CN108995395A - The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure - Google Patents
The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure Download PDFInfo
- Publication number
- CN108995395A CN108995395A CN201810952902.3A CN201810952902A CN108995395A CN 108995395 A CN108995395 A CN 108995395A CN 201810952902 A CN201810952902 A CN 201810952902A CN 108995395 A CN108995395 A CN 108995395A
- Authority
- CN
- China
- Prior art keywords
- spray printing
- base board
- ion beam
- flexible base
- focused ion
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/44—Typewriters or selective printing mechanisms having dual functions or combined with, or coupled to, apparatus performing other functions
- B41J3/445—Printers integrated in other types of apparatus, e.g. printers integrated in cameras
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M7/00—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock
- B41M7/009—After-treatment of prints, e.g. heating, irradiating, setting of the ink, protection of the printed stock using thermal means, e.g. infrared radiation, heat
Abstract
The invention discloses the preparation methods and equipment of a kind of electrohydrodynamics spray printing pattern three-dimension flexible structure comprising rack, rack are equipped with carrying platform；Spray printing module；Spray printing platform；Focused ion beam equipment fixes device, it is arranged in spray printing platform upper end, and the fixed device of the focused ion beam equipment includes bottom plate, the adjacent both sides of the bottom plate are respectively provided with the clamping device of clamping flexible base board and for so that focused ion beam can scan the laser mobile mechanism on rear side of flexible base board, flexible base board is clamped by clamping device, flexible base board is set to be in plumbness, one end is fixed on clamping device, free state is presented in the other end, the focused ion beam equipment face flexible base board back side, from the free end of flexible base board to fixed extreme direction, focused ion beam equipment carries out local etching according to preset path, utilize ion implanting and sputtering, the flexible base board of spray printing plane pattern is set to deform, form three-dimensional structure of different shapes.
Description
Technical field
The present invention relates to electrohydrodynamics Printing techniques field more particularly to a kind of electrohydrodynamics spray printing patterns three
Tie up the Preparation equipment and method of flexible structure.
Background technique
Electrohydrodynamics Printing techniques are to apply voltage between substrate and nozzle, under induction electric field force effect, spray
The charge printed in solution is assembled in liquid surface, and the Coulomb force between charge causes liquid surface to generate tangential stress, tangential at this
Under the action of stress, liquid forms taper liquid level in nozzle tip, and commonly referred to as taylor cone works as electricity as electric field strength increases
When field force overcomes surface tension of liquid, generate jet stream or drop on the top of taylor cone, can spray printing array pattern, micro- pattern and
The figures such as film.Electrohydrodynamics Printing techniques are a kind of new techniques for manufacturing micro nano structure and device.
Micro nano structure and device are usually three-dimensional structure shape, such as flexible electronic device, in order to improve its ductility,
The shapes such as interconnection line preparation waviness, the tubular, spiral shape of ripple between flexible electronic device and electrode, to improve flexibility
The elongation of electronics, mainly using transfer technique carry out preparation three-dimensional structure device, this method there are complex process, manufacture at
The problems such as this is high.Electrohydrodynamics Printing techniques have equipment is simple, can be used material it is wide, without mask, direct forming, at
The advantages that this is low, high-efficient, is particularly suitable for the pattern spray printing of the solution materials such as polymer and metal nanoparticle, at present the skill
Art is mainly used for the figure of spray printing flat shape, therefore, it is micro-nano in three-dimensional structure to limit electrohydrodynamics Printing techniques
Application in structure and device preparation.
Summary of the invention
It is an object of the present invention to for existing electrohydrodynamics spray printing device there are the shortcomings that, propose a kind of electricity
The preparation method and equipment of fluid dynamics spray printing pattern three-dimension flexible structure.
