CN109001228A - A kind of substrate defects detection rotary table with back lighting - Google Patents
A kind of substrate defects detection rotary table with back lighting Download PDFInfo
- Publication number
- CN109001228A CN109001228A CN201811087515.4A CN201811087515A CN109001228A CN 109001228 A CN109001228 A CN 109001228A CN 201811087515 A CN201811087515 A CN 201811087515A CN 109001228 A CN109001228 A CN 109001228A
- Authority
- CN
- China
- Prior art keywords
- substrate
- rotary table
- positioning
- defects detection
- back lighting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 95
- 238000001514 detection method Methods 0.000 title claims abstract description 51
- 230000007547 defect Effects 0.000 title claims abstract description 48
- 238000005286 illumination Methods 0.000 claims abstract description 32
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 235000007164 Oryza sativa Nutrition 0.000 claims description 5
- 235000009566 rice Nutrition 0.000 claims description 5
- 238000004458 analytical method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 238000003491 array Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims description 2
- 240000007594 Oryza sativa Species 0.000 claims 1
- 238000012360 testing method Methods 0.000 abstract description 2
- 238000007789 sealing Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 241000209094 Oryza Species 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention provides a kind of substrate defects detection rotary table with back lighting, positioning device include the annulus pallet for different size substrate, have scale on annulus pallet, realize the positioning to the circular substrate of different size；Cylindrical connecting bracket realizes the sealing to light source for connecting substrate positioning device and backlighting arrangement；Backlighting arrangement provides the light source of diversified forms, while guaranteeing Uniform Illumination；Circular ring shape pinboard realizes the fixation of lighting device and turntable；Turntable can drive backlighting arrangement and substrate positioning device to realize rotary motion；Pedestal with removable unloading functions, for fix substrate positioning device and with the connection of detection platform.The present invention can not only be realized to the substrate wafer accurate positioning of plurality of specifications and rotary motion compared with existing device for whole audience sweep test, and can provide the back light of a variety of Uniform Illuminations, meet lighting demand when different defects detections.
Description
Technical field
The present invention relates to substrate defects fields of measurement more particularly to a kind of substrate defects detection revolutions with back lighting
Workbench.
Background technique
With the rapid development of semiconductor material, there is great demand to high performance semiconductor material, especially LED shines
The fields such as bright, power electronic devices, new-energy automobile；Support of the semiconductor substrate as entire device, the quality of substrate are direct
Performance concerning device.Substrate material in process, can inevitably generate damage, leave defect on the surface of substrate, and serve as a contrast
The most rounded transparent/translucent state in bottom, translucency is stronger, and defect and substrate intrinsic colour contrast are smaller, this is just
To lossless optical detection, more stringent requirements are proposed.
In the detection system of substrate defects, the motion mode of lighting device, positioning device and workbench accounts for lifting foot
The position of weight.The mode of illumination, the uniformity of angle and light, intensity etc. directly affect measurement effect and later image processing
Complexity；Mode, the flatness of placement and the repeatability of measurement that substrate is placed, directly affect positioning accuracy；Work
The selection for making the motion mode of platform directly affects detection speed, smaller in field of detection in especially high-accuracy measuring system
In the case where, rotary motion is added, reduces whole audience detection time.
In existing detection device, the optical lens surface defects detection system as designed by 204064972 U of patent CN
System, there are three light source and three cameras for the system, are respectively completed the positioning, front detection and reverse side detection of optical mirror slip.Pass through
The combination of thimble structure and manipulator completes the exchange of optical mirror slip front and back sides, optical mirror slip front and back sides is realized under different station
The automatic detection of flaw.But whole system is illuminated using the straight incident, single light source in front, according to back lighting, because of light source
Without leakproofness, interference when front and reverse side are detected vulnerable to ambient influences the accuracy of testing result.Patent
The detection device of semiconductor wafer designed by CN 204359271U, the device is by computer to semiconductor wafer profile figure
The calculating and analysis of picture move to control, and realize that detection light is incident upon the specific position of semiconductor wafer, and receive using optical path
Collecting system forms light intensity corresponding with position, spectroscopic data hum pattern by luminous intensity and spectral information to computer.The device
Light source be it is embedded in the detection system, only a kind of illumination selection, and be merely able to acquisition light intensity corresponding with wafer position
And spectral information.The defectoscopy device of chip designed by 106574900 A of patent CN, the device use upper and lower air blower
Air is ejected into wafer surface so that the chip is fixed, and configures three measuring devices, completes that chip is upper and lower, side surface
Defects detection.But the device is only applicable to the wafer detection of single size, and positioning accuracy not can guarantee.Therefore, in list
Under light source lighting method, single size workbench and positioning device, be not able to satisfy different size, different defect type transparent or
The detection demand of translucent substrate material.
