CN112895426B - Micro-nano 3D printing method for single-plate electrode electric field driven jet deposition - Google Patents
Micro-nano 3D printing method for single-plate electrode electric field driven jet deposition Download PDFInfo
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
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Abstract
The invention provides a micro-nano 3D printing method for single-plate electrode electric field driven jet deposition, which belongs to the technical field of 3D printing and micro-nano manufacturing, combines a micro-nano 3D printer for single-plate electrode electric field driven jet deposition and a brand new printing working mode, realizes macro/micro/nano cross-scale manufacturing of micro-nano 3D printing by single-plate electrode electric field driven jet deposition, and solves the problem of low-cost manufacturing of multi-material cross-scale complex three-dimensional structures; the micro-nano 3D printing working method for the single-plate electrode electric field driven jet deposition further has the outstanding advantages of simple process, flexibility in operation, easiness in implementation, low production cost and good universality, particularly has the unique advantage of stable printing of any combination of a nozzle, a base material and a printing material, and greatly expands the application field and range of the technology.
Description
Technical Field
The disclosure relates to the technical field of 3D printing and micro-nano manufacturing, in particular to a micro-nano 3D printing method for single-plate electrode electric field driven jet deposition.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
Micro-nano scale 3D printing is a novel processing technology for preparing a micro-nano structure or a functional product containing a micro-nano characteristic structure based on an additive manufacturing principle. Compared with the existing micro-nano manufacturing technology, the micro-nano 3D printing has the advantages of low production cost, simple process, wide variety of printing materials and suitable substrates, no need of masks or molds, direct forming, and good process flexibility and adaptability, and especially has very outstanding advantages and wide industrial application prospects in the aspects of manufacturing of complex three-dimensional micro-nano structures, large aspect ratio micro-nano structures, composite (multi-material) material micro-nano structures, macro-micro cross-scale structures, non-flat substrates/flexible substrates/curved surfaces and micro-nano patterning of 3D surfaces. Micro-nano 3D printing has been applied to the fields of microelectronics, photoelectronics, flexible electronics, high-definition flexible display, biomedical treatment, tissue engineering, new materials, new energy, aerospace, wearable equipment and the like. Micro-nano scale 3D printing is listed as a novel technology with subversiveness in the year 2014 by technical comments of the American Massachusetts institute of technology.
Through the development of the last decade, more than ten micro-nano-scale 3D printing processes have been proposed at present, which mainly include: the method comprises the following steps of micro-stereolithography, two-photon polymerization 3D laser direct writing, electrohydrodynamic jet printing (electro-jet printing), aerosol jet printing, micro-laser sintering, electrochemical deposition, micro-three-dimensional printing (binder jet), composite micro-nano 3D printing and the like. Compared with other existing micro-nano 3D Printing technologies, the electro-hydrodynamic Jet Printing (electro-Jet Printing) technology which appears and develops rapidly in recent years has outstanding advantages in the aspects of resolution, Printing materials, equipment cost and the like. However, due to the limitation of the working principle of the electro-jet printing technology (the electrode pair consisting of the conductive nozzle and the conductive substrate is accumulated layer by layer along with the printing, the printing height is continuously changed, the electric field force is continuously changed, the stability of the printing process is poor, the printing process exceeds a certain height, the printing cannot be realized, and the like), the electro-jet printing technology is applied to printing materials, nozzles and receiving substrates, the height of a formed part, the printing stability and the like have various defects and limitations, the macro/micro/nano cross-scale structure integrated printing is difficult to realize (the height of a nozzle and a base material is generally limited within 3 mm), and especially the stable printing of a conductive nozzle on a conductive base material by using a conductive material (the phenomena of discharge, breakdown and the like of the conductive nozzle, the conductive material and a conductive substrate under the continuous cone jet injection condition) cannot be realized, so that the application of the conductive nozzle on practical engineering is limited.
In view of the above deficiencies and limitations, the inventors have disclosed 2 patents of invention: 1) an integrated nozzle electric field driven injection micro-nano 3D printing device and a working method thereof (application number 201810726142.4); 2) a high-precision electric field driven jet deposition 3D printing device and a working method thereof (application number 201711408812.X) overcome some defects and limitations of traditional electro-jet printing.
However, as the inventors have found further intensive research, there are some problems that have not been overcome, such as:
(1) the prior art cannot realize high-resolution stable printing of the conductive material on the conductive substrate. When the traditional electro-jet printing and electric field driven jet micro-nano 3D printing is used for printing a high-viscosity conductive material, the phenomena of discharge, even short circuit, breakdown and the like exist in the conditions of continuous conical jet flow jet of a conductive nozzle, the conductive material and a conductive substrate, and the stability and the continuity of high-resolution printing cannot be realized;
(2) the existing electric jet printing and electric field driven jet micro-nano 3D printing are both that a nozzle is directly connected with a high-voltage power supply, and the high voltage can cause biological materials or biological cells to lose biological activity, so that the prior art can not realize high-resolution printing of the biological materials or the biological cells, and is greatly limited in aspects of biological manufacturing, cell 3D printing and the like;
(3) for submicron-scale and nanoscale 3D printing, glass nozzles or silicon-based nozzles are generally adopted, the materials are all non-conductive, the non-conductive nozzles need to be subjected to conductive treatment such as metal spraying and the like during use, and the actual service life of the nozzles after the metal spraying treatment is short, so that the production cost is high and the production period is long; in addition, when the nozzle size is less than 100 nm, it is difficult to conduct the nozzle (the nozzle size is too small, the nozzle size changes, and clogging is likely to occur), and the nozzle subjected to the conductive treatment has a short service life because the conductive layer is very thin.
