CN106738896A - A kind of micro/nano-scale 3D printer and method - Google Patents
A kind of micro/nano-scale 3D printer and method Download PDFInfo
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- CN106738896A CN106738896A CN201611197073.XA CN201611197073A CN106738896A CN 106738896 A CN106738896 A CN 106738896A CN 201611197073 A CN201611197073 A CN 201611197073A CN 106738896 A CN106738896 A CN 106738896A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
Abstract
The invention discloses a kind of micro/nano-scale 3D printer and method, equipment includes jet head sets, printing bed, controller and three-dimensional motion mechanism, wherein, the jet head sets include multiple shower nozzles, each shower nozzle applies high-voltage pulse power source between conductive nozzle and electrically-conductive backing plate, fluid is pulled out the cone jet to form taylor cone and stabilization using the forceful electric power field force formed between nozzle and substrate from jet hole, the controller control three-dimensional motion mechanism action, it is set to drive jet head sets that relative motion occurs with printing bed, the action of each shower nozzle is controlled simultaneously, setting position to base material on printing bed carries out micro-droplet spray printing, printer model material successively, separated type material and backing material.The present invention is based on electrohydrodynamic jet printing (also known as EFI print), solve micro-nano 3D printing it is grand/micro- across yardstick manufacture, printable material category be few and the problem such as support removal difficulty, especially solves current micro/nano-scale 3D printing technique in cost, material, resolution ratio, grand/micro- across yardstick manufacture, the not enough and limitation of the aspect such as going to support.
Description
Technical field
The invention belongs to increasing material manufacturing and technical field of micro-nano manufacture, and in particular to a kind of micro/nano-scale 3D printer and side
Method.
Background technology
Minute mechanical and electrical system, biologic medical, organizational project, new material (Meta Materials, lightweighting materials, composite, photon
Crystal, FGM etc.), new energy (solar cell, micro fuel cell etc.), high definition show, it is micro-fluidic device, micro-
Receive optics, micro-nano sensor, micro-nano electronics, biochip, wearable electronic, embedded electronic, photoelectron and flexible electrical
The various fields such as son have huge industry demand for complex three-dimensional micro nano structure.However, existing various minute manufacturings
No matter technology is difficult to meet efficient, inexpensive mass manufacture from technological layer or in terms of productivity ratio, cost, material etc.
The demand of the industrial applications of complex three-dimensional micro-nano structure, such as from technological layer, existing such as optical lithography, electron beam light
The minute manufacturing such as quarter, interference lithography, laser assisted microprocessing, soft lithographic, nano-imprint lithography technology mainly realizes 2D or 2.5D
Micro-nano structure (simple geometry figure) is manufactured, it is difficult to realize the manufacture of complicated ture three-D micro-nano structure；Additionally, it is existing this slightly
Manufacture method of receiving is also faced with that equipment and mask (or mould) are expensive, is more expensive to manufacture, the cycle is long, can be asked with material category is few etc.
Topic.Micro/nano-scale 3D printing provides a kind of brand-new solution for above problem, and has shown that huge work
Industry application prospect.
Micro/nano-scale 3D printing (also known as micro-nano increasing material manufacturing) be it is a kind of based on increase material principle manufacture micro-nano structure or
The novel micro nanometer process technology of functional product (having micro-nano feature), compared with existing minute manufacturing technology, it has cost
Low, simple structure, can it is many with material category, without mask or mould, the advantage of direct forming, especially in complex three-dimensional micro-nano
Structure, high-aspect-ratio micro-nano structure, compound (many materials) material micro-nano structure, grand/micron composite structure and embedded with heterogeneous structure
Manufacture view has very prominent potential and advantage.Micro/nano-scale 3D printing has been used for Aero-Space, tissue work at present
Journey, biologic medical, minute mechanical and electrical system, new material (Meta Materials, lightweighting materials, intellectual material, composite), new energy
Various fields and the industry such as (fuel cell, solar energy etc.), flexible electronic, printed electronic, micronano optical device, micro-fluidic device
But, existing various micro/nano-scale 3D printing techniques face some shortcomings and certain limitation.For example it is micro- vertical
Body photoetching printed material is single, and resolution ratio is relatively low, particularly with must backing material structure be difficult to printing；Two-photon gathers
Although closing, laser direct-writing resolution ratio is very high, printed material and formation of parts it is size-constrained, it is impossible to realize grand/micro- across yardstick
Manufacture, and cost is very high.Especially existing micro-nano 3D printing is also faced with the difficult problem of support removal.Therefore, urgently
Need exploitation novel micro nanometer yardstick 3D technology, technique, material and equipment.
