vacuum environment, the molten metal is injected in the mold, and makes in the mold
Molten metal vibrate to form ingot casting；The process environments of vacuum can effectively reduce dissolution of the gas in the dissolution metal
Degree advantageously reduces the formation of stomata, reduces the defect of obtained ingot casting.Moreover, in optinal plan of the present invention, by the melting
Metal injects the mold by several times；This injection mode can be such that the molten metal for first injecting mold is sufficiently stirred, thus
The difficulty that dissolved gas is precipitated is reduced, the residual gas in the molten metal is advantageously reduced, advantageously reduces the ingot casting
The defects of.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (17)
1. a kind of method of smelting of ingot casting characterized by comprising
Mold is provided；
Form molten metal；
The molten metal is injected into the mold；
Vibrate the molten metal in the mold to form ingot casting.
2. method of smelting as described in claim 1, which is characterized in that the mold, which is fixed on, to be born on bracket；
The molten metal in the mold is vibrated by the vibration for bearing bracket.
3. method of smelting as claimed in claim 2, which is characterized in that the bracket that bears is connected with cam vibration device, institute
Stating cam vibration device includes motor；
Make described to bear mount vibration by the motor.
4. method of smelting as claimed in claim 2, which is characterized in that after providing the mold, the molten metal is infused
Before entering the mold, the mold is made to start to vibrate；
Mold into vibration injects the molten metal.
5. method of smelting as claimed in claim 4, which is characterized in that the molten metal is injected the mold by several times；
After mold is provided, injected for the first time into the mold before the molten metal, the mold starts to vibrate；
The vibration of the mold continues to last time to inject after molten metal.
6. method of smelting as described in claim 1, which is characterized in that inject after the molten metal, vibration it is lasting when
Between in 2min to 5min range.
7. method of smelting as described in claim 1, which is characterized in that direction of vibration include first direction, second direction and
At least one direction in third direction, the first direction is parallel with gravity direction, and the second direction is perpendicular to described
One direction, the third direction and the first direction and the second direction are vertical.
8. method of smelting as described in claim 1, which is characterized in that so that the molten metal is shaken by ultrasonic vibration installation
It is dynamic.
9. the method for smelting as described in claim 1,2 or 8, which is characterized in that vibration frequency is in 40Hz to 200Hz range.
10. the method for smelting as described in claim 1,2 or 8, which is characterized in that Oscillation Amplitude is in 1.5mm to 2.5mm range
It is interior.
11. method of smelting as described in claim 1, which is characterized in that the flow velocity that the molten metal injects the mold exists
Within the scope of 0.5 Kilograms Per Second to 4.0 Kilograms Per Seconds.
12. method of smelting as described in claim 1, which is characterized in that the mold is set in vacuum chamber；
In vacuum environment, the molten metal is injected in the mold, and vibrate the molten metal in the mold with
Form ingot casting.
13. method of smelting as claimed in claim 12, which is characterized in that the vacuum degree of the vacuum chamber is 10-2Pa to 10-3Pa
In range.
14. method of smelting as described in claim 1, which is characterized in that the molten metal includes copper, cobalt, nickel, platinum, Jin He
One of silver is a variety of.
15. method of smelting as described in claim 1, which is characterized in that the molten metal is molten copper；
The molten copper is formed by way of melting cathode copper.
16. method of smelting as described in claim 1, which is characterized in that formed by way of vacuum induction melting described molten
Melt metal.
17. method of smelting as described in claim 1, which is characterized in that by mass percentage, the purity of the molten metal exists
99.99% or more.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556196.6A CN109226721A (en) | 2017-07-10 | 2017-07-10 | The method of smelting of ingot casting |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710556196.6A CN109226721A (en) | 2017-07-10 | 2017-07-10 | The method of smelting of ingot casting |
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| CN201710556196.6A Pending CN109226721A (en) | 2017-07-10 | 2017-07-10 | The method of smelting of ingot casting |
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|---|---|---|---|---|
| GB480554A (en) * | 1936-03-25 | 1938-02-24 | Deutsche Edelstahlwerke Ag | Improvements in or relating to the casting of metals and alloys |
| US3703923A (en) * | 1970-11-12 | 1972-11-28 | United States Steel Corp | Balancing mechanism and method for continuous casting molds |
| JPS5533879A (en) * | 1978-08-31 | 1980-03-10 | Takaoka Kogyo Kk | Precision casting method utilizing vibration |
| JPS5921462A (en) * | 1982-07-27 | 1984-02-03 | Kayaba Ind Co Ltd | Pressure casting method |
| KR20030094919A (en) * | 2002-06-10 | 2003-12-18 | 한국기계연구원 | A process and an apparatus for casting alloy using vibration |
| JP2007075879A (en) * | 2005-09-16 | 2007-03-29 | Matsuda Gokin Chuzosho:Kk | Casting method and casting apparatus |
| CN204035526U (en) * | 2014-08-09 | 2014-12-24 | 林南平 | Casting mould |
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2017
- 2017-07-10 CN CN201710556196.6A patent/CN109226721A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB480554A (en) * | 1936-03-25 | 1938-02-24 | Deutsche Edelstahlwerke Ag | Improvements in or relating to the casting of metals and alloys |
| US3703923A (en) * | 1970-11-12 | 1972-11-28 | United States Steel Corp | Balancing mechanism and method for continuous casting molds |
| JPS5533879A (en) * | 1978-08-31 | 1980-03-10 | Takaoka Kogyo Kk | Precision casting method utilizing vibration |
| JPS5921462A (en) * | 1982-07-27 | 1984-02-03 | Kayaba Ind Co Ltd | Pressure casting method |
| KR20030094919A (en) * | 2002-06-10 | 2003-12-18 | 한국기계연구원 | A process and an apparatus for casting alloy using vibration |
| JP2007075879A (en) * | 2005-09-16 | 2007-03-29 | Matsuda Gokin Chuzosho:Kk | Casting method and casting apparatus |
| CN204035526U (en) * | 2014-08-09 | 2014-12-24 | 林南平 | Casting mould |
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