CN103064137A - Electric field induction imprinting method of aspheric surface micro-lens array - Google Patents

Electric field induction imprinting method of aspheric surface micro-lens array Download PDF

Info

Publication number
CN103064137A
CN103064137A CN2013100067666A CN201310006766A CN103064137A CN 103064137 A CN103064137 A CN 103064137A CN 2013100067666 A CN2013100067666 A CN 2013100067666A CN 201310006766 A CN201310006766 A CN 201310006766A CN 103064137 A CN103064137 A CN 103064137A
Authority
CN
China
Prior art keywords
electric field
polymkeric substance
base material
array
aspheric surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2013100067666A
Other languages
Chinese (zh)
Other versions
CN103064137B (en
Inventor
邵金友
丁玉成
胡鸿
田洪淼
李祥明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xian Jiaotong University
Original Assignee
Xian Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xian Jiaotong University filed Critical Xian Jiaotong University
Priority to CN201310006766.6A priority Critical patent/CN103064137B/en
Publication of CN103064137A publication Critical patent/CN103064137A/en
Application granted granted Critical
Publication of CN103064137B publication Critical patent/CN103064137B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

Disclosed is an electric field induction imprinting method of an aspheric surface micro-lens array. A micro-column array is placed on information technology outsourcing (ITO) conducting glass base materials in an imprinting mode, then another piece of ITO conducting glass is used as a top electrode, then a pair of parallel plate electrodes are formed with the base materials, and direct voltage is applied between the electrodes. When the base materials are heated to a temperature higher than a glassy state transition temperature of a polymer, under the induction impact of an electric field, the micro-column array deforms into the aspheric surface micro-lens array in a flowing mode, and the specific steps includes preparing and processing a imprinting mould, then selecting the base materials, electrodes and the polymer, then imprinting, demolding, applying an external electric field to conduct electric field induction remolding, and last, the polymer is solidified and the aspheric surface micro-lens array is acquired. The electric field induction imprinting method of the aspheric surface micro-lens array does not need complex process control, greatly reduces processing cost and improves processing efficiency.

