CN109049674A - A kind of increasing material manufacturing device and method for micro-system three-dimensional structure - Google Patents
A kind of increasing material manufacturing device and method for micro-system three-dimensional structure Download PDFInfo
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- CN109049674A CN109049674A CN201811219025.5A CN201811219025A CN109049674A CN 109049674 A CN109049674 A CN 109049674A CN 201811219025 A CN201811219025 A CN 201811219025A CN 109049674 A CN109049674 A CN 109049674A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
- B29C64/112—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material using individual droplets, e.g. from jetting heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/188—Processes of additive manufacturing involving additional operations performed on the added layers, e.g. smoothing, grinding or thickness control
- B29C64/194—Processes of additive manufacturing involving additional operations performed on the added layers, e.g. smoothing, grinding or thickness control during lay-up
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
- B29C64/393—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The present invention relates to a kind of increasing material manufacturing device and methods for micro-system three-dimensional structure, belong to material increasing field.High viscosity droplet squeezes out spray head and is fixed on guide upright post by support frame, X-axis mobile device is fixed on the base, Y-axis mobile device is fixed in X-axis mobile device, deflecting electric field electrode is mounted on guide upright post by Z axis mobile device, dielectric layer is bonded on an array, electrod-array is fixed in Y-axis mobile device, and polarization module is fixed on the base and positioned at the top of dielectric layer.The present invention utilizes Layered Manufacturing Technology, according to the technical characterstic of the liquid material drop solidified forming under condition of pulse electric field, the accurate control amount of increasing material manufacturing is realized using impulse electric field isolation technics, realize the accurate injection of micron order drop, by adjusting voltage parameter to realize high viscosity liquid high frequency jet.
Description
Technical field
The invention belongs to increases material manufacturing technology fields, in particular to the increasing material manufacturing dress of ultrathin functional layer high-precision control amount control shape
It sets and method.
Background technique
In recent years, the research work progress in domestic and international micro-system manufacturing field is rapid, in two-dimentional integrated and micro-nano technology etc.
Aspect achieves lot of research.In structure design level, while the chip-scale two dimension of multiple micro-systems is integrated, certain journey
Functional density is improved on degree, but the increase of micro-system number will lead to increased dramatically for device two-dimensional.It is excellent by space
Change combined two-dimension integrated chip and constitute three-dimensional structure, had not only improved space utilization rate but also several times improve functional density.It is making
It makes in technique level, micro-electronic manufacturing is being produced in batches and occupied with the integrated aspect of control circuit excellent relative to Ultra-precision Turning
Gesture, but its core technology, that is, photoetching is only applicable to two-dimentional chip, cannot achieve the 3 D stereo manufacture of micro-system, this problem by
Gradually obtain the concern of domestic and international scientific worker.Increasing material manufacturing (Additive Manufacturing, AM) technology is to be based on dividing
The advanced manufacturing technology that layer manufacturing theory develops, it is just fast towards the integration of the more material parts with complex structures of multifunction
Speed manufacture development.Currently, mainly having selective laser burning by the increases material manufacturing technology of raw material of metal, ceramic powders or silk material
Knot, laser melting coating, electronics beam shaping etc..And the microstructure of existing forming method part or phase composition are uncontrollable, control shape
Control amount problem is the bottleneck that material increasing material manufacturing is applied in micro sensing system regions, and increasing material manufacturing is shaped in ultrathin functional layer
Scale, which reduces, and accuracy improves aspect still huge room for promotion.
The cumulative manufacture of conventional material is by point-by-point cumulative forming, not by the manufacturability of processing mold and labyrinth space
The restriction of accessibility shows process advantage in terms of the quick response that complicated single-piece or small lot manufacture.In terms of control amount, specially
Sharp application publication number KR20140006121, EP2772347, CN103192079A, US8021593B2 are shaped using different inner diameters
Mouth realizes control amount to regulate and control shaped opening area of section, but this control amount mode needs to apply excessive pressure and is just able to achieve extrusion,
Also heavy viscous material can not be squeezed out.The isolation technics that the Central China University of Science and Technology has studied Pneumatic power diaphragm type metal microlayer model is theoretical and real
Analysis is tested, the preliminary perfect spraying technique of 100 μm of grade metal microlayer models, however 100um reaches the essence of MEMS system not enough
Degree requires.In addition, the patent of publication number CN1635933A discloses a kind of spraying equipment that hyperfine liquid is realized using electric field, but
Manufacture efficiency is too low, cannot achieve high-precision on a large scale and manufactures, it is difficult to meet the needs of complicated MEMS system manufacture.The U.S. she
Sharp noy university champagne branch school proposes to use electrohydraulic dynamic (electrohydrodynamic, EDH), by applying impulse electric field,
The separation of high-precision microfluid is controlled, however drop caused by this method is awing with sprawling on workbench
It is completely uncontrollable.
It can be seen that traditional increases material manufacturing technology has the disadvantage that:
(1) difficulty of submicron order microfluidic separation: currently widely used squash type or separate type (piezoelectric method and heat
Bubble method) it is the small quantity of fluid for being not easy to realize that injection is less than 1pl the problem of problem in terms of the injection of hyperfine liquid.
(2) drop can not be accurately located on workbench: for micron order drop, be accurately positioned to print platform
Position control accuracy requirement is very high, need to use piezoelectric straight line platform, but it forms range and there was only some tens of pm, cost is high and goes
Journey is not suitable for being integrated for micro-system device, and common stepper motor precision is difficult to reach micron order in engineering, therefore
A wide range of, the high accuracy positioning of drop are current problems in the urgent need to address.
(3) wellability of the droplet deposition in forming platform is unable to control: conventional injection and increasing material manufacturing is to final heavy
Product wellability of drop on platform is unable to control, and kinetic energy when flight can only be leaned on to realize sprawling for drop, it is difficult to manufacture ultra-thin
Film.