(4) In the prior art, because the conductive nozzle is directly connected with a high-voltage power supply, the jet flow/droplet material carries charges in the printing process, and the problems of serious electric field crosstalk, coulomb repulsion force and the like exist (particularly, an insulating base material is used, the charges carried by the printed material are difficult to dissipate, the charges are accumulated, the coulomb repulsion force exists between the jet flow/droplet material and the current jet flow/droplet material, and the printing precision and quality are seriously influenced), but the whole is electrically neutral, so that the problems of electric field crosstalk, coulomb repulsion force and the like which cannot be avoided due to the limitation of a printing principle in the conventional electrohydrodynamic jet printing and electric field driving jet micro-nano 3D printing are solved.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a micro-nano 3D printing method adopting electric field driving, jetting and depositing of a single-plate electrode, which combines a micro-nano 3D printer adopting electric field driving, jetting and depositing of a single-plate electrode and a brand-new printing working mode, not only can realize high-resolution stable printing of a conductive material on a conductive substrate, but also can realize high-resolution printing of a biological material or a biological cell, and particularly solves the problems of high manufacturing cost, long period and short service life of a submicron-scale and nanoscale 3D printing nozzle and the difficult problem that a conductive nozzle below 100 nanometers is difficult to manufacture; no jet/droplet material carries charge which can cause electric field crosstalk and coulomb repulsion force to seriously affect the accuracy and quality of printed products; the nozzle has the outstanding advantages of simple structure, low production cost and good universality (being suitable for nozzles made of any materials, printing materials made of any materials and base materials made of any materials), and particularly has the unique advantages of stable printing of any combination of the nozzles (conductive and non-conductive), the base materials (conductive and non-conductive) and the printing materials (conductive and non-conductive), thereby greatly expanding the application field and range of the technology.
In order to achieve the purpose, the following technical scheme is adopted in the disclosure:
the present disclosure proposes three new print modes and print combinations: the device comprises a pulse cone jet flow mode, a micro-extrusion mode and a continuous cone jet flow mode, and specifically comprises the following steps:
(1) the pulse awl efflux mode, single dull and stereotyped electrode adopt pulse high voltage, and under pulse high voltage effect, the printing material of printing nozzle end experiences: the processes of stretching deformation, cone jet flow injection, retraction, rupture and the like are carried out, and finally a single micro liquid (molten) drop is formed;
the method has the advantages that the extremely fine cone jet flow can be used for generating droplets with the size far smaller than the inner diameter of the nozzle, and the precise on-demand jet deposition of the droplets is realized by combining different parameter settings (peak value, frequency, duty ratio, bias and the like) of pulse voltage and the precise control of the movement of the printing nozzle.
(2) In the micro-extrusion mode, a single flat electrode adopts direct-current high voltage, the height of the printing nozzle and the flat electrode is small (lower than that of a pulse cone jet flow mode and a continuous cone jet flow mode), and the liquid (molten) body is driven to be extruded (or extruded and pulled out) from the printing nozzle under the combined action of back pressure and electric field force under the condition that the applied voltage is lower than the threshold voltage for forming the cone jet flow;
the continuous deposition forming is realized by accurately regulating and controlling the continuously deposited microfiber printing material by combining different process parameters (back pressure, voltage and nozzle diameter) and the movement speed of a printing platform (or a printing nozzle).
(3) In the continuous cone jet mode, a single flat electrode adopts direct current or alternating current high voltage, a liquid (molten) body is driven by continuous electric field force to form a stable Taylor cone at the tip of a nozzle, cone jet is continuously jetted, and printing materials are jetted and deposited on a printing substrate or a formed structure in a continuous micro jet mode.
Micro-extrusion mode has the highest printing efficiency, but the lowest printing accuracy; the printing in the continuous conical jet mode has higher printing efficiency and high printing precision; the pulsed cone jet mode has the highest printing accuracy, but the printing efficiency is the lowest.
The three different printing working modes are combined, and the micro-nano 3D printing of the single-plate electrode electric field driven jet deposition has the unique advantage of simultaneously considering both printing precision and printing efficiency. Different working modes are used for different printing material properties (viscosity, surface tension, rheological property and the like) and different printing characteristic structures:
if the viscosity of the material is low, the surface tension is large, and the printing characteristic structure is very fine, the pulse cone jet flow mode is used for printing, so that the precision/resolution (precision priority) of the printed micro-nano characteristic structure is ensured;
if the viscosity of the material is higher or a micro/submicron scale structure is printed, the continuous cone jet mode is preferentially adopted for printing, and efficient printing is realized on the premise of meeting the precision (considering both the precision and the efficiency preferentially);
if the viscosity of the material is high, a micro-extrusion mode is selected when a macro structure/mesostructure of the feature junction is printed, so that the precision condition of the printed feature structure is low, and the efficiency is first.
Based on the printing working mode, the disclosure provides a micro-nano 3D printing method for single-plate electrode electric field driven jet deposition, which comprises the following steps:
step 1: and (5) printing initialization.
Fixing the printing substrate on a flat electrode; moving an XYZ three-axis precision motion platform to a printing initial position; UV curing module enable; heating the printing platform to a set temperature; the high voltage applied to the plate electrode enables.
Step 2: and (4) pretreatment before printing.
Step 2.1: starting an observation positioning module; determining corresponding printing working modes and combinations thereof according to the material performance of the printing parts and the geometric characteristic structures (macro-scale geometric shapes, micro-scale and nano-scale characteristic structures) of the printing parts;
step 2.1.1: if the viscosity of the material of the printed matter is in the range of 20mPa & s to 1000mPa & s, the geometrical characteristic structure of the printed matter comprises the following characteristics: 1) printing microscopic and nanoscopic characteristic structures by adopting a pulse cone jet mode; 2) and printing macroscopic and mesoscopic characteristic structures by adopting a micro-extrusion mode.
Step 2.1.2: if the viscosity of the material of the printed piece ranges from 1000 mPa.s to 60000mPa.s, the geometrical characteristic structure of the printed piece comprises a macroscopic characteristic structure, a mesoscopic characteristic structure, a microscopic characteristic structure and a sub-microscopic characteristic structure: 1) printing micro and sub-micro characteristic structures by adopting a continuous cone jet mode; 2) and printing macroscopic and mesoscopic characteristic structures by adopting a micro-extrusion mode.
Switching between printing modes is performed by automatically converting the type (dc, ac, pulse) and magnitude of the high-voltage power supply output voltage and the print height initially set by the printing program.
Step 2.2: according to the material performance, the characteristic structure and the corresponding printing working mode of a printed matter, corresponding printing process parameters (voltage, back pressure, printing speed, printing height, nozzle size, voltage frequency, duty ratio, printing platform heating temperature, printing nozzle temperature and the like) are set, and the printing process parameters are obtained according to empirical data, theoretical formulas and experimental optimization.
And step 3: and 3D printing.
Step 3.1: selecting whether the photocuring module is started or not according to whether the printed material needs photocuring or not; adjusting the distance between a printing nozzle and a printing substrate to a set height by using a laser range finder and moving the Z axis of an XYZ three-axis precise motion platform; adjusting the printing material at the tail end of the printing nozzle to the required shape by utilizing the precise back pressure control module and the flat plate electrode, adjusting the back pressure and the voltage value and by means of an observation camera of the observation positioning module;
step 3.1.1: the printing material in the printing nozzle is extruded under the action of back pressure and self gravity to reach the tail end of the printing nozzle to form a meniscus, and under the action of a self-excited stable electrostatic field formed between the extruded printing material at the printing nozzle and a flat plate electrode, the printing material (micro liquid drops or micro molten drops) at the meniscus is polarized, and negative charges are gathered on the outer surface;
step 3.1.2: the electric field of the flat plate electrode is changed by adjusting the value of the voltage of the high-voltage power supply, so that the electric field force of the printing material polarized at the tail end of the printing nozzle is changed, and under the combined action of various forces such as the electric field force, the viscous force, the surface tension, the back pressure and the like, the meniscus is gradually stretched and deformed to form a Taylor cone;
step 3.1.3: the shape and size of the taylor cone are adjusted to the set shape and size (optimized) by adjusting the process parameters (voltage, backpressure, printing height, etc.).
Step 3.2: according to a printing path set by a program, driving a printing nozzle (or a printing platform) to spray and deposit a printing material through an X axis and a Y axis of an XYZ three-axis precision motion platform to complete printing of a layer of characteristic structure; after the printing of the characteristic structure on the layer is finished, driving the printing nozzle to move upwards by the Z axis of the XYZ three-axis precise motion platform to the set printing layer thickness height, and continuously executing the printing of the characteristic structure on the next layer; repeating the above operations until the printing of all layers is completed;
step 3.3: after the printing is finished on the last layer, closing the feeding module, and closing the precision back pressure control module and the high-voltage power supply; the Z axis of the XYZ three-axis precision motion platform drives the printing nozzle to move upwards to print the initial position, and the X axis and the Y axis of the XYZ three-axis precision motion platform drive the printing nozzle (or the printing platform) to move to the initial position.
And 4, step 4: and (5) processing after printing.
The heating of closing print platform closes UV solidification module, closes observation orientation module, closes laser range finder, takes off from print platform and prints substrate and printing, according to actual need, carries out aftertreatment such as heating, UV solidification, carries out aftertreatment to printing, further improves its performance.
When the printing material is UV curing material such as photosensitive resin, and the like, the UV curing module needs to be started when the printing material is printed in the step 3; after printing is completed, the UV curing module is turned off in step 4.
When the printing material is a thermoplastic material, the printing nozzle has a heating function, and the printing process parameters further comprise the heating temperature of the printing nozzle.
The printing spray head (or the printing nozzle) further comprises more than 2 printing spray heads (or printing nozzles), for more than 2 printing spray heads, multi-material macro/micro/nano cross-scale 3D printing is achieved by combining different types and sizes of nozzles, and for more than 2 nozzles of a single spray head, macro/micro/nano cross-scale 3D printing of the same material can be achieved.
As some possible implementation manners, if a multi-layer micro-nano structure (especially a submicron-scale and nanoscale complex three-dimensional structure) needs to be printed, after the printing of the first layer is finished, the printing nozzle is raised by one layer thickness height, and by combining the precise positioning function of the vertical observation camera of the observation positioning module, the deposition printing of the next layer of section is continued by taking the printed solid surface (formed structure) as a target printing position, and the steps are repeated until the printing of all layers is finished, so that the three-dimensional micro-nano solid structure is finally formed.
As some possible implementations, the printing operation modes and their combinations include, but are not limited to, the types and combinations of step 3, according to the material properties of the printed parts and the geometric features (macro-scale geometry, micro-scale and nano-scale features) of the printed parts, and any different combinations or single printing operation modes may be included according to actual needs and specific conditions.
As some possible implementations, in step 4, the post-printing treatment includes at least vacuum heating, UV post-curing, and surface treatment of the print.
As some possible implementations, the print nozzle is any one or combination of conductive and non-conductive materials.
As some possible implementations, the printing nozzles are stainless steel nozzles, martial arts nozzles, glass nozzles, or silicon-based nozzles.
As some possible implementations, the inner diameter of the print nozzle ranges in size from 0.1 μm to 300 μm.
As some possible implementations, the printing substrate is any one or a combination of several materials of a conductor, a semiconductor, and an insulator.
As some possible implementations, the print substrate is PET, PEN, PDMS, glass, silicon wafer, or brass plate.
As some possible realization modes, the flat electrode is any one or a combination of several materials of a copper electrode, an aluminum electrode, a steel electrode and a composite conductive material.
As some possible implementations, the thickness of the plate electrode ranges from 0.5mm to 30 mm.
As some possible implementations, the flatness of the plate electrode is greater than or equal to a tolerance level 5 precision.
As possible realization modes, the XYZ three-axis precise motion platform is of a gantry structure and is driven by a linear motor.
As some possible realization modes, the XYZ three-axis precise motion platform adopts a three-axis air-floating motion platform.
As some possible realization modes, the XYZ three-axis precise motion platform adopts a three-axis gantry linear rail motion platform.
