CN109228304B - Three-dimensional printing device for electric field induced auxiliary electrospray - Google Patents

Three-dimensional printing device for electric field induced auxiliary electrospray Download PDF

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CN109228304B
CN109228304B CN201811135245.XA CN201811135245A CN109228304B CN 109228304 B CN109228304 B CN 109228304B CN 201811135245 A CN201811135245 A CN 201811135245A CN 109228304 B CN109228304 B CN 109228304B
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electric field
micro
nano
electrode
printing
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CN109228304A (en
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王大志
李凯
贾皓然
任同群
梁军生
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Dalian University of Technology
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Dalian University of Technology
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B29C64/106—Processes of additive manufacturing using only liquids or viscous materials, e.g. depositing a continuous bead of viscous material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20—Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor

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  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The invention belongs to the technical field of advanced manufacturing, and relates to a device for manufacturing a three-dimensional structure by electric field induction auxiliary electrospray printing. The electric injection printing module sends the functional material solution into the spray needle, cuts the functional material solution into micro/nano stable jet flow which is far smaller than the size of the spray needle by utilizing the electric field force applied to the spray needle, and prints out a micro/nano structure; the electric field induced forming module utilizes the space electric field force generated by the induced electrode to regulate and control the structure, and obtains a complex micro/nano three-dimensional structure through electric field induction, stress deformation, cooling solidification and three-dimensional forming. The three-dimensional printing device disclosed by the invention is used for manufacturing a complex micro/nano three-dimensional structure, has the advantages of free forming of a space three-dimensional structure, high printing resolution, high forming speed and the like, the line width of the complex micro/nano three-dimensional structure obtained by utilizing the device is dozens of nanometers, and the complex micro/nano three-dimensional structure manufactured by printing is widely applied to the fields of electronics, information, energy and the like.

Description

Three-dimensional printing device for electric field induced auxiliary electrospray
Technical Field
The invention belongs to the technical field of advanced manufacturing, and relates to a three-dimensional printing device for electric field induced auxiliary electrospray.
Background
With the improvement of device performance and integration level, the functional structure of the device gradually develops from a two-dimensional structure to a three-dimensional structure. For example, three-dimensional microelectromechanical systems based on cantilever beam structures provide greater bandwidth and tunable frequency than two-dimensional systems; compared with a macroscopic photoelectric device, the micro photoelectric device has small volume, light weight and low power consumption. Therefore, the micro/nano three-dimensional structure plays an important role in miniaturization, integration and energy conservation of high-performance devices. In addition, the micro/nano three-dimensional structure has been applied to high-performance devices such as wearable electronic devices, high-sensitivity sensors, high-resolution displays, large-capacity capacitors, and the like as a sensing unit of the high-performance device.
At present, the processing method of the micro/nano three-dimensional structure mainly comprises focused ion beams, micro-stereolithography and electrochemical deposition. In addition, the high energy ion beam may damage the surface of the structure, thereby affecting the quality of the surface of the structure. The micro-stereolithography technique has low cost and high efficiency, but has limited processable materials (mostly liquid photosensitive resin, ceramics, etc.), low resolution of the manufacturing structure and the supporting structure is needed in the processing process. Electrochemical deposition can produce metal structures with complex high aspect ratio in batches, but the manufactured structures are micron-sized, the bonding strength between layers is low, and dislocation is easy to exist between layers. Three-dimensional printing technologies developed in recent years, such as ink-jet printing, three-dimensional direct writing and the like, have the characteristics of short processing period, low cost and the like, and provide an effective way for manufacturing micro/nano three-dimensional structures. At present, the three-dimensional printing technology mainly adopts layer-by-layer direct writing and layer-by-layer accumulative addition of a three-dimensional structure, and a complex three-dimensional structure is difficult to manufacture. In addition, the resolution of the current three-dimensional printing technology mainly depends on the size of the jet orifice, is limited by jet orifice processing, and is difficult to realize the processing of submicron and below structures.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the three-dimensional printing device for electric field induction auxiliary electrospray. The micro/nano structure is manufactured by an electrospray printing technology, and meanwhile, an electric field force is applied to the printed micro/nano structure to induce and form the three-dimensional micro/nano structure, so that the space free manufacture of the micro/nano scale structure is realized, and the micro/nano three-dimensional structure with a complex shape is manufactured.