Summary of the invention
The present invention provides a kind of increasing material manufacturing device and method for micro-system three-dimensional structure, it is therefore an objective to realize high
The high frequency of viscosity functional material micron order drop squeezes out, and realizes micron order drop in the positioning with a wide range of precise of print platform, reality
Existing micron order drop controllably sprawling on print platform, provides skill to get rid of the constraint of external instrument in the manufacture of micro-system
Art means.
The technical solution adopted by the present invention is that: high viscosity droplet squeezes out spray head and is fixed on guide upright post by support frame, X
Shaft moving device is fixed, and Y-axis mobile device is fixed in X-axis mobile device on the base, and deflecting electric field electrode is mobile by Z axis
Device is mounted on guide upright post, and dielectric layer is bonded on an array, and electrod-array is fixed in Y-axis mobile device, polarization
Module is fixed on the base and positioned at the top of dielectric layer.
It includes: nozzle housing end, electro-hydraulic power separation electric field electrode anode, electro-hydraulic power that the high viscosity droplet, which squeezes out spray head,
Separate electric field electrode cathode, electrodeless variable domain heating device, nozzle housing, the micro- mouth of molding and piezoelectric diaphragm；Piezoelectric diaphragm is fixed on
Nozzle housing end, electro-hydraulic power separation electric field electrode anode are fixed on micro- mouthful of inside of molding, and electro-hydraulic power separates electric field electrode cathode
It is fixed on micro- mouthful of outer wall of molding, electrodeless variable domain heating device is fixed on nozzle housing inner wall；
The deflecting electric field electrode includes: deflecting electric field X electrode, deflecting electric field Y electrode and insulation connecting layer, deflecting electric field
X electrode and deflecting electric field Y electrode are that cross section is fan-shaped column fritter, are fixed on the upper and lower side of insulation connecting layer in pairs,
It is circumferential to be evenly distributed with two pieces of deflecting electric field X electrodes, two pieces of deflecting electric field Y electrodes totally four cylindricality fritters on the upside of insulation connecting layer, it should
Two are neither in contact and two deflecting electric field X electrodes composition positioned opposite is a pair of, two deflecting electric field Y electrode phases between four pieces
A pair is constituted to arrangement, corresponding insulation connecting layer downside is disposed with electrode fritter identical with upside；
The electrod-array includes the array formed by dielectric wetting electrode, and dielectric wetting electrode includes dielectric wetting
Electric field cathode, dielectric wetting electric field anode, electric gate insulation filler and power supply, power supply and dielectric wetting electric field cathode, dielectric are moistened
Wet electric field anode connection has electric gate insulation filler to insulate between dielectric wetting electric field cathode and dielectric wetting electric field anode.
A kind of increasing material manufacturing method for micro-system three-dimensional structure, includes the following steps:
(1) in specific processing instance, user can first pass through the 3D solid mould printed needed for 3 d modeling software is established
Type, or three-dimensional digital model is obtained using reverse engineering by way of to entity exemplar 3-D scanning；
(2) threedimensional model of part to be printed is imported into the Slice Software of computer, by slicing delamination come to three-dimensional
Entity carries out dismantling work；
(3) required printing fluid material or the quasi- wire rod etc. used by melting heating method are configured according to actual needs
Material, and the property of liquid functional material is recorded, such as viscosity coefficient η, conductivity k, surface tension constant γ, permittivity ε；
(4) geometric parameter and control parameter of some increasing material manufacturing equipments are determined by prior calculating, such as are deflected
The phase of pulse voltage U and nozzle position height h, deflecting electric field electrode added by size Ux, Uy of electric field electrode plate, nozzle end
To the geometric dimension h of electrode plate spacing n, deflecting electric field electrode plate2With position dimension h1Size, be adjusted and exchange；
(5) increasing material manufacturing equipment is connected to the control port of computer, control is programmed by software window, so that
Increasing material manufacturing equipment can actively adjust the voltage parameters such as required voltage U, Ux, Uy in print procedure；
(6) increasing material manufacturing device is adjusted, so that it is grouped into initial position, and start to print, the material wire or liquid of melting
Increasing material manufacturing material squeeze out spray head end, pool semi-spherical shape first, electro-hydraulic power separate electric field action under, move
Semi-spherical shape droplet surface of the dynamic charge in spray head end is assembled, and the repulsion between charge makes the fluent material of spray head end gradually
Stretching becomes taper, and final electrostatic force is more than Surface Tension of Liquid Drops, and the fluent material of taper isolates spherical liquid in tapered end
Drop, realizes the drippage of material, to realize that drippage of the drop under electric field action, set voltage are greater than achievable injection
Pulse voltage size, as provided in formula (7), the conductance of pulse voltage and surface tension of liquid constant γ, liquid functional material
Rate k, nozzle inside diameter d and permittivity of vacuum ε0Between relational expression:
And as dielectric relaxation relationship it is found that pulse voltage U added by nozzle end, pulse frequency should not be greater than voltage arteries and veins
Injection frequency f is rushed, in order to avoid influencing the normal drippage of drop, formula (12) gives dipole in voltage pulse injection frequency and drop
Polarization intensity σ, fluent material permittivity ε between rough relationship:
For the different structure of workpiece to be added, electrode section will take different voltage swings at nozzle, according to formula (13),
Drop size is larger, and flow is larger, thus forming speed is very fast, and precision is lower；Drop size is smaller, and flow is smaller, forming
Speed is slow, and precision is higher, influences the factor of droplet size V, specifically include that the permittivity ε of fluent material, nozzle inside diameter d,
The polarization intensity σ of dipole in nozzle flow path length L, drop, the viscosity coefficient η of streaming flow, pulse added by nozzle end
Voltage U, the conductivity k of liquid functional material, surface tension of liquid constant γ；
(7) according to every layer of shape of workpiece to be added and the deviation post position in forming platform, X-Y plane mobile platform is first
