CN109065667A - A kind of method that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE - Google Patents
A kind of method that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE Download PDFInfo
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- CN109065667A CN109065667A CN201810878456.6A CN201810878456A CN109065667A CN 109065667 A CN109065667 A CN 109065667A CN 201810878456 A CN201810878456 A CN 201810878456A CN 109065667 A CN109065667 A CN 109065667A
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- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 title claims abstract description 63
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 title claims abstract description 63
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 title claims abstract description 63
- 238000005530 etching Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000001035 drying Methods 0.000 claims abstract description 6
- 238000002310 reflectometry Methods 0.000 claims abstract description 6
- 238000005406 washing Methods 0.000 claims abstract description 6
- 238000004260 weight control Methods 0.000 claims abstract description 5
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 27
- 239000011521 glass Substances 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000000654 additive Substances 0.000 claims description 9
- 230000000996 additive effect Effects 0.000 claims description 9
- 238000005554 pickling Methods 0.000 claims description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Substances [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 6
- 239000004115 Sodium Silicate Substances 0.000 claims description 3
- 235000019795 sodium metasilicate Nutrition 0.000 claims description 3
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052911 sodium silicate Inorganic materials 0.000 claims description 3
- 239000011259 mixed solution Substances 0.000 claims description 2
- 239000004094 surface-active agent Substances 0.000 claims description 2
- 239000002253 acid Substances 0.000 abstract description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 4
- 229910017604 nitric acid Inorganic materials 0.000 abstract description 4
- 230000007613 environmental effect Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 208000020442 loss of weight Diseases 0.000 description 6
- 235000008216 herbs Nutrition 0.000 description 4
- 239000003513 alkali Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Weting (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of methods that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE；By the two-sided PERC battery of SE pass sequentially through chain type go PSG, slot type alkaline etching, washing and drying blanking after, so that the etching of the two-sided PERC battery of SE subtracts Weight control between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, the back side of the two-sided PERC battery of SE forms pyramid structure and reflectivity controls between 10%-20%.Alkaline etching of the invention can limited reduction HF/HNO3 usage amount, reduce environmental improvement cost, chemicals manufacturing cost is reduced simultaneously, alkaline etching backside reflection rate is higher compared to acid etch, so that the etching of the two-sided PERC battery of SE subtracts Weight control between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, the back side of the two-sided PERC battery of SE forms pyramid structure and reflectivity controls between 10%-20%, the two-sided PERC battery conversion efficiency of SE can effectively be promoted, practicability is very strong, highly promotes.
Description
Technical field
The present invention relates to the two-sided PERC battery lithographic technique field SE, specially a kind of inorganic alkaline etching is used for solar energy SE
The method of two-sided PERC battery.
Background technique
Conventional single, polycrystalline SE cell piece production process at present are as follows: making herbs into wool-diffusion-SE- acid etch-annealing-SiNx plated film-
Silk-screen printing-sintering-sorting-detection, diffusion are carried out using the back-to-back mode of two panels silicon wafer, are carried out to front side of silicon wafer (diffusingsurface)
Doping forms P-N junction, and upper phosphorus is also inevitably spread in the back side and side, and the light induced electron that front is collected can have along edge
The region of phosphorus flows to the back side, causes short circuit.Wet process acid etch removes the phosphorosilicate glass of side and the back side using HF/HNO3 solution,
It avoids that short circuit occurs, but is compared using acid solution etched backside reflectivity and use alkaline etching higher, so as to cause the two-sided PERC electricity of SE
Pond piece back side transfer efficiency, which is less than, uses alkaline etching, while alkaline etching can effectively reduce the usage amount of HF/HNO3, reduce ring
Border treatment cost.
The present invention is directed to reduce the two-sided PERC cell piece backside reflection rate of SE, increase the conversion of the two-sided PERC cell piece back side SE
Efficiency；Reduce chemicals cost；Environmental improvement cost is reduced simultaneously.
Summary of the invention
The purpose of the present invention is to provide a kind of methods that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE, with solution
Certainly the problems mentioned above in the background art.