The content of the invention
The present invention is in order to solve the above problems, it is proposed that a kind of micro/nano-scale 3D printer and method, and the present invention is based on electricity
Fluid dynamic jet printing (also known as EFI print), prints several functions material (conductive material, insulating materials, high viscosity material
Material, metal material etc.), and combine using separated type material and water-soluble support materials, realize inexpensive, efficient, high-resolution
It is grand/micro-/to receive across the printing of scale complex true three-dimensional structure, solve low, the printable material category of micro-nano 3D printing resolution ratio it is few and
The support removal problem such as difficulty, especially solves current micro/nano-scale 3D printing technique in cost, material, resolution ratio, grand/micro-
Across yardstick manufacture, the deficiency and limitation of going the aspects such as support.
Micro/nano-scale 3D printer is printed based on EFI it is an object of the present invention to provide one kind, can realize can be used for many
Plant the efficient, inexpensive of material micro-nano structure, large area manufacture.EFI print uses electric field driven (safe from liquid cone in " drawing " mode
Strangle cone) the superfine jet of top generation.Its general principle：Conductive nozzle (first electrode) and electrically-conductive backing plate (second electrode) it
Between apply high-voltage pulse power source, using between nozzle and substrate formed forceful electric power field force fluid is pulled out to form Thailand from jet hole
The cone jet of cone and stabilization is strangled, because nozzle has potential higher, the fluid at nozzle can be made by electroluminescent shearing stress
With after local charge force exceedes surface tension of liquid, charged fluid sprays from nozzle, forms superfine jet (due to being
From the jet that tip is launched, jet diameter is much smaller than nozzle diameter, therefore it is far smaller than jet size to form microlayer model size,
The 1-2 order of magnitude generally smaller than jet size), fine liquid drop spray is deposited on printing bed, and is consolidated by heat/light etc.
Change.
The present invention can realize printable material ranges extensively, no based on the EFI print micro/nano-scale 3D printer for providing
Influenceed by factors such as viscosity of material, dielectric properties.Realize from inorganic material to organic material, from insulating materials to conduction material
Material, multiple material three-dimensional structure is high resolution printed from solution to suspension etc., has broken existing minute yardstick 3D printing technique
The limited bottleneck of printed material species.Additionally, the viscosity of printed material is almost unrestricted.
The present invention can realize across the yardstick manufacture of three-dimensional structure based on the EFI print micro/nano-scale 3D printer for providing,
Technological parameter (voltage, nozzle and base material distance, injection frequency, moving speed of table etc.) is adjusted merely by, just can be same
Grand yardstick, minute yardstick or even the high resolution printed across yardstick of yardstick that receive of complex three-dimensional structure are realized under printing head.
Another object of the present invention prints micro/nano-scale 3D printing method to provide a kind of EFI, in micro-structural or electronics
Support is easily removed during production.Using the method for the printing separated type material between supporting construction and model structure,
And using water-soluble support materials (such as PVA), effectively simply stripping off for supporting construction is realized, enormously simplify and post-processed
Journey, the product surface quality better of acquisition is more suitable for manufacturing the micro- part or micro-structural that must use supporting construction.
To achieve these goals, the present invention is adopted the following technical scheme that：
A kind of micro/nano-scale 3D printer, including jet head sets, printing bed, controller and three-dimensional motion mechanism, wherein, it is described
Jet head sets include multiple shower nozzles, and each shower nozzle applies high-voltage pulse power source between conductive nozzle and electrically-conductive backing plate, using in spray
Fluid is pulled out the forceful electric power field force formed between mouth and substrate the cone jet to form taylor cone and stabilization, the control from jet hole
Device control three-dimensional motion mechanism action processed, makes it drive jet head sets that relative motion occurs with printing bed, while controlling each shower nozzle
Action, micro-droplet spray printing is carried out to the setting position of base material on printing bed, printer model material, separated type material and support successively
Material, the separated type material is low-surface-energy material, and the backing material is water-soluble material.
Printed by order, separated type material is printed between cast material and backing material, be used in combination Water Soluble Support
Material, the effective of supporting construction simply strips off during realizing micro-structural or electronic product production, it is possible to increase acquisition
Product surface quality, is more suitable for manufacturing the micro- part or micro-structural that must use supporting construction.
The three-dimensional motion mechanism, including tri- motions in direction of X, Y and Z, the X, Y-direction motion are carried
Printing bed, jet head sets are set on the motion of the Z-direction.
Certainly, those skilled in the art can be on the basis of operation principle of the invention, using other three-dimensional motion machines
Structure is replaced, such as three-dimensional working machine, multiple degrees of freedom robotic arm, simple replacement is belonged to, for that need not pay creativeness
Work, protection scope of the present invention all should be belonged to.
Meanwhile, printing bed or jet head sets are carried out simply combining or replacing relative to the position of three-dimensional motion mechanism,
Belong to simple replacement, to would not require any inventive effort, protection scope of the present invention all should be belonged to.
Wafer-supporting platform and base material are provided with the printing bed, wafer-supporting platform is fixed on workbench top, and wafer-supporting platform sets conductive
Layer or conductive material, the base material are located at wafer-supporting platform top, and base material is fixed on wafer-supporting platform by vacuum suction.
The base material can be insulating materials, semi-conducting material or conductive material, and substrate surface can be special according to printed material
Property is surface-treated.
The fixing means of the base material can be replaced other modes.
The 3D printer is additionally provided with light curring unit, and installed in the vicinity of printing head, exposure light source is irradiated to be beaten
Print material is deposited on the region on base material, realizes the rapid curing of photocuring printed material.
The 3D printer is additionally provided with video acquisition device, and video acquisition device is arranged on workbench side, monitors whole
Individual electric jet printing process and graphic printing process.
Certainly, those skilled in the art's design of the invention can be provided with other external devices on 3D printer,
More to improve 3D printing process or effect, or the letter of the aspects such as composition structure, placement location is carried out to existing external device
It is monotropic to change and combine i.e. available scheme, without paying any creative work i.e. it is contemplated that.
Cast material is liquid high-molecular organic material and inorganic material, and organic polymer class includes polymer, photosensitive tree
Fat, hydrogel, PC etc.；Inorganic includes nano metal material, nano ceramic material etc..Backing material is water soluble polymer material
Material (such as PVA).Separated type material is liquid low-surface-energy material, including fluoropolymer and organosilicon polymer.
Certainly, those skilled in the art can simply be replaced above-mentioned material under above-mentioned enlightenment of the invention, category
In would not require any inventive effort.
The jet head sets include the first printing head, the second shower nozzle and the 3rd shower nozzle, respectively printer model material, fid
Material, separated type material.
Preferably, first shower nozzle, the second shower nozzle and the 3rd shower nozzle are respectively made up of two parts, and a part is storage print
The syringe of material a, part is to be connected in the conductive nozzle below syringe.
The conductive nozzle connection high-voltage power cathode of the shower nozzle of the jet head sets, high voltage power supply negative pole is connected with base material.
The shower nozzle of the jet head sets is connected with pneumatic system by pressure piping, and shower nozzle air inlet is connected with pressure piping,
Ensure that material can continue to be got from nozzle.
Preferably, the conductive nozzle is metallic nozzle or coated inner wall conductive material, and the internal diameter of conductive nozzle is 0.1-
500μm。
Preferably, the printing technology parameter of the minute yardstick 3D printer, applied voltage scope 0-4000v, air pressure 0-
20psi, pulse frequency 0-3000Hz, print speed 0-300mm/s, the operating distance between nozzle and base material are 0-3mm.
A kind of micro/nano-scale 3D printing method, forms forceful electric power field force between the nozzle and substrate of shower nozzle, and forceful electric power field force will
Fluid pulls out the cone jet to form taylor cone and stabilization from jet hole, the microlayer model spray to the base material setting position on printing bed
Print, jet printing process is printed for order, successively printer model material, separated type material and water-soluble support materials.
Beneficial effects of the present invention are：
(1) present invention can realize high-resolution, low cost, the manufacturing of many materials of arbitrarily complicated true three-dimensional structure.
(2) present invention only adjusts printing technology parameter, just can realize many of print structure under same size marking shower nozzle
Dimensional variation, realizes across the yardstick manufacture of grand/micro-/micro-nano structure.
(3) present invention combines separated type material and water-soluble support materials realize the effective simple removal of supporting construction, protects
The accuracy of manufacture of printing part is demonstrate,proved, has been adapted to the manufacture of complex three-dimensional micro-nano feature structure.
(4) present invention is available for printed material scope wide, and viscosity is almost unrestricted.From inorganic material to organic material, from
, to conductive material, from low viscosity material to heavy viscous material etc., and biomaterial, metal nanoparticle etc. are various for insulating materials
The printing of material.
(5) present invention outstanding advantages such as have simple structure, low cost, printing effect high, it is easy to accomplish large area is complicated
Three-dimensional micro-nano structure is manufactured.