To achieve the above object, the present invention provides a kind of preparation side of electrohydrodynamics spray printing pattern three-dimension flexible structure
Method,
1) flexible base board tiling is fixed on the spray printing platform of electrohydrodynamics spray printing device；
2) spray printing solution is fitted into sprayed printed system, according to the width of pre- spray printing pattern, setting electric current body dynamics spray printing
Technological parameter；
3) by electrohydrodynamics sprayed printed system movable spray-printing platform, and the nozzle of spray printing mechanism is navigated into flexible base
The initial position of the spray printing of plate starts the spray printing for carrying out pre- spray printing pattern, while spray printing platform heat admittedly to spray printing pattern
Change；
4) spray printing terminates, and when heating spray printing pattern and being in semi-cured state, passes through gripper mechanism grips flexible base board
One end and mobile to vertical direction, so that flexible base board is in plumbness, flexible base board one end is fixed by clamping device, another
End is in free state；
5) several segments are divided by flexible base board from fixing end to free extreme direction according to pre-prepared three-dimensional structure shape,
According to pre-prepared three-dimensional structure shape need, several equal or unequal length for being divided into；
6) horizontal direction and vertical direction both direction of the fixed device of focused ion beam equipment in flexible base board plane
It is mobile, and focused ion beam equipment is against the back side of flexible base board；
7) according to pre-prepared three-dimensional structure shape, the technological parameter of focused ion beam equipment is set, according to flexible base board
It is divided into the etching number that several number of segment setting focused ion beam stress introduce；
8) from the free end of flexible base board to fixed extreme direction, focused ion beam equipment is pressed according to preset path
It is divided into the regional area of several number of segment according to flexible base board, carries out local etching respectively, when making ion bombardment substrate surface, ion note
Enter and sputter while occurring, ion implanting can introduce tensile stress, and sputtering can introduce compression, the sequence of local etching, according to pre-
The three-dimensional structure shape of preparation, makes the flexible base board of spray printing plane pattern deform, and forms three-dimensional structure of different shapes.
The technological parameter of focused ion beam equipment includes implantation dosage, focused ion beam and the spray printing pattern of focused ion beam
The inclined angle of flat scanning, the spacing of focused ion beam spray head and spray printing pattern plane.
It can successively carry out, can also be carried out in any order local quarter according to the sequence that flexible base board is segmented in step 8)
Erosion.
A kind of equipment of the preparation method based on above-mentioned electrohydrodynamics spray printing pattern three-dimension flexible structure comprising machine
Frame, the rack are equipped with carrying platform；
Spray printing module, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with and is used for spray printing
Spray printing mechanism, for forming spray printing pattern on spray printing to flexible base board；
Spray printing platform, the spray printing platform can X to movement setting on the carrying platform；
Focused ion beam equipment fixes device, and setting is in spray printing platform mechanism upper end, and the focused ion beam equipment is solid
Determining device includes the bottom plate being arranged on spray printing platform, and the adjacent both sides of the bottom plate are respectively provided with the folder of clamping flexible base board
Hold mechanism and for so that focused ion beam can scan the mobile mechanism on rear side of flexible base board.
The spray printing module includes firm banking and the spray printing mechanism being arranged in vertical, and the spray printing mechanism includes
Dismountable syringe is arranged in fixing seat in fixing seat, and in the upper end of the fixing seat, setting can vertically be slid
Operating mechanism, the plunger part of the syringe are linked with the operating mechanism.
The clamping device includes the first track base that bottom plate side is arranged in, constitutes sliding cooperation with the first track base
First sliding block and the clamp assemblies being arranged on the first sliding block, the clamp assemblies can Z-direction movement setting it is sliding described first
On block.
The clamp assemblies include the shifting axle being arranged on the first sliding block along Z-direction, constitute to slide with shifting axle and match
The mobile fixture of conjunction and lead screw transmission mechanism for driving mobile fixture to move along Z-direction.
The mobile mechanism includes the second track base that bottom plate side is arranged in, constitutes sliding cooperation with the second track base
Second sliding block and the focused ion beam equipment clamp assemblies being arranged on the second sliding block, the focused ion beam equipment clamping group
Part can Z-direction movement be arranged on second sliding block.
The focused ion beam equipment clamp assemblies include the sliding rack being arranged on the second sliding block along Z-direction and slide
It moves frame and constitutes the clamping piece of sliding cooperation and the lead screw transmission mechanism for driving clamping piece to move along Z-direction.
Heating plate is equipped between the bottom plate and spray printing platform.
Beneficial effects of the present invention: by electrohydrodynamics sprayed printed system spray printing plane pattern, using heating plate to spray
The plane pattern of print carries out heating semi-solid preparation, is then clamped by clamping device to flexible base board, gripper mechanism grips are soft
Property substrate Z-direction movement, so that flexible base board be in plumbness, one end is fixed on clamping device, the other end presentation free state,
The focused ion beam equipment face flexible base board back side, from the free end of flexible base board to fixed extreme direction, focused ion beam equipment
Local etching is carried out according to preset path, when ion bombardment substrate surface, ion implanting and sputtering while being occurred, ion
Injection can introduce tensile stress, and sputtering can introduce compression, and the flexible base board of spray printing plane pattern is made to deform, and form wave
The three-dimensional structures of different shapes such as shape, ripple be tubular, spiral shape, fold-line-shaped, curved shape.
Detailed description of the invention
Fig. 1 is logical schematic of the invention
Fig. 2 is structural schematic diagram of the invention.
Fig. 3 is the structural schematic diagram of spray printing module of the invention.
Fig. 4 is the structural schematic diagram of focused ion beam equipment irradiation means of the invention.
Fig. 5 is the structural schematic diagram of clamping device of the invention.
Fig. 6 is the structural schematic diagram of focused ion beam equipment irradiation means of the invention.
Specific embodiment
The embodiment of the present invention is described further below for attached drawing:
The present invention provides a kind of preparation method of electrohydrodynamics spray printing pattern three-dimension flexible structure,
1) flexible base board tiling is fixed on the spray printing platform of electrohydrodynamics spray printing device；
2) spray printing solution is fitted into sprayed printed system, according to the width of pre- spray printing pattern, setting electric current body dynamics spray printing
Technological parameter, the shifting of the voltage, jetting height, the flow of spray printing solution, spray printing motion platform of diameter, application including nozzle
Dynamic speed；
3) by electrohydrodynamics sprayed printed system movable spray-printing platform, and the nozzle of spray printing mechanism is navigated into flexible base
The initial position of the spray printing of plate starts the spray printing for carrying out pre- spray printing pattern, while spray printing platform heat admittedly to spray printing pattern
Change；
4) spray printing terminates, and when heating spray printing pattern and being in semi-cured state, passes through gripper mechanism grips flexible base board
One end and mobile to vertical direction, so that flexible base board is in plumbness, flexible base board one end is fixed by clamping device, another
End is in free state；
5) several segments are divided by flexible base board from fixing end to free extreme direction according to pre-prepared three-dimensional structure shape,
According to pre-prepared three-dimensional structure shape need, several equal or unequal length for being divided into；
6) horizontal direction and vertical direction both direction of the fixed device of focused ion beam equipment in flexible base board plane
It is mobile, and focused ion beam equipment is against the back side of flexible base board；
7) according to pre-prepared three-dimensional structure shape, the technological parameter of focused ion beam equipment is set, focused ion beam is set
Standby technological parameter include the implantation dosage of focused ion beam, focused ion beam and spray printing pattern plane scanning inclination angle,
The spacing of focused ion beam spray head and spray printing pattern plane is divided into several number of segment according to flexible base board and focused ion beam stress is arranged
The etching number of introducing；
8) from the free end of flexible base board to fixed extreme direction, focused ion beam equipment is pressed according to preset path
It is divided into the regional area of several number of segment according to flexible base board, carries out local etching respectively, when making ion bombardment substrate surface, ion note
Enter and sputter while occurring, ion implanting can introduce tensile stress, and sputtering can introduce compression, the sequence of local etching, according to pre-
The three-dimensional structure shape of preparation can successively carry out according to the sequence that flexible base board is segmented, can also carry out part in any order
Etching, makes the flexible base board of spray printing plane pattern deform, and forms that waveform, ripple be tubular, spiral shape, fold-line-shaped, curve
The three-dimensional structure of different shapes such as shape.
As shown, the invention discloses a kind of systems based on above-mentioned electrohydrodynamics spray printing pattern three-dimension flexible structure
The equipment of Preparation Method comprising rack comprising rack 1, the rack 1 are equipped with carrying platform；
Spray printing module 4, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with and is used for spray printing
Spray printing mechanism, to carry out pattern printing on spray printing to flexible base board, the spray printing module is existed by the setting of Y-axis slideway 41
On horizontal gird, then again by Z axis slideway 42 be arranged on Y-axis slideway, so as to spray printing mechanism height and Y-direction away from
From being adjusted；
Spray printing platform 2, the spray printing platform can X to movement setting on the carrying platform, focused ion beam equipment irradiating machine
Structure be arranged on spray printing platform mechanism, it can be achieved that X to movement；
Focused ion beam equipment irradiation means 3 are arranged in spray printing platform upper end, and the focused ion beam equipment irradiating machine
Structure includes the bottom plate being arranged on spray printing platform, and the adjacent both sides of the bottom plate are respectively provided with the clamping device 31 of clamping substrate
With for making focused ion beam equipment can focused ion beam equipment mobile mechanism 32 on rear side of scanning substrate.
Heating plate 34 is set between bottom plate 33 and spray printing platform, which is arranged below flexible base board, can be to institute
The pattern of spray printing is solidified.
The spray printing module includes firm banking 43 and the spray printing mechanism being arranged in vertical, spray printing mechanism packet
It includes fixing seat 45, dismountable syringe 44 is set in fixing seat, setting can be vertically in the upper end of the fixing seat
The operating mechanism of sliding, the plunger part of the syringe are linked with the operating mechanism, and the operating mechanism is using card
Slot structure, and operating mechanism slip setting is on the fixed base, plunger part is embedded in the notch, and is grasped
Make mechanism and drives Z-direction movement.
Irradiation light and industrial camera is respectively set in the two sides of spray printing mechanism, two are set by the bracket fixation of adjustable angle
It sets in the two sides of firm banking, by adjusting the angle of two brackets, the demand of illumination and the camera shooting of different angle may be implemented.
The clamping device 31 includes that the first track base 311 that bottom plate side is arranged in and the first track base are constituted and slid
First sliding block 312 of cooperation and the clamp assemblies that are arranged on the first sliding block, the clamp assemblies can Z-direction movement be arranged in institute
It states on the first sliding block.The clamp assemblies include the shifting axle 314 being arranged on the first sliding block along Z-direction and shifting axle structure
At the mobile fixture 313 of sliding cooperation and the lead screw transmission mechanism for driving mobile fixture to move along Z-direction, mobile folder
Tool rear end is then the sliding-end that sliding cooperation is constituted with shifting axle, and front end extends to form clamping part.
The focused ion beam equipment mobile mechanism includes the second track base 321 that bottom plate side is arranged in, leads with second
The focused ion beam equipment device clamping that rail chair 321 constitutes the second sliding block 322 of sliding cooperation and is arranged on the second sliding block 322
Component, the focused ion beam equipment device clamp assemblies can Z-direction movement be arranged on second sliding block.The focused ion beam
Equipment clamp assemblies include the sliding rack being arranged on the second sliding block along Z-direction, constitute the clamping for sliding cooperation with sliding rack
Part 323 and lead screw transmission mechanism for driving clamping piece to move along Z-direction, the clamping piece is for clamping focused ion
Beam device device 5.
When focused ion beam equipment mobile mechanism X is to when movement, then clamping device Y-direction moves, and the direction of motion of the two is hung down
Straight setting.
Embodiment is not construed as limitation of the present invention, but any based on spiritual improvements introduced of the invention, all should be
Within protection scope of the present invention.
Claims (10)
1. a kind of preparation method of electrohydrodynamics spray printing pattern three-dimension flexible structure, it is characterised in that:
1) flexible base board tiling is fixed on the spray printing platform of electrohydrodynamics spray printing device；
2) spray printing solution is fitted into sprayed printed system, according to the width of pre- spray printing pattern, the work of setting electric current body dynamics spray printing
Skill parameter；
3) by electrohydrodynamics sprayed printed system movable spray-printing platform, and the nozzle of spray printing mechanism is navigated into flexible base board
The initial position of spray printing starts the spray printing for carrying out pre- spray printing pattern, while spray printing platform is heating and curing to spray printing pattern；
4) spray printing terminates, and when heating spray printing pattern and being in semi-cured state, passes through the one of gripper mechanism grips flexible base board
It holds and mobile to vertical direction, so that flexible base board is in plumbness, flexible base board one end is fixed by clamping device, at the other end
In free state；
5) several segments are divided by flexible base board from fixing end to free extreme direction according to pre-prepared three-dimensional structure shape, according to
Pre-prepared three-dimensional structure shape need, several the equal or unequal length being divided into；
6) horizontal direction and vertical direction both direction of the fixed device of focused ion beam equipment in flexible base board plane are mobile,
And focused ion beam equipment is against the back side of flexible base board；
7) according to pre-prepared three-dimensional structure shape, the technological parameter of focused ion beam equipment is set, is divided into according to flexible base board
The etching number that several number of segment setting focused ion beam stress introduce；
8) from the free end of flexible base board to fixed extreme direction, focused ion beam equipment is according to preset path, according to soft
Property substrate be divided into the regional areas of several number of segment, carry out local etching respectively, when making ion bombardment substrate surface, ion implanting and
It sputters while occurring, ion implanting can introduce tensile stress, and sputtering can introduce compression, the sequence of local etching, according to pre-prepared
Three-dimensional structure shape, so that the flexible base board of spray printing plane pattern is deformed, form three-dimensional structure of different shapes.
2. the preparation method of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: the technological parameter of focused ion beam equipment includes the implantation dosage of focused ion beam, focused ion beam and spray printing pattern plane
Angle, the spacing of focused ion beam spray head and spray printing pattern plane of scanning inclination.
3. the preparation method of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: it can successively be carried out according to the sequence that flexible base board is segmented in step 8), local etching can also be carried out in any order.
4. a kind of preparation method based on claim 1,2 or the 3 electrohydrodynamics spray printing pattern three-dimension flexible structures
Equipment, it is characterised in that: it includes rack, and the rack is equipped with carrying platform；
Spray printing module, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with the spray for spray printing
Printing mechanism, for forming spray printing pattern on spray printing to flexible base board；
Spray printing platform, the spray printing platform can X to movement setting on the carrying platform；
Focused ion beam equipment fixes device, and setting is in spray printing platform upper end, and the focused ion beam equipment fixes device packet
Include the bottom plate being arranged on spray printing platform, the adjacent both sides of the bottom plate be respectively provided with clamping flexible base board clamping device and
For making focused ion beam that can scan the mobile mechanism on rear side of flexible base board.
5. equipment according to claim 4, it is characterised in that: the spray printing module includes firm banking and along Vertical Square
To the spray printing mechanism of setting, the spray printing mechanism includes fixing seat, dismountable syringe is arranged in fixing seat, described solid
The operating mechanism that can vertically slide is arranged in the upper end of reservation, and the plunger part of the syringe and the operating mechanism join
Dynamic cooperation.
6. equipment according to claim 4, it is characterised in that: the clamping device includes first that bottom plate side is arranged in
Track base, the first sliding block that sliding cooperation is constituted with the first track base and the clamp assemblies being arranged on the first sliding block, it is described
Clamp assemblies can Z-direction movement be arranged on first sliding block.
7. equipment according to claim 6, it is characterised in that: the clamp assemblies include being arranged along Z-direction first
Shifting axle and shifting axle on sliding block constitute the mobile fixture of sliding cooperation and for driving mobile fixture to transport along Z-direction
Dynamic lead screw transmission mechanism.
8. equipment according to claim 4, it is characterised in that: the mobile mechanism includes second that bottom plate side is arranged in
Track base, the second sliding block that sliding cooperation is constituted with the second track base and the focused ion beam equipment being arranged on the second sliding block
Clamp assemblies, the focused ion beam equipment clamp assemblies can Z-direction movement be arranged on second sliding block.
9. equipment according to claim 8, it is characterised in that: the focused ion beam equipment clamp assemblies include along Z axis
The sliding rack and sliding rack that direction is arranged on the second sliding block constitute the clamping piece of sliding cooperation and for driving clamping piece edge
The lead screw transmission mechanism of Z-direction movement.
10. according to equipment described in claim 4 or 5 or 6 or 7 or 8 or 9, it is characterised in that: the bottom plate and spray printing platform it
Between be equipped with heating plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810952902.3A CN108995395A (en) | 2018-08-21 | 2018-08-21 | The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810952902.3A CN108995395A (en) | 2018-08-21 | 2018-08-21 | The preparation method and equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure |
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| CN110370804A (en) * | 2019-07-24 | 2019-10-25 | 嘉兴学院 | The electrohydrodynamics spray printing control method of pattern spray printing width driving |
| CN110385850A (en) * | 2019-07-23 | 2019-10-29 | 嘉兴学院 | The method of electrohydrodynamics spray printing Arbitrary 3 D flexible electronic circuit pattern |
| CN110385912A (en) * | 2019-08-05 | 2019-10-29 | 嘉兴学院 | The electrohydrodynamics spray printing control method of the lattice structure pattern of proportional spacing |
| CN110850609A (en) * | 2019-11-21 | 2020-02-28 | 中国电子科技集团公司第二十六研究所 | Low-stress acousto-optic device and preparation method thereof |
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