Summary of the invention
The substrate defects detection revolution with back lighting that the main technical problem to be solved by the present invention is to provide a kind of
A kind of substrate defects detection rotary table with back lighting of workbench.
In order to solve the above technical problems, the substrate defects detection revolution with back lighting that the present invention provides a kind of
Workbench, comprising: pedestal, turntable, circular ring shape pinboard, backlighting arrangement, cylindrical connecting bracket and substrate positioning dress
It sets；
The bottom face of the turntable is formed with the upper surface of pedestal and is removably fixedly connected；The upper table of the turntable
Face is connected with the circular ring shape connecting plate；Motor driven turntable drives the circular ring shape connecting plate rotation；
One side of the circular ring shape connecting plate far from turntable is arranged in the backlighting arrangement, and the back lighting fills
The light direction set is the direction far from the circular ring shape connecting plate；The backlighting arrangement far from circular ring shape connecting plate one
Face is connect by the cylindrical connecting bracket with the substrate positioning device；
The light that goes out of backlighting arrangement is radiated in cylindrical connecting bracket by the cylinder connecting bracket, and blocker ring
Border light enters in cylindrical connecting bracket.
In a preferred embodiment: the substrate positioning device includes multiple positioning annulus pallets in concentric arrays.
In a preferred embodiment: the positioning annulus pallet, the chamfering slope for being 45 ° with inclination angle on the inside of it；Institute
The upper surface for stating positioning annulus pallet has arc groove close to inner circle, convenient for the pick-and-place of annulus pallet and substrate.
In a preferred embodiment: the positioning annulus tray upper surface has scale, each positioning annulus pallet
Scale along evenly spaced radial setting, and circumferentially interval setting be in M shape, for positioning analysis and read substrate
The relative position of defect, the tracing positional in measurement process.
In a preferred embodiment: the positioning annulus pallet inner sidewall positions side with substrate；The setting circle
Ring pallet inner sidewall has circular step, is used to support substrate.
In a preferred embodiment: the cylindrical connecting bracket, centre are hollow structure, are set on the inside of hollow structure
There is step, for connecting substrate positioning device and backlighting arrangement；
In a preferred embodiment: the lighting method of the backlighting arrangement includes downward back optical illumination, low angle
Degree illumination and high angle illumination, and be Uniform Illumination, according to the defect type of substrate material, choose the mode of illumination.
In a preferred embodiment: the light intensity regulating mode of the backlighting arrangement includes to entire lighting device
Region is adjusted, and entire lighting device is divided into 8 regions according to " rice " font, and each region is equipped with driving switch, according to
Type, the orientation of tested substrate material and defect, choose the intensity and angle of illumination.
In a preferred embodiment: the circular ring shape pinboard, by the counterbore backlighting arrangement with
And turntable, reduce the rotation in turning course.
In a preferred embodiment: the two sides of the detachable base have trapezoidal groove, work convenient for manual manipulation
Platform.
The advantages and positive effects of the present invention are: a kind of substrate defects detection revolution work with back lighting
Platform meets the substrate detection demand of plurality of specifications size, provides a variety of lighting methods, meet number of drawbacks type detection demand.
This detection is simple with rotary table structure, lightweight and convenient, and being placed on displacement platform can be used, practical.
Detailed description of the invention
Fig. 1 is the substrate defects detection rotary table structural schematic diagram of the invention with back lighting；
Fig. 2 a- Fig. 2 b is the knot of substrate defects detection rotary table on the direction A-A of the invention with back lighting
Structure cross-sectional view；
Fig. 3 is substrate positioning device top view；
Fig. 4 is substrate positioning device explosive view；
Fig. 5 a- Fig. 5 b is cross-sectional view of the single positioning annulus pallet on the direction B-B；
Fig. 6 a- Fig. 6 b is cross-sectional view of the cylindrical connecting bracket on the direction C-C；
Fig. 7 a- Fig. 7 b is cross-sectional view of the backlighting arrangement on the direction D-D；
Fig. 8 is backlighting arrangement top view；
Fig. 9 is substrate defects schematic diagram；
Figure 10 a- Figure 10 b is cross-sectional view of the circular ring shape connecting plate on the direction E-E；
Figure 11 a- Figure 11 c is turntable three-view diagram；
Figure 12 a- Figure 12 c is pedestal three-view diagram.