The technical scheme of the invention is as follows:
an electric field induction auxiliary electrospray three-dimensional printing device comprises an electrospray printing module and an electric field induction forming module; the electric injection printing module sends the functional material solution into the spray needle at a constant flow rate, cuts the functional material solution into micro/nano-scale stable jet flow with the size far smaller than that of the spray needle by utilizing the electric field force applied to the spray needle, and prints a micro/nano structure; the electric field induction forming module regulates and controls the structure by utilizing the space electric field force generated by the induction electrode, and obtains a complex micro/nano three-dimensional structure through electric field induction, stress deformation, cooling solidification and three-dimensional forming;
the electrospray printing module comprises a precision injection pump 1, a precision injector 2, a functional material solution 3, a conduit 4, a spray needle clamp 5, a spray needle 6, a camera 7, an upper computer 8, a motion controller 9, a motion platform 10, a printing substrate 11, a substrate 12, a micro/nano structure 13, a high-voltage power controller 16 and a jet flow 17; the precision injector 2 is fixed on the precision injection pump 1, and the functional material solution 3 in the precision injector 2 is conveyed to the nozzle of the spray needle 6 under the thrust of the precision injection pump 1 through the conduit 4; the spray needle clamp 5 is fixed on the Z axis and used for clamping a spray needle 6; the camera 7 displays the jet behavior in the printing process in real time in the monitoring software of the upper computer 8, and adjusts the printing parameters in time according to the fed-back jet behavior to ensure the printing stability; the motion controller 9 receives motion control commands in the upper computer 8, including the motion path, speed and the like of the printing structure; the motion platform 10 comprises XYZ motion axes, and realizes XYZ motion in three directions, wherein an X axis is fixed above a Y axis, the two axes are matched to realize motion in an XY plane, and a Z axis is positioned above the XY axes to realize motion in a vertical direction; the substrate 12 is placed on the printing substrate 11, the printing substrate 11 and the substrate 12 are relatively static, and the micro/nano structure 13 is printed on the substrate 12 in cooperation with the movement in the Z-axis direction; the printing substrate 11 is grounded; the high-voltage power controller 16 provides high voltage for the spray needle 6, potential difference exists between the spray needle 6 and the printing substrate 11 to form electric field force, the functional material solution 3 is dragged to a micro/nano stable jet flow 17 which is far smaller than the size of a spray hole at the spray opening of the spray needle 6 under the action of the electric field force, and the micro/nano stable jet flow is continuously printed on the substrate 12 to form a micro/nano structure 13; the vertical height of the spray needle 6 can be adjusted through the movement of the Z axis.
The electric field induction forming module comprises an induction electrode and an electrode power supply 18; the induction electrode is arranged on the substrate 12 or around the substrate 12 and is controlled by the upper computer 8; the electrode power supply 18 provides high voltage electricity to the induction electrode, the induction electrode after voltage application generates a space partition electric field, and the micro/nano structure 13 is induced into a complex micro/nano three-dimensional structure under the action of the electric field force of the induction electrode.
Further, the electric field induction forming module comprises an induction electrode clamp 14, a static induction electrode 15, an electrode power supply 18 and a dynamic induction electrode 20; the static induction electrode 15 is fixed on the induction electrode clamp 14, the dynamic induction electrode 20 is suspended above the substrate 12 and is controlled by the upper computer 8 in the printing process; the electrode power supply 18 provides high voltage electricity for the static induction electrode 15 and the dynamic induction electrode 20, the static induction electrode 15 and the dynamic induction electrode 20 after voltage application generate a space zoning electric field, and the micro/nano structure 13 is induced into a complex micro/nano three-dimensional structure under the synergistic effect of the electric field force of the static induction electrode 15 and the electric field force of the dynamic induction electrode 20.
Further, the voltages of the static induction electrode 15 and the dynamic induction electrode 20 can be adjusted individually, and each induction electrode can generate different electric field strengths to generate different electric field strengths.
Further, the dynamic induction electrode 20 can move freely in space.
Further, the electric field induced complex micro/nano three-dimensional structure is influenced by the induced electrode structure, the electrode area, the electrode voltage, the gap between the electrode and the micro/nano structure 13, and the spatial position of the electrode and the micro/nano structure 13.
The device is adopted to carry out electric field induction auxiliary electrospray printing to manufacture a three-dimensional structure, and comprises the following steps:
1) electrospray printing micro/nanostructures: the precision syringe 2 containing the functional material solution 3 is arranged on the precision syringe pump 1, the functional material solution 3 is sent into the spray needle 6 at a certain flow rate through the conduit 4 by utilizing the pushing pressure of the precision syringe pump 1, and the precision syringe pump 1 can adjust the flow rate of the functional material solution 3 in the printing process; the spray needle clamp 5 is arranged on a Z axis, the spray needle 6 is fixed on the spray needle clamp 5, and the vertical distance between the spray needle 6 and the substrate 12 can be adjusted through the up-and-down movement of the Z axis; the high voltage power controller 16 applies high voltage to the nozzle 6, at this time, an electric field force exists between the nozzle 6 and the printing substrate 11, the functional material solution 3 forms a micro/nano-scale jet flow far smaller than the size of the nozzle at the nozzle hole of the nozzle 6 under the combined action of the electric field force, the mechanical force, the surface tension of the liquid and the like, and forms a micro/nano-structure 13 on the substrate.
2) Electric field induced three-dimensional structure: the static induction electrode 15 is fixed in the induction electrode clamp 14, the electrode power supply 18 applies voltage to the static induction electrode 15 and the dynamic induction electrode 20 to form a space induction electric field, and the micro/nano structure 13 in the electric field is subjected to the action of the electric field force and forms a three-dimensional complex structure through electric field induction, stress deformation, cooling solidification and three-dimensional forming. The static induction electrode 15, the dynamic induction electrode 20 and the micro/nano structure 13 have a certain position relation in space, the printed micro/nano structure 13 is placed in an induction electric field formed by the static induction electrode 15 and the dynamic induction electrode 20, the micro/nano structure 13 can be subjected to electric field forces in different directions in space, and at the moment, the micro/nano structure 13 is induced into a complex micro/nano three-dimensional structure such as a spiral micro/nano structure 19 and an umbrella-shaped micro/nano array structure 21 through the synergistic effect of the static induction electrode 15 and the dynamic induction electrode 20. The parameters such as the structure of the induced electrode, the area of the electrode, the voltage of the electrode, the gap between the electrode and the micro/nano structure 13, the space position between the electrode and the micro/nano structure 13 and the like are related to the preset complex micro/nano three-dimensional structure. The magnitude of the electric field force is related to the structure of the induced electrode, the area of the electrode, the voltage of the electrode, the gap between the electrode and the micro/nano structure 13, the spatial position between the electrode and the micro/nano structure 13, and the like. The voltage values of the static induction electrode 15 and the dynamic induction electrode 20 can be independently adjusted; the dynamic induction electrode 20 can realize free motion in space.
The invention has the beneficial effects that: the complex micro/nano three-dimensional structure obtained by the device has the linewidth of dozens of nanometers, and can be widely applied to the fields of electronics, information, energy and the like.
Drawings
Fig. 1 is a schematic diagram of a three-dimensional printing device with electric field induced assisted electrospray.
Fig. 2 is a schematic diagram of the spatial position relationship and the stress of the micro/nano structure and the inducing electrode.
FIG. 3(a) is a schematic diagram of the process of spiral micro/nano structure induction forming;
FIG. 3(b) is a schematic diagram of the position relationship between the dynamic induction electrode and the micro/nano array structure;
FIG. 3(c) is a schematic diagram of the umbrella-shaped micro/nano array structure induction forming process.
In the figure: 1 precision injection pump; 2, a precision injector; 3 functional material solution; 4, a conduit; 5, a spray needle clamp; 6, spraying a needle; 7, a camera; 8, an upper computer; 9 a motion controller; 10 a motion platform; 11 printing the substrate; 12 a substrate; 13 micro/nano-structures; 14 inducing the electrode holder; 15 a static induction electrode; 16 a high voltage power supply controller; 17, jetting; an 18-electrode power supply; 19 helical micro/nano-structures; 20 a dynamic induction electrode; an umbrella-shaped micro/nano-array structure 21.