Brief description of the drawings
Fig. 1 is the structural representation of the minute yardstick 3D printer of the embodiment of the present invention 1；
Fig. 2 is the structural perspective of the minute yardstick 3D printer of the embodiment of the present invention 2；
Wherein, 1 base, 2x-y workbench, 3 wafer-supporting platforms, 4 first shower nozzles, 5 second shower nozzles, 6 the 3rd shower nozzles, 7z is to work
Platform, 8 syringes, 9 conductive nozzles, 10 base materials, 11 high voltage power supplies, 12 ultra-violet curing light sources, 13 frames, 14 pressure pipings, 15 shootings
Head, 16 heating cushions.
Specific embodiment：
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
Embodiment 1：
As shown in figure 1, micro/nano-scale 3D printer, it includes：Base 1, x-y workbench 2, wafer-supporting platform 3, the first shower nozzle 4,
Second shower nozzle 5, the 3rd shower nozzle 6, z are to workbench 7, syringe 8, conductive nozzle 9, base material 10, high voltage power supply 11, frame 13, pressure
Pipeline 14, camera 15, heating cushion 16.Wherein base 1 is placed in bottom；X-y workbench 2 is placed on base 1；Printing bed 3 is consolidated
It is scheduled on x-y workbench 2；First shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 are respectively placed in directly over wafer-supporting platform 3, and with z to
Workbench 7 is connected；Z is fixed on the crossbeam 1301 of frame 13 to workbench 7；Frame 13 is fixed on base 1；First shower nozzle
4th, the second shower nozzle 5 and the 3rd shower nozzle 6 are respectively provided with air inlet, and air inlet is connected with pressure piping 14 by flexible pipe.First spray
High voltage power supply 5 is set between first 4 foot conduction nozzle 901 and base material 10, wherein conductive nozzle 901 is with high voltage power supply 11 just
Pole connects, and base material 10 is connected with the negative pole of high voltage power supply 11.The conductive nozzle 902 of the bottom of the second shower nozzle 5 and high voltage power supply 11
Positive pole is connected, and the positive pole of the conductive nozzle 903 of the bottom of the 3rd shower nozzle 6 also with high voltage power supply 11 is connected.Heating cushion 16 is placed in and holds piece
The lower section of platform 3, the top of x-y workbench 2.
The x-y workbench 2 is two-dimentional precision displacement table, and using LS-180 linear displacement platforms, impulse stroke 150mm is double
To repetitive positioning accuracy ± 0.1 μm.Realize movement of the base material 10 in x-y directions, and with the first shower nozzle 4, the second shower nozzle the 5, the 3rd
Shower nozzle 6 is engaged along z to up and down motion, completes the manufacture of each Rotating fields.
The z is one-dimensional high-accuracy displacement platform to workbench 7.Using the M-501 ultraprecise z-axis displacement platforms of PI Corp., weight
Multiple 0.1 μm of precision.Z drives the first shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 along z to up and down motion to workbench 7.
The heating cushion 16 is silicon rubber heating cushion, and wafer-supporting platform 3 is stainless steel plate, and base material 10 is silicon chip, by Copper Foil paper
It is fixed on wafer-supporting platform 3.
First shower nozzle 4, the second shower nozzle 5, the inlet charge pressure of the 3rd shower nozzle 6 are 0-10ps i.
The high voltage power supply 11 uses high-voltage pulse power source, voltage pulse output 0-4KV continuously adjustabes, output pulse frequency
10Hz-1500Hz, output waveform is square.
First shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 include syringe 8 and conductive nozzle 9, are stored respectively in syringe
Cast material, backing material, separated type material.
The cast material is epoxy resin, and backing material is PVA, and separated type material is aqueous emulsion of dimethyl polysiloxane fluid.
Embodiment 2：
As shown in Fig. 2 micro/nano-scale 3D printer includes：Base 1, x-y workbench 2, wafer-supporting platform 3, the first shower nozzle 4,
Two shower nozzles 5, the 3rd shower nozzle 6, z are to workbench 7, syringe 8, conductive nozzle 9, base material 10, high voltage power supply 11, ultra-violet curing light source
12, frame 13, pressure piping 14, camera 15.Wherein base 1 is placed in bottom；X-y workbench 2 is placed on base 1；Printing
Bed 3 is fixed on x-y workbench 2；First shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 are respectively placed in directly over wafer-supporting platform 3, and
It is connected to workbench 7 with z；Z is fixed on the crossbeam 1301 of frame 13 to workbench 7；Frame 13 is fixed on base 1；The
One shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 are respectively provided with air inlet, and air inlet is connected with pressure piping 14 by flexible pipe.
High voltage power supply 5 is set between the foot of first shower nozzle 4 conduction nozzle 901 and base material 10, wherein conductive nozzle 901 and high voltage power supply
11 positive pole connection, base material 10 is connected with the negative pole of high voltage power supply 11.The conductive nozzle 902 and high-tension electricity of the bottom of the second shower nozzle 5
The positive pole connection in source 11, the positive pole of the conductive nozzle 903 of the bottom of the 3rd shower nozzle 6 also with high voltage power supply 11 is connected.Ultra-violet curing light
Source 12 is separately fixed near the first shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6.
The x-y workbench 2 is two-dimentional precision displacement table, and using LS-180 linear displacement platforms, impulse stroke 150mm is double
To repetitive positioning accuracy ± 0.1 μm.
The z is one-dimensional high-accuracy displacement platform to workbench 7.Using the M-501 ultraprecise z-axis displacement platforms of PI Corp., weight
Multiple 0.1 μm of precision.Z drives the first shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 along z to up and down motion to workbench 7.
First shower nozzle 4, the second shower nozzle 5, the inlet charge pressure of the 3rd shower nozzle 6 are 0-10ps i.
The high voltage power supply 11 uses high-voltage pulse power source, voltage pulse output 0-4KV continuously adjustabes, output pulse frequency
10Hz-1500Hz, output waveform is square.
First shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 include syringe 8 and conductive nozzle 9, are stored respectively in syringe
Cast material, backing material, separated type material.
The cast material photosensitive resin, backing material is PVA, and separated type material is ptfe emulsion.
Near the conductive nozzle of the first shower nozzle 4, the second shower nozzle 5 and the 3rd shower nozzle 6 set camera 15, realize nozzle with
The accurate alignment of substrate distance, while the whole electricity jet printing process of monitoring.
Although above-mentioned be described with reference to accompanying drawing to specific embodiment of the invention, not to present invention protection model
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need the various modifications made by paying creative work or deformation still within protection scope of the present invention.
Claims (10)
1. a kind of micro/nano-scale 3D printer, it is characterized in that：Including jet head sets, printing bed, controller and three-dimensional motion mechanism, its
In, the jet head sets include multiple shower nozzles, and each shower nozzle applies high-voltage pulse power source between conductive nozzle and electrically-conductive backing plate, profit
Fluid is pulled out the forceful electric power field force formed between nozzle and substrate the cone jet to form taylor cone and stabilization from jet hole,
The controller control three-dimensional motion mechanism action, makes it drive jet head sets that relative motion occurs with printing bed, while control is each
The action of individual shower nozzle, the setting position to base material on printing bed carries out micro-droplet spray printing, successively printer model material, separated type material
With backing material, the separated type material is low-surface-energy material, and the backing material is water-soluble material.
2. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：The three-dimensional motion mechanism, including X, Y
With tri- motions in direction of Z, the X, Y-direction motion carry printing bed, are set on the motion of the Z-direction
Jet head sets.
3. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：Wafer-supporting platform is provided with the printing bed
And base material, wafer-supporting platform be fixed on workbench top, wafer-supporting platform set conductive layer or conductive material, the base material be located at wafer-supporting platform on
Side, base material is fixed on wafer-supporting platform by vacuum suction.
4. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：Light curring unit is additionally provided with, is installed
In the vicinity of printing head, exposure light source is irradiated to the region that printed material is deposited on base material, realizes photocuring printed material
Rapid curing.
5. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：Video acquisition device is additionally provided with, depending on
Frequency harvester is arranged on workbench side, the whole electricity jet printing process of monitoring and graphic printing process.
6. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：The jet head sets include the first printing spray
Head, the second shower nozzle and the 3rd shower nozzle, difference printer model material, backing material, separated type material.
7. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：The conductive spray of the shower nozzle of the jet head sets
Mouth connects high-voltage power cathode, and high voltage power supply negative pole is connected with base material.
8. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：The shower nozzle of the jet head sets passes through pressure
Pipeline is connected with pneumatic system, and shower nozzle air inlet is connected with pressure piping, it is ensured that material can continue to be got from nozzle.
9. a kind of micro/nano-scale 3D printer as claimed in claim 1, it is characterized in that：The conductive nozzle be metallic nozzle or
Coated inner wall conductive material, the internal diameter of conductive nozzle is 0.1-500 μm.
10. a kind of micro/nano-scale 3D printing method, it is characterized in that, forceful electric power field force is formed between the nozzle and substrate of shower nozzle, by force
Fluid is pulled out electric field force the cone jet to form taylor cone and stabilization from jet hole, to the base material setting position on printing bed
Micro-droplet spray printing, jet printing process is printed for order, successively printer model material, separated type material and water-soluble support materials.
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