CN109084694A - 一种薄膜厚度检测方法 - Google Patents
一种薄膜厚度检测方法 Download PDFInfo
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- CN109084694A CN109084694A CN201811103276.7A CN201811103276A CN109084694A CN 109084694 A CN109084694 A CN 109084694A CN 201811103276 A CN201811103276 A CN 201811103276A CN 109084694 A CN109084694 A CN 109084694A
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- 238000001514 detection method Methods 0.000 title claims abstract description 20
- 238000005259 measurement Methods 0.000 claims abstract description 15
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000007246 mechanism Effects 0.000 claims description 49
- 230000001681 protective effect Effects 0.000 claims description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 20
- 230000003014 reinforcing effect Effects 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 4
- 235000005121 Sorbus torminalis Nutrition 0.000 claims description 3
- 244000152100 Sorbus torminalis Species 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 81
- 239000010409 thin film Substances 0.000 abstract description 2
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- 230000003447 ipsilateral effect Effects 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113310418A (zh) * | 2021-06-01 | 2021-08-27 | 安徽松泰包装材料有限公司 | 一种cpp吹塑薄膜的壁厚检测装置 |
CN118424124A (zh) * | 2024-07-02 | 2024-08-02 | 玻尔兹曼(广州)科技有限公司 | 基于红外吸收法的高精度测厚仪及测厚方法 |
CN118640854A (zh) * | 2024-08-14 | 2024-09-13 | 济宁顺兴塑业有限公司 | 用于塑料编织袋合格率检测的厚度检测装置及方法 |
Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11304433A (ja) * | 1998-04-15 | 1999-11-05 | Sony Corp | 膜厚測定用サンプル・フィルムの保持装置 |
CN201247048Y (zh) * | 2008-07-24 | 2009-05-27 | 天津港东科技发展股份有限公司 | 光学薄膜测厚仪 |
US20130128275A1 (en) * | 2011-11-01 | 2013-05-23 | Tokyo Electron Limited | Interference optical system, substrate processing apparatus, and measuring method |
CN203349807U (zh) * | 2013-08-09 | 2013-12-18 | 山东大学 | 10~100μm固体薄膜厚度的测量装置 |
CN203929022U (zh) * | 2014-05-13 | 2014-11-05 | 启东优思电子有限公司 | 手机主板锡膏测厚仪 |
CN204373632U (zh) * | 2015-01-24 | 2015-06-03 | 杭州中塑包装材料有限公司 | 薄膜测厚仪 |
CN105136047A (zh) * | 2015-05-28 | 2015-12-09 | 清华大学深圳研究生院 | 原位测量薄膜厚度变化的设备和方法 |
CN205561801U (zh) * | 2016-05-05 | 2016-09-07 | 上海丙嘉精密机械科技有限公司 | 一种方便使用的薄膜测厚仪 |
CN205642323U (zh) * | 2016-05-27 | 2016-10-12 | 上海丙嘉精密机械科技有限公司 | 一种能便捷使用精确度高的测厚仪 |
CN205719778U (zh) * | 2016-04-29 | 2016-11-23 | 深圳市旭龙昇电子有限公司 | 一种pet薄膜拉伸强度检测装置 |
CN205718859U (zh) * | 2016-04-29 | 2016-11-23 | 武宁县宏辉新材料有限公司 | 一种pvb中间膜的厚度测试仪 |
CN106895812A (zh) * | 2015-12-18 | 2017-06-27 | 天津良益科技有限公司 | 一种薄膜测厚仪 |
CN206459595U (zh) * | 2017-02-20 | 2017-09-01 | 淮阴师范学院 | 一种使用方便的薄膜厚度测量装置 |
CN107144249A (zh) * | 2017-05-28 | 2017-09-08 | 浙江凯利新材料股份有限公司 | 一种基于螺栓自定位的膜厚监测系统 |
CN207291027U (zh) * | 2017-08-28 | 2018-05-01 | 重庆瑞霆塑胶有限公司 | 薄膜厚度控制结构 |
CN108020159A (zh) * | 2017-11-27 | 2018-05-11 | 武汉科技大学 | 基于机器视觉的轴类零件尺寸图像采集装置 |
-
2018
- 2018-09-20 CN CN201811103276.7A patent/CN109084694B/zh active Active
Patent Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11304433A (ja) * | 1998-04-15 | 1999-11-05 | Sony Corp | 膜厚測定用サンプル・フィルムの保持装置 |
CN201247048Y (zh) * | 2008-07-24 | 2009-05-27 | 天津港东科技发展股份有限公司 | 光学薄膜测厚仪 |
US20130128275A1 (en) * | 2011-11-01 | 2013-05-23 | Tokyo Electron Limited | Interference optical system, substrate processing apparatus, and measuring method |
CN203349807U (zh) * | 2013-08-09 | 2013-12-18 | 山东大学 | 10~100μm固体薄膜厚度的测量装置 |
CN203929022U (zh) * | 2014-05-13 | 2014-11-05 | 启东优思电子有限公司 | 手机主板锡膏测厚仪 |
CN204373632U (zh) * | 2015-01-24 | 2015-06-03 | 杭州中塑包装材料有限公司 | 薄膜测厚仪 |
CN105136047A (zh) * | 2015-05-28 | 2015-12-09 | 清华大学深圳研究生院 | 原位测量薄膜厚度变化的设备和方法 |
CN106895812A (zh) * | 2015-12-18 | 2017-06-27 | 天津良益科技有限公司 | 一种薄膜测厚仪 |
CN205719778U (zh) * | 2016-04-29 | 2016-11-23 | 深圳市旭龙昇电子有限公司 | 一种pet薄膜拉伸强度检测装置 |
CN205718859U (zh) * | 2016-04-29 | 2016-11-23 | 武宁县宏辉新材料有限公司 | 一种pvb中间膜的厚度测试仪 |
CN205561801U (zh) * | 2016-05-05 | 2016-09-07 | 上海丙嘉精密机械科技有限公司 | 一种方便使用的薄膜测厚仪 |
CN205642323U (zh) * | 2016-05-27 | 2016-10-12 | 上海丙嘉精密机械科技有限公司 | 一种能便捷使用精确度高的测厚仪 |
CN206459595U (zh) * | 2017-02-20 | 2017-09-01 | 淮阴师范学院 | 一种使用方便的薄膜厚度测量装置 |
CN107144249A (zh) * | 2017-05-28 | 2017-09-08 | 浙江凯利新材料股份有限公司 | 一种基于螺栓自定位的膜厚监测系统 |
CN207291027U (zh) * | 2017-08-28 | 2018-05-01 | 重庆瑞霆塑胶有限公司 | 薄膜厚度控制结构 |
CN108020159A (zh) * | 2017-11-27 | 2018-05-11 | 武汉科技大学 | 基于机器视觉的轴类零件尺寸图像采集装置 |
Non-Patent Citations (2)
Title |
---|
张慧萍: "光学薄膜厚度及性能的测试", 《中国优秀硕士学位论文全文数据库基础科学辑》 * |
航空制造工程手册总编委会: "《航空制造工程手册 发动机机械加工》", 31 August 2016 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113310418A (zh) * | 2021-06-01 | 2021-08-27 | 安徽松泰包装材料有限公司 | 一种cpp吹塑薄膜的壁厚检测装置 |
CN118424124A (zh) * | 2024-07-02 | 2024-08-02 | 玻尔兹曼(广州)科技有限公司 | 基于红外吸收法的高精度测厚仪及测厚方法 |
CN118640854A (zh) * | 2024-08-14 | 2024-09-13 | 济宁顺兴塑业有限公司 | 用于塑料编织袋合格率检测的厚度检测装置及方法 |
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Effective date of registration: 20200122 Address after: No. 676, Shuangzhu Road, Huangdao District, Qingdao, Shandong Province Applicant after: Qingdao Huatairuite Mechanical and Electrical Technology Co., Ltd. Address before: 610065 School of chemical engineering, Sichuan University, No. 24 south section of first ring road, Sichuan, Chengdu Applicant before: Wang Shun |
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Address after: 266000 No. 676, Shuangzhu Road, Huangdao District, Qingdao, Shandong Province Patentee after: Qingdao huatairuite New Material Technology Co.,Ltd. Address before: 266000 No. 676, Shuangzhu Road, Huangdao District, Qingdao, Shandong Province Patentee before: Qingdao Huatairuite Mechanical and Electrical Technology Co.,Ltd. |