CN109234688A - The smelting equipment of ingot casting - Google Patents
The smelting equipment of ingot casting Download PDFInfo
- Publication number
- CN109234688A CN109234688A CN201710558909.2A CN201710558909A CN109234688A CN 109234688 A CN109234688 A CN 109234688A CN 201710558909 A CN201710558909 A CN 201710558909A CN 109234688 A CN109234688 A CN 109234688A
- Authority
- CN
- China
- Prior art keywords
- mold
- smelting equipment
- smelting
- molten metal
- bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D27/00—Treating the metal in the mould while it is molten or ductile ; Pressure or vacuum casting
- B22D27/08—Shaking, vibrating, or turning of moulds
Abstract
A kind of smelting equipment of ingot casting, comprising: mold, in the chamber of the smelting equipment, for bearing molten metal；Vibration device is connected with the mold, for vibrating the molten metal in the mold.The vibration device can be such that the molten metal in mold vibrates, to achieve the purpose that the stirring molten metal, form convection current in the molten metal, the formation of stirring and the convection current of the smelting metal, the formation of stomata and shrinkage hole can be effectively reduced, the defect of formed ingot casting can be effectively reduced, the probability that ingot casting is scrapped is advantageously reduced, to improve the utilization rate of ingot material；The defect of formed sputtering target material is advantageously reduced, to improve the quality of formed sputtering target material.
Description
Technical field
The present invention relates to Metal Melting field, in particular to a kind of smelting equipment of ingot casting.
Background technique
Sputtering target material is a kind of extremely important critical material necessary to manufacture semiconductor chip.Utilize sputtering target material shape
The technological principle of film forming layer is to be sputtered out the atom of target, in the form of a film using accelerated ion bombardment target
It deposits on substrate, ultimately forms the film layer in semiconductor chip.Using sputtering target material be formed by film layer it is high with uniformity,
Many advantages, such as controllability is strong is applied in the forming method of various semiconductor devices.
In the semiconductor technology that sputtering technology forms film layer, the quality of sputtering target material will have a direct impact on the formation film layer
Quality；And metal targets are the raw materials to form sputtering target material with ingot casting, so the quality of metal targets ingot casting is to being formed
The quality of film layer plays a key role.
Wherein superelevation fine copper is the raw material for manufacturing the ultra-pure copper sputtering target material of semiconductor chip.Ultra-pure copper ingot generally exists
After melting, by degasification, cast.According to the difference that sputtering target material size requires, ultra-pure copper ingot is used
Diameter is generally in 150mm to 250mm range.
It is higher and higher to the formation quality requirement of film layer with the rapid development of semiconductor device design and manufacturing technology,
The quality requirement of sputtering target material is also higher and higher.Correspondingly, the quality requirement to corresponding ingot casting also increases accordingly.
Often existing defects are more for existing equipment ingot casting obtained, and ingot material is be easy to cause to scrap or sputtering target material
The problem of internal existing defects.
Summary of the invention
Problems solved by the invention is to provide a kind of smelting equipment of ingot casting, to reduce the defects of obtained ingot casting, from
And ingot material utilization rate is improved, it prevents ingot material from scrapping, reduces the appearance of formed sputtering target material internal flaw, improve institute
Form the quality of sputtering target material.
To solve the above problems, the present invention provides a kind of smelting equipment of ingot casting, comprising:
Mold, for bearing molten metal；Vibration device is connected with the mold, for making the melting in the mold
Metal vibration.
Optionally, the mold, which is fixed on, bears on bracket；The vibration device is fixedly linked with the bracket that bears.
Optionally, the vibration device includes: motor, is connected with transmission shaft, and the transmission shaft is rotated；Vibrating mechanism,
It is connected with the transmission shaft, the rotation of the transmission shaft is made to be converted to vibration；Drive rod, and the vibrating mechanism and described bears
Bracket is fixedly linked.
Optionally, the vibrating mechanism is cam vibrating mechanism.
Optionally, the motor is variable-frequency motor.
Optionally, further includes: supporting support is sleeved on outside the mold, and the bracket that bears passes through the supporting support
Realize the connection with the mold.
Optionally, the chamber is vacuum chamber, and the vacuum chamber includes smelting part；The mold and described bear bracket position
In the bottom of the smelting part.
Optionally, the bottom of the smelting part vacuum chamber has through-hole；The vacuum chamber further includes extension, the extension
Portion is connected to the smelting part by the through-hole；The drive rod run through the through-hole and the extension, one end with it is described
It bears bracket to be fixedly linked, the other end is connected with the vibrating mechanism.
Optionally, the smelting equipment further include: blocker ring, positioned at bracket and the smelting part vacuum chamber of bearing
Between bottom, it is arranged around the through-hole.
Optionally, the smelting equipment further include: bellows is set on the drive rod, surrounds the vacuum chamber
Extension.
Optionally, the vacuum degree of the vacuum chamber is 10-2Pa to 10-3Within the scope of Pa.
Optionally, the smelting equipment is vacuum induction melting furnace, and the vacuum chamber of the smelting part is the vacuum induction
The vacuum chamber of smelting furnace.
Optionally, the vibration device is ultrasonic vibration installation.
Optionally, the ultrasonic vibration installation is fixed on the side wall of the mold.
Optionally, the mold has inlet and the bottom far from the inlet；The ultrasonic vibration installation is from institute
It states inlet and extends to the bottom.
Optionally, the mold is hollow cylinder shell, and the hollow cylinder shell is sealing along one end of generatrix direction
Bottom, the other end is open inlet；The ultrasonic vibration installation is along the hollow cylinder shell generatrix direction from described
Inlet extends to bottom.
Optionally, the vibration frequency of the vibration device is in 40Hz to 200Hz range.
Optionally, the Oscillation Amplitude of the vibration device is in 1.5mm to 2.5mm range.
Compared with prior art, technical solution of the present invention has the advantage that
In the smelting equipment, the vibration device can be such that the molten metal in mold vibrates, to reach stirring institute
State molten metal, in the molten metal formed convection current purpose；The stirring of molten metal can effectively promote dissolved gas
Precipitation, can be effectively reduced the concentration of dissolved gas in molten metal, reduce the residual gas in obtained ingot casting, reduction gas
The formation in hole；The formation of convection current in molten metal can effectively improve molten metal surface and internal temperature uniformity, make institute
It states molten metal surface and inside tends to solidify simultaneously, avoid the formation of superficial film, reduce the formation of shrinkage hole；Stomata and receipts
The reduction of shrinkage cavity can effectively reduce the defect of formed ingot casting, advantageously reduce the probability that ingot casting is scrapped, to improve ingot casting
The utilization rate of material；The defect of formed sputtering target material is advantageously reduced, to improve the quality of formed sputtering target material.
In optinal plan of the present invention, the smelting equipment includes bearing bracket for fix the mold；The vibration
Device is fixedly linked with the bracket that bears.The vibration device by make it is described bear mount vibration and the mold occurs
Vibration, and then cause the vibration of molten metal in the mold.This way simple process, strong operability；And without straight
Contacting the molten metal can make the molten metal generate vibration, so as to avoid introducing into the molten metal
Impurity is conducive to the purity for keeping the molten metal, is conducive to the quality for improving formed sputtering target material.
In optinal plan of the present invention, in 40Hz to 200Hz range, Oscillation Amplitude exists the vibration frequency of the vibration device
In 1.5mm to 2.5mm range.Vibration frequency is unsuitable excessively high also unsuitable too low, and Oscillation Amplitude should not be too large also unsuitable too small；Vibration
Underfrequency, Oscillation Amplitude are too small, then the molten metal is excessively gentle by the effect stirred, institute's shape in the molten metal
It flows through in pairs and is unfavorable for the precipitation of dissolved gas in faint, excessively gentle stirring, be unfavorable for the reduction of residual gas, it is excessively micro-
Weak stirring is unfavorable for improving the uniformity of molten metal temperature, is unfavorable for that molten metal surface and inside is made to tend to coagulate simultaneously
Gu；Vibration frequency is excessively high, Oscillation Amplitude is excessive, then molten metal may be made to shake out mold because of vibration, and causes material unrestrained
Take and unnecessary process risk.
In optinal plan of the present invention, the mold is set in vacuum chamber；The mold is set to doing in vacuum chamber
Method can effectively reduce the solubility of gas in the molten metal, be conducive to drive gas evolution, advantageously reduce residual gas
Body；And the vacuum chamber includes smelting part and extension, and the extension can be surrounded by bellows, wherein the mold
It is located at the smelting part bottom with the bracket that bears, the drive rod runs through the extension, fixes with the vibrating mechanism
It is connected；Since deformation may be implemented in bellows, because deformation also may be implemented in the extension that bellows surrounds, so the smelting part
The vacuum chamber that the extension surrounded with the bellows is constituted can be realized under the premise of guaranteeing that vacuum degree technique requires
The requirement of vibration, and simple process, strong operability.
In optinal plan of the present invention, the smelting equipment further includes blocker ring, bears bracket and the melting positioned at described
Between the bottom of portion's vacuum chamber, it is arranged around the through-hole；When the molten metal overflows, the blocker ring can play resistance
Gear effect, avoids molten metal from being flowed into the vacuum chamber of extension through the through-hole, to prevent the vibration device impaired.
In optinal plan of the present invention, the vibration device can also be ultrasonic vibration installation；The ultrasonic vibration installation is solid
Due on the side wall of the mold；Therefore the ultrasonic vibration installation can be such that uncured molten metal in the mold occurs
Vibration, to achieve the purpose that the stirring molten metal, form convection current in the molten metal；And use ultrasonic vibration
Device vibrates the molten metal, not only without directly contacting the molten metal, will not introduce impurity, and without to work
Skill equipment does the larger function of changing and vibration can be realized, and equipment manufacturing costs are lower, advantageously ensure that smelting technology condition, have
Conducive to the stability and quality for improving smelting technology.
Detailed description of the invention
Fig. 1 is a kind of the schematic diagram of the section structure of ingot casting that smelting equipment is obtained；
Fig. 2 is the structural schematic diagram of one embodiment of smelting equipment of the present invention；
Fig. 3 is the structural schematic diagram of another embodiment of smelting equipment of the present invention.
Specific embodiment
It can be seen from background technology that, the existing equipment ingot casting obtained often more problems of existing defects.Now in conjunction with one kind
The smelting equipment of ingot casting analyzes the reason of its defect problem:
Vacuum induction melting furnace (Vacuum Induction Melter) be it is a kind of under vacuum conditions, utilize intermediate frequency sense
Principle of heating is answered, the vacuum metling complete set of equipments of metal molten is made.This equipment can be used to refine the metal and alloy of high-purity.
Existing vacuum induction melting furnace generally comprises an induction coil, graphite crucible and graphite jig.Graphite jig
It is set on the pedestal in vaccum sensitive stove.It is heated in graphite crucible after melting in copper raw material and forms molten metal；Molten metal
It is fed into graphite jig with formation ingot casting to be cooled.
With reference to Fig. 1, a kind of the schematic diagram of the section structure of ingot casting that smelting equipment is obtained is shown.
It should be noted that this is illustrated for sentencing the manufacture of ultrahigh-purity copper ingot casting, i.e. smelting equipment shown in Fig. 1
Obtained ingot casting is casting in bronze ingot.
In the smelting equipment, molten copper injects mold 10, obtains the casting in bronze ingot after cooling.Wherein, molten copper is molten
Refining raw material be cathode copper, therefore in molten copper institute's dissolved gas content it is relatively high.In general, cathode copper is obtained molten
Melt in copper, the concentration of dissolved gas can be up to tens ppm to hundreds of ppm.Melting obtains the molten copper and molten copper note
Enter the technical process of mold 10 in the process environments of vacuum, is precipitated in molten copper due to environment under low pressure；But due to low
Pressure ring border and the gas flow that is precipitated is limited, the technique for being unable to satisfy sputtering target material casting in bronze ingot requires (sputtering target material casting in bronze ingot
The concentration of middle dissolved gas requires to be even less than 1ppm in several ppm), remnants have more solution gas in formed casting in bronze ingot
Body.Residual gas can form stomata 11 in being formed by casting in bronze ingot, to become the defects of described casting in bronze ingot.
Further, since copper has preferable heating conduction, while cooling, the molten copper on surface has preferable dissipate to molten copper
Thermal environment, cooling velocity are very fast；The molten copper dissipating-heat environment of inside ingot is poor, and cooling velocity is slower.So molten copper is cold
When but forming casting in bronze ingot, the molten copper on surface takes the lead in solidifying, superficial film easy to form；It is solidified after internal molten copper, it is interior
Portion's molten copper can be due to expanding with heat and contract with cold and volume becomes smaller, to can make the superficial film that showing for local dent occur in solidification
As to form shrinkage hole.When gradation injection molten copper is to obtain casting in bronze ingot, preceding primary the obtained casting in bronze ingot of injection molten copper
The shrinkage hole on surface can be supplemented by the rear molten copper once injected, and be filled；But after last time injection molten copper,
Since will not molten copper be injected into the mold 10 again, so being formed by shrinkage hole (not indicating in figure) is unable to get melting
Copper supplement, is unable to get filling, so will form the shrinkage hole 12 of recess in the casting in bronze ingot surface finally obtained, lacks to become
It falls into.
Excessive residual gas can make stomata 11 in obtained casting in bronze ingot excessive, to cause defect in the casting in bronze ingot
Excessively；The difference of molten copper cooling velocity can make the shrinkage hole 12 of obtained casting in bronze ingot surface excessive, too deep, to cause institute
It is excessive to obtain casting in bronze ingot surface defect.The excessive defect of casting in bronze ingot can be such that the casting in bronze ingot scraps, and influence the benefit of ingot material
With rate, it is also possible to cause formed sputtering target material defect excessive, to influence the quality of formed sputtering target material.
To solve the technical problem, the present invention provides a kind of smelting equipment, and the vibration device can make in mold
Molten metal vibration, to achieve the purpose that the stirring molten metal, form convection current, the melting in the molten metal
The formation of stirring and the convection current of metal, can effectively reduce the formation of stomata and shrinkage hole, can effectively reduce formed ingot casting
Defect, the probability that ingot casting is scrapped is advantageously reduced, to improve the utilization rate of ingot material；It advantageously reduces to form sputtering
The defect of target, to improve the quality of formed sputtering target material.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
With reference to Fig. 2, the structural schematic diagram of one embodiment of smelting equipment of the present invention is shown.
The smelting equipment includes: mold 110, in the chamber of the smelting equipment, for bearing molten metal
111；Vibration device (does not indicate) in figure, is connected with the mold 110, for making the molten metal 111 in the mold 110 shake
It is dynamic.
The mold 110 is used to provide state space for the formation of the ingot casting.
It should be noted that in the present embodiment, to be illustrated for obtaining the smelting equipment of ultrahigh-purity copper ingot casting.Institute
It is the molten copper of ultra-high purity with the molten metal 111.The purity of the molten metal is 99.99% or more, i.e., described molten
Melt the mass percent of copper in metal 99.99% or more.In other embodiments of the invention, metal in the molten metal
Mass percent even can achieve 99.999% or more, so as to effectively improve the material purity of formed sputtering target material,
Impurity and defect in target are reduced, the quality for improving formed sputtering target material is conducive to.
In other embodiments of the invention, the molten metal can also be one of copper, cobalt, nickel, platinum, Jin Heyin or more
Kind, i.e., the described molten metal can also be copper, cobalt, nickel, platinum, gold, silver and its alloy.
The mold 110 is located in the chamber of the smelting equipment.
As shown in Fig. 2, the smelting equipment further includes vacuum chamber 130 in the present embodiment, i.e., the chamber of the described smelting equipment
For vacuum chamber.The vacuum chamber 130 includes smelting part 131, and the mold 110 is located at the smelting part 131 of the vacuum chamber 130
It is interior.The mold 110 is set to the way in vacuum chamber 130, dissolution of the gas in molten metal 111 can be effectively reduced
Degree, is conducive to drive gas evolution, advantageously reduces residual gas.
It should be noted that the molten metal 111 is obtained by way of vacuum induction melting in the present embodiment
, i.e., the described smelting equipment is vacuum induction melting furnace.So as shown in Fig. 2, the smelting equipment further include: graphite crucible
112, for heating raw material and carrying out melting to obtain molten metal.Specifically, 112 periphery of graphite crucible is surrounded with induction
Coil (does not indicate) in figure, and induction coil can generate eddy current after being powered, thus make the melting sources in graphite crucible 112, with
Obtain molten metal；The graphite crucible 112 molten metal 111 obtained injects in the mold 110, is cast after cooling
Ingot.
The vacuum chamber 130 of the smelting part 131 is the vacuum chamber of the vacuum induction furnace, that is to say, that the graphite
Crucible 112 also is located in the vacuum chamber 130 of the smelting part 131 as the mold 110.As shown in Fig. 2, the graphite
Crucible 112 is set to 110 top of the mold, and the molten metal 111 is after melting is completed in the graphite crucible 112,
It can directly be injected in the mold 110；Fusion process and injection process are respectively positioned in vacuum chamber 130, to avoid described
The chance that molten metal 111 is contacted with air prevents 111 oxidation by air of molten metal and influences the molten metal
111 purity；And the molten metal 111 is during injecting mold 110, the surface of the molten metal 111
Product increases, and is conducive to the precipitation of dissolved gas in the molten metal 111, advantageously reduces residual gas, reduces the shape of stomata
At.
In the present embodiment, the vacuum degree of the vacuum chamber 130 is 10-2Pa to 10-3Within the scope of Pa.The vacuum chamber 130
Vacuum degree is unsuitable excessively high also unsuitable too low: if the vacuum degree of the vacuum chamber 130 is too low, i.e., air pressure in the described vacuum chamber 130
It is excessively high, then it is unfavorable for the reduction of gas solubility in molten metal 110, gas may be will affect from the molten metal 110
Precipitation, be unfavorable for the reduction of residual gas；If the vacuum degree of the vacuum chamber 130 is excessively high, i.e., gas in the described vacuum chamber 130
Press through it is low, then may cause technology difficulty increase, process costs rise the problem of.
In the present embodiment, the mold 110 is hollow cylinder shell, and one end of the hollow cylinder shell is the bottom of sealing
Portion, the other end are open inlet.The inlet is open architecture, and the molten metal 111 is injected through the inlet
In the mold 110；The bottom is sealing structure, for carrying the molten metal 111 injected.
The shape of 110 internal cavities of mold is also cylinder, so the shape of the obtained ingot casting of the smelting equipment
For cylinder.In other embodiments of the invention, the shape of the shape of the mold and the inside ingot cavity may be it
His rule or irregular shape.The shape of the mold and the shape of the inside ingot cavity are according to smelting technology environment
It is required that and formed sputtering target material shape processing request and set.
The material of the mold 110 is graphite.The fusing point of graphite is up to 3700 DEG C or more, so the mold of graphite material
110 have preferable high temperature resistance, so as to realize the installation of ingot casting in fusion process.
It should be noted that in the present embodiment, the smelting equipment further include: supporting support (not shown), it is described
Supporting support includes bottom plate and the support portion that is weldingly connected with the bottom plate.
The supporting support is set in outside the mold 110, for realizing clamping, installation and the fixation of the mold 110；
It is also used for protecting the mold 110, prevents the mold 110 mechanically damaged；In addition, the supporting support is also used to realize
Being fixedly linked between the mold 110 and the vibration device is used for conduction vibration, to induce the vibration of the molten metal
It is dynamic.
The bottom plate, in the fixation of the smelting equipment chamber indoor location, is also used to realize for realizing the mold 110
With being fixedly linked for the vibration device.
In the present embodiment, the area of the bottom plate is greater than the area of 110 bottom of mold, the bottom plate include with it is described
The fringe region of central area and the encirclement central area that bottom plate is in contact.Have on the bottom plate of fringe region through thickness
The multiple mounting holes and the installation part in the mounting hole of degree.
In the present embodiment, the mounting hole is through-hole, i.e., there is no screw thread on the described mounting hole side wall, the installation part is
Screw bolt and nut.
The support portion is set in outside the mold 110, is fixedly linked, is also used to for realizing with the mold 110
The mold 110 is protected, provides mechanical support for the mold 110, prevents the mold 110 impaired.The support portion includes
One or more fixed rings and the one or more support columns being connected with the fixed ring outer peripheral surface, for the mold
110 play the role of mechanical support.
The Fixing shrink ring is loaded on being fixedly linked for realizing the mold 110 on the mold 110.The present embodiment
In, the mold 110 is cylindrical shell, and the fixed ring is annulus.The shape needs of the fixed ring are cut with the mold 110
The shape in face is adapted, such as when the shape of the mold is square column type, and the fixed ring is side's annular.
In the present embodiment, the quantity of the fixed ring is 3, is uniformly distributed in along the inlet to the bottom described
On the side wall of mold 110.This way can effectively improve the stability of the mold 110, to improve technology stability.
For the ease of the mold 110 to be set in inside the fixed ring, the internal diameter of the fixed ring is slightly larger than described
The outer diameter of mold 110.But in the present embodiment, the molten metal 111 in the mold 110 can shake in fusion process
It is dynamic, therefore in order to avoid the mold 110 collides in fusion process, it is damaged to reduce the mold 110 by machinery
The probability of wound all has the multiple stable holes for extending radially through thickness on the side wall of each fixed ring and is located at described steady
The stabilizing member in hole is determined, to realize that the mold 110 in the fixation of the fixed ring of described double bond, position, realizes the mold 110 and institute
State being fixedly linked for fixed ring.
Specifically, the stable hole is screw hole, i.e., there is screw thread on the described stable hole side wall, the stabilizing member is bolt.
The stabilizing member runs through the stable hole along the direction towards the center of circle, is in contact with the side wall of the mold 110, by described more
The fixation of the mold 110 is realized in interaction in a stable hole between stabilizing member.
It should be noted that realizing that the mold 110 is fixed by the stable hole and the stabilizing member in the present embodiment
Way be only an example, in other embodiments of the invention, can also realize fixation by other means.
The support column is weldingly connected with the bottom plate, for realizing being fixedly connected for the support portion and the bottom plate；
Outer peripheral surface of the support column also with each fixed ring is fixedly linked, to realize that the mechanical support to the mold 110 acts on.
It should be noted that in order to improve the intensity connected between the support portion and the bottom plate, in the present embodiment, no
Only the support column is weldingly connected with the bottom plate, and the fixed ring near the bottom plate also welds phase with the bottom plate
Even.
In the present embodiment, the smelting equipment further include: bear bracket 120, the bracket 120 that bears is located at the chamber
Bottom, and the mold 110 is fixed on and bears on bracket 120.
The bracket 120 that bears is also used to realize the vibration device and described for fixing the position of the mold 110
Being fixedly linked between mold 110, so that conduction vibration, induces the vibration of molten metal in the mold 110.The present embodiment
In, the chamber is vacuum chamber 130, and the mold 110 is located in the smelting part 131 of the vacuum chamber 130, described to bear bracket
120 also are located in the smelting part 131.
The mold 110 is born on bracket 120 described in being fixed on, and the mold 110 bears 120 stationary phase of bracket with described
Even.In the present embodiment, the mold 110 is set in the supporting support, thus it is described bear bracket 120 by with the branch
Being fixedly linked for support bracket, realizes the fixation of the mold 110.
Specifically, being provided with multiple mounting holes on the bottom plate of the supporting support, there is installation part in mounting hole；It is described to hold
It puts and is also equipped with multiple fixation holes on bracket 120, the position of the fixation hole is corresponded to each other with the position of the mounting hole；It is described
Installation part is for connecting the mounting hole and the fixation hole.
In the present embodiment, the fixation hole is through-hole as the mounting hole, and the installation part is screw bolt and nut,
Mounting hole described in the bolt-through and the fixation hole, are connected with the nut screw, realize that the bottom plate is born with described
Bracket 120 is fixedly linked, and then the mold 110 is made to be fixed on described bear on bracket 120 by the supporting support.
In the present embodiment, by screw bolt and nut realize described in bear and be fixedly linked between bracket and the supporting support
Way is only an example.In other embodiments of the invention, the mounting hole and the fixation hole can be disposed as screw hole, then
The installation part is only that connection can be realized in bolt；Since the supporting support and the material for bearing bracket are usually arranged as resistance to height
The metal of temperature, such as stainless steel, therefore in other embodiments of the invention, described bear between bracket and supporting support can be with
It realizes and is fixedly linked by welding.
The vibration device is connected with the mold, and the molten metal 111 in the mold 110 can be made to generate vibration,
To achieve the purpose that the stirring molten metal 111, form convection current in the molten metal 111.
Stirring of the vibration device to the molten metal 111 can effectively promote dissolution in the molten metal 111
The precipitation of gas can be effectively reduced the concentration of dissolved gas in molten metal 111, reduce the residual gas in obtained ingot casting
Body reduces the formation of stomata.
The vibration device makes to form convection current in the molten metal 111, so as to effectively improve the molten metal
111 surfaces and internal temperature uniformity, make 111 surface of molten metal and inside tend to solidify simultaneously, avoid skin covering of the surface
The formation of layer, reduces the formation of shrinkage hole.
So the smelting equipment achievees the purpose that reduce stomata and shrinkage hole by the way that the vibration device is arranged, with
Defect in obtained ingot casting is effectively reduced, the probability that ingot casting is scrapped is advantageously reduced, to improve the utilization rate of ingot material；Have
Conducive to the defect for reducing formed sputtering target material, to improve the quality of formed sputtering target material.
In the present embodiment, the mold 110 be fixed on it is described bear on bracket 120, the vibration device is born with described
Bracket 120 is connected, and by the conduction for bearing bracket 120, vibrates the mold 110, and then cause the mold
The vibration of molten metal 111 in 110.
This way simple process, strong operability；And without directly contact the molten metal 111 can make it is described
Molten metal 111 generates vibration, so as to avoid introducing impurity into the molten metal 111, is conducive to keep described molten
The purity for melting metal 111 is conducive to the quality for improving formed sputtering target material.
It should be noted that the vibration frequency of the vibration device is in 40Hz to 200Hz range, i.e., in the present embodiment
The vibration frequency of bracket 120 is born caused by the vibration device in 40Hz to 200Hz range.
The vibration frequency for bearing bracket 120 is unsuitable excessively high also unsuitable too low.The vibration frequency for bearing bracket 120
If too low, the molten metal 111 is excessively gentle by the effect stirred, convection current formed in the molten metal 111
Excessively faint, excessively gentle stirring is unfavorable for the precipitation of dissolved gas, is unfavorable for the reduction of residual gas, excessively faint pair
Stream is unfavorable for the raising of 111 temperature uniformity of molten metal, is unfavorable for that 111 surface of molten metal and inside is made to tend to coagulate simultaneously
Gu；If the vibration frequency for bearing bracket 120 is too high, it may make the molten metal 111 in the mold 110
Vibration it is excessively violent, increase the possibility that the molten metal 111 shakes out the mold 110, may cause waste of material,
The problem of process risk improves, it is also possible to will cause the damage and pollution of process equipment.
In addition, the Oscillation Amplitude of the vibration device is in 1.5mm to 2.5mm range, i.e., the described vibration in the present embodiment
The Oscillation Amplitude of bracket 120 is born caused by device in 1.5mm to 2.5mm range.
The Oscillation Amplitude for bearing bracket 120 should not it is too big also should not be too small.The Oscillation Amplitude for bearing bracket 120
If too small, the molten metal 111 is excessively gentle by the effect stirred, convection current formed in the molten metal 111
Excessively faint, excessively gentle stirring is unfavorable for the precipitation of dissolved gas, is unfavorable for the reduction of residual gas, excessively faint pair
Stream is unfavorable for the raising of 111 temperature uniformity of molten metal, is unfavorable for that 111 surface of molten metal and inside is made to tend to coagulate simultaneously
Gu；If the Oscillation Amplitude for bearing bracket 120 is too big, it may make the molten metal 111 in the mold 110
Vibration it is excessively violent, increase the possibility that the molten metal 111 shakes out the mold 110, may cause waste of material,
The problem of process risk improves, it is also possible to will cause the damage and pollution of process equipment.
Specifically, being connected with transmission shaft 122, making the transmission as shown in Fig. 2, the vibration device includes: motor 121
Axis 122 rotates；Vibrating mechanism 123 is connected with the transmission shaft 122, and the rotation of the transmission shaft 122 is made to be converted to vibration；It passes
Lever 124 is fixedly linked with the vibrating mechanism 123 and the bracket 120 that bears.
In the present embodiment, the motor 121 realizes the conversion of electric energy by electromagnetic induction principle, for converting electrical energy into
Mechanical energy, the power source as the vibration device.As shown in Fig. 2, the motor 121 can make the horizontally disposed transmission
Axis 122 is rotated along its axial direction M.
Specifically, the motor 121 is variable-frequency motor.The way that variable-frequency motor is used in the vibration device, can
Realize the vibration frequency of the vibration device continuously adjustable from 40Hz to 200Hz, to enable the smelting equipment root
Vibration frequency is set according to the amount of molten metal 111 in the mold 110, and then reaches and improves smelting efficiency, improve ingot casting matter
The purpose of amount.
The vibrating mechanism 123 is transducing head, and the rotation of the rotation axis 122 can be made to be converted to vibration.Specifically,
In the present embodiment, the vibrating mechanism 123 is cam vibrating mechanism, and the rotation of the transmission shaft 122 can be made to be converted to revolution
Movement moves back and forth, to realize the conversion for turning to vibration.
In the present embodiment, the vibrating mechanism 123 is cam vibrating mechanism, including cam 123b, driven member 123a and machine
Frame 123c.Wherein cam 123b is the component with curved profile or groove, generally does rotary motion or reciprocating motion
Driving link；Driven member 123a is in contact with the profile of cam 123b, thus transmit power and realize the movement for making a reservation for rule,
Driven member 123a can be moved reciprocatingly or be swung with the profile of cam 123b under normal circumstances；Rack 123c, for providing machine
Tool supporting role.
In the present embodiment, the cam 123b in the vibrating mechanism 123 is connected with the transmission shaft 122, the transmission shaft
122 make the cam 123b do rotary motion or reciprocating motion；The driven member 123a is done with the profile of the cam 123b
It moves back and forth or swings；Described 124 one end of drive rod and the driven member 123a are fixedly linked by bolt realization, the other end with
The bracket 120 that bears is fixedly linked, so the bracket 120 that bears can be as reciprocal fortune be done in the movement of the driven member 123a
Dynamic or swing, to realize vibration, and then vibrates the molten metal 111 in the mold 110.
It should be noted that in the present embodiment, the cam 123b, the driven member 123a and rack 123c institute structure
At cam vibrating mechanism be only an example.The specific technical solution of the cam vibrating mechanism and identical in the prior art, sheet
Invention repeats no more this.
It should also be noted that, the present embodiment in, the vibrating mechanism 123 be include the cam 123b, it is described driven
The cam vibrating mechanism of part 123a and the rack 123c, this way is simple easily new, strong operability.But the present invention other
In embodiment, the rotation of the transmission shaft can also be converted into vibration using other mechanical devices.
In the present embodiment, the mold 110 and the bracket 120 that bears are all set in as the graphite crucible 112
In the smelting part 131 of the vacuum chamber 130, so there is through-hole (not mark in figure for the bottom of 131 vacuum chamber 130 of the smelting part
Show)；The vacuum chamber 130 further includes extension 132, and the extension 132 is connected with the smelting part 131 by the through-hole
It is logical；The drive rod 124 runs through the through-hole and the extension 132, and one end is fixedly linked with the bracket 120 that bears, separately
One end is connected with the vibrating mechanism 123.
In the present embodiment, driven member 123a constitutes the bottom of 130 extension 132 of vacuum chamber in the vibrating mechanism 123
Portion, so 124 one end of the drive rod is weldingly connected with the bracket 120 that bears, the other end is through the through-hole and described prolongs
Extending portion 132 is fixedly linked with the driven member 123a.
Specifically, the drive rod 124 is connected on the side wall of one end with the driven member 123a is provided with external screw thread, it is described
With the through-hole of impenetrating thickness in driven member 123a, one end that the drive rod 124 is connected with the driven member 123a passes through institute
Through-hole is stated to be fixedly linked by nut and driven member 123a realization.
In the present embodiment, the smelting equipment further include: bellows 140 is set on the drive rod 124, to surround
The extension 132 of the vacuum chamber 130.Specific described 140 one end of bellows and 131 vacuum chamber of smelting part, 130 bottom
Sealing is connected, and the other end is connected with the driven member 123a sealing in the vibrating mechanism 123, therefore the pipe of the bellows 140
Wall and the driven member 123a surround 130 extension 132 of vacuum chamber, that is to say, that the lumen of the bellows 140 is
The extension 132.
Since deformation may be implemented in the bellows 140, the extension that the bellows 140 surrounds also be may be implemented
Deformation, so the vacuum chamber 130, Neng Gou that the extension 132 that the smelting part 131 and the bellows 140 surround is constituted
Under the premise of guaranteeing that vacuum degree technique requires, the requirement of vibration, and simple process, strong operability are realized.
It should be noted that as shown in Fig. 2, in the present embodiment, the smelting equipment further include: blocker ring 150 is located at institute
It states between the bottom for bearing 131 vacuum chamber 130 of bracket 120 and the smelting part, is arranged around the through-hole.
In fusion process, the molten metal 111 is fallen at 131 bottom of smelting part, 150 energy of blocker ring
Barrier effect is enough played, to prevent the molten metal fallen 111 from flowing into the extension 132, to prevent the melting of high temperature
Metal 111 damages the drive rod 124 and the vibrating mechanism 123, reduces the impaired possibility of the vibration device, extends institute
State the service life and operating cost of smelting equipment.
In the present embodiment, the vibration device is connected with the bracket 120 that bears, and the mold 110, which is fixed on, bears branch
On frame 120, the mechanical oscillation by bearing bracket 120 make molten metal 111 in the mold 110 generate vibration.This way
An only example, in other embodiments of the invention, the vibration device can also be other structures.
With reference to Fig. 3, the structural schematic diagram of another embodiment of smelting equipment of the present invention is shown.
The present embodiment and previous embodiment something in common, details are not described herein by the present invention.The present embodiment and previous embodiment
The difference is that the vibration device is ultrasonic vibration installation 220 in the present embodiment.
Ultrasonic vibration installation 220 is to generate the molten metal 211 in the mold 210 using the high frequency sound wave of ultrasonic wave
Vibration is to achieve the purpose that realize stirring, form convection current.The ultrasonic vibration installation can directly make in the mold 210 not
Cured molten metal vibrates, therefore sets the vibration device to the way of ultrasonic vibration installation, can not also directly connect
Under the premise of touching the molten metal 211, achievees the purpose that stirring, forms convection current, impurity will not be introduced.
And the small volume of the ultrasonic vibration installation 220, therefore ultrasonic vibration dress is set by the vibration device
The function of vibration can be realized without doing larger change to process equipment, particularly without the transformation vacuum in the way for setting 220
Chamber 230, can be effectively reduced equipment manufacturing costs, advantageously ensure that smelting technology condition, be conducive to improve the steady of smelting technology
Qualitative and quality.
As shown in figure 3, the mold 210 is hollow cylinder shell, one end of the hollow cylinder shell is the bottom of sealing
Portion 214, the other end are open inlet 213.In the present embodiment, the ultrasonic vibration installation 220 is fixed on the mold 210
Side wall on.
Due to molten metal 211 start to cool down immediately after leaving graphite crucible 212 and injecting in the mold 210 it is cold
But, it is then formed by curing ingot casting, so the ultrasonic vibration installation 220 is made to be fixed on the way of 210 side wall, it can be effective
Reduce the distance between that device 220 of the ultrasonic vibration and uncured molten metal 211, effectively improves to uncured melting
The effect that metal 211 stirs improves the intensity of formed convection current in the molten metal 211, advantageously reduces residual gas, have
Conducive to raising temperature uniformity, and then reduce the formation of stomata and shrinkage hole.Specifically, the ultrasonic vibration installation 220 is from institute
It states inlet 213 and extends to the bottom 214.
So that the ultrasonic vibration installation 220 is extended to the way of the bottom 214 from the inlet 213, institute can be made
Stating molten metal 211 when any position, can adequately be stirred in the mold 210, form pair of suitable intensity
Stream, to improve the exclusion of residual gas, improves the temperature uniformity of molten metal, is conducive to the reduction of stomata and shrinkage hole.
It should be noted that the ultrasonic vibration installation 220 is made to extend to the way of the bottom only from the inlet
For an example.In other embodiments of the invention, the ultrasonic vibration installation can also be set on the mold.
To sum up, in the smelting equipment, the vibration device can be such that the molten metal in mold vibrates, and stir to reach
Mix the molten metal, in the molten metal formed convection current effect；Convection current in the stirring of molten metal and molten metal
Formation, can be effectively reduced the concentration of dissolved gas in molten metal, molten metal surface and internal can be effectively improved
Temperature uniformity advantageously reduces the defect of formed ingot casting to advantageously reduce the formation of stomata and shrinkage hole, to mention
The utilization rate of high ingot material；The defect of formed sputtering target material is advantageously reduced, to improve the matter of formed sputtering target material
Amount.
Although present disclosure is as above, present invention is not limited to this.Anyone skilled in the art are not departing from this
It in the spirit and scope of invention, can make various changes or modifications, therefore protection scope of the present invention should be with claim institute
Subject to the range of restriction.
Claims (19)
1. a kind of smelting equipment of ingot casting characterized by comprising
Mold, in the chamber of the smelting equipment, for bearing molten metal；
Vibration device is connected with the mold, for vibrating the molten metal in the mold.
2. smelting equipment as described in claim 1, which is characterized in that further include: bracket is born, the bracket that bears is located at institute
Cavity bottom is stated, and the mold is fixed on and bears on bracket；
The vibration device is connected with the bracket that bears.
3. smelting equipment as claimed in claim 2, which is characterized in that the vibration device includes:
Motor is connected with transmission shaft, rotates the transmission shaft；
Vibrating mechanism is connected with the transmission shaft, and the rotation of the transmission shaft is made to be converted to vibration；
Drive rod is fixedly linked with the vibrating mechanism and the bracket that bears.
4. smelting equipment as claimed in claim 3, which is characterized in that the vibrating mechanism is cam vibrating mechanism.
5. smelting equipment as claimed in claim 3, which is characterized in that the motor is variable-frequency motor.
6. smelting equipment as claimed in claim 2, is characterized in that, further includes: supporting support is sleeved on outside the mold；
The mold is fixed on described bear on bracket by the supporting support.
7. smelting equipment as claimed in claim 3, which is characterized in that the chamber is vacuum chamber, and the vacuum chamber includes molten
Refining portion；
The mold and the bracket that bears are located in the smelting part.
8. smelting equipment as claimed in claim 7, which is characterized in that the bottom of the smelting part vacuum chamber has impenetrating thickness
Through-hole；
The vacuum chamber further includes extension, and the extension is connected to the smelting part by the through-hole；
The drive rod runs through the through-hole and the extension, and one end is fixedly linked with the bracket that bears, the other end and institute
Vibrating mechanism is stated to be connected.
9. smelting equipment as claimed in claim 8, which is characterized in that further include: blocker ring bears bracket and institute positioned at described
Between the bottom for stating smelting part vacuum chamber, it is arranged around the through-hole.
10. smelting equipment as claimed in claim 8, which is characterized in that the smelting equipment further include: bellows is set in
On the drive rod, to surround the extension of the vacuum chamber.
11. the smelting equipment as described in claim 7 to claim 10 any one claim, which is characterized in that described
The vacuum degree of vacuum chamber is 10-2Pa to 10-3Within the scope of Pa.
12. smelting equipment as claimed in claim 7, which is characterized in that the smelting equipment is vacuum induction melting furnace, described
The vacuum chamber of smelting part is the vacuum chamber of the vacuum induction melting furnace.
13. smelting equipment as described in claim 1, which is characterized in that the vibration device is ultrasonic vibration installation.
14. smelting equipment as claimed in claim 13, which is characterized in that the mold is hollow cylinder shell, described hollow
One end of cylindrical shell is the bottom of sealing, and the other end is open inlet.
15. smelting equipment as claimed in claim 14, which is characterized in that the ultrasonic vibration installation is fixed on the mold
On side wall.
16. smelting equipment as claimed in claim 15, which is characterized in that the ultrasonic vibration installation extends from the inlet
To the bottom.
17. smelting equipment as claimed in claim 15, which is characterized in that the ultrasonic vibration installation is set in the mold
On.
18. the smelting equipment as described in claim 1,3,5 or 13, which is characterized in that the vibration frequency of the vibration device exists
In 40Hz to 200Hz range.
19. smelting equipment as described in claim 1, which is characterized in that the Oscillation Amplitude of the vibration device is arrived in 1.5mm
Within the scope of 2.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558909.2A CN109234688A (en) | 2017-07-10 | 2017-07-10 | The smelting equipment of ingot casting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710558909.2A CN109234688A (en) | 2017-07-10 | 2017-07-10 | The smelting equipment of ingot casting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109234688A true CN109234688A (en) | 2019-01-18 |
Family
ID=65083287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710558909.2A Withdrawn CN109234688A (en) | 2017-07-10 | 2017-07-10 | The smelting equipment of ingot casting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109234688A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116441787A (en) * | 2023-05-15 | 2023-07-18 | 永州市兴发电熔科技有限公司 | Single-sided welding double-sided forming smelting flux and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB480554A (en) * | 1936-03-25 | 1938-02-24 | Deutsche Edelstahlwerke Ag | Improvements in or relating to the casting of metals and alloys |
| CN1702188A (en) * | 2005-06-06 | 2005-11-30 | 辽宁工学院 | Method for preparing nanocystalline ingot casting by magnetic field and ultrasonic combined treatment of metal melt and dedicated apparatus therefor |
| CN102994787A (en) * | 2012-12-10 | 2013-03-27 | 西安诺博尔稀贵金属材料有限公司 | Method for vacuum melting of silver cadmium alloy ingot |
| CN105710350A (en) * | 2016-04-11 | 2016-06-29 | 浙江万丰摩轮有限公司 | Ultrasonic vibration casting technology and device of aluminum alloy hub |
| CN106513640A (en) * | 2016-10-28 | 2017-03-22 | 中南大学 | Ultrasonic mold casting method for alloy steel |
-
2017
- 2017-07-10 CN CN201710558909.2A patent/CN109234688A/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB480554A (en) * | 1936-03-25 | 1938-02-24 | Deutsche Edelstahlwerke Ag | Improvements in or relating to the casting of metals and alloys |
| CN1702188A (en) * | 2005-06-06 | 2005-11-30 | 辽宁工学院 | Method for preparing nanocystalline ingot casting by magnetic field and ultrasonic combined treatment of metal melt and dedicated apparatus therefor |
| CN102994787A (en) * | 2012-12-10 | 2013-03-27 | 西安诺博尔稀贵金属材料有限公司 | Method for vacuum melting of silver cadmium alloy ingot |
| CN105710350A (en) * | 2016-04-11 | 2016-06-29 | 浙江万丰摩轮有限公司 | Ultrasonic vibration casting technology and device of aluminum alloy hub |
| CN106513640A (en) * | 2016-10-28 | 2017-03-22 | 中南大学 | Ultrasonic mold casting method for alloy steel |
Non-Patent Citations (1)
| Title |
|---|
| 李杰等: "超声波导入方式对金属凝固组织的影响", 《第五届冶金工程科学论坛》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116441787A (en) * | 2023-05-15 | 2023-07-18 | 永州市兴发电熔科技有限公司 | Single-sided welding double-sided forming smelting flux and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101539365B (en) | Smelting furnace with mechanical agitation and high-energy ultrasonic processing and smelting method thereof | |
| CN105568036B (en) | Preparing method of high-silicon aluminum composite material | |
| EP3895829B1 (en) | Die casting method for filtering cavity | |
| CN102409188A (en) | Method for preparing semisolid alloy through centrifuging and chilling | |
| CN105710350A (en) | Ultrasonic vibration casting technology and device of aluminum alloy hub | |
| CN112139472A (en) | Device and method for rapidly preparing semi-solid metal slurry | |
| WO2018090820A1 (en) | Continuous precision forming device and process for amorphous alloy or composite material thereof | |
| CN109234688A (en) | The smelting equipment of ingot casting | |
| CN102416463A (en) | Electroslag fusion casting manufacturing method for annular plate of hydraulic generator | |
| KR20210091272A (en) | Equipment for the production of semi-solid slurry | |
| CN208495711U (en) | A kind of bearing cap casting mould | |
| US9475120B1 (en) | Apparatus and method for dispersing particles in a molten material without using a mold | |
| CN111001777A (en) | Composite field treatment and high-pressure extrusion forming method for iron-containing aluminum alloy | |
| CN202398799U (en) | Casting device applying composite electromagnetic field for high temperature alloy fine grains | |
| CN1380153A (en) | Electromagnetic continuous casting method of hollow metal tube blank | |
| JP7206965B2 (en) | Method and apparatus for manufacturing titanium ingot | |
| CN210908017U (en) | Electromagnetic multi-cyclone stirring casting device | |
| CN1470343A (en) | High-smelting point thixotropic metal bland and composite material intermittent preparing process and apparatus | |
| CN1092466C (en) | Composite electromagnetic inductor for electromagnetic casting | |
| CN106513640A (en) | Ultrasonic mold casting method for alloy steel | |
| CN109226721A (en) | The method of smelting of ingot casting | |
| CN217121713U (en) | Vibration solidification grain refining device suitable for vacuum pouring metal casting | |
| KR102409182B1 (en) | Casting method of titanium alloy using titanium scrap | |
| JPH0494859A (en) | Apparatus for precisely casting metal | |
| CN211360616U (en) | Ingot casting production device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20190118 |
|
| WW01 | Invention patent application withdrawn after publication |