In figure:
1, substrate positioning device 2, cylindrical connecting bracket 3, backlighting arrangement
4, circular ring shape connecting plate 5, turntable 6, detachable base
11, annulus pallet 1 12, annulus pallet 2 13, annulus pallet 3
111, annulus tray support step 112, annulus pallet slope groove 113, annulus pallet graduation mark
114, annulus pallet arc groove 115, substrate position side 21,22 steps
23, cylindrical stent graduation mark 31, low angle back lighting mode 32, high angle back lighting mode
33, direct-type backlight lighting method 41,42 positioning counterbores 51, turntable main body
52, turntable motor 61,62 location holes 63, trapezoidal groove
Specific embodiment
In order to which the purpose of the present invention, technical solution and characteristic is explained further, in the following with reference to the drawings and specific embodiments
Substrate defects detection of the son to the present invention with back lighting is further described with rotary table structure & working mechanism.
Fig. 1, Fig. 2 are substrate defects detection rotary table structural schematic diagram and section view of the invention with back lighting
Figure.The substrate defects detection rotary table with back lighting includes substrate positioning device 1, cylindrical stent 2, backlight
Lighting device 3, circular ring shape connecting plate 4, turntable 5 and detachable base 6.Substrate positioning device 1 is on backlighting arrangement 3
Side, the two are connected and fixed by cylindrical stent 2；Annular connecting plate 4 is for being connected and fixed lighting device 3 and turntable 5；Rotation
Platform 5 can drive lighting device 3, cylindrical stent 2 and substrate positioning device 1 to do rotary motion together；Turntable 5 is fixed on removable
6 top of pedestal is unloaded, there are location holes for 6 lower section of detachable base, convenient for entire detection to be fixed on above displacement platform with workbench.
Positioning to substrate material, the top view and explosive view of the substrate positioning device 1 as shown in Figure 3, Figure 4.This hair
It is bright by taking 2 inches, 4 inches and 6 inch substrates as an example, but be not limited to the substrate wafer of this 3 kinds of sizes.From the figure 3, it may be seen that positioning device
Mainly by positioning annulus tray set at, when detecting 6 inch substrates, only need to position annulus pallet 13, when detecting 4 inch substrates,
It needs plus positioning annulus pallet 12 on positioning annulus pallet 13, when detecting 2 inch substrates, in the support for detecting 4 inch substrates
Disk is along with positioning annulus pallet 11；Be divided into the graduation mark 114 of 5mm between having on each positioning annulus pallet, graduation mark 114 with
It centered on the center of circle of annulus pallet, is scattered in the form of " rice " wordline, separately there is substrate to position side scale marker in side, convenient for circle
The positioning of substrate can get the relative position of defect, in measurement to measure again.As shown in figure 5, each annulus pallet
Inside have substrate position side 115, substrate can be fixed and it is positioned；There are three annulus for the inside of each annulus pallet
Shape step 111 is used to support substrate or support annulus pallet when detecting to substrate wafer；The inside of annulus pallet
There is the chamfering slope 112 no more than 45 °, convenient for the pick-and-place between pick-and-place and substrate between annulus pallet and annulus pallet；
On the surface of annulus pallet, there are also symmetrical arc grooves 113 to be convenient for manual manipulation substrate wafer.
The cylinder connecting bracket 2 is equipped with step in the inner wall of hollow structure as shown in fig. 6, intermediate is hollow structure
21, step 22, the insertion of substrate positioning device 1 top, the insertion of lighting device 3 lower section.Cylindrical connecting bracket
Upper surface circumferentially have graduation mark 23, the positioning for annulus pallet.
The lighting device 3 is as shown in fig. 7, the lighting method provided mainly has 3 kinds: downward back optical illumination 33, the angle of elevation
Spend back lighting 32 and low angle back lighting 31.When detecting substrate whole audience defect, downward back optical illumination 33 is selected；When
Detect substrate the defects of collapsing angle, point when, select high angle back lighting 32；When detecting scratch, crackle the defects of, selection
Low angle back lighting 31.The downward back optical illumination 33 using circular arrangement (triangle, diamond shape, " rice " shape can also),
The distance between each small bulbs equalization.The uniformity of the lighting device 3 and several relating to parameters: sample and the photograph
The distance of bright device 3, the light emitting angle of sample and light source, the arrangement situation of light source, the light distribution etc. of each light source.
Each LED light source is identical in the lighting device 3, and each light source intensity distribution meets lambertian distribution.