Coarse positioning is carried out in position to be processed, the accurate position of current platform can be obtained using device for accurately measuring such as laser displacement sensors
It sets, computer is adjusted deflecting electric field according to the deviation of target position and current location, after drips, through overshoot electricity
Accurate deflection is realized at, to reach the pinpoint purpose of small range, after the completion of current location prints, X-Y mobile platform
It continues to move to, step before repeating, is accurately positioned on a large scale to realize, the figure being sliced according to every layer, computer is automatic
It plans the movement routine of shaped platform in this layer of print pattern print procedure, and passes through the deflecting action of cooperation deflecting electric field electrode
The further dripping position of accurate control drop, prints the layer pattern, deflecting electric field electrode according to the form of drips point by point
The pinpoint influence of drop can be obtained by formula (18), wherein the center of the height h, deflecting electric field electrode of nozzle lower end are high
Spend h1, deflecting electric field electrode pole plate size in the vertical direction be h2, apply deflection voltage on deflecting electric field electrode pad
Ux, Uy and opposite polar plate distance n have an impact to offset distance:
(8) for the drop of each drippage, when droplet deposition is after forming platform, computer control is soaked based on dielectric
Droplet sprawls module, makes its one or more dielectrics wetting electric field electrode at drop to different voltages, to control
Droplet sprawls state, obtains the controllable drop state of thickness, and then control the thickness of this layer, shadow of the voltage swing to infiltration angle
It rings by formula (19) it is found that drop infiltrates angle change, and then the shape of change drop, θ in formula under electric field controlsVAfter being powered
Infiltration angle, θ0Static infiltration angle when to be not powered on, ε0For permittivity of vacuum, εrFor dielectric layer relative dielectric constant, UcFor
The opposite voltage applied between microelectrode pole plate, dcFor medium thickness, surface tension constant of the γ between drop-air:
(9) after having printed the layer pattern, computer control nozzle moved upwards along Z axis a slicing layer away from
From；
(10) by repeating step (7) to (9) alternately, the increasing material manufacturing process that successively prints is realized；
(11) after increasing material manufacturing process, the operation of software should be stopped, increasing material manufacturing equipment is closed, remove printout,
It disconnects the connection of increasing material manufacturing equipment and computer and handles non-printing fluid or wire rod well.
The present invention can be fixed in the cavity full of low-pressure inert gas in use by pedestal, to realize to micro-structure
Increasing material manufacturing.
Beneficial effects of the present invention:
The present invention utilizes Layered Manufacturing Technology, according to the technology of the liquid material drop solidified forming under condition of pulse electric field
Feature realizes the accurate control amount of increasing material manufacturing using impulse electric field isolation technics, realizes micron order liquid by adjusting voltage parameter
The accurate injection of drop, to realize high viscosity liquid high frequency jet.
Guarantee that the large scale and high accuracy of drop positions by deflecting electric field and 2 D shifting unit, is accumulating multiple drops
It is able to maintain stable, controllable Duplication during film forming, and then is realized indirectly to form film thickness and two dimension molding
The control of precision.
After drips are on substrate, since its is undersized, can not completely it be sprawled under gravity
To realize being thinned for thickness, therefore its solid-liquid interface infiltration angle is changed using dielectric wetting (EWOD) device, and then further real
Now to the control of thickness, print resolution.
The present invention is able to achieve the extrusion that viscosity is up to the liquid of 1000cps, and 5khz, the film of manufacture can be reached by squeezing out frequency
Thickness can reach sub-micron rank, and the increasing material manufacturing for micro-system component provides possibility.The present invention can pass through in use
Pedestal is fixed in the cavity full of low-pressure inert gas, to realize the increasing material manufacturing to micro-structure.The present invention is to micro sensing
The development in the fields such as the manufacture of device, being integrated of MEMS, microelectric technique, precision processing technology and defence and military
Play facilitation.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the structural schematic diagram that high viscosity droplet of the present invention squeezes out spray head；
Fig. 3 is deflecting electric field structural schematic diagram of the present invention；
Fig. 4 is electrode array configurations schematic diagram of the present invention；
Fig. 5 is dielectric wetting control shape schematic diagram of the present invention.
Specific embodiment
It is fixed on guide upright post 2 as shown in Figure 1, high viscosity droplet squeezes out module 5 by support frame 4, X-axis mobile device
11 are fixed on pedestal 1, and Y-axis mobile device 10 is fixed in X-axis mobile device 11, and deflecting electric field electrode 6 is filled by the way that Z axis is mobile
3 to be set to be mounted on guide upright post 2, dielectric layer 8 is bonded on electrod-array 9, and electrod-array 9 is fixed in Y-axis mobile device 10,
Polarization module 7 is fixed on the top on pedestal 1 and being located at dielectric layer 8.
As shown in Fig. 2, it includes: nozzle housing end 501, electro-hydraulic power separation electric field electricity that the high viscosity droplet, which squeezes out spray head,
Extremely anode 502, electro-hydraulic power separation electric field electrode cathode 503, electrodeless variable domain heating device 504, nozzle housing 505, the micro- mouth of molding
506 and piezoelectric diaphragm 507；Piezoelectric diaphragm 507 is fixed on nozzle housing end 501, and electro-hydraulic power separation electric field electrode anode 502 is solid
It is scheduled on micro- 506 inside of mouth of molding, electro-hydraulic power separation electric field electrode cathode 503 is fixed on micro- 506 outer wall of mouth of molding, and electrodeless variable domain adds
Thermal 504 is fixed on 505 inner wall of nozzle housing；What electrodeless variable domain heating device 504 was heated by treating rapidoprint
Mode can reduce the surface tension of material to be processed, and when work of piezoelectric diaphragm 507, generated pressure with electro-hydraulic power separated electricity
Electric field force collective effect between field plate anode 502 and electro-hydraulic power separation electric field electrode cathode 503, promotes drop to overcome surface
Power, to realize that droplet squeezes out.
As shown in figure 3, deflecting electric field electrode 6 includes: that deflecting electric field X electrode 601, deflecting electric field Y electrode 602 and insulation connect
Layer 603 is connect, deflecting electric field X electrode 601 and deflecting electric field Y electrode 602 are that cross section is fan-shaped column fritter, fixed in pairs
It is circumferential to be evenly distributed with two pieces of deflecting electric field X electrodes 601, two in 603 upside of insulation connecting layer in the upper and lower side of insulation connecting layer 603
The totally four cylindricality fritters of block deflecting electric field Y electrode 602, two are neither in contact and two deflecting electric field X electrodes between this four pieces
601 compositions positioned opposite are a pair of, and two compositions positioned opposite of deflecting electric field Y electrode 602 are a pair of, corresponding insulation connecting layer 603
Downside is disposed with electrode fritter identical with upside；In the actual processing process, after drop is separated with nozzle, through overshoot electricity
The accurate deflection in field is, it can be achieved that small range is accurately positioned.
As shown in figure 4, electrod-array 9 includes the array formed by dielectric wetting electrode, dielectric wetting electrode includes
Dielectric soaks electric field cathode 901, dielectric wetting electric field anode 902, electric gate insulation filler 903 and power supply 904, power supply 904 with
Dielectric soaks electric field cathode 901, dielectric wetting electric field anode 902 connects, and dielectric soaks electric field cathode 901 and dielectric soaks electric field
There is electric gate insulation filler 903 to insulate between anode 902.
As shown in figure 5, for dielectric soak control type schematic diagram, have as shown in the figure dielectric layer 8, dielectric wetting electric field cathode 901,
Dielectric soaks electric field anode 902, electric gate insulation filler 903 and power supply 904, and droplet deposition is after forming platform, control device
One or more electrodes pair in forming platform are controlled, form electric field, the size pair of voltage of electric field in the specific region where drop
The infiltration angle of drop and shaped platform has an impact, and drop infiltration angle changes under electric field controls, and then changes the shape of drop.
Particularly, during shaping ultrathin functional layer, required structural thickness is minimum, then used electrode voltage is larger, to obtain
The minimum single drop of thickness is obtained, to control the maximum gauge of forming ultrathin functional layer.
Working principle is: the movement by controlling X-axis mobile device 11, Y-axis mobile device 10 and Z axis mobile device 3；Electricity
Fluid power separates electric field electrode anode 502, electro-hydraulic power separation electric field cathode 503, electrodeless variable domain heating device 504, deflecting electric field electricity
The adjusting of pole 6, the module 7, electrod-array 9 and the connected voltage swing of piezoelectric diaphragm 12 of polarizing；Control device is to piezoelectric diaphragm 507
Apply pulse signal, piezoelectric diaphragm 507 is pushed away by required pressure when piezoelectricity conversion acquisition work, and then as auxiliary force
Hydrodynamic state functional material；Control device separates electric field electrode anode to the electro-hydraulic power formed inside and outside micro- mouth 506 by pulse signal
502, electro-hydraulic power separation electric field cathode 503 is motivated, so that forming formation impulse electric field at micro- mouth 506, is formed in micro- mouth 506
Liquid functional material will be successively detached from droplets from forming micro- 506 end of mouth with pulse change；Detailed process is: when
Voltage is located at vector voltage VLWhen (VLIt is to maintain the maximum voltage value that drop does not drip), form the liquid function of micro- 506 end of mouth
Energy material forms a cone angle wide at the top and narrow at the bottom, and keeps this shape；As one vector voltage V of appearanceHPulse when (VHGreatly
In VL), the liquid functional material at cone angle tip will be detached under the action of periodical electric field force, be formed drop, be dripped downwards；
In drop dropping process, by deflecting electric field electrode 6, the deflecting electric field at this is adjusted by control device, so that drop obtains
It obtains in X, the falling speed of Y-direction, realizes the accurate positioning of position during drips.If institute's printed material is the function such as piezoelectricity
Energy material can also be adjusted the voltage of polarization module 7 by control device, generate polarized electric field, act at the material printed,
Certain polarization process is carried out to material, realizes specific function, such as piezoelectric property.
Electro-hydraulic separate section preferred parameter is provided, can refer to geometric parameter and control of the relevant parameter to increasing material manufacturing equipment
Parameter processed is adjusted, to realize the effect of better micro-system three-dimensional structure increasing material manufacturing.Relevant parameter includes fluid
Viscosities il is 1 × 10-3Pas, fluid conductivity k are 5.5 × 10-6S/m, surface tension of liquid constant γ are 67.91, in nozzle
Diameter d is 2 μm, and flow path length L is 200 μm in nozzle, and pulse voltage U added by nozzle end is 2000V, voltage pulse injection frequency
Rate f is 8.47 × 107Hz。
A kind of increasing material manufacturing method for micro-system three-dimensional structure, includes the following steps:
(1) in specific processing instance, user can first pass through the 3D solid mould printed needed for 3 d modeling software is established
Type, or three-dimensional digital model is obtained using reverse engineering by way of to entity exemplar 3-D scanning；
(2) threedimensional model of part to be printed is imported into the Slice Software of computer, by slicing delamination come to three-dimensional
Entity carries out dismantling work；
(3) required printing fluid material or the quasi- wire rod etc. used by melting heating method are configured according to actual needs
Material, and the property of liquid functional material is recorded, such as viscosity coefficient η, conductivity k, surface tension constant γ, permittivity ε；
(4) geometric parameter and control parameter of some increasing material manufacturing equipments are determined by prior calculating, such as are deflected
The phase of pulse voltage U and nozzle position height h, deflecting electric field electrode added by size Ux, Uy of electric field electrode plate, nozzle end
To the geometric dimension h of electrode plate spacing n, deflecting electric field electrode plate2With position dimension h1Size, be adjusted and exchange；
(5) increasing material manufacturing equipment is connected to the control port of computer, control is programmed by software window, so that
Increasing material manufacturing equipment can actively adjust the voltage parameters such as required voltage U, Ux, Uy in print procedure；
(6) increasing material manufacturing device is adjusted, so that it is grouped into initial position, and start to print, the material wire or liquid of melting
Increasing material manufacturing material squeeze out spray head end, pool semi-spherical shape first, electro-hydraulic power separate electric field action under, move
Semi-spherical shape droplet surface of the dynamic charge in spray head end is assembled, and the repulsion between charge makes the fluent material of spray head end gradually
Stretching becomes taper, and final electrostatic force is more than Surface Tension of Liquid Drops, and the fluent material of taper isolates spherical liquid in tapered end
Drop, realizes the drippage of material, to realize that drippage of the drop under electric field action, set voltage are greater than achievable injection
Pulse voltage size, as provided in formula (7), the conductance of pulse voltage and surface tension of liquid constant γ, liquid functional material
Rate k, nozzle inside diameter d and permittivity of vacuum ε0Between relational expression:
And as dielectric relaxation relationship it is found that pulse voltage U added by nozzle end, pulse frequency should not be greater than voltage arteries and veins
Injection frequency f is rushed, in order to avoid influencing the normal drippage of drop, formula (12) gives dipole in voltage pulse injection frequency and drop
Polarization intensity σ, fluent material permittivity ε between rough relationship:
For the different structure of workpiece to be added, electrode section will take different voltage swings at nozzle, for example, processing compared with
Thick underlying structure, the accuracy of manufacture is of less demanding, therefore applies higher voltage；Ultrathin functional layer, that is, piezoelectric material layer thickness pole
Thin, the accuracy of manufacture requires height, therefore applies lower voltage, and according to formula (13), drop size is larger, and flow is larger, because forming
Shape fast speed, and precision is lower；Drop size is smaller, and flow is smaller, and forming speed is slow, and precision is higher, influences drop body
The factor of product V specifically includes that the permittivity ε of fluent material, nozzle inside diameter d, nozzle flow path length L, dipole in drop
Polarization intensity σ, the viscosity coefficient η of streaming flow, pulse voltage U, liquid functional material added by nozzle end conductivity k,
Surface tension of liquid constant γ；
(7) according to every layer of shape of workpiece to be added and the deviation post position in forming platform, X-Y plane mobile platform is first
Coarse positioning is carried out in position to be processed, the accurate position of current platform can be obtained using device for accurately measuring such as laser displacement sensors
It sets, computer is adjusted deflecting electric field according to the deviation of target position and current location, after drips, through overshoot electricity
Accurate deflection is realized at, to reach the pinpoint purpose of small range, after the completion of current location prints, X-Y mobile platform
It continues to move to, step before repeating, is accurately positioned on a large scale to realize.The figure being sliced according to every layer, computer are automatic
It plans the movement routine of shaped platform in this layer of print pattern print procedure, and passes through the deflecting action of cooperation deflecting electric field electrode
The further dripping position of accurate control drop, prints the layer pattern, deflecting electric field electrode according to the form of drips point by point
The pinpoint influence of drop can be obtained by formula (18), wherein the center of the height h, deflecting electric field electrode of nozzle lower end are high
Spend h1, deflecting electric field electrode pole plate size in the vertical direction be h2, apply deflection voltage on deflecting electric field electrode pad
Ux, Uy and opposite polar plate distance n have an impact to offset distance:
(8) for the drop of each drippage, when droplet deposition is after forming platform, computer control is soaked based on dielectric
Droplet sprawls module, makes its one or more dielectrics wetting electric field electrode at drop to different voltages, to control
Droplet sprawls state, obtains the controllable drop state of thickness, and then control the thickness of this layer, shadow of the voltage swing to infiltration angle
It rings by formula (19) it is found that drop infiltration angle changes under electric field controls, and then changes the shape of drop, for example, super in forming
During thin functional layer, required structural thickness is minimum, and voltage is then larger between the electrode pair of required setting, to obtain thickness pole
Small single drop, to control the maximum gauge of forming ultrathin functional layer, θ in formulaVFor the infiltration angle after energization, θ0To be not powered on
When static infiltration angle, ε0For permittivity of vacuum, εrFor dielectric layer relative dielectric constant, UcBy applying between microelectrode pole plate
Opposite voltage, dcFor medium thickness, surface tension constant of the γ between drop-air:
(9) after having printed the layer pattern, computer control nozzle moved upwards along Z axis a slicing layer away from
From；
(10) by repeating step (7) to (9) alternately, the increasing material manufacturing process that successively prints is realized；
(11) after increasing material manufacturing process, the operation of software should be stopped, increasing material manufacturing equipment is closed, remove printout,
It disconnects the connection of increasing material manufacturing equipment and computer and handles non-printing fluid or wire rod well.
The present invention can be fixed in the cavity full of low-pressure inert gas in use by pedestal, to realize to micro-structure
Increasing material manufacturing.
The present invention squeezes out the nozzle structure size and voltage parameter of module by optimization high viscosity droplet, realizes submicron order
The separation of drop realizes accurate control amount.It can be by designing the geometric parameter of increasing material manufacturing equipment, control set for adjusting institute
The voltage status of each section is assigned to realize the control to fine droplet.
Correlation theory derives as follows:
Liquid functional material material enters the needle-shaped nozzle (internal diameter refers in particular to end orifice diameter) of micro- mouthful of the molding of internal diameter d,
Being in fluid lower end on infinitely great forming platform is highly the position of h, and L is nozzle flow path length, and ρ is drop end boundaries
Locate radius of curvature, and consider the half size that ρ is d when drop does not ooze, under electric field action, causes charge in nozzle end,
Charge focuses in nozzle end hemispherical portion, and quantity of electric charge Q approximate can be indicated with following formula on the drop of nozzle end:
Q=2 π ε0αUd (1)
Wherein ε0Permittivity of vacuum is represented, α represents a coefficient relevant to nozzle geometric dimension, its value arrives for 1
Between 1.5, when nozzle inside diameter d is much smaller than the length l of nozzle, α is approximately that 1, U represents pulse voltage added by nozzle end；
Electric field intensity value E of the liquid functional material in nozzle endlFor,
Wherein k is the conductivity of liquid functional material；
Due to acting on the pressure balance of nozzle end liquid functional material, the liquid functional material material under electric field action
In nozzle end electrostatic pressure Pe(Pa) it can be indicated by following formula (3),
Wherein S represents the nozzle bore area of nozzle end；
As α=1, from equation (1), (2) and (3) obtain formula (4),
When not applying under current field condition, pressure P is equivalent to by the surface tension of liquid of nozzle ends, formula (5) are obtained,
Wherein γ is the surface tension constant of liquid functional material, and the condition of electrofluid injection is that electrostatic force is greater than surface
Tension, therefore establishment condition such as following formula (6),
Pe>Ps (6)
In summary, when the micro- mouth of the molding for giving certain internal diameter, by calculate and pressure that comparison surface tension obtains and
The relational expression (6) for the pressure that static pressure generates when the internal diameter d for forming micro- mouthful is sufficiently small, is applied to the pulse of nozzle end
Voltage U is sufficiently large, and electrostatic force specific surface tension is big.
Pulse voltage at the spray head of injection can be achieved to be provided by formula (7):
The voltage that drop is separated in the present invention meets the condition determined by formula (7)；
Injection pressure Δ P (Pa) meets following formula (8),
Under internal field's effect, it can be reduced needed for injection can be achieved by using the mode of the nozzle of small internal diameter
Spray head at pulse voltage size；
Nozzle capillary road flow q is derived by Poiseuille equation (Poiseuille's Law) equation, it is assumed that molding
Liquid functional material is cylinder in micro- mouth, flows the flow q of liquid functional material are as follows:
Wherein, η is the viscosity coefficient for flowing liquid functional material, is proportional in the micro- mouth of molding according to above equation flow q
The biquadratic of diameter d can realize reduction flow by reducing micro- mouthful of internal diameter of molding, be brought by the jet pressure Δ P that formula (8) obtain
Formula (9) obtains formula (10)
In order to obtain the drop of separation, need to control the duration of pulse voltage, under electric field action, dipole in drop
It is migrated with electric field, drop is made to show to charge, it is believed that the drop full charge of time is substantially equal to by being determined by dielectric relaxation
Timeconstantτ:
Wherein, σ is the polarization intensity of dipole in drop, and ε is the dielectric constant of fluent material, and f indicates timeconstantτ
Inverse, i.e. voltage pulse injection frequency,
To sum up, when voltage pulse injection frequency is more than f, the generation of drop be cannot respond to, and drop can not fall off；
By formula (11) and formula (12), the volume V that can estimate drop is the integral of flow q and timeconstantτ,
Assuming that the drop of drippage is spherical shape, then the liquid-drop diameter d drippedVAre as follows:
According to formula (14), the size of drop is by nozzle inside diameter d, flow path length L, voltage U and liquid function material in nozzle
Expect that property such as permittivity ε, surface tension constant γ, conductivity k, polarization intensity σ, viscosity coefficient η etc. determines.
The realization principle of wide area high-precision drop positioning are as follows: be made of X-axis mobile device 11 and Y-axis mobile device 10 flat
Face mobile device, Z axis mobile device 3, deflecting electric field electrode 6 constitute wide area pinpoint module；X-axis mobile device 11 is fixed on
On pedestal 1, Y-axis mobile device 10 is fixed in X-axis mobile device 11, and Z axis mobile device 3 and guide upright post 2 form prismatic pair,
Deflecting electric field electrode 6 is fixed on 3 end of Z axis mobile device.The pole plate of the deflecting electric field electrode is annular, is formed altogether by 4,
The drop deflection of controllable axial direction when the opposite polar plate collective effect of every two.Control device can pass through driving stepping electricity
Machine adjusts X-axis mobile device and Y-axis mobile device, realizes the positioning of range in plane, after the completion of positioning, utilizes workbench
On deflecting electric field control drop in X, the deflection of Y-direction, further realize the accurate positioning to drips position.
Nozzle lower end is highly the position of h on infinitely great forming platform, and the center of deflecting electric field electrode is in
It is highly h on infinitely great forming platform1Position, the size of the pole plate of deflecting electric field electrode in the vertical direction be h2, it is assumed that
Only apply deflection voltage Ux in certain secondary control on the deflecting electric field electrode pad of control X-direction, opposite polar plate distance is
N, droplet quality are m, and drop is in dropping process, the vertical direction only effect by gravitation g always, with Constant Acceleration
Degree accelerates, and drops down on shaped platform, and vertical direction speed is vz,
In the horizontal direction, initial fall stage, the non-stress of drop are being passed through at deflecting electric field electrode plate by electric field masterpiece
With and generate horizontal direction speed, and then horizontal velocity can be expressed as v ' when eventually falling on shaped platform
Δ t is time of the drop Jing Guo deflecting electric field electrode pad region,
Composite type (16) and (17), when available drop is fallen on shaped platform, the displacement of X-direction offset is x1
It can be seen that adjusting the geometric dimension h of the comparative electrode plate spacing n of deflecting electric field electrode, deflecting electric field electrode plate2
With position dimension h1Size, application deflection voltage Ux and Uy, can effectively control bits of offset of the drop in forming platform
It sets, accurately to control the drippage of drop.
Electrod-array 9, dielectric layer 8 are constituted the droplet soaked based on dielectric and sprawl module；The electrod-array 9 is electrode
Rectangular array, electrod-array 9 are fixed on 10 top of Y-axis mobile device, and dielectric layer 8 is bonded in 9 surface of electrod-array, control device
By adjusting the voltage of electrod-array, dielectric is formed on the surface of the material and soaks electric field, changes the infiltration angle of drop, to change liquid
The surface tension of drop controls the hydrophobe characteristic of material, as shown in figure 5, the concrete principle of dielectric wetting electric field control shape is:
A) array base plate that more microelectrodes are constituted is constructed in forming platform, is covered with dielectric layer on electrod-array to prevent
Drop electrolysis；
B) each pair of microelectrode is made of positive and negative polarities, connects the positive and negative two-stage in configuring direct current power supply respectively；DC power supply
On-off and size are adjusted by control device, are realized and are formed part at the forming specific region of plate (below one or several drops)
The infiltration angle of electric field, drop can be determined by Young-Lippman formula；
Wherein, θVFor the infiltration angle after energization, θ0Static infiltration angle when to be not powered on, ε0For permittivity of vacuum, εrFor
Dielectric layer relative dielectric constant, UcBy the opposite voltage applied between microelectrode pole plate, dcFor medium thickness, γ is liquid table
Face tension constant；
C) DC power supply Uc size set by can be determined by required drop thickness.
Claims (5)
1. a kind of increasing material manufacturing device for micro-system three-dimensional structure, it is characterised in that: high viscosity droplet squeezes out spray head
It is fixed on guide upright post by support frame, X-axis mobile device is fixed on the base, and Y-axis mobile device is fixed on the mobile dress of X-axis
It sets, deflecting electric field electrode is mounted on guide upright post by Z axis mobile device, and dielectric layer is bonded on an array, electrode
Array is fixed in Y-axis mobile device, and polarization module is fixed on the base and positioned at the top of dielectric layer.
2. a kind of increasing material manufacturing device for micro-system three-dimensional structure according to claim 1, it is characterised in that:
It includes: nozzle housing end, electro-hydraulic power separation electric field electrode anode, electro-hydraulic power separation electric field that the high viscosity droplet, which squeezes out spray head,
Electrode Negative, electrodeless variable domain heating device, nozzle housing, the micro- mouth of molding and piezoelectric diaphragm；Piezoelectric diaphragm is fixed on nozzle housing
End, electro-hydraulic power separation electric field electrode anode are fixed on micro- mouthful of inside of molding, and electro-hydraulic power separation electric field electrode cathode is fixed on into
Micro- mouthful of outer wall of type, electrodeless variable domain heating device are fixed on nozzle housing inner wall.
3. a kind of increasing material manufacturing device for micro-system three-dimensional structure according to claim 1, it is characterised in that:
The deflecting electric field electrode includes: deflecting electric field X electrode, deflecting electric field Y electrode and insulation connecting layer, deflecting electric field X electrode with
Deflecting electric field Y electrode is that cross section is fan-shaped column fritter, is fixed on the upper and lower side of insulation connecting layer in pairs, is insulating
It is circumferential to be evenly distributed with two pieces of deflecting electric field X electrodes, two pieces of deflecting electric field Y electrodes totally four cylindricality fritters on the upside of articulamentum, this four pieces it
Between two be neither in contact and two deflecting electric field X electrodes composition positioned opposite is a pair of, two deflecting electric field Y electrodes are positioned opposite
A pair is constituted, corresponding insulation connecting layer downside is disposed with electrode fritter identical with upside.
4. a kind of increasing material manufacturing device for micro-system three-dimensional structure according to claim 1, it is characterised in that:
The electrod-array includes the array formed by dielectric wetting electrode, and dielectric wetting electrode includes that dielectric wetting electric field is negative
Pole, dielectric wetting electric field anode, electric gate insulation filler and power supply, power supply and dielectric wetting electric field cathode, dielectric soak electric field
Anode connection has electric gate insulation filler to insulate between dielectric wetting electric field cathode and dielectric wetting electric field anode.
5. a kind of increasing material manufacturing method for micro-system three-dimensional structure, which comprises the steps of:
(1) in specific processing instance, user can first pass through the three-dimensional entity model printed needed for 3 d modeling software is established, or
Three-dimensional digital model is obtained using reverse engineering by way of to entity exemplar 3-D scanning；
(2) threedimensional model of part to be printed is imported into the Slice Software of computer, by slicing delamination come to 3D solid
Carry out dismantling work；
(3) materials such as required printing fluid material or the quasi- wire rod used by melting heating method are configured according to actual needs
Material, and the property of liquid functional material is recorded, such as viscosity coefficient η, conductivity k, surface tension constant γ, permittivity ε；
(4) geometric parameter and control parameter of some increasing material manufacturing equipments, such as deflecting electric field are determined by prior calculating
Pulse voltage U added by size Ux, Uy of electrode plate, nozzle end and nozzle position height h, deflecting electric field electrode it is relatively electric
The geometric dimension h of pole plate spacing n, deflecting electric field electrode plate2With position dimension h1Size, be adjusted and exchange；
(5) increasing material manufacturing equipment is connected to the control port of computer, control is programmed by software window, so that printing
Increasing material manufacturing equipment can actively adjust the voltage parameters such as required voltage U, Ux, Uy in the process；
(6) increasing material manufacturing device is adjusted, so that it is grouped into initial position, and start to print, the material wire of melting or liquid
Increasing material manufacturing material pools semi-spherical shape in the end for squeezing out spray head first, in the case where electro-hydraulic power separates electric field action, mobile electricity
Semi-spherical shape droplet surface of the lotus in spray head end is assembled, and the repulsion between charge stretches the fluent material of spray head end gradually
Become taper, final electrostatic force is more than Surface Tension of Liquid Drops, and the fluent material of taper isolates spherical drop in tapered end, real
The drippage of material is showed, to realize that drippage of the drop under electric field action, set voltage are greater than the arteries and veins that injection can be achieved
Rush voltage swing, as provided in formula (7), pulse voltage and surface tension of liquid constant γ, liquid functional material conductivity k,
Nozzle inside diameter d and permittivity of vacuum ε0Between relational expression:
And as dielectric relaxation relationship it is found that pulse voltage U added by nozzle end, pulse frequency should not be greater than voltage pulse spray
Radio frequency rate f, in order to avoid influencing the normal drippage of drop, formula (12) gives the pole of dipole in voltage pulse injection frequency and drop
Change the rough relationship between the permittivity ε of intensity σ, fluent material:
For the different structure of workpiece to be added, electrode section will take different voltage swings at nozzle, according to formula (13), drop
Size is larger, and flow is larger, thus forming speed is very fast, and precision is lower；Drop size is smaller, and flow is smaller, forming speed
Slowly, and precision is higher, influences the factor of droplet size V, specifically includes that permittivity ε, the nozzle inside diameter d, nozzle of fluent material
The polarization intensity σ of dipole in flow path length L, drop, the viscosity coefficient η of streaming flow, pulse voltage added by nozzle end
U, the conductivity k of liquid functional material, surface tension of liquid constant γ；
(7) according to every layer of shape of workpiece to be added and deviation post position in forming platform, X-Y plane mobile platform first to
Working position carries out coarse positioning, and the exact position of current platform can be obtained using device for accurately measuring such as laser displacement sensors,
Computer is adjusted deflecting electric field according to the deviation of target position and current location, after drips, by deflecting electric field
Place realizes accurate deflection, to reach the pinpoint purpose of small range, after the completion of current location prints, X-Y mobile platform after
Continuous movement, step before repeating are accurately positioned on a large scale to realize, the figure being sliced according to every layer, computer is advised automatically
Draw this layer of print pattern print procedure in shaped platform movement routine, and by cooperation deflecting electric field electrode deflecting action into
One step accurately controls the dripping position of drop, prints the layer pattern, deflecting electric field electrode pair point by point according to the form of drips
The pinpoint influence of drop can obtain by formula (18), wherein the centre-height of the height h, deflecting electric field electrode of nozzle lower end
h1, deflecting electric field electrode pole plate size in the vertical direction be h2, apply on deflecting electric field electrode pad deflection voltage Ux,
Uy and opposite polar plate distance n have an impact to offset distance:
(8) for the drop of each drippage, when droplet deposition is after forming platform, computer controls the droplet soaked based on dielectric
Module is sprawled, makes its one or more dielectrics wetting electric field electrode at drop to different voltages, to control droplet
Sprawl state, obtain the controllable drop state of thickness, and then control the thickness of this layer, voltage swing to infiltration angle influence by
Formula (19) is it is found that drop infiltrates angle change, and then the shape of change drop, θ in formula under electric field controlsVFor the leaching after energization
Moisten angle, θ0Static infiltration angle when to be not powered on, ε0For permittivity of vacuum, εrFor dielectric layer relative dielectric constant, UcFor micro- electricity
The opposite voltage applied between the pole plate of pole, dcFor medium thickness, surface tension constant of the γ between drop-air:
(9) after having printed the layer pattern, computer control nozzle moves the distance of a slicing layer along Z axis upwards；
(10) by repeating step (7) to (9) alternately, the increasing material manufacturing process that successively prints is realized；
(11) after increasing material manufacturing process, the operation of software should be stopped, increasing material manufacturing device is closed, remove printout, disconnected
The connection of increasing material manufacturing equipment and computer simultaneously handles non-printing fluid or wire rod well.
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| CN111545265A (en) * | 2020-04-16 | 2020-08-18 | 湘潭大学 | Hydraulic control system with ultrahigh precision and capability of improving reaction conversion rate |
| CN112895426A (en) * | 2021-01-20 | 2021-06-04 | 青岛理工大学 | Micro-nano 3D printing method for single-plate electrode electric field driven jet deposition |
| CN113368914A (en) * | 2021-06-07 | 2021-09-10 | 岭南师范学院 | 3D printing integrated digital microfluidic chip structure and manufacturing method |
| CN114603845A (en) * | 2022-03-07 | 2022-06-10 | 西安交通大学 | Online polarization 3D printing head made of piezoelectric ceramic/polymer composite material |
| CN114888310A (en) * | 2022-05-30 | 2022-08-12 | 重庆大学 | Printing platform based on metal droplet sprays |
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| CN114888310A (en) * | 2022-05-30 | 2022-08-12 | 重庆大学 | Printing platform based on metal droplet sprays |
| CN115179655A (en) * | 2022-06-28 | 2022-10-14 | 华中科技大学 | Multi-ring split coaxial type electric jet printing spray head with adjustable inner diameter and conformal jet printing method |
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