Description

A kind of electric field of aspherical microlens array is induced method for stamping
Technical field
The invention belongs to technical field of micro-nano manufacture, the electric field that is specifically related to a kind of aspherical microlens array is induced method for stamping.
Background technology
Lenticule refers to micro lens, usually its diameter is that 10 μ m are to 1 ㎜ level, and according to the difference of surface curvature, lenticule can be divided into spherical microlens and aspherical microlens, wherein aspherical microlens is more practical because it can eliminate spherical aberration better, is exactly microlens array by these micro lens according to the array that certain filling rate and arrangement mode form.In view of its in the communication technology, the huge applications of the numerous areas such as optical measurement and flat pannel display and shooting, various preparation methods about microlens array propose in succession, such as the melting photoresist method, ink-jet printing process and excimer laser ablation etc.But these methods all can only prepare the lenticule of spherical, have had a strong impact on its employing and popularization in application.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the present invention is to provide a kind of electric field of aspherical microlens array to induce method for stamping, can produce the polymkeric substance aspherical microlens array, cutting down finished cost, when improving working (machining) efficiency, also guaranteed lenticular surface smoothness.
In order to achieve the above object, the technical scheme taked of the present invention is:
A kind of electric field of aspherical microlens array is induced method for stamping, stay micro-pillar array at ITO electro-conductive glass base material, then use another piece ITO electro-conductive glass as top electrode, form the pair of parallel plate electrode with base material, and between electrode, apply DC voltage, when heated substrate is above to the glassy state inversion temperature of polymkeric substance, be subjected to the electric field force inducing action, micro-pillar array again stream becomes the microlens array with aspheric surface face type.
A kind of electric field of aspherical microlens array is induced method for stamping, may further comprise the steps:
1) preparation of impressing mould and processing: utilize photoetching and etching technics to process required array of circular apertures graphic structure at crystal column surface, and it is carried out surface treatment, the demoulding after making it be beneficial to impression;
2) selection of base material, electrode and polymkeric substance: base material and electrode all adopt surperficial evaporation a layer thickness be the ITO electro-conductive glass of the electrical-conductive nanometer indium tin metal compound of 50nm-300nm, polymkeric substance adopts has thermoplastic material, or has simultaneously the material of thermoplasticity and ultraviolet curable;
3) impression and the demoulding: utilize sol evenning machine spin coating one layer of polymeric on base material, polymer thickness is 10um-50um, impressing mould after will processing with the pressure P of 10Mpa is pressed on the base material, combine closely with base material, and guarantee that environment temperature more than the glassy state inversion temperature of polymkeric substance, after 1-20 minute, is cooled to room temperature, the demoulding stays polymkeric substance column array at base material;
4) apply external electric field: utilize another piece ITO electro-conductive glass as top electrode, form the pair of plates electrode with substrate combination, one deck clearance is arranged between two plate electrodes, the clearance is 2-4 times of columnar arrays height, adopt direct supply, the voltage-regulation scope is at 300-500V, and positive pole connects electrode, negative pole connects base material, and the polymkeric substance microtrabeculae array that forms is applied external electric field;
5) electric field is induced reshaping: environment temperature is risen to more than the glass transition temperature, the regulation voltage size makes electric field force greater than polymer surfaces tension force, continues 1-20 minute again, until forming process finishes;
6) curing of polymkeric substance: in the situation that it is constant to keep applying voltage, according to polymeric material character, select corresponding curing mode, finally obtaining aspheric surface is lens arra.
Described polymkeric substance is PMMA, PS or SU-8 glue.
The present invention has broken through the restriction that conventional microlens array preparation technology can only prepare spherical lens, and the microlens array that obtains has the super-smooth surface characteristic, more is conducive to the widespread use of optical field.Because the present invention does not need complicated technology controlling and process, greatly reduce processing cost simultaneously, improved working (machining) efficiency.The technical program can be widely used in the many-sides such as chip lab, flat-panel monitor, optical system detection and observation.
Description of drawings:
Fig. 1-1 is the impressing mould front view.
Fig. 1-2 is the upward view of impressing mould.
Fig. 2 is that spin coating has polymeric material base material schematic diagram.
Fig. 3 is for being pressed in template the schematic diagram on the polymeric material.
Fig. 4 is the polymkeric substance column array schematic diagram that forms after the demoulding.
Fig. 5 carries out electricity and induces the reshaping schematic diagram for apply external electric field under heated condition.
Fig. 6 is that electric field is induced the local rheology principle schematic of polymkeric substance in the reshaping process.
Fig. 7 is the Polymer microlenses arrays schematic diagram behind the curing molding.
Embodiment
Below in conjunction with accompanying drawing the present invention is described in detail.
Impressing mould is pressed in the surfaces of conductive substrates that is coated with in advance polymkeric substance with the pressure of 10Mpa, impressing mould and base material are combined closely, guarantee that environment temperature is more than polymer glass attitude inversion temperature, to realize the fully filling of polymkeric substance in the impressing mould cavity, then be cooled to the room temperature demoulding, obtain the polymkeric substance microtrabeculae array on conductive base, with another piece conductive plate as top electrode, form the pair of parallel electrode pair with base material, between apply the DC voltage of 300-500V, and again environment temperature is risen to more than the glassy state inversion temperature of polymkeric substance, under the inducing action of electric field force, polymkeric substance microtrabeculae array is rheoforging again, obtain having the Polymer microlenses arrays of aspheric surface face type, at last according to polymeric material character, by corresponding curing mode, with polymer cure.
A kind of electric field of aspherical microlens array is induced method for stamping, may further comprise the steps:
1) preparation of impressing mould and processing: with reference to Fig. 1, impressing mould 1 adopts the traditional handicraft of photoetching and etching, make microwell array 2 at wafer, carrying out low-surface-energy after finishing processes, be the anti-sticking layer 3 of 20-100nm in the positive making of impressing mould a layer thickness namely, damage mini column array structure when preventing the demoulding;
2) selection of base material, electrode and polymkeric substance: with reference to Fig. 2, select the ITO electro-conductive glass as base material 4 and top electrode 5, the two plane plate electrode that partners, polymkeric substance 6 can adopt has thermoplastic, or has simultaneously the material of thermoplasticity and ultraviolet curable;
3) impression and the demoulding: with reference to Fig. 3 and Fig. 4, be the polymkeric substance 6 of 10-50um in base material 4 usefulness sol evenning machine spin coating a layer thickness, impressing mould 1 after will processing with constant pressure P=10MPa is pressed on the base material 4, impressing mould and base material are combined closely, and with hot plate 7 heated substrates to more than the glassy state inversion temperature of material, after 1-20 minute, be cooled to room temperature, the demoulding has stayed polymkeric substance microtrabeculae array 8 at base material 4;
4) apply extra electric field: with reference to Fig. 5, with another piece ito glass as top electrode 5, between the pair of plates electrode, apply constant voltage, one deck clearance is arranged between two plate electrodes, and the clearance is 2-4 times of columnar arrays height, adopts direct supply, voltage 300-500V is adjustable continuously, electrical-conductive nanometer indium tin metal on the base material 4 is oxidized to the negative pole that the ITO layer connects power supply, and the ITO layer of top electrode 5 connects the positive pole of power supply, and the polymkeric substance microtrabeculae array 8 that forms is applied external electric field;
5) electric field is induced reshaping: with reference to Fig. 6, again heat by 7 pairs of base materials 4 of hot plate, temperature is risen to more than the glassy state inversion temperature, regulate the size of DC voltage 9, electric field force is increased to is enough to overcome the surface tension of material, thereby drive the reshaping of polymkeric substance microtrabeculae array 8, to obtain the structure of aspheric surface face type, be in the effect that polymkeric substance microtrabeculae array 8 between the lower plate electrode is subject to an electric field force F who makes progress, electric field force F can make herein polymeric material overcome surface tension and viscosity resistance upwards flows.Under the acting in conjunction of these power, the final rheology of polymkeric substance forms the structure 10 with aspheric surface face type;
6) curing of polymkeric substance: with reference to Fig. 7, make polymeric material under constant voltage, voltage swing is that certain value of 300-500V all can, kept 1-20 minute, cure polymer, the curing mode of polymkeric substance is determined by the character of polymkeric substance, such as uv-exposure curing, cooling curing etc., after curing is finished, withdraw top electrode, final aspherical microlens array 10 has just been stayed on the base material 4.
Said method, the aspherical microlens array that can realize is of a size of: mould bossing size W1 and sunk part size W2 are 10 microns to 100 micron orders, between the plate electrode apart from d be 50 microns to 100 micron orders, impression height and lens height h1, h2 be 10 microns to 100 micron orders, the impression stay film and final molding to stay film thickness h3, h4 be 1 micron to 10 micron orders, final lens sizes W3 be 10 microns to 100 micron orders, lens gap W4 be 10 microns to 100 micron orders.
Imprint lithography and electric field are induced the sub-translucent array of polymkeric substance aspheric surface of reshaping, to utilize imprint lithography to finish large-area location to microlens array, this step simple economy, the rate of output is high, the micro-pillar array that forms is induced in the forming process at follow-up electric field, further rheology, finally formed the microlens array with excellent surface structure, any material is removed and ablation because this kind processing technology does not relate to, and in the process of polymkeric substance natural flow, lenticular surfaceness is very tiny, can reach 10 below the nanometer, so be a kind of very simple and practical preparation method, the product excellent optical performance can be used for various optical fields.
On the other hand, the present invention has overcome the restriction that conventional microlens preparation technology can only prepare spherical microlens, induce the reshaping of micro-pillar array by electric field, the microlens array of formation has aspheric surface face type, is suitable for application and the popularization of various optical fields.

