CN103064137B - Electric field induction imprinting method of aspheric surface micro-lens array - Google Patents
Electric field induction imprinting method of aspheric surface micro-lens array Download PDFInfo
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- CN103064137B CN103064137B CN201310006766.6A CN201310006766A CN103064137B CN 103064137 B CN103064137 B CN 103064137B CN 201310006766 A CN201310006766 A CN 201310006766A CN 103064137 B CN103064137 B CN 103064137B
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Abstract
Disclosed is an electric field induction imprinting method of an aspheric surface micro-lens array. A micro-column array is placed on information technology outsourcing (ITO) conducting glass base materials in an imprinting mode, then another piece of ITO conducting glass is used as a top electrode, then a pair of parallel plate electrodes are formed with the base materials, and direct voltage is applied between the electrodes. When the base materials are heated to a temperature higher than a glassy state transition temperature of a polymer, under the induction impact of an electric field, the micro-column array deforms into the aspheric surface micro-lens array in a flowing mode, and the specific steps includes preparing and processing a imprinting mould, then selecting the base materials, electrodes and the polymer, then imprinting, demolding, applying an external electric field to conduct electric field induction remolding, and last, the polymer is solidified and the aspheric surface micro-lens array is acquired. The electric field induction imprinting method of the aspheric surface micro-lens array does not need complex process control, greatly reduces processing cost and improves processing efficiency.
Description
Technical field
The invention belongs to technical field of micro-nano manufacture, be specifically related to a kind of electric field induce method for stamping of aspherical microlens array.
Background technology
Lenticule refers to micro lens, usually its diameter be 10 μm to 1 ㎜ level, and according to the difference of surface curvature, lenticule can be divided into spherical microlens and aspherical microlens, wherein aspherical microlens can eliminate spherical aberration and more practical better due to it, is exactly microlens array by these micro lens according to the array that certain filling rate and arrangement mode form.In view of it is in the communication technology, the huge applications of optical measurement and the numerous areas such as flat pannel display and shooting, the various preparation method about microlens array proposes in succession, such as nuda rice, ink-jet printing process and excimer laser ablation etc.But these methods all can only prepare the lenticule of spherical, its employing in application and popularization are had a strong impact on.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the present invention is to provide a kind of electric field induce method for stamping of aspherical microlens array, polymkeric substance aspherical microlens array can be produced, cutting down finished cost, while improving working (machining) efficiency, also assures that lenticular surface smoothness.
In order to achieve the above object, the technical scheme that the present invention takes is:
A kind of electric field induce method for stamping of aspherical microlens array, ITO electro-conductive glass base material leaves micro-pillar array, then use another block ITO electro-conductive glass as top electrode, pair of parallel plate electrode is formed with base material, and DC voltage is applied between electrode, time more than heated substrate to the glass transition temperature of polymkeric substance, by electric field force inducing action, micro-pillar array again stream becomes the microlens array with aspheric surface face type.
An electric field induce method for stamping for aspherical microlens array, comprises the following steps:
1) preparation of impressing mould and process: utilize photoetching and etching technics to process required array of circular apertures graphic structure at crystal column surface, and surface treatment is carried out to it, the demoulding after making it be beneficial to impression;
2) selection of base material, electrode and polymkeric substance: base material and electrode all adopt surperficial evaporation a layer thickness to be the ITO electro-conductive glass of the electrical-conductive nanometer indium tin metal compound of 50nm-300nm, polymkeric substance adopts has thermoplastic material, or has the material of thermoplasticity and ultraviolet curable simultaneously;
3) impression and the demoulding: utilize sol evenning machine spin coating one layer of polymeric on base material, polymer thickness is 10um-50um, with the pressure P of 10Mpa, the impressing mould after process is pressed on base material, combine closely with base material, and ensure that environment temperature is more than the glass transition temperature of polymkeric substance, after 1-20 minute, is cooled to room temperature, the demoulding, base material stays polymkeric substance columnar arrays;
4) external electric field is applied: utilize another block ITO electro-conductive glass as top electrode, pair of plates electrode is formed with substrate combination, one deck clearance is had between two plate electrodes, clearance is 2-4 times of columnar arrays height, adopt direct supply, voltage regulation limits is at 300-500V, and positive pole connects electrode, negative pole connects base material, applies external electric field to the polymkeric substance micro-pillar array formed;
5) electric field induce reshaping: again environment temperature is risen to more than glass transition temperature, regulation voltage size, makes electric field force be greater than polymer surfaces tension force, continues 1-20 minute, until forming process terminates;
6) solidification of polymkeric substance: when keeping applying voltage constant, according to polymeric material character, select corresponding curing mode, finally obtaining aspheric surface is lens arra.
Described polymkeric substance is PMMA, PS or SU-8 glue.
The present invention breaches the restriction that conventional microlens arrays preparation technology can only prepare spherical lens, and the microlens array obtained has super-smooth surface characteristic, is more conducive to the widespread use of optical field.Simultaneously because the present invention does not need complicated technology controlling and process, greatly reduce processing cost, improve working (machining) efficiency.The technical program can be widely used in chip lab, flat-panel monitor, the many-side such as optical system detection and observation.
Accompanying drawing illustrates:
Fig. 1-1 is impressing mould front view.
Fig. 1-2 is the upward view of impressing mould.
Fig. 2 is that spin coating has polymer material substrate schematic diagram.
Fig. 3 is by template pressure schematic diagram on polymeric materials.
Fig. 4 is the polymkeric substance columnar arrays schematic diagram formed after the demoulding.
Fig. 5 carries out electricity induction reshaping schematic diagram for applying external electric field in a heated state.
Fig. 6 is that in electric field induce reshaping process, polymkeric substance local flow becomes principle schematic.
Fig. 7 is the Polymer microlenses arrays schematic diagram after curing molding.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
Impressing mould is pressed in the surfaces of conductive substrates being coated with polymkeric substance in advance with the pressure of 10Mpa, impressing mould and base material are combined closely, ensure that environment temperature is more than polymer glass state inversion temperature, to realize the completely filling of polymkeric substance in impressing mould cavity, then the room temperature demoulding is cooled to, obtain the polymkeric substance micro-pillar array on conductive base, with another block conductive plate as top electrode, pair of parallel electrode pair is formed with base material, between apply the DC voltage of 300-500V, and again environment temperature is risen to more than the glass transition temperature of polymkeric substance, under the inducing action of electric field force, polymkeric substance micro-pillar array rheoforging again, obtain the Polymer microlenses arrays with aspheric surface face type, last according to polymeric material character, by corresponding curing mode, by polymer cure.
An electric field induce method for stamping for aspherical microlens array, comprises the following steps:
1) preparation of impressing mould and process: with reference to Fig. 1, impressing mould 1 adopts the traditional handicraft of photoetching and etching, wafer makes microwell array 2, low-surface-energy process is carried out after completing, namely make the anti-sticking layer 3 that a layer thickness is 20-100nm in impressing mould front, prevent from damaging mini column array structure during the demoulding;
2) selection of base material, electrode and polymkeric substance: with reference to Fig. 2, select ITO electro-conductive glass as base material 4 and top electrode 5, the two flat plate electrode that partners, polymkeric substance can adopt has thermoplastic, or has the material of thermoplasticity and ultraviolet curable simultaneously;
3) impression and the demoulding: with reference to Fig. 3 and Fig. 4, base material 4 is the polymkeric substance of 10-50um by sol evenning machine spin coating a layer thickness, with constant pressure P=10MPa, the impressing mould 1 after process is pressed on base material 4, impressing mould and base material are combined closely, and with more than hot plate 7 heated substrate to the glass transition temperature of material, after 1-20 minute, be cooled to room temperature, the demoulding, base material 4 leaves polymkeric substance micro-pillar array 8;
4) extra electric field is applied: with reference to Fig. 5, with another block ito glass as top electrode 5, constant voltage is applied between pair of plates electrode, have one deck clearance between two plate electrodes, clearance is 2-4 times of columnar arrays height, adopts direct supply, voltage 300-500V continuously adjustabe, electrical-conductive nanometer indium tin metal on base material 4 is oxidized to the negative pole that ITO layer connects power supply, and the ITO layer of top electrode 5 connects the positive pole of power supply, applies external electric field to the polymkeric substance micro-pillar array 8 formed;
5) electric field induce reshaping: with reference to Fig. 6, again heated by hot plate 7 pairs of base materials 4, temperature is made to rise to more than glass transition temperature, regulate the size of DC voltage 9, electric field force is increased to is enough to overcome the surface tension of material, thus drive the reshaping of polymkeric substance micro-pillar array 8, to obtain the structure of aspheric surface face type, the polymkeric substance micro-pillar array 8 be between lower plate electrode is subject to the effect of an electric field force F upwards, and polymeric material herein can be made to overcome surface tension for electric field force F and viscosity resistance upwards flows.Under the acting in conjunction of these power, the final stream of polymkeric substance is deformed into the structure 10 that has aspheric surface face type;
6) solidification of polymkeric substance: with reference to Fig. 7, make polymeric material under constant voltage, voltage swing is certain value of 300-500V, keep 1-20 minute, cure polymer, the curing mode of polymkeric substance is determined by the character of polymkeric substance, as uv-exposure solidification, cooling solidification etc., after having solidified, withdraw top electrode, final aspherical microlens array 10 has just been stayed on base material 4.
Said method, the aspherical microlens array that can realize is of a size of: mould bossing size W1 and sunk part size W2 is 10 microns to 100 micron orders, distance d between plate electrode be 50 microns to 100 micron orders, impression height and lens height h1, h2 be 10 microns to 100 micron orders, impression stay film and final molding to stay film thickness h3, h4 be 1 micron to 10 micron orders, final lens sizes W3 be 10 microns to 100 micron orders, lens gap W4 be 10 microns to 100 micron orders.
The sub-translucent array of polymkeric substance aspheric surface of imprint lithography and electric field induce reshaping, utilize imprint lithography to complete large-area location to microlens array, this step simple economy, the rate of output is high, the micro-pillar array formed is in follow-up electric field induce forming process, further stream becomes, finally define the microlens array with excellent surface structure, remove and ablation because this kind of processing technology does not relate to any material, in the process of polymkeric substance natural flow, lenticular surfaceness is very tiny, below 10 nanometers can be reached, so be a kind of very simple and practical preparation method, product excellent optical performance, may be used for various optical field.
On the other hand, instant invention overcomes the restriction that conventional microlens preparation technology can only prepare spherical microlens, by the reshaping of electric field induce micro-pillar array, the microlens array of formation has aspheric surface face type, is suitable for application and the popularization of various optical field.
Claims (2)
1. an electric field induce method for stamping for aspherical microlens array, is characterized in that, comprise the following steps:
1) preparation of impressing mould and process: utilize photoetching and etching technics to process required array of circular apertures graphic structure at crystal column surface, and surface treatment is carried out to it, the demoulding after making it be beneficial to impression;
2) selection of base material, electrode and polymkeric substance: base material and electrode all adopt surperficial evaporation a layer thickness to be the ITO electro-conductive glass of the electrical-conductive nanometer indium tin metal compound of 50nm-300nm, polymkeric substance adopts has thermoplastic material, or has the material of thermoplasticity and ultraviolet curable simultaneously;
3) impression and the demoulding: utilize sol evenning machine spin coating one layer of polymeric on base material, polymer thickness is 10um-50um, with the pressure P of 10Mpa, the impressing mould after process is pressed on base material, combine closely with base material, and ensure that environment temperature is more than the glass transition temperature of polymkeric substance, after 1-20 minute, is cooled to room temperature, the demoulding, base material stays polymkeric substance columnar arrays;
4) external electric field is applied: utilize another block ITO electro-conductive glass as top electrode, pair of plates electrode is formed with substrate combination, one deck clearance is had between two plate electrodes, clearance is 2-4 times of columnar arrays height, adopt direct supply, voltage regulation limits is at 300-500V, and positive pole connects electrode, negative pole connects base material, applies external electric field to the polymkeric substance micro-pillar array formed;
5) electric field induce reshaping: again environment temperature is risen to more than glass transition temperature, regulation voltage size, makes electric field force be greater than polymer surfaces tension force, continues 1-20 minute, until forming process terminates;
6) solidification of polymkeric substance: when keeping applying voltage constant, according to polymeric material character, selecting corresponding curing mode, finally obtaining aspherical microlens array.
2. the electric field induce method for stamping of a kind of aspherical microlens array according to claim 1, is characterized in that, described polymkeric substance is PMMA, PS or SU-8 glue.
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| CN103387206A (en) * | 2013-07-18 | 2013-11-13 | 中国科学院合肥物质科学研究院 | Manufacturing method of ultramicropore broadband flexible micro-perforated plate |
| CN103771336B (en) * | 2014-01-21 | 2016-04-13 | 西安交通大学 | A kind of energy accumulator manufacture method based on piezopolymer micro structure array |
| CN104045054A (en) * | 2014-05-14 | 2014-09-17 | 中国科学院合肥物质科学研究院 | Method for preparing high-adhesion micro-nano array structure film through wet etching and reverse transfer printing |
| CN104330841B (en) * | 2014-10-30 | 2016-05-04 | 西安交通大学 | The auxiliary manufacture method of electricity of the controlled microlens array of a kind of numerical aperture |
| US20180157169A1 (en) * | 2015-06-15 | 2018-06-07 | Sabic Global Technologies B.V. | Metal electrode formation for oled lighting applications |
| CN106405692B (en) * | 2016-06-14 | 2018-03-16 | 西安交通大学 | A kind of preparation technology of electric field induction fly's-eye lens multilevel hierarchy |
| CN109188862A (en) * | 2018-10-11 | 2019-01-11 | 京东方科技集团股份有限公司 | Stamping structure and its manufacturing method, impression block |
| CN109240040B (en) * | 2018-11-16 | 2021-10-19 | 京东方科技集团股份有限公司 | Imprint template and imprint method |
| CN111170270A (en) * | 2020-01-07 | 2020-05-19 | 南昌大学 | Surface microstructure preparation method based on electric field regulation and control morphology |
| CN112357876B (en) * | 2020-11-25 | 2024-06-04 | 四川大学 | Method for preparing polymer array by combining 3D printing with electric field induction molding |
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| CN101910829A (en) * | 2007-11-14 | 2010-12-08 | 3M创新有限公司 | Make the method for microarray |
| CN102253435A (en) * | 2011-07-11 | 2011-11-23 | 西安交通大学 | Micromachining method for manufacturing polymer cylindrical microlens by electric field induction |
| CN102305960A (en) * | 2011-07-11 | 2012-01-04 | 西安交通大学 | Process for preparing electric field induced convex interface two-dimensional photonic crystal |
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| US7001658B2 (en) * | 2003-04-28 | 2006-02-21 | Eastman Kodak Company | Heat selective electrically conductive polymer sheet |
| EP2304078B1 (en) * | 2008-06-30 | 2015-04-15 | 3M Innovative Properties Company | Method of forming a microstructure |
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| CN101910829A (en) * | 2007-11-14 | 2010-12-08 | 3M创新有限公司 | Make the method for microarray |
| CN102253435A (en) * | 2011-07-11 | 2011-11-23 | 西安交通大学 | Micromachining method for manufacturing polymer cylindrical microlens by electric field induction |
| CN102305960A (en) * | 2011-07-11 | 2012-01-04 | 西安交通大学 | Process for preparing electric field induced convex interface two-dimensional photonic crystal |
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