Detailed Description
The following detailed description of the embodiments of the invention refers to the accompanying drawings. The three-dimensional printing device for electric field induced auxiliary electrospray mainly comprises an electrospray printing module and an electric field induced molding module.
The range of the precision injector 2 is 25-1000 mu L, the precision injector 2 is placed on the precision injection pump 1, the precision injector 2 sucks the silver sol functional material solution 3, and the precision injector 2 uses 0.01-5 mu Lmin through the conduit 4 under the thrust of the precision injection pump 1-1The functional material solution 3 is conveyed to the nozzle of the spray needle 6 at the flow speed of the functional material solution; the spray needle clamp 5 is fixed on a Z axis and used for clamping a spray needle 6, the spray needle 6 is made of stainless steel or quartz, and the inner diameter of the spray needle is 5-500 mu m; the camera 7 displays the jet behavior in the printing process in real time in the monitoring software of the upper computer 8, and adjusts the printing parameters in time according to the fed-back jet behavior to ensure the printing stability; the upper computer 8 sends a motion command to the motion controller 9 by using the written motion control software, wherein the motion command comprises a three-axis motion path, a motion speed and the like of the printing micro/nano structure 13; the motion platform 10 comprises XYZThe motion axis realizes the motion in three directions of XYZ with the motion speed range of 0.001-100mm s-1The range of the adding (subtracting) speed is 0.5-100mm s-2The positioning precision is better than 2 μm, the X axis is fixed above the Y-axis, the two axes are matched to realize the motion in the XY plane, and the Z axis is positioned above the XY axis to realize the motion in the vertical direction; the substrate 12 is placed on the grounded printing substrate 11, the printing substrate 11 and the substrate 12 are relatively static, and the micro/nano structure 13 with the diameter of 50nm-10 mu m and the height of 200nm-3mm can be printed on the substrate 12 by matching with the movement in the Z-axis direction; the high-voltage power controller 16 provides 400-5000V voltage for the spray needle 6, an electric field is formed between the spray needle 6 and the grounded substrate 12, under the action of the electric field force, the silver sol functional material solution 3 is dragged into a micro/nano stable jet flow 17 with the size of 100nm-50 mu m, and is accumulated continuously, and a micro/nano structure 13 is finally formed; the vertical printing height of the spray needle 6 can be adjusted through a Z axis, the maximum adjusting range is 200mm, and the adjusting and positioning precision is smaller than 2 mu m.
The static induction electrode 15 is fixed on the induction electrode clamp 14, and the electrode power supply 18 provides high voltage to the static induction electrode 15 and the dynamic induction electrode 20, wherein the voltage is 200-8000V; the induced electrode after applying voltage generates a space partition electric field, the micro/nano structure 13 is in the electric field and is induced into a complex micro/nano three-dimensional structure under the synergistic action of the static induced electrode 15 and the dynamic induced electrode 20, if the printed micro/nano structure 13 is placed between the two static induced electrodes 15, and the micro/nano structure 13 is induced into a spiral micro/nano structure 19 under the electric field force of different spatial directions by combining the synergistic action of the dynamic induced electrode 20; the array micro/nano structure 13 is placed at one side of the dynamic induction electrode 20, and the micro/nano structure 13 is acted by an electric field force in the same direction in the space under the cooperation of the static induction electrode 15, so that the micro/nano structure is induced into an umbrella-shaped micro/nano array structure 21; the voltage of the static induction electrode 15 and the dynamic induction electrode 20 can be adjusted independently, and each induction electrode can generate different electric field intensity so as to generate electric field force with different sizes; the electric field induced complex micro/nano three-dimensional structure is influenced by the induced electrode structure, the electrode area, the electrode voltage, the gap between the electrode and the micro/nano structure 13, the space position between the electrode and the micro/nano structure 13 and the like; the dynamic induction electrode 20 is free to move in space.