As some possible realization modes, the effective travel range of the X axis and the Y axis of the XYZ three-axis precise motion platform is 0 mm-600 mm, the repeated positioning precision is more than or equal to +/-0.4 mu m, the positioning precision is more than or equal to +/-0.6 mu m, the maximum speed is 1000mm/s, the maximum acceleration is more than or equal to 1g, the effective travel range of the Z axis is 0 mm-300 mm, and the positioning precision is more than or equal to +/-0.1 mu m.
As some possible implementation manners, the high-voltage power supply can output direct-current high voltage, alternating-current high voltage or pulse high voltage, can set bias voltage, and the set bias voltage range is 0-2 KV and is continuously adjustable;
the direct current high voltage range is 0 KV-5 KV, the output pulse direct current voltage range is 0 KV- +/-4 KV and is continuously adjustable, the output pulse frequency range is 0 Hz-3000 Hz and is continuously adjustable, and the alternating current high voltage range is 0 KV- +/-4 KV.
As some possible implementations, the feeding speed and the printing speed of the feeding module during the printing process must be accurately matched to ensure continuous and stable feeding.
As some possible realization modes, the heating temperature range of the printing platform is 20-200 ℃.
As some possible realization modes, the heating temperature range of the printing nozzle is 20-400 ℃.
As some possible realization modes, the pressure regulating precision of the precision back pressure control module is greater than or equal to 1 kPa.
Compared with the prior art, the beneficial effect of this disclosure is:
1. the single-plate electrode electric field driven jet deposition micro-nano 3D printing working method provided by the disclosure combines a single-plate electrode electric field driven jet deposition micro-nano 3D printer and a brand new printing working mode (a pulse cone jet flow mode, a micro extrusion mode and a continuous cone jet flow mode), and realizes the macro/micro/nano cross-scale manufacturing of the single-plate electrode electric field driven jet deposition micro-nano 3D printing; the printing working method comprehensively considers the material performance of the printing part and the geometric characteristic structure (macro-scale geometric shape, micro-scale and nano-scale characteristic structure) of the printing part, simultaneously considers the printing efficiency and the printing precision, really realizes the macro/micro/nano cross-scale 3D printing meeting the industrial application requirements, and has the advantages of low production cost, simple process, wide range of suitable printing materials and extremely wide viscosity range (20-60000mPa.s) of the printing materials.
(2) The micro-nano 3D printing working method for single-plate electrode electric field driven jet deposition combines a micro-nano 3D printer for single-plate electrode electric field driven jet deposition, a brand-new printing working mode (pulse cone jet flow mode; micro extrusion mode; continuous cone jet flow mode) and multiple spray heads (or multiple spray nozzles), realizes multi-material macro/micro/nano cross-scale 3D printing for the first time, solves the problem of low-cost manufacture of multi-material macro/micro/nano cross-scale complex three-dimensional structures, and expands the application field and functions of 3D printing.
(3) The micro-nano 3D printing working method for single-plate electrode electric field driven jet deposition combines a micro-nano 3D printing device for single-plate electrode electric field driven jet deposition, a brand new printing working mode (pulse cone jet flow mode; micro extrusion mode; continuous cone jet flow mode) and a single-nozzle multi-single-nozzle array, realizes high-efficiency micro-nano 3D printing, solves the problem that the current micro-nano 3D printing production efficiency is low, and paves the way for low-cost high-efficiency micro-nano 3D printing industry to be widely applied industrially.
(4) According to the micro-nano 3D printing working method adopting the electric field driving of the single-flat-plate electrode to jet and deposit, the types of printing materials for macro/micro/nano cross-scale 3D printing can be almost unlimited (polymers, biological materials, conductive materials, nano materials, composite materials and the like), the viscosity range of the materials is extremely wide (20-60000mPa.s), and the problems that the printing materials are single and the viscosity range is extremely narrow in the current macro/micro 3D printing process can be solved.
(5) The invention provides a micro-nano 3D printing working method for single-plate electrode electric field driven spray deposition, which is a novel micro-spray forming technology based on a self-excited electrostatic field. Therefore, the method is suitable for nozzles made of any materials, substrates made of any materials and types and any printing materials, can realize cross-scale manufacturing of macro/micro/nano structures, and has good process universality. The application field is almost unlimited and very wide.
(6) The micro-nano 3D printing working method driven by the single-flat-plate electrode electric field to spray and deposit breaks through the limitation and constraint of the nozzle, the substrate and the printing material, and realizes high-resolution stable printing of any combination of the nozzle (conductive and non-conductive), the substrate (conductive and non-conductive) and the printing material (conductive and non-conductive).
(7) The micro-nano 3D printing working method of single-plate electrode electric field driven jet deposition realizes high-resolution stable printing of a conductive material on a conductive substrate, and the problem that stable continuous printing cannot be realized due to the phenomena of short circuit, discharge breakdown and the like when the conductive material is printed by traditional electro-spray printing is solved by electrostatic induction instead of directly applying high voltage to a nozzle.
(8) The micro-nano 3D printing working method for the single-plate electrode electric field driven jet deposition realizes macro/micro cross-scale printing of biological materials or biological cells, expands the range of printing materials, and can better ensure the biological activity of the biological materials and the biological cells which are not allowed to be directly applied with higher voltage.
(9) The micro-nano 3D printing device adopting the single-plate electrode electric field to drive the jet deposition has no problems of electric field crosstalk, Coulomb repulsive force and the like, and improves the printing precision and stability. Because the nozzle is not connected with a high-voltage power supply at all, stable cone jet flow spraying is realized by means of polarized charges, and the whole jet flow/microdroplet is electrically neutral although the electric field polarization has charge redistribution, so that the problems of electric field crosstalk, coulomb repulsive force and the like which cannot be avoided due to the limitation of the printing principle in the conventional electrohydrodynamic jet printing and electric field driving jet micro-nano 3D printing are solved.