Relative to entire optical system, the size of single LED is smaller, it is possible to which list LED is considered as point light source.Plurality of LEDs is lined up
Array can improve total luminous flux, and the arrangement mode of LED can be annular, line style, triangle, rectangle, diamond shape etc., the present invention with
For annular.The illumination of certain point should be the superposition for the illumination that every LED is emitted in the point in array in space, equal to guarantee
Even, the number of LED should be even number.The distribution function of single LED light intensity is
Iθ=I0cosθ (1)
Since the light distribution of light source is the cosine function of light emitting anger, light impinges upon the illumination in target face and is similarly cosine
Function, i.e., the Illumination Distribution in target face indicate are as follows:
E (r, θ)=E0(r)cosmθ (2)
Wherein θ indicates the angle of light and light-emitting surface normal at the point of LED light source homed on its target face, E0(r) hair is indicated
In smooth surface normal direction with the brightness value at light source distance r, m value depend on LED chip and LED package lens center of surface opposite position
It sets, it is related to primary optical design.N number of LED lines up circle ring array in rectangular coordinate system, annular radii r, then the seat of LED
Mark is respectivelyN=0,1,2 ..., N.The luxmeter at any point in the space of LED illumination
It is shown as:
It follows that the illumination for being emitted to substrate is the superposition of N number of LED illumination, the size for adjusting circle ring array radius r can
To determine, the Illumination Distribution uniformity is maximum in central area when substrate plan range light source z, seeks second differential to E (x, y, z),
Enable x=0, at y=0,It can be seen that the maximum condition of the uniformity are as follows:
As can be seen from the above equation, the radius of circle ring array and the quantity of LED are unrelated, it is believed that the size of N (> 3) does not change
Become maximum homogeneous condition.So the downward back optical illumination 31 meets homogeneous condition.
In the lighting device 3 there are two types of the regulative modes of illumination intensity, one is adjust each small bulbs by button
Illumination intensity；Another kind is that region is adjusted, and the lighting device 3 is divided into 8 regions according to " rice " font, as shown in figure 8, often
A region is equipped with switch, and controllable switch and illumination intensity are adjusted, each small in addition to adjusting when needing illumination intensity weaker
The brightness of light bulb can also only open symmetrical partial region, such as region 1,3,5,7.It is lacked for different zones are of different shapes
It falls into, when detecting, by controlling the light intensity in single region, the higher image of contrast is obtained, if defect is in region as shown in Figure 9
1 position needs light intensity stronger when if detecting this defect, can individually tune up the light intensity in region 1.
As shown in Figure 10, the lighting device 3 is fixed on the annular connecting plate 4 by top half by positioning counterbore 41
On the annular connecting plate 4, lower half portion is fixedly connected by positioning counterbore 42 with the turntable 5.
The turntable 5 as shown in figure 11, is controlled by stepper motor 52, and substrate positioning device 1, backlight is driven to shine
Bright device 3 does rotary motion, in the detection system, can cooperate XY displacement platform, realize substrate surface whole audience defects detection.
As shown in figure 12, the movement that inside has trapezoidal groove 63 to facilitate workbench, there is positioning in top to the detachable base 6
Hole 61 can be fixed with annular connecting plate, and there is location hole 62 in lower section, and directly workbench is fixed on displacement platform.At intermediate position
A round hole 65 is opened, groove 64 is opened in bottom, and the line of light source is connected through to the control switch in outside.
Substrate defects detection rotary table of the present invention with back lighting, it is simple and compact for structure, it is practical, it is applicable in
In more sizes, number of drawbacks, comprehensive substrate defects detection system.Different detection optics is replaced according to different measurement demands
System, flexibility are big.
The foregoing is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited to this,
Anyone skilled in the art in the technical scope disclosed by the present invention, using this design carries out the present invention non-
Substantive change belongs to the behavior for invading the scope of the present invention.
Claims (11)
1. a kind of substrate defects detection rotary table with back lighting, characterized by comprising: pedestal, turntable, circle
Annular pinboard, backlighting arrangement, cylindrical connecting bracket and substrate positioning device；
The bottom face of the turntable is formed with the upper surface of pedestal and is removably fixedly connected；The upper surface of the turntable with
The circular ring shape connecting plate is connected；Motor driven turntable drives the circular ring shape connecting plate rotation；
The backlighting arrangement is arranged in one side of the circular ring shape connecting plate far from turntable, and the backlighting arrangement
Light direction is the direction far from the circular ring shape connecting plate；One side of the backlighting arrangement far from circular ring shape connecting plate is logical
The cylindrical connecting bracket is crossed to connect with the substrate positioning device；
The light that goes out of backlighting arrangement is radiated in cylindrