CN208993305U - The Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure - Google Patents
The Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure Download PDFInfo
- Publication number
- CN208993305U CN208993305U CN201821346376.8U CN201821346376U CN208993305U CN 208993305 U CN208993305 U CN 208993305U CN 201821346376 U CN201821346376 U CN 201821346376U CN 208993305 U CN208993305 U CN 208993305U
- Authority
- CN
- China
- Prior art keywords
- spray printing
- ion beam
- focused ion
- base board
- sliding block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of Preparation equipments of electrohydrodynamics spray printing pattern three-dimension flexible structure comprising rack, rack are equipped with carrying platform；Spray printing module；Spray printing platform；Focused ion beam equipment fixes device, it is arranged in spray printing platform upper end, and the fixed device of the focused ion beam equipment includes bottom plate, the adjacent both sides of the bottom plate are respectively provided with the clamping device of clamping flexible base board and for so that focused ion beam can scan the laser mobile mechanism on rear side of flexible base board, flexible base board is clamped by clamping device, flexible base board is set to be in plumbness, one end is fixed on clamping device, free state is presented in the other end, the focused ion beam equipment face flexible base board back side, from the free end of flexible base board to fixed extreme direction, focused ion beam equipment carries out local etching according to preset path, utilize ion implanting and sputtering, the flexible base board of spray printing plane pattern is set to deform, form three-dimensional structure of different shapes.
Description
Technical field
The utility model relates to electrohydrodynamics Printing techniques field more particularly to a kind of electrohydrodynamics spray printing figures
The Preparation equipment of case three-dimension flexible structure.
Background technique
Electrohydrodynamics Printing techniques are to apply voltage between substrate and nozzle, under induction electric field force effect, spray
The charge printed in solution is assembled in liquid surface, and the Coulomb force between charge causes liquid surface to generate tangential stress, tangential at this
Under the action of stress, liquid forms taper liquid level in nozzle tip, and commonly referred to as taylor cone works as electricity as electric field strength increases
When field force overcomes surface tension of liquid, generate jet stream or drop on the top of taylor cone, can spray printing array pattern, micro- pattern and
The figures such as film.Electrohydrodynamics Printing techniques are a kind of new techniques for manufacturing micro nano structure and device.
Micro nano structure and device are usually three-dimensional structure shape, such as flexible electronic device, in order to improve its ductility,
The shapes such as interconnection line preparation waviness, the tubular, spiral shape of ripple between flexible electronic device and electrode, to improve flexibility
The elongation of electronics, mainly using transfer technique carry out preparation three-dimensional structure device, this method there are complex process, manufacture at
The problems such as this is high.Electrohydrodynamics Printing techniques have equipment is simple, can be used material it is wide, without mask, direct forming, at
The advantages that this is low, high-efficient, is particularly suitable for the pattern spray printing of the solution materials such as polymer and metal nanoparticle, at present the skill
Art is mainly used for the figure of spray printing flat shape, therefore, it is micro-nano in three-dimensional structure to limit electrohydrodynamics Printing techniques
Application in structure and device preparation.
Utility model content
The purpose of this utility model is that for existing electrohydrodynamics spray printing device there are the shortcomings that, propose one
The electrohydrodynamics spray printing device of kind laser irradiation deformation.
To achieve the above object, the utility model provides a kind of system of electrohydrodynamics spray printing pattern three-dimension flexible structure
Standby equipment comprising rack, the rack are equipped with carrying platform；
Spray printing module, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with and is used for spray printing
Spray printing mechanism, for forming spray printing pattern on spray printing to flexible base board；
Spray printing platform, the spray printing platform can X to movement setting on the carrying platform；
Focused ion beam equipment fixes device, and setting is in spray printing platform mechanism upper end, and the focused ion beam equipment is solid
Determining device includes the bottom plate being arranged on spray printing platform, and the adjacent both sides of the bottom plate are respectively provided with the folder of clamping flexible base board
Hold mechanism and for so that focused ion beam can scan the mobile mechanism on rear side of flexible base board.
The spray printing module includes firm banking and the spray printing mechanism being arranged in vertical, and the spray printing mechanism includes
Dismountable syringe is arranged in fixing seat in fixing seat, and in the upper end of the fixing seat, setting can vertically be slid
Operating mechanism, the plunger part of the syringe are linked with the operating mechanism.
The clamping device includes the first track base that bottom plate side is arranged in, constitutes sliding cooperation with the first track base
First sliding block and the clamp assemblies being arranged on the first sliding block, the clamp assemblies can Z-direction movement setting it is sliding described first
On block.
The clamp assemblies include the shifting axle being arranged on the first sliding block along Z-direction, constitute to slide with shifting axle and match
The mobile fixture of conjunction and lead screw transmission mechanism for driving mobile fixture to move along Z-direction.
The mobile mechanism includes the second track base that bottom plate side is arranged in, constitutes sliding cooperation with the second track base
Second sliding block and the focused ion beam equipment clamp assemblies being arranged on the second sliding block, the focused ion beam equipment clamping group
Part can Z-direction movement be arranged on second sliding block.
The focused ion beam equipment clamp assemblies include the sliding rack being arranged on the second sliding block along Z-direction and slide
It moves frame and constitutes the clamping piece of sliding cooperation and the lead screw transmission mechanism for driving clamping piece to move along Z-direction.
Heating plate is equipped between the bottom plate and spray printing platform.
The utility model has the beneficial effects that utilizing heating plate by electrohydrodynamics sprayed printed system spray printing plane pattern
Heating semi-solid preparation is carried out to the plane pattern of spray printing, then flexible base board is clamped by clamping device, clamping device folder
The movement of flexible base board Z-direction is held, flexible base board is made to be in plumbness, one end is fixed on clamping device, and the other end is presented freely
State, the focused ion beam equipment face flexible base board back side, from the free end of flexible base board to fixed extreme direction, focused ion beam
Equipment carries out local etching according to preset path, when ion bombardment substrate surface, ion implanting and sputtering while occurring,
Ion implanting can introduce tensile stress, and sputtering can introduce compression, and the flexible base board of spray printing plane pattern is made to deform, and form wave
The three-dimensional structures of different shapes such as shape wave, ripple be tubular, spiral shape, fold-line-shaped, curved shape.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the structural schematic diagram of the spray printing module of the utility model.
Fig. 3 is the structural schematic diagram of the focused ion beam equipment irradiation means of the utility model.
Fig. 4 is the structural schematic diagram of the clamping device of the utility model.
Fig. 5 is the structural schematic diagram of the focused ion beam equipment irradiation means of the utility model.
Specific embodiment
The embodiments of the present invention are described further below for attached drawing:
As shown, the utility model discloses one kind to be based on above-mentioned electrohydrodynamics spray printing pattern three-dimension flexible structure
Preparation method equipment comprising rack comprising rack 1, the rack 1 be equipped with carrying platform；
Spray printing module 4, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with and is used for spray printing
Spray printing mechanism, to carry out pattern printing on spray printing to flexible base board, the spray printing module is existed by the setting of Y-axis slideway 41
On horizontal gird, then again by Z axis slideway 42 be arranged on Y-axis slideway, so as to spray printing mechanism height and Y-direction away from
From being adjusted；
Spray printing platform 2, the spray printing platform can X to movement setting on the carrying platform, focused ion beam equipment irradiating machine
Structure be arranged on spray printing platform, it can be achieved that X to movement；
Focused ion beam equipment irradiation means 3 are arranged in spray printing platform upper end, and the focused ion beam equipment irradiating machine
Structure includes the bottom plate being arranged on spray printing platform, and the adjacent both sides of the bottom plate are respectively provided with the clamping device 31 of clamping substrate
With for making focused ion beam that can scan the focused ion beam equipment mobile mechanism 32 on rear side of flexible base board.
Heating plate 34 is set between bottom plate 33 and spray printing platform, which is arranged below flexible base board, can be to institute
The pattern of spray printing is solidified.
The spray printing module includes firm banking 43 and the spray printing mechanism being arranged in vertical, spray printing mechanism packet
It includes fixing seat 45, dismountable syringe 44 is set in fixing seat, setting can be vertically in the upper end of the fixing seat
The operating mechanism of sliding, the plunger part of the syringe are linked with the operating mechanism, and the operating mechanism is using card
Slot structure, and operating mechanism slip setting is on the fixed base, plunger part is embedded in the notch, and is grasped
Make mechanism and drives Z-direction movement.
Irradiation light and industrial camera is respectively set in the two sides of spray printing mechanism, two are set by the bracket fixation of adjustable angle
It sets in the two sides of firm banking, by adjusting the angle of two brackets, the demand of illumination and the camera shooting of different angle may be implemented.
The clamping device 31 includes that the first track base 311 that bottom plate side is arranged in and the first track base are constituted and slid
First sliding block 312 of cooperation and the clamp assemblies that are arranged on the first sliding block, the clamp assemblies can Z-direction movement be arranged in institute
It states on the first sliding block.The clamp assemblies include the shifting axle 314 being arranged on the first sliding block along Z-direction and shifting axle structure
At the mobile fixture 313 of sliding cooperation and the lead screw transmission mechanism for driving mobile fixture to move along Z-direction, mobile folder
Tool rear end is then the sliding-end that sliding cooperation is constituted with shifting axle, and front end extends to form clamping part.
The focused ion beam equipment mobile mechanism includes the second track base 321 that bottom plate side is arranged in, leads with second
The focused ion beam equipment device clamping that rail chair 321 constitutes the second sliding block 322 of sliding cooperation and is arranged on the second sliding block 322
Component, the focused ion beam equipment device clamp assemblies can Z-direction movement be arranged on second sliding block.The focused ion beam
Equipment clamp assemblies include the sliding rack being arranged on the second sliding block along Z-direction, constitute the clamping for sliding cooperation with sliding rack
Part 323 and lead screw transmission mechanism for driving clamping piece to move along Z-direction, the clamping piece is for clamping focused ion
Beam device device 5.
When focused ion beam equipment mobile mechanism X is to when movement, then clamping device Y-direction moves, and the direction of motion of the two is hung down
Straight setting.
Embodiment is not construed as limitations of the present invention, but changes made by any spirit based on the utility model
Into should all be within the protection scope of the utility model.
Claims (7)
1. a kind of Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure, it is characterised in that: it includes rack, institute
Rack is stated equipped with carrying platform；
Spray printing module, side on the carrying platform is arranged by horizontal gird in the spray printing module, and it is equipped with the spray for spray printing
Printing mechanism, for forming spray printing pattern on spray printing to flexible base board；
Spray printing platform, the spray printing platform can X to movement setting on the carrying platform；
Focused ion beam equipment fixes device, and setting is in spray printing platform upper end, and the focused ion beam equipment fixes device packet
Include the bottom plate being arranged on spray printing platform, the adjacent both sides of the bottom plate be respectively provided with clamping flexible base board clamping device and
For making focused ion beam can mobile mechanism on rear side of scanning substrate.
2. the Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: the spray printing module includes firm banking and the spray printing mechanism being arranged in vertical, and the spray printing mechanism includes fixing
Dismountable syringe is arranged in fixing seat in seat, and the operation that can vertically slide is arranged in the upper end of the fixing seat
Mechanism, the plunger part of the syringe are linked with the operating mechanism.
3. the Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: the clamping device includes the first track base that bottom plate side is arranged in, constitutes the first of sliding cooperation with the first track base
Sliding block and the clamp assemblies being arranged on the first sliding block, the clamp assemblies can Z-direction movement be arranged on first sliding block.
4. the Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 3, feature exist
In: the clamp assemblies include the shifting axle being arranged on the first sliding block along Z-direction, the shifting with shifting axle composition sliding cooperation
Dynamic fixture and the lead screw transmission mechanism for driving mobile fixture to move along Z-direction.
5. the Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: the mobile mechanism includes the second track base that bottom plate side is arranged in, constitutes the second of sliding cooperation with the second track base
Sliding block and the focused ion beam equipment clamp assemblies being arranged on the second sliding block, the focused ion beam equipment clamp assemblies can
Z-direction movement is arranged on second sliding block.
6. the Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1, feature exist
In: the focused ion beam equipment clamp assemblies include the sliding rack being arranged on the second sliding block along Z-direction and sliding framework
At the clamping piece of sliding cooperation and the lead screw transmission mechanism for driving clamping piece to move along Z-direction.
7. the system of electrohydrodynamics spray printing pattern three-dimension flexible structure according to claim 1 or 2 or 3 or 4 or 5 or 6
Standby equipment, it is characterised in that: heating plate is equipped between the bottom plate and spray printing platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821346376.8U CN208993305U (en) | 2018-08-21 | 2018-08-21 | The Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821346376.8U CN208993305U (en) | 2018-08-21 | 2018-08-21 | The Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208993305U true CN208993305U (en) | 2019-06-18 |
Family
ID=66798753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821346376.8U Expired - Fee Related CN208993305U (en) | 2018-08-21 | 2018-08-21 | The Preparation equipment of electrohydrodynamics spray printing pattern three-dimension flexible structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208993305U (en) |
-
2018
- 2018-08-21 CN CN201821346376.8U patent/CN208993305U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190618 Termination date: 20200821 |