Claims (2)

1. the electric field of an aspherical microlens array is induced method for stamping, it is characterized in that, may further comprise the steps:
1) preparation of impressing mould and processing: utilize photoetching and etching technics to process required array of circular apertures graphic structure at crystal column surface, and it is carried out surface treatment, the demoulding after making it be beneficial to impression;
2) selection of base material, electrode and polymkeric substance: base material and electrode all adopt surperficial evaporation a layer thickness be the ITO electro-conductive glass of the electrical-conductive nanometer indium tin metal compound of 50nm-300nm, polymkeric substance adopts has thermoplastic material, or has simultaneously the material of thermoplasticity and ultraviolet curable;
3) impression and the demoulding: utilize sol evenning machine spin coating one layer of polymeric on base material, polymer thickness is 10um-50um, impressing mould after will processing with the pressure P of 10Mpa is pressed on the base material, combine closely with base material, and guarantee that environment temperature more than the glassy state inversion temperature of polymkeric substance, after 1-20 minute, is cooled to room temperature, the demoulding stays polymkeric substance column array at base material;
4) apply external electric field: utilize another piece ITO electro-conductive glass as top electrode, form the pair of plates electrode with substrate combination, one deck clearance is arranged between two plate electrodes, the clearance is 2-4 times of columnar arrays height, adopt direct supply, the voltage-regulation scope is at 300-500V, and positive pole connects electrode, negative pole connects base material, and the polymkeric substance microtrabeculae array that forms is applied external electric field;
5) electric field is induced reshaping: environment temperature is risen to more than the glass transition temperature, the regulation voltage size makes electric field force greater than polymer surfaces tension force, continues 1-20 minute again, until forming process finishes;
6) curing of polymkeric substance: in the situation that it is constant to keep applying voltage, according to polymeric material character, select corresponding curing mode, finally obtain aspherical microlens array.
2. the electric field of a kind of aspherical microlens array according to claim 1 is induced method for stamping, it is characterized in that, described polymkeric substance is PMMA, PS or SU-8 glue.
CN201310006766.6A 2013-01-09 2013-01-09 Electric field induction imprinting method of aspheric surface micro-lens array Active CN103064137B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310006766.6A CN103064137B (en) 2013-01-09 2013-01-09 Electric field induction imprinting method of aspheric surface micro-lens array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310006766.6A CN103064137B (en) 2013-01-09 2013-01-09 Electric field induction imprinting method of aspheric surface micro-lens array

Publications (2)

Publication Number Publication Date
CN103064137A true CN103064137A (en) 2013-04-24
CN103064137B CN103064137B (en) 2015-07-08

Family

ID=48106835

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310006766.6A Active CN103064137B (en) 2013-01-09 2013-01-09 Electric field induction imprinting method of aspheric surface micro-lens array

Country Status (1)

Country Link
CN (1) CN103064137B (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103387206A (en) * 2013-07-18 2013-11-13 中国科学院合肥物质科学研究院 Manufacturing method of ultramicropore broadband flexible micro-perforated plate
CN103771336A (en) * 2014-01-21 2014-05-07 西安交通大学 Manufacturing method of energy harvester based on piezoelectric polymer micro-structure array
CN104045054A (en) * 2014-05-14 2014-09-17 中国科学院合肥物质科学研究院 Method for preparing high-adhesion micro-nano array structure film through wet etching and reverse transfer printing
CN104330841A (en) * 2014-10-30 2015-02-04 西安交通大学 Electric assistant manufacturing method of controllable numerical aperture microlens array
CN106405692A (en) * 2016-06-14 2017-02-15 西安交通大学 Preparation technology of fly's-eye lens multi-level structure through electric field induction
CN107850833A (en) * 2015-06-15 2018-03-27 沙特基础工业全球技术公司 The metal electrode of OLED illumination applications is formed
CN109188862A (en) * 2018-10-11 2019-01-11 京东方科技集团股份有限公司 Stamping structure and its manufacturing method, impression block
CN109240040A (en) * 2018-11-16 2019-01-18 京东方科技集团股份有限公司 Impression block and method for stamping
CN111170270A (en) * 2020-01-07 2020-05-19 南昌大学 Surface microstructure preparation method based on electric field regulation and control morphology
CN112357876A (en) * 2020-11-25 2021-02-12 四川大学 Method for preparing polymer array by combining 3D printing with electric field induced molding
CN112357876B (en) * 2020-11-25 2024-06-04 四川大学 Method for preparing polymer array by combining 3D printing with electric field induction molding

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040213954A1 (en) * 2003-04-28 2004-10-28 Bourdelais Robert P. Heat selective electrically conductive polymer sheet
CN101910829A (en) * 2007-11-14 2010-12-08 3M创新有限公司 Make the method for microarray
US20110111182A1 (en) * 2008-06-30 2011-05-12 Stay Matthew S Method of forming a microstructure
CN102253435A (en) * 2011-07-11 2011-11-23 西安交通大学 Micromachining method for manufacturing polymer cylindrical microlens by electric field induction
CN102305960A (en) * 2011-07-11 2012-01-04 西安交通大学 Process for preparing electric field induced convex interface two-dimensional photonic crystal

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040213954A1 (en) * 2003-04-28 2004-10-28 Bourdelais Robert P. Heat selective electrically conductive polymer sheet
CN101910829A (en) * 2007-11-14 2010-12-08 3M创新有限公司 Make the method for microarray
US20110111182A1 (en) * 2008-06-30 2011-05-12 Stay Matthew S Method of forming a microstructure
CN102253435A (en) * 2011-07-11 2011-11-23 西安交通大学 Micromachining method for manufacturing polymer cylindrical microlens by electric field induction
CN102305960A (en) * 2011-07-11 2012-01-04 西安交通大学 Process for preparing electric field induced convex interface two-dimensional photonic crystal

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103387206A (en) * 2013-07-18 2013-11-13 中国科学院合肥物质科学研究院 Manufacturing method of ultramicropore broadband flexible micro-perforated plate
CN103771336A (en) * 2014-01-21 2014-05-07 西安交通大学 Manufacturing method of energy harvester based on piezoelectric polymer micro-structure array
CN103771336B (en) * 2014-01-21 2016-04-13 西安交通大学 A kind of energy accumulator manufacture method based on piezopolymer micro structure array
CN104045054A (en) * 2014-05-14 2014-09-17 中国科学院合肥物质科学研究院 Method for preparing high-adhesion micro-nano array structure film through wet etching and reverse transfer printing
CN104330841A (en) * 2014-10-30 2015-02-04 西安交通大学 Electric assistant manufacturing method of controllable numerical aperture microlens array
CN107850833A (en) * 2015-06-15 2018-03-27 沙特基础工业全球技术公司 The metal electrode of OLED illumination applications is formed
CN106405692A (en) * 2016-06-14 2017-02-15 西安交通大学 Preparation technology of fly's-eye lens multi-level structure through electric field induction
CN109188862A (en) * 2018-10-11 2019-01-11 京东方科技集团股份有限公司 Stamping structure and its manufacturing method, impression block
WO2020073632A1 (en) * 2018-10-11 2020-04-16 Boe Technology Group Co., Ltd. Imprint template, method of fabricating imprint template, apparatus for performing method of fabricating imprint template, imprint mold for fabricating an imprint template
US11420361B2 (en) 2018-10-11 2022-08-23 Boe Technology Group Co., Ltd. Imprint template, method of fabricating imprint template, apparatus for performing method of fabricating imprint template, imprint mold for fabricating an imprint template
CN109240040A (en) * 2018-11-16 2019-01-18 京东方科技集团股份有限公司 Impression block and method for stamping
US11531265B2 (en) 2018-11-16 2022-12-20 Beijing Boe Technology Development Co., Ltd. Imprint template and imprint method
CN111170270A (en) * 2020-01-07 2020-05-19 南昌大学 Surface microstructure preparation method based on electric field regulation and control morphology
CN112357876A (en) * 2020-11-25 2021-02-12 四川大学 Method for preparing polymer array by combining 3D printing with electric field induced molding
CN112357876B (en) * 2020-11-25 2024-06-04 四川大学 Method for preparing polymer array by combining 3D printing with electric field induction molding

Also Published As

Publication number Publication date
CN103064137B (en) 2015-07-08

Similar Documents

Publication Publication Date Title
CN103064137B (en) Electric field induction imprinting method of aspheric surface micro-lens array
CN103159164B (en) A kind of electric field induce method for stamping of high-depth-to-width-microcolumn microcolumn array
CN101339364B (en) Method for manufacturing microlens array by soft mode impressing
CN101446762B (en) Micro-complex type method for inducing electric field under the restrict of non-contact moulding board
CN102540284B (en) Preparation method of micro-lens array based on negative photoresist and mask moving exposure process
CN103149607B (en) A kind of fabricating method of microlens array be shaped based on template electric induction
CN101823690A (en) Manufacturing method of SU-8 nano fluid system
CN103852972A (en) Micrometer impressing and laser induction forming method of double-focus microlens array
CN104330841B (en) The auxiliary manufacture method of electricity of the controlled microlens array of a kind of numerical aperture
Zhu et al. Flexible biconvex microlens array fabrication using combined inkjet-printing and imprint-lithography method
CN103217849A (en) Novel-structure adjustable-focus liquid crystal microlens array
Hu et al. Fabrication of large-area cylindrical microlens array based on electric-field-driven jet printing
CN102253435A (en) Micromachining method for manufacturing polymer cylindrical microlens by electric field induction
CN102305960B (en) Process for preparing electric field induced convex interface two-dimensional photonic crystal
CN105607163B (en) A kind of impression manufacture method on the surface with lenticule or microlens array structure
CN106405692B (en) A kind of preparation technology of electric field induction fly's-eye lens multilevel hierarchy
CN106094426A (en) A kind of Thinfilm pattern and forming method, display device
CN103197362B (en) Electric field induction rheology forming method of paraboloid-like microlens array
CN105824063A (en) Variable-focus micro lens array structure based on electric actuation and preparation process thereof
CN104122747A (en) Electroosmosis driving nanoimprint device and working method thereof
Hsieh et al. Lens-profile control by electrowetting fabrication technique
CN102243436A (en) Electric-field-induced micro-compounding method under geometrical restraint
CN102358611B (en) Dielectrophoretic force embossing and forming method for manufacturing microlens array with parabolic concave surface
CN102207563A (en) Device and method for processing wide-breadth high-precision micro-column lens array plate
CN106082597A (en) A kind of optical aspherical surface glass molds press forming device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant