CN109073566B - 用于通过激光多普勒效应检测用于微电子或光学的板的方法和系统 - Google Patents

用于通过激光多普勒效应检测用于微电子或光学的板的方法和系统 Download PDF

Info

Publication number
CN109073566B
CN109073566B CN201780021710.4A CN201780021710A CN109073566B CN 109073566 B CN109073566 B CN 109073566B CN 201780021710 A CN201780021710 A CN 201780021710A CN 109073566 B CN109073566 B CN 109073566B
Authority
CN
China
Prior art keywords
wafer
light
measurement volume
light source
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201780021710.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN109073566A (zh
Inventor
菲利普·加斯塔尔多
马约·杜朗德热维涅
特里斯坦·孔比耶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unity Semiconductor SAS
Original Assignee
Unity Semiconductor SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unity Semiconductor SAS filed Critical Unity Semiconductor SAS
Publication of CN109073566A publication Critical patent/CN109073566A/zh
Application granted granted Critical
Publication of CN109073566B publication Critical patent/CN109073566B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201780021710.4A 2016-03-31 2017-03-14 用于通过激光多普勒效应检测用于微电子或光学的板的方法和系统 Active CN109073566B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1652835A FR3049710B1 (fr) 2016-03-31 2016-03-31 Procede et systeme d'inspection par effet doppler laser de plaquettes pour la microelectronique ou l'optique
FR1652835 2016-03-31
PCT/EP2017/055967 WO2017167573A1 (fr) 2016-03-31 2017-03-14 Procede et systeme d'inspection par effet doppler laser de plaquettes pour la microelectronique ou l'optique

Publications (2)

Publication Number Publication Date
CN109073566A CN109073566A (zh) 2018-12-21
CN109073566B true CN109073566B (zh) 2022-07-19

Family

ID=55863116

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780021710.4A Active CN109073566B (zh) 2016-03-31 2017-03-14 用于通过激光多普勒效应检测用于微电子或光学的板的方法和系统

Country Status (9)

Country Link
US (1) US11092644B2 (enExample)
EP (1) EP3436807B1 (enExample)
JP (1) JP2019518197A (enExample)
KR (1) KR20180123699A (enExample)
CN (1) CN109073566B (enExample)
FR (1) FR3049710B1 (enExample)
SG (1) SG11201808303YA (enExample)
TW (1) TW201802461A (enExample)
WO (1) WO2017167573A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI718627B (zh) * 2019-08-19 2021-02-11 崑山科技大學 以表面波頻率偵測材料表面瑕疵之方法
JP7636401B2 (ja) * 2019-09-20 2025-02-26 ノードソン コーポレーション レーザー干渉法システムおよび方法
CN113503822B (zh) * 2021-06-01 2023-08-18 南京中安半导体设备有限责任公司 晶圆厚度的测量方法及其测量装置
EP4202423B1 (en) 2021-12-23 2025-09-24 Unity Semiconductor A method and system for discriminating defects present on a frontside from defects present on a backside of a transparent substrate
EP4647746A1 (en) 2024-05-07 2025-11-12 Unity Semiconductor Support for a dark field optical inspection system
CN120395592B (zh) * 2025-07-03 2025-09-12 成都承奥科技有限公司 一种石墨环加工用高精度打磨检测设备及其使用方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5710629A (en) * 1992-12-10 1998-01-20 Schneider Electric S.A. Interferometric measuring device forming a spacial interference pattern
WO2002039099A2 (en) * 2000-11-13 2002-05-16 Koninklijke Philips Electronics N.V. Measurement of surface defects
WO2009112704A8 (fr) * 2008-02-05 2010-01-28 Altatech Semiconductor Dispositif d'inspection de plaquettes semi-conductrices
CN106716112A (zh) * 2014-09-29 2017-05-24 统半导体公司 用于检验用于电学、光学或光电学的透明晶片的方法和系统
CN107076547A (zh) * 2014-09-29 2017-08-18 统半导体公司 用于检验用于电学、光学或光电学的晶片的方法和系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02253166A (ja) * 1989-03-27 1990-10-11 Yuji Ikeda 光ファイバレーザドップラ流速計の光学装置
JP2711140B2 (ja) * 1989-06-08 1998-02-10 三菱電機株式会社 徴細粒子測定装置
US5343290A (en) * 1992-06-11 1994-08-30 International Business Machines Corporation Surface particle detection using heterodyne interferometer
US5883714A (en) * 1996-10-07 1999-03-16 Phase Metrics Method and apparatus for detecting defects on a disk using interferometric analysis on reflected light
JP3375876B2 (ja) * 1998-02-06 2003-02-10 株式会社日立製作所 結晶欠陥計測方法及び結晶欠陥計測装置
US7068363B2 (en) * 2003-06-06 2006-06-27 Kla-Tencor Technologies Corp. Systems for inspection of patterned or unpatterned wafers and other specimen
US9909986B2 (en) * 2003-10-15 2018-03-06 Applied Research And Photonics, Inc. Thickness determination and layer characterization using terahertz scanning reflectometry
US7420669B2 (en) * 2004-07-01 2008-09-02 Midwest Research Institute Optic probe for semiconductor characterization
CN1740782B (zh) * 2005-09-15 2010-04-28 中国科学院上海光学精密机械研究所 倾斜入射光散射式硅片表面缺陷检测仪
JP5520736B2 (ja) * 2010-07-30 2014-06-11 株式会社日立ハイテクノロジーズ 欠陥検査方法及び欠陥検査装置
CN102937411B (zh) * 2012-11-09 2015-01-21 清华大学 一种双频光栅干涉仪位移测量系统
CN103322927B (zh) * 2013-06-19 2016-04-20 清华大学 一种三自由度外差光栅干涉仪位移测量系统
KR102609862B1 (ko) * 2014-04-17 2023-12-04 펨토매트릭스, 인코포레이티드. 웨이퍼 계측 기술들

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5710629A (en) * 1992-12-10 1998-01-20 Schneider Electric S.A. Interferometric measuring device forming a spacial interference pattern
WO2002039099A2 (en) * 2000-11-13 2002-05-16 Koninklijke Philips Electronics N.V. Measurement of surface defects
WO2009112704A8 (fr) * 2008-02-05 2010-01-28 Altatech Semiconductor Dispositif d'inspection de plaquettes semi-conductrices
CN106716112A (zh) * 2014-09-29 2017-05-24 统半导体公司 用于检验用于电学、光学或光电学的透明晶片的方法和系统
CN107076547A (zh) * 2014-09-29 2017-08-18 统半导体公司 用于检验用于电学、光学或光电学的晶片的方法和系统

Also Published As

Publication number Publication date
TW201802461A (zh) 2018-01-16
US11092644B2 (en) 2021-08-17
US20200271718A1 (en) 2020-08-27
WO2017167573A1 (fr) 2017-10-05
JP2019518197A (ja) 2019-06-27
CN109073566A (zh) 2018-12-21
KR20180123699A (ko) 2018-11-19
FR3049710A1 (fr) 2017-10-06
EP3436807B1 (fr) 2020-12-02
FR3049710B1 (fr) 2020-06-19
EP3436807A1 (fr) 2019-02-06
SG11201808303YA (en) 2018-10-30

Similar Documents

Publication Publication Date Title
CN109073566B (zh) 用于通过激光多普勒效应检测用于微电子或光学的板的方法和系统
US7643139B2 (en) Method and apparatus for detecting defects
CN102759533B (zh) 晶圆检测方法以及晶圆检测装置
US9857313B2 (en) Method and system for inspecting wafers for electronics, optics or optoelectronics
US10260868B2 (en) Interferometric method and system using variable fringe spacing for inspecting transparent wafers for electronics, optics or optoelectronics
KR100900618B1 (ko) 표면 측정 장치
CN117747467A (zh) 一种晶圆的缺陷检测装置
US8934091B2 (en) Monitoring incident beam position in a wafer inspection system
EP4332557B1 (en) A system for optical inspection of a substrate using same or different wavelengths
KR20240150416A (ko) 투명 기판의 전면에 존재하는 결함과 후면에 존재하는 결함을 구별하기 위한 방법 및 시스템
CN112540082A (zh) 检测系统及检测方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant