CN109166940A - 一种高效异质结太阳能电池的电极制作方法 - Google Patents
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Abstract
本发明公开了一种高效异质结太阳能电池的电极制作方法,所述制作方法包括如下步骤:首先在沉积完透明导电膜和种子层的硅片表面覆盖一层保护膜,并烘干固化;再使用激光在保护膜上刻画出栅线图形结构的凹槽,漏出种子层;然后在漏出的种子层上面进行电镀处理,形成金属电极;最后去除保护膜以及金属电极外的种子层,完成金属电极的制作。本发明提供了一个高转换效率、低成本的金属化电极的制作方案,对高效异质结太阳能电池的量产和发展具有非常重要的意义。
Description
技术领域
本发明涉及晶体硅太阳能电池制备技术领域,尤其涉及一种高效异质结太阳能电池的电极制作方法。
背景技术
目前晶体硅太阳能电池的工艺技术较为成熟,多晶转换效率在18-19%,单晶转换效率在19-20%左右。经过多年的技术改进和优化,晶硅电池的生产成本已有大幅的下降,继续下降的空间比较有限。而国内高效异质结太阳能电池的研发和产业化才刚刚开始,电池效率已经取得了较大的提升,基本达到了22%左右的水平,这个效率要比晶硅电池高2-3%,优势比较明显。
目前大部分做高效异质结太阳能电池的公司还是采用比较成熟的银电极技术,但是采用银浆作为高效异质结太阳能电池的电极材料,银浆耗量较多,成本相对较高,在和晶体硅太阳能电池成本竞争方面存在不利的一面,所以降低高效异质结电池的生产成本,开发廉价的金属化技术对于高效异质结电池的发展壮大具有非常重要的意义。
发明内容
针对上述问题,本发明提供了一种高转换效率、低成本的高效异质结太阳能电池的电极制作方法。
为解决上述技术问题,本发明所采用的技术方案是:一种高效异质结太阳能电池的电极制作方法,所述制作方法包括如下步骤:
在沉积完透明导电膜和种子层的硅片表面覆盖一层保护膜,并烘干固化;
使用激光在保护膜上刻画出栅线图形结构的凹槽,漏出种子层;
在漏出的种子层上面进行电镀处理,形成金属电极;
去除保护膜以及金属电极外的种子层,完成金属电极的制作。
进一步的,所述透明导电薄膜为ITO、IWO、ZnO中的一种,厚度为80-120nm,所述种子层为金属铜,厚度为100-500nm。
进一步的,所述保护膜为高分子材料,使用浸泡、涂覆或印刷的方式覆盖在硅片表面,其中烘干固化温度为60-150℃,固化时间为1-10min。
进一步的,所述激光为短波长激光器,如皮秒、紫外、绿光等,激光刻画出栅线图形结构的凹槽的宽度为20-60um。
进一步的,所述电镀处理形成的金属电极为Cu/Sn金属层,电极厚度为10-40um,宽度为20-60um。
由上述对本发明结构的描述可知,和现有技术相比,本发明具有如下优点:
本发明使用了Cu/Sn金属作为电池金属电极的材料,大幅度降低了生产成本,另外由于激光开槽的宽度比较窄,形成的电极线宽也较窄,而且电镀Cu/Sn金属的导电性比较好,使得高效异质结电池的转换效率有了较大幅度的提升,所以本发明提供了一个高转换效率、低成本的金属化电极的制作方案,对高效异质结太阳能电池的量产和发展具有非常重要的意义。
附图说明
构成本申请的一部分的附图用来提供对本发明的进一步理解,本发明的示意性实施例及其说明用于解释本发明,并不构成对本发明的不当限定。在附图中:
图1为本发明一种高效异质结太阳能电池的电极制作方法流程图;
图2为本发明一种高效异质结太阳能电池沉积完透明导电薄膜和种子层的示意图。
图3为本发明一种高效异质结太阳能电池沉积完透明导电薄膜、种子层、以及覆盖住保护膜的示意图。
图4为本发明一种高效异质结太阳能电池激光在保护膜上面开完槽的示意图。
图5为本发明一种高效异质结太阳能电池电镀完电极的示意图。
图6为本发明一种高效异质结太阳能电池去除完保护膜以及电极外种子层的示意图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。
如图2所示,一种高效异质结太阳能电池包括N型硅片1、对称设置在N型硅片的非晶硅层2、透明导电层3、种子层4。
参考图1,一种高效异质结太阳能电池的电极制作方法,所述制作方法包括如下步骤:
S01,如图3所示,在沉积完透明导电膜3和种子层4的硅片表面覆盖一层保护膜5,并烘干固化,所述透明导电薄膜为ITO、IWO、ZnO中的一种,厚度为80-120nm,所述种子层为金属铜,厚度为100-500nm,所述保护膜为高分子材料,使用浸泡、涂覆或印刷的方式覆盖在硅片表面,其中烘干固化温度为60-150℃,固化时间为1-10min。;
S02,如图4所示,使用激光在保护膜5上刻画出栅线图形结构的凹槽,漏出种子层,所述激光为短波长激光器,如皮秒、紫外、绿光等,激光刻画出栅线图形结构的凹槽的宽度为20-60um;
S03,如图5所示,在漏出的种子层4上面进行电镀处理,形成金属电极6,所述金属电极为Cu/Sn金属层,电极厚度为10-40um,宽度为20-60um;
S04,如图6所示,去除保护膜5以及金属电极外的种子层4,完成金属电极的制作。
本发明使用了Cu/Sn金属作为电池金属电极的材料,大幅度降低了生产成本,另外由于激光开槽的宽度比较窄,形成的电极线宽也较窄,而且电镀Cu/Sn金属的导电性比较好,使得高效异质结电池的转换效率有了较大幅度的提升,所以本发明提供了一个高转换效率、低成本的金属化电极的制作方案,对高效异质结太阳能电池的量产和发展具有非常重要的意义。
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。
Claims (6)
1.一种高效异质结太阳能电池的电极制作方法,其特征在于:所述制作方法包括如下步骤:
在沉积完透明导电膜和种子层的硅片表面覆盖一层保护膜,并烘干固化;
使用激光在保护膜上刻画出栅线图形结构的凹槽,漏出种子层;
在漏出的种子层上面进行电镀处理,形成金属电极;
去除保护膜以及金属电极外的种子层,完成金属电极的制作。
2.根据权利要求1所述一种高效异质结太阳能电池的电极制作方法,其特征在于:所述透明导电薄膜为ITO、IWO、ZnO中的一种,厚度为80-120nm,所述种子层为金属铜,厚度为100-500nm。
3.根据权利要求1所述一种高效异质结太阳能电池的电极制作方法,其特征在于:所述保护膜为高分子材料,使用浸泡、涂覆或印刷的方式覆盖在硅片表面,其中烘干固化温度为60-150℃,固化时间为1-10min。
4.根据权利要求1所述一种高效异质结太阳能电池的电极制作方法,其特征在于:所述激光为短波长激光器,如皮秒、紫外、绿光等,激光刻画出栅线图形结构的凹槽的宽度为20-60um。
5.根据权利要求1所述一种高效异质结太阳能电池的电极制作方法,其特征在于:所述电镀处理形成的金属电极为Cu/Sn金属层,电极厚度为10-40um,宽度为20-60um。
6.根据权利要求1所述一种高效异质结太阳能电池的电极制作方法,其特征在于:所述去除保护膜采用的是低浓度的碱溶液,所述去除种子层采用的是碱性的CuCl2溶液。
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CN112864283A (zh) * | 2019-11-08 | 2021-05-28 | 福建钜能电力有限公司 | 一种提升异质结太阳能电池电学性能的工艺方法 |
CN114050203A (zh) * | 2021-11-11 | 2022-02-15 | 福建金石能源有限公司 | 一种异质结太阳电池的电极栅级制作方法 |
CN114284396A (zh) * | 2021-12-24 | 2022-04-05 | 苏州大学 | 栅线电极制备方法及太阳能电池 |
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CN205231076U (zh) * | 2015-11-02 | 2016-05-11 | 钧石(中国)能源有限公司 | 一种异质结太阳能电池 |
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CN112864283A (zh) * | 2019-11-08 | 2021-05-28 | 福建钜能电力有限公司 | 一种提升异质结太阳能电池电学性能的工艺方法 |
CN114050203A (zh) * | 2021-11-11 | 2022-02-15 | 福建金石能源有限公司 | 一种异质结太阳电池的电极栅级制作方法 |
CN114284396A (zh) * | 2021-12-24 | 2022-04-05 | 苏州大学 | 栅线电极制备方法及太阳能电池 |
CN114284396B (zh) * | 2021-12-24 | 2023-08-22 | 苏州大学 | 栅线电极制备方法及太阳能电池 |
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