(10) The micro-nano 3D printing working method of single-plate electrode electric field driven jet deposition has the outstanding advantages of simple process, flexibility in operation, low cost, high printing efficiency, and good stability and universality, and can realize high-efficiency micro-nano 3D printing by combining with the array type spray heads.
(11) The micro-nano 3D printing working method driven by the single-plate electrode electric field for jet deposition can be used in the fields and industries of aerospace, micro-nano electromechanical systems, biomedical treatment, tissue and organ, new materials (lattice materials, metamaterials, functional gradient materials, composite materials and the like), 3D functional structure electronics, wearable equipment, new energy sources (fuel cells, solar energy and the like), high-definition display, micro-fluidic devices, micro-nano optical devices, micro-nano sensors, printed electronics, stretchable electronics, soft robots and the like.
Advantages of additional aspects of the disclosure will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the disclosure.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and are not to limit the disclosure.
Fig. 1 is a schematic diagram of a basic principle and a printing mode of micro-nano 3D printing driven by a single-plate electrode electric field provided by an embodiment of the disclosure.
Fig. 2 is a process flow diagram of a micro-nano 3D printing working method driven by a single-plate electrode electric field according to an embodiment of the disclosure.
Detailed Description
The present disclosure is further described with reference to the following drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The embodiments and features of the embodiments in the present disclosure may be combined with each other without conflict.
Fig. 1 shows the basic principle of driving a micro-nano 3D printer by a single flat plate electrode electric field:
the flat electrode is connected with the positive electrode (or the negative electrode) of the high-voltage pulse power supply, a grounded counter electrode is not needed, especially, the printing nozzle and the substrate are not used as electrodes (pairs), and the restriction and the limitation of the traditional electric jet printing and the existing electric field driven jet deposition micro-nano 3D printing on the conductivity of the nozzle and the substrate are broken through.
Even if the insulated nozzle and the insulated base material are adopted, stable printing can be realized, the electric field required by self-excitation (induction) spraying is utilized under the action of electrostatic induction, the positive electrode of the high-voltage pulse power supply is connected with the flat electrode, so that the flat electrode has high potential, positive charges can be uniformly distributed on the flat electrode at the moment according to the contact electrification principle, and the direction of the formed electric field points to infinity from the flat electrode.
Due to the action of electrostatic induction, an object in an electric field is polarized, electric charges on the lower surface and the inner portion of a printing substrate are migrated under the action of the electric field generated by a flat plate electrode, the electric charges are redistributed to form electric moments, positive charges are distributed on the upper surface, negative charges are distributed on the lower surface, a printing material extruded from a nozzle and in a meniscus shape is also polarized under the action of the electric field, and the negative charges are distributed on the outer surface of a meniscus.
Under the action of electric field force, the liquid (molten) body at the nozzle is stretched to form a Taylor cone, stable cone jet flow spraying occurs along with the increase of applied voltage, the printing material is sprayed and deposited on the substrate, when negative high voltage is applied to the flat electrode, electric charges opposite to the positive high voltage are distributed in the liquid (molten) drop of the nozzle, and the formed electric field still drives the printing material to be sprayed and deposited on the substrate or the formed structure.
Example 1:
as shown in fig. 2, embodiment 1 of the present disclosure provides a working method for manufacturing a transparent electrode by a single-flat-plate electrode electric field driving single-nozzle jet deposition micro-nano 3D printer.
Wherein: the printing material is selected from nano conductive silver paste (viscosity 35000mPa & s, silver content 80%, surface tension 32 dynes/cm); the printing nozzle is a 30G stainless steel conductive nozzle with the inner diameter of 0.16 mm; the printing substrate is common transparent glass with the thickness of 100mm multiplied by 2 mm; the flat plate electrode is a copper plate of 150mm × 150mm × 3 mm.
The specific printing process and printing parameters are as follows:
step 1: and (5) printing initialization.
Fixing the printing substrate on a flat electrode; each motion module enables, and the XYZ three-axis precision motion platform moves to the printing initial position.
Step 2: and (4) pretreatment before printing.
Firstly, the viscosity of the material for manufacturing the transparent electrode is more than 1000mPa & s, and the microstructure is printed, so the mode is selected to be a continuous cone jet mode;
secondly, starting the observation camera, and setting the high-voltage power supply to be in an amplifier mode according to the selected mode; the signal generator is set to have the frequency of 800Hz, the peak value of 7V, the bias voltage of 0V and the duty ratio of 50 percent; the precision back pressure control valve is set to be 0.15 Mpa; the printing height was set to 0.15 mm; the combined speed during printing was set to 20mm/s and the acceleration was set to 100mm/s2。
And step 3: and 3D printing.
Firstly, the nano conductive silver paste is printed without photocuring, so that a photocuring module is not started; driving the printing nozzle to move to a position 0.15mm away from the printing substrate through a Z-axis precise displacement table; starting a high-voltage power supply, a signal generator and a precise back pressure control valve, ejecting materials in a printing nozzle from a nozzle opening under the action of back pressure and the like to form a half-moon-shaped meniscus, wherein the meniscus is positioned in an electric field formed between a flat electrode and the printing nozzle, the material meniscus at the nozzle opening forms a Taylor cone by the strong electric field force, and the Taylor cone tip materials are ejected to form a very fine jet flow along with the gradual increase of the electric field force and are deposited on a printing substrate;
then, according to the set printing program, finishing the printing of the characteristic structure;
finally, after the printing program is run, closing the feeding module, and closing the precision back pressure control valve, the high-voltage power supply and the signal generator; and the X axis and the Y axis of the XYZ three-axis precision motion platform drive the printing nozzle to move to the printing initial position.
And 4, step 4: and (5) processing after printing.
And (4) closing the observation positioning module, and taking down the printing substrate from the flat electrode for sintering treatment (sintering at 130 ℃ for 40 min).
Example 2:
the embodiment 2 of the disclosure provides a typical working method for manufacturing a flexible hybrid circuit in a macro-micro cross-scale mode by utilizing a single-plate electrode electric field driving jet deposition micro-nano 3D printing technology.