To achieve the above object, the invention provides the following technical scheme:
A kind of method that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE；
By the two-sided PERC battery of SE pass sequentially through chain type go PSG, slot type alkaline etching, washing and drying blanking after so that
The etching of the two-sided PERC battery of SE subtracts Weight control between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, and SE is two-sided
The back side of PERC battery forms pyramid structure and reflectivity controls between 10%-20%.
Preferably, chain type removes PSG specific step is as follows, goes PSG PERC battery two-sided to SE to carry out the back side by chain type
The two-sided PERC battery of SE is put into removal back side phosphorosilicate glass slot by the removal of phosphorosilicate glass；
Removing in back side phosphorosilicate glass slot is HF:DI water=1:9, belt speed 1.2-2.5m/min with liquid proportion.
Preferably, specific step is as follows for slot type alkaline etching, to going the SE battery after PSG successively to carry out alkali quarter via chain type
Erosion, first of pickling and second pickling；
Wherein, matching in alkaline etching slot with liquid is KOH: additive: DI water=1:4:90, etching temperature are set as 70
DEG C -75 DEG C, time 170s-230s；
In first of descaling bath is HCL:H2O2:DI water=1:0.65:16 with liquid proportion, and pickling temperature is set as 50
DEG C -60 DEG C, time 130s-180s；
In second descaling bath is HF:DI water=1:37 with liquid proportion, and pickling temperature is set as 20 DEG C -30 DEG C, the time
For 80s-120s.
Preferably, the additive in alkaline etching slot is that the mixing of isopropanol, sodium metasilicate, a small amount of surfactant and water is molten
Liquid.
Preferably, the KOH in alkaline etching slot can be replaced using NaOH.
Compared with prior art, the beneficial effects of the present invention are:
The present invention is first removed the two-sided PERC cell backside phosphorosilicate glass of SE using the band liquid idler wheel for having HF solution, then
Silicon wafer is fully immersed in KOH or NaOH tank liquor and is performed etching, replaces traditional acid solution to crystal silicon by using inorganic lye
The two-sided PERC cell backside of solar energy SE performs etching, and the two-sided PERC cell backside of crystal silicon solar SE and KOH or NaOH occur
Reaction, while front side of silicon wafer (diffusingsurface) is due to there is the protection of phosphorosilicate glass, so that front is not destroyed by lye.
Alkaline etching of the invention can limited reduction HF/HNO3 usage amount, reduce environmental improvement cost, while reduction
Product manufacturing cost, alkaline etching backside reflection rate are higher compared to acid etch, so that the etching loss of weight amount control of the two-sided PERC battery of SE
For system between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, the back side of the two-sided PERC battery of SE forms pyramid structure
And reflectivity control can effectively promote the two-sided PERC battery conversion efficiency of SE, practicability is very strong, non-between 10%-20%
Often it is worthy to be popularized.
Detailed description of the invention
Fig. 1 is method flow schematic diagram of the invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to Fig. 1, the present invention provides a kind of technical solution:
A kind of method that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE, the two-sided PERC battery of SE is passed sequentially through
After chain type goes PSG, slot type alkaline etching, washing and drying blanking, so that the etching of the two-sided PERC battery of SE subtracts Weight control and exists
Between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, the back side of the two-sided PERC battery of SE forms pyramid structure and anti-
Rate control is penetrated between 10%-20%.
First using the thickness of diffusion technique increase diffusingsurface phosphorosilicate glass using SE laser doping, chain type removes PSG machine
Platform idler wheel, which is stained with HF solution, can effectively remove the phosphorosilicate glass while front phosphorosilicate glass of the two-sided PERC cell backside of SE and side
It is not influenced by HF solution, then the two-sided PERC battery of SE is placed in KOH or the NaOH solution of collocation additive, although whole
A two-sided PERC battery of SE is immersed in the KOH of collocation additive or the alkaline etching slot of NaOH solution, the two-sided PERC electricity of SE
Pond is placed in the gaily decorated basket, but since diffusingsurface has " protection " of phosphorosilicate glass, can play only PERC cell backside two-sided to SE
Alkaline etching is carried out on positive (diffusingsurface) without influence, being excited photodoping due to SE figure has laser graphics region phosphorosilicate glass
Slight damage needs to throw additive using special alkaline etching and collocation alkali and further protects the two-sided PERC battery diffusingsurface of SE
It is destroyed from lye.
Chain type removes PSG: removal back side phosphorosilicate glass slot: configuration just matches liquid, belt speed according to the ratio of 1:9 with HF:DI in liquid
2.0m/min。
It goes PSG formula with after liquid according to above-mentioned chain type, by the two-sided PERC battery loading of SE to PSG board is removed, passes through
Blanking is expanded so that the two-sided PERC cell backside phosphorosilicate glass corrosion of SE is clean after removing back side phosphorosilicate glass slot, washing, drying
It is unaffected to dissipate face phosphorosilicate glass.
Slot type alkaline etching: preparing and just match liquid, KOH or NaOH in alkaline etching slot: additive: DI water according to 1:4:90 ratio
Example matches liquid, and temperature sets 75 DEG C, making herbs into wool time 220s, and the additive in alkaline etching slot is that isopropanol, sodium metasilicate, a small amount of surface are living
The mixed solution of property agent and water；
HCL:H2O2:DI matches liquid according to the ratio of 1:0.65:16 in first of descaling bath, and temperature sets 60 DEG C, when making herbs into wool
Between 140s；
HF:DI matches liquid according to the ratio of 1:37 in second descaling bath, and temperature sets 28 DEG C, making herbs into wool time 120s.
According to above-mentioned alkaline etching formula with after liquid, the two-sided PERC battery of 50 SE is selected, selects the two-sided PERC electricity of SE
The size in pond is 156.75*156.75, and the two-sided PERC battery weight of SE of 156.75*156.75 size is 11g, by 50 SE
The two-sided PERC battery of SE of the two-sided PERC battery through past PSG is put into alkaline etching, by alkaline etching, pickling, washing and drying
Blanking afterwards, the alkaline etching loss of weight of the two-sided PERC battery of 50 SE and the data of backside reflection rate are as shown in table 1 below:
| SE silicon wafer quantity | 8 | 17 | 15 | 10 |
| Etch loss of weight amount | 0.12 | 0.15 | 0.19 | 0.20 |
| Backside reflection rate | 12.24% | 13.68% | 16.33% | 18.45% |
It can be obtained by upper 1 data of table, by means of the present invention, so that loss of weight amount is very during etching loss of weight for SE battery
Good control meets inorganic alkaline etching and makes the two-sided PERC battery etching loss of weight 0.9%-1.8% of SE, alkali in 0.12-0.20g
Backside reflection rate after throwing is up to 10%-20%, the available good promotion of effect of the two-sided PERC battery of SE.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. a kind of method that inorganic alkaline etching is used for the two-sided PERC battery of solar energy SE, it is characterised in that:
By the two-sided PERC battery of SE pass sequentially through chain type go PSG, slot type alkaline etching, washing and drying blanking after so that SE is bis-
The etching of face PERC battery subtracts Weight control between the 0.9%-1.8% of the two-sided PERC battery original weight amount of SE, the two-sided PERC of SE
The back side of battery forms pyramid structure and reflectivity controls between 10%-20%.
2. the method that a kind of inorganic alkaline etching according to claim 1 is used for the two-sided PERC battery of solar energy SE, feature
Be: chain type removes PSG, and specific step is as follows, goes PSG PERC battery two-sided to SE to carry out back side phosphorosilicate glass by chain type
The two-sided PERC battery of SE is put into removal back side phosphorosilicate glass slot by removal；
Removing in back side phosphorosilicate glass slot is HF:DI water=1:9, belt speed 1.2-2.5m/min with liquid proportion.
3. the method that a kind of inorganic alkaline etching according to claim 1 is used for the two-sided PERC battery of solar energy SE, feature
Be: specific step is as follows for slot type alkaline etching, to going the SE battery after PSG successively to carry out alkaline etching, first via chain type
Pickling and second pickling；
Wherein, matching in alkaline etching slot with liquid is KOH: additive: DI water=1:4:90, etching temperature are set as 70 DEG C -75
DEG C, time 170s-230s；
In first of descaling bath is HCL:H2O2:DI water=1:0.65:16 with liquid proportion, and pickling temperature is set as 50 DEG C -60
DEG C, time 130s-180s；
In second descaling bath is HF:DI water=1:37 with liquid proportion, and pickling temperature is set as 20 DEG C -30 DEG C, and the time is
80s-120s。
4. the method that a kind of inorganic alkaline etching according to claim 3 is used for the two-sided PERC battery of solar energy SE, feature
Be: the additive in alkaline etching slot is the mixed solution of isopropanol, sodium metasilicate, a small amount of surfactant and water.
5. the method that a kind of inorganic alkaline etching according to claim 3 is used for the two-sided PERC battery of solar energy SE, feature
Be: the KOH in alkaline etching slot can be replaced using NaOH.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810878456.6A CN109065667B (en) | 2018-08-03 | 2018-08-03 | Method for etching solar SE double-sided PERC battery by inorganic alkali |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810878456.6A CN109065667B (en) | 2018-08-03 | 2018-08-03 | Method for etching solar SE double-sided PERC battery by inorganic alkali |
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| CN109065667B CN109065667B (en) | 2020-02-14 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109888061A (en) * | 2019-03-22 | 2019-06-14 | 通威太阳能（合肥）有限公司 | Alkali-polished efficient PERC battery and preparation process thereof |
| CN109979862A (en) * | 2019-04-22 | 2019-07-05 | 通威太阳能（成都）有限公司 | A kind of etching groove for promoting two-sided PERC battery appearance yield and reducing acid consumption |
| CN110473938A (en) * | 2019-08-08 | 2019-11-19 | 山西潞安太阳能科技有限责任公司 | A kind of novel alkali throwing selective emitter making technology |
| CN110518088A (en) * | 2019-07-18 | 2019-11-29 | 天津爱旭太阳能科技有限公司 | A kind of preparation method of SE solar battery |
| CN110752271A (en) * | 2019-09-26 | 2020-02-04 | 无锡琨圣科技有限公司 | Processing method of PERC battery |
| CN110922970A (en) * | 2019-11-29 | 2020-03-27 | 南京纳鑫新材料有限公司 | PERC battery back polishing additive and technology |
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| CN107221568A (en) * | 2017-07-10 | 2017-09-29 | 苏州腾晖光伏技术有限公司 | A kind of preparation method of the selection two-sided PERC batteries of emitter stage |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109888061A (en) * | 2019-03-22 | 2019-06-14 | 通威太阳能（合肥）有限公司 | Alkali-polished efficient PERC battery and preparation process thereof |
| CN109888061B (en) * | 2019-03-22 | 2023-09-26 | 通威太阳能（安徽）有限公司 | Alkali polishing efficient PERC battery and preparation process thereof |
| CN109979862A (en) * | 2019-04-22 | 2019-07-05 | 通威太阳能（成都）有限公司 | A kind of etching groove for promoting two-sided PERC battery appearance yield and reducing acid consumption |
| CN110518088A (en) * | 2019-07-18 | 2019-11-29 | 天津爱旭太阳能科技有限公司 | A kind of preparation method of SE solar battery |
| CN110473938A (en) * | 2019-08-08 | 2019-11-19 | 山西潞安太阳能科技有限责任公司 | A kind of novel alkali throwing selective emitter making technology |
| CN110752271A (en) * | 2019-09-26 | 2020-02-04 | 无锡琨圣科技有限公司 | Processing method of PERC battery |
| CN110922970A (en) * | 2019-11-29 | 2020-03-27 | 南京纳鑫新材料有限公司 | PERC battery back polishing additive and technology |
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| CN109065667B (en) | 2020-02-14 |
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