In order to achieve the purpose, the invention adopts the technical scheme that:
the device is adopted to carry out electric field induction auxiliary electrospray printing to manufacture a three-dimensional structure, and comprises the following steps:
1) electrospray printing micro/nanostructures: a precision injector 2 containing a functional material solution 3 (silver sol) is arranged on a precision injection pump 1, the range of the precision injector 2 is 25-1000 mu L, and the silver sol functional material solution 3 is pressed for 0.01-5 mu L min by the pushing pressure of the precision injection pump 1 through a conduit 4-1The flow rate of the silver sol is sent into a spray needle 6, and the precise injection pump 1 can adjust the flow of the silver sol functional material solution 3 at any time in the printing process; the inner diameter of the spray needle 6 is 0.5-500 mu m, the spray needle is fixed on a spray needle clamp 5 of a Z axis, the vertical distance between a spray hole of the spray needle 6 and the substrate 12 is adjusted through the movement of the Z axis, the maximum adjustment range is 200mm, and the adjustment positioning precision is less than 2 mu m; the high-voltage power supply applies 400-5000V voltage between the spray needle 6 and the printing platform substrate 10 and generates electric field force, and the functional material solution 3 forms micro/nano-scale stable liquid drops far smaller than the size of the spray hole at the spray hole of the spray needle 6 under the combined action of the electric field force, the mechanical force, the surface tension of the liquid and the like to form a micro/nano structure 13 with the resolution ratio of 50nm-10 mu m.
2) Electric field induced three-dimensional structure: the static induction electrode 15 is fixed on the induction electrode clamp 14, the electrode power supply 18 applies voltage to the static induction electrode 15 and the dynamic induction electrode 20, the voltage is 200-8000V, the dynamic induction electrode 20 can realize free movement in space, a layer of air gap exists between the static induction electrode 15, the dynamic induction electrode 20 and the micro/nano structure 13, the gap size is 200nm-500 μm, the electrode applied with voltage forms an electric field in the layer of air gap, the micro/nano structure 13 in the electric field is subjected to the action of the electric field force, and a complex micro/nano three-dimensional structure is formed through electric field induction, stress deformation, cooling solidification and three-dimensional forming, for example, the printed micro/nano structure 13 is placed between the two static induction electrodes 15 and then is combined with the synergistic effect of the dynamic induction electrode 20The micro/nano structure 13 is subjected to electric field forces in different directions in space and is further induced into a spiral micro/nano structure 19; the array micro/nano structure 13 is placed at one side of the dynamic induction electrode 20, and the micro/nano structure 13 is acted by an electric field force in the same direction in the space under the cooperation of the static induction electrode 15, so that the micro/nano structure is induced into an umbrella-shaped micro/nano array structure 21; the static induction electrode 15, the dynamic induction electrode 20 and the micro/nano structure 13 have a certain position relation in space, the printed micro/nano structure 13 is placed in a space electric field formed by the two induction electrodes, and the micro/nano structure 13 is subjected to the synergistic effect of the static induction electrode 15 and the dynamic induction electrode 20, so that the micro/nano structure 13 is induced into a complex micro/nano three-dimensional structure; parameters such as the structure of the induction electrode, the area of the electrode, the voltage of the electrode, the gap between the electrode and the micro/nano structure 13, the space position between the electrode and the micro/nano structure 13 and the like are related to a preset complex micro/nano three-dimensional structure; the induced electrode structure (spiral, space zigzag, etc.) and the electrode area (25-10000 μm)2) Key parameters such as electrode voltage (200-8000V), gap (20-500 μm) between the electrode and the micro/nano structure 13, space position between the electrode and the micro/nano structure 13 and the like are related to the preset complex micro/nano three-dimensional structure; the magnitude of the electric field force is related to the structure of the induced electrode, the area of the electrode, the voltage of the electrode, the gap between the electrode and the complex micro/nano three-dimensional structure, the space position between the electrode and the micro/nano structure 13 and the like; the voltage value of the induction electrode can be independently adjusted; the inducing electrode material is a conductor, such as a metal material, conductive glass and the like; the electrode clamp is an insulator, such as polymer, ceramic, alumina and the like; the induction forming process lasts for 2-30min under the condition that the voltage of the induction electrode is kept unchanged and the position of the induction electrode is fixed, so that the micro/nano structure 13 is solidified and formed under the action of an electric field force, and finally, a complex micro/nano three-dimensional structure and a complex micro/nano three-dimensional array structure are obtained.

Claims (5)

1. The three-dimensional printing device is characterized by comprising an electrospray printing module and an electric field induction forming module; the electrospray printing module sends the functional material solution into the spray needle at a constant flow rate, cuts the functional material solution into a micro/nano stable jet flow with the size far smaller than that of the spray needle by utilizing the electric field force applied to the spray needle, and prints a micro/nano structure (13); the electric field induction forming module regulates and controls the structure by utilizing the space electric field force generated by the induction electrode, and obtains a complex micro/nano three-dimensional structure through electric field induction, stress deformation, cooling solidification and three-dimensional forming;
the electrospray printing module comprises a precision injection pump (1), a precision injector (2), a functional material solution (3), a conduit (4), a spray needle clamp (5), a spray needle (6), a camera (7), an upper computer (8), a motion controller (9), a motion platform (10), a printing substrate (11), a substrate (12), a micro/nano structure (13), a high-voltage power controller (16) and a jet flow (17); the precise injector (2) is fixed on the precise injection pump (1), and the functional material solution (3) in the precise injector (2) is conveyed to the nozzle of the spray needle (6) under the thrust of the precise injection pump (1) through the conduit (4); the spray needle clamp (5) is fixed on the Z axis and used for clamping a spray needle (6); the camera (7) displays the jet behavior in the printing process in real time in monitoring software of the upper computer (8), and printing parameters are adjusted in time according to the fed-back jet behavior to ensure the printing stability; the motion controller (9) receives motion control commands in the upper computer (8), including the motion path and speed of the printing structure; the motion platform (10) comprises XYZ motion axes, so that XYZ motion in three directions is realized, an X axis is fixed above a Y axis, the two axes are matched to realize XY plane motion, and a Z axis is positioned above the XY axes to realize vertical motion; the substrate (12) is placed on the printing substrate (11), the printing substrate (11) and the substrate (12) are relatively static, and the micro/nano structure (13) is printed on the substrate (12) in cooperation with the movement in the Z-axis direction; the printing substrate (11) is grounded; the high-voltage power controller (16) provides high voltage for the spray needle (6), potential difference exists between the spray needle (6) and the printing substrate (11) to form electric field force, the functional material solution (3) is dragged into a micro/nano stable jet flow (17) which is far smaller than the size of a spray hole at the spray opening of the spray needle (6) under the action of the electric field force, and the micro/nano stable jet flow is continuously printed on the substrate (12) to form a micro/nano structure (13); the vertical height of the spray needle (6) can be adjusted through the movement of a Z axis;
the electric field induction forming module comprises an induction electrode and an electrode power supply (18); the induction electrodes are arranged on the substrate (12) or around the substrate (12) and controlled by an upper computer (8); the electrode power supply (18) provides high-voltage electricity for the induction electrode, the induction electrode after voltage is applied generates a space partition electric field, and the micro/nano structure (13) is induced into a complex micro/nano three-dimensional structure under the action of the electric field force of the induction electrode;
the induction electrode comprises a static induction electrode (15) and a dynamic induction electrode (20), the static induction electrode (15) is fixed on an induction electrode clamp (14), and the induction electrode clamp (14) is fixed on the substrate (12); the dynamic induction electrode (20) is suspended around the substrate (12) and is controlled to move by the upper computer (8) in the printing process.
2. The three-dimensional printing apparatus for electric field induced assisted electrospray according to claim 1, wherein the voltages of the static induction electrode (15) and the dynamic induction electrode (20) are adjusted individually or synchronously, and when synchronously adjusted, each induction electrode generates different electric field strength to generate different electric field force.
3. The three-dimensional printing device for electric field induced assisted electrospray according to claim 1 or 2, characterized in that the formation of the electric field induced complex micro/nano-three-dimensional structure is influenced by the combination of factors of induced electrode structure, electrode area, electrode voltage, electrode-to-micro/nano-structure (13) gap, and electrode-to-micro/nano-structure (13) spatial position.
4. Three-dimensional printing device for electric field induced assisted electrospray according to claim 1 or 2, characterized in that the static induction electrode (15) and the dynamic induction electrode (20) have an electrode area of 25-10000 μm2The electrode voltage is 200-8000V, and the gap between the inducing electrode and the micro/nano structure (13) is 20-500 μm.
5. The three-dimensional printing apparatus for electric field induced assisted electrospray according to claim 1 or 2, wherein the complex micro/nano three-dimensional structure features have a diameter of 50nm-10 μm, a height of 200nm-3mm and an aspect ratio of 4000.
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