Wherein: the printing materials are sequentially selected from nano conductive silver paste (viscosity is 35000mPa & s) and PDMS (viscosity is 3500mPa & s); the printing nozzle is a glass insulation nozzle (the inner diameter is 50 mu m) or a 27G stainless steel conductive nozzle (the inner diameter is 200 mu m); a250 mm × 250mm × 3mm copper plate is selected as the plate electrode.
The specific printing process and printing parameters are as follows:
step 1: and (5) printing initialization.
Fixing the printing substrate on a flat electrode; each motion module enables, and XYZ triaxial precision motion platform moves to the printing initial position, and printing platform starts the heating, and the temperature sets up to 50 ℃.
Step 2: and (4) pretreatment before printing.
Firstly, the viscosity of a nano conductive silver paste material for manufacturing a flexible mixed circuit is more than 1000mPa & s, and a microstructure is printed, so that the mode is selected to be a continuous cone jet mode; the viscosity of PDMS for the circuit substrate and the encapsulation layer is greater than 1000mPa · s and the macroscopic structure is printed, so the mode is chosen to be micro-extrusion mode.
Secondly, starting an observation camera, setting a high-voltage power supply to be a branch mode when a micro-extrusion mode is used for printing a circuit base and a packaging layer, setting the voltage to be 700V, setting a precise back pressure control valve connected with a PDMS charging barrel to be 10kPa, and setting the printing height of a printing PDMS nozzle to be 0.1 mm; when the circuit printing is carried out in the continuous quasi-jet mode, a high-voltage power supply is set to be in a direct-current mode, the voltage is 900V, a precision back pressure control valve connected with a nano conductive silver paste charging barrel is set to be 0.15MPa, and the printing height of a nozzle for printing the nano conductive silver paste is set to be 0.15 mm; the combined speed during printing was set to 20mm/s and the acceleration was set to 100mm/s2。
And step 3: and 3D printing.
Firstly, the nano conductive silver paste and PDMS do not need to be photocured when being printed, so that a photocuring module is not started; the nanometer conductive silver paste printing nozzle is driven to move to a position 0.15mm away from the printing substrate through the Z-axis precise displacement table, and the PDMS printing nozzle is 0.1mm away from the printing substrate; starting a high-voltage power supply and a precise back pressure control valve, ejecting materials in a printing nozzle from a nozzle opening under the action of back pressure and the like to form a half-moon-shaped meniscus, wherein the meniscus is positioned in an electric field formed between a flat electrode and the printing nozzle, the material meniscus at the nozzle opening forms a Taylor cone under the action of strong electric field force, and the Taylor cone tip materials are ejected to form extremely fine jet flow along with the gradual increase of the electric field force and are deposited on a printing substrate;
then, opening the precision back pressure control valve connected with the PDMS, and closing the precision back pressure control valve after finishing printing the flexible hybrid circuit substrate according to a set printing program; opening a precision back pressure control valve connected with the nano conductive silver paste, and closing the precision back pressure control valve after printing of a connecting circuit is completed according to a set program; the precise back pressure control valve connected with the PDMS is opened again, and the precise back pressure control valve is closed after the printing of the flexible hybrid circuit packaging layer is completed according to the set printing program;
finally, when the multilayer hybrid circuit is printed, the Z-axis precision displacement platform rises to a certain height at the initial printing position and then resets the zero point again, and the printing step is repeated; after the printing program is operated, closing all the feeding modules and closing all the precise back pressure control valves and the high-voltage power supply; and the X axis and the Y axis of the XYZ three-axis precision motion platform drive the printing nozzle to move to the printing initial position.
And 4, step 4: and (5) processing after printing.
And (4) closing the observation positioning module, and taking down the flexible mixed circuit from the flat electrode for sintering treatment (sintering at 110 ℃ for 50 min).
Example 3:
in order to realize efficient and large-area manufacturing of transparent electrodes, embodiment 3 of the present disclosure provides a working method of a single-material multi-nozzle jet deposition micro-nano 3D printing device driven by a single-plate electrode electric field.
Wherein: the printing material is selected from nano conductive silver paste (viscosity 35000mPa & s, silver content 80%, surface tension 32 dynes/cm); the printing nozzle is a 30G stainless steel conductive nozzle (the inner diameter is 0.16mm), and 4 printing nozzles are arranged in a diamond shape; the printing substrate is common transparent glass with the thickness of 300mm multiplied by 2 mm; a350 mm × 350mm × 3mm copper plate is selected as the flat plate electrode.
The specific printing process and printing parameters are as follows:
step 1: and (5) printing initialization.
The printing substrate is fixed on the flat plate electrode, each motion module enables, and the XYZ three-axis precise motion platform moves to the printing initial position.
Step 2: and (4) pretreatment before printing.
Firstly, the viscosity of the material for manufacturing the transparent electrode is more than 1000mPa & s, and the microstructure is printed, so the mode is selected to be a continuous cone jet mode;
secondly, starting the observation camera, and setting the high-voltage power supply to be in an amplifier mode according to the selected mode; the signal generator is set to have the frequency of 800Hz, the peak value of 7V, the bias voltage of 0V and the duty ratio of 50 percent; the precision back pressure control valve is set to be 0.15 Mpa; the printing height was set to 0.15 mm; the combined speed during printing was set to 20mm/s and the acceleration was set to 100mm/s2。
And step 3: and 3D printing.
Firstly, the nano conductive silver paste is printed without photocuring, so that a photocuring module is not started; driving the printing nozzle to move to a position 0.15mm away from the printing substrate through a Z-axis precise displacement table; starting a high-voltage power supply, a signal generator and a precise back pressure control valve, ejecting materials in a printing nozzle from a nozzle opening under the action of back pressure and the like to form a half-moon-shaped meniscus, wherein the meniscus is positioned in an electric field formed between a flat electrode and the printing nozzle, the material meniscus at the nozzle opening forms a Taylor cone by the strong electric field force, and the Taylor cone tip materials are ejected to form a very fine jet flow along with the gradual increase of the electric field force and are deposited on a printing substrate;
then, according to the set printing program, finishing the printing of the characteristic structure;
finally, after the printing program is run, closing the feeding module, and closing the precision back pressure control valve, the high-voltage power supply and the signal generator; and the X axis and the Y axis of the XYZ three-axis precision motion platform drive the printing nozzle to move to the printing initial position.
And 4, step 4: and (5) processing after printing.
And (4) closing the observation positioning module, and taking down the printing substrate from the flat electrode for sintering treatment (sintering at 130 ℃ for 40 min).
Preferably, the printing device applicable to the single-flat-plate electrode electric field driving micro-nano 3D printing working method according to each embodiment of the disclosure may include a printing nozzle, a printing substrate, a flat-plate electrode, a printing platform, a high-voltage power supply, a feeding module, a precision back pressure control module, an XYZ three-axis precision motion platform, a positive pressure gas path system, an observation positioning module, a UV curing module, a laser range finder, a base, a connecting frame, a first adjustable support, a second adjustable support, and a third adjustable support;
the base is arranged at the lowest part; the printing platform is fixed on the base; the flat plate electrode is arranged on the printing platform; one end of the high-voltage power supply is connected with the flat plate electrode, and the other end of the high-voltage power supply is grounded; the printing substrate is arranged on the flat electrode; the printing nozzle is connected with a discharge port at the lowest end of the printing spray head and is arranged right above the flat plate electrode, and the printing nozzle is vertical to the flat plate electrode; the feeding module is connected with the lower half part of the printing spray head; the precise back pressure control module is connected with the top of the printing nozzle; the positive pressure gas path system is connected with the precision back pressure control module; the printing nozzle is connected with an XYZ three-axis precision motion platform through a connecting frame; the observation positioning module is arranged on the first adjustable bracket, and the first adjustable bracket is fixed on the connecting frame; the laser range finder is arranged on a second adjustable support, and the second adjustable support is fixed on the connecting frame; the UV curing module is arranged on a third adjustable support, and the third adjustable support is fixed on the connecting frame.
Preferably, the number of print heads: 1.2, 3, …, N; number of printing nozzles: 1.2, 3, …, N; the number of the material modules is as follows: 1.2, 3, …, N; the number of the precise backpressure control modules is as follows: 1.2, 3, …, N.
According to the difference of actual requirements and required functions, the following two schemes are selected according to the number and the combined configuration of the printing spray heads, the printing nozzles, the feeding modules and the precise back pressure control modules.
The first scheme is as follows: print shower nozzle module, print nozzle module, feed module, accurate backpressure control module all one-to-one, and print shower nozzle, print nozzle, feed module, accurate backpressure control module's quantity is no less than 2.
The second scheme is as follows: the number of the printing nozzles is one, at least more than 2 discharge ports are formed in the bottom of each printing nozzle, and the discharge ports are respectively connected with the printing nozzles; the number of the printing nozzles is not less than 2; the number of the feeding modules is 1; the number of the precise back pressure control modules is 1.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
Claims (27)
1. A micro-nano 3D printing method for single-plate electrode electric field driven jet deposition is characterized in that: the method comprises the following steps:
step 1: printing initialization;
fixing a printing substrate on a flat plate electrode, moving an XYZ three-axis precision motion platform to a printing initial position, enabling a UV curing module, heating the printing platform to a set temperature, and enabling high voltage applied to the flat plate electrode;
step 2: pre-treatment of printing;
step 2.1: starting an observation positioning module, and determining a corresponding printing working mode and a corresponding printing working mode combination according to the material performance of the printing part and the geometric characteristic structure of the printing part;
when the viscosity of the material of the printed matter ranges from 20mPa.s to 1000 mPa.s, the geometrical characteristic structure of the printed matter comprises macroscopic, mesoscopic, microscopic and nanoscopic characteristic structures: printing microscopic and mesoscopic characteristic structures in a pulse cone jet mode, and printing macroscopic and mesoscopic characteristic structures in a micro-extrusion mode;
when the viscosity of the material of the print is in the range of 1000mPa · s to 60000mPa · s, the geometrical features of the print comprise macroscopic, mesoscopic, microscopic and sub-microscopic features: printing micro and sub-micro characteristic structures in a continuous cone jet mode, and printing macro and meso characteristic structures in a micro extrusion mode;
2.2, setting corresponding printing process parameters according to the material performance of the printed matter, the contained characteristic structure and the corresponding printing working mode;
and step 3: 3D printing;
step 3.1: selecting whether a photocuring module is started or not according to whether the printed material needs photocuring, and adjusting the distance between a printing nozzle and a printing substrate to a set height by using a laser range finder and moving a Z axis of an XYZ three-axis precise motion platform; adjusting the printing material at the tail end of the printing nozzle to the required shape by utilizing the precise back pressure control module and the flat plate electrode, adjusting the back pressure and the voltage value and by means of an observation camera of the observation positioning module;
step 3.2: according to a printing path set by a program, driving a printing nozzle or a printing platform to spray and deposit a printing material through an X axis and a Y axis of an XYZ three-axis precision motion platform to complete printing of a layer of characteristic structure, driving the printing nozzle to move upwards by a set printing layer thickness height through a Z axis of the XYZ three-axis precision motion platform after printing of the layer of characteristic structure is completed, and continuously executing printing of the next layer of characteristic structure; repeating the above operations until the printing of all layers is completed;
step 3.3: after the last layer of printing is finished, closing the feeding module, and closing the precision backpressure control module and the high-voltage power supply, wherein the Z axis of the XYZ three-axis precision motion platform drives the printing nozzle to move upwards to a printing initial position, and the X axis and the Y axis of the XYZ three-axis precision motion platform drive the printing nozzle or the printing platform moves to the printing initial position;
and 4, step 4: processing after printing;
and closing the heating of the printing platform, closing the UV curing module, closing the observation positioning module, closing the laser range finder, taking down the printing substrate and the printed piece from the printing platform, and performing post-treatment on the printed piece.
2. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 2, the type and the size of the output voltage of the high-voltage power supply and the printing height which is initially set are automatically changed through a printing program to switch between the printing modes.
3. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 2.1, according to the material performance of the printed part and the geometric characteristic structure of the printed part, the printing working mode is one of a pulse cone jet flow mode, a micro-extrusion mode and a continuous cone jet flow mode or the combination of any two or three of the two or three.
4. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 2.2, the printing process parameters comprise voltage, back pressure, printing speed, printing height, nozzle size, voltage frequency and duty ratio, printing platform heating temperature and printing nozzle temperature, and all the printing process parameters are obtained according to empirical data, theoretical formulas and experimental optimization.
5. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 3.1, adjusting the printing material at the end of the printing nozzle to a required shape, comprising the steps of:
step 3.1.1: the printing material in the printing nozzle is extruded under the action of back pressure and self gravity to reach the tail end of the printing nozzle to form a meniscus, and under the action of a self-excited stable electrostatic field formed between the extruded printing material at the printing nozzle and a flat plate electrode, the printing material at the meniscus is polarized, and negative charges are gathered on the outer surface of the printing nozzle;
step 3.1.2: the electric field of the flat plate electrode is changed by adjusting the value of the voltage of the high-voltage power supply, so that the electric field force of the printing material polarized at the tail end of the printing nozzle is changed, and under the combined action of the electric field force, the viscous force, the surface tension and the back pressure, the meniscus is gradually stretched and deformed to form a Taylor cone;
step 3.1.3: and adjusting the appearance and the size of the Taylor cone into the set optimized appearance and size by adjusting the process parameters.
6. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
and when the printing material is the UV curing material, starting the UV curing module, and after printing is finished, closing the UV curing module in step 4.
7. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 3, when the printing material is a thermoplastic material, the printing nozzle has a heating function, and the printing process parameters further include the heating temperature of the printing nozzle.
8. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
comprises at least 2 printing nozzles or at least two printing nozzles;
when at least two printing spray heads and at least two printing nozzles exist, multi-material macro, micro and nano cross-scale 3D printing is realized by combining printing nozzles of different types and sizes;
when there are two at least nozzles and only one printing shower nozzle, print the shower nozzle bottom and set up two at least discharge gates, every discharge gate is connected with a printing nozzle, realizes the macro, little and receive of same kind of material and strides yardstick 3D and prints.
9. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
when the multi-layer micro-nano structure is printed, after the printing of the first layer is finished, the printing nozzle is raised by one layer thickness height, the precise positioning function of the vertical observation camera of the observation positioning module is combined, the printed solid surface is taken as a target printing position, the deposition printing of the next layer section is continued, the steps are circulated in the way until the printing of all layers is finished, and finally the three-dimensional micro-nano solid structure is formed.
10. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
in step 4, the post-printing treatment at least comprises vacuum heating, UV post-curing and surface treatment of the printed piece.
11. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the printing nozzle is made of any one or a combination of conductive and non-conductive materials.
12. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the printing nozzle is a stainless steel nozzle, a gunning nozzle, a glass nozzle or a silicon nozzle.
13. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the inner diameter of the printing nozzle ranges from 0.1 mu m to 300 mu m.
14. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the printing substrate is any one or a combination of several materials of a conductor, a semiconductor and an insulator.
15. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the printing substrate is PET, PEN, PDMS, glass, silicon chip or copperplate.
16. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the flat electrode is any one or a combination of several materials of a copper electrode, an aluminum electrode, a steel electrode and a composite conductive material.
17. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the thickness range of the flat plate electrode is 0.5 mm-30 mm.
18. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the flatness of the plate electrode is greater than or equal to a tolerance level 5 precision.
19. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the XYZ three-axis precision motion platform is of a gantry structure and is driven by a linear motor.
20. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the XYZ three-axis precise motion platform adopts a three-axis air-floating motion platform.
21. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the XYZ three-axis precise motion platform adopts a three-axis gantry linear rail motion platform.
22. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the effective travel range of the X axis and the Y axis of the XYZ three-axis precise motion platform is 0 mm-600 mm, the repeated positioning precision is more than or equal to +/-0.4 mu m, the positioning precision is more than or equal to +/-0.6 mu m, the maximum speed is 1000mm/s, the maximum acceleration is more than or equal to 1g, the effective travel range of the Z axis is 0 mm-300 mm, and the positioning precision is more than or equal to +/-0.1 mu m.
23. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the high-voltage power supply can output direct-current high voltage, alternating-current high voltage or pulse high voltage, can set bias voltage, and the set bias voltage range is 0 KV-2 KV and is continuously adjustable;
the direct current high voltage range is 0 KV-5 KV, the output pulse direct current voltage range is 0 KV- +/-4 KV and is continuously adjustable, the output pulse frequency range is 0 Hz-3000 Hz and is continuously adjustable, and the alternating current high voltage range is 0 KV- +/-4 KV.
24. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the feeding speed and the printing speed of the feeding module are accurately matched in the printing process.
25. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the heating temperature range of the printing platform is 20-200 ℃.
26. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the heating temperature range of the printing nozzle is 20-400 ℃.
27. The single-plate electrode electric field driven jet deposition micro-nano 3D printing method according to claim 1, characterized in that:
the pressure regulating precision of the precise back pressure control module is greater than or equal to 100 kPa.
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| Fabrication of a Large-Area, Fused Polymer Micromold Based on Electric-Field-Driven (EFD) μ-3D Printing;Zilong Peng. et.;《POLYMERS》;20191118;第11卷(第11期);全文 * |
| 电场驱动喷射沉积微纳3D打印技术及应用;兰红波;《航空制造技术》;北京航空制造工程研究所;20190531;第62卷(第1期);第38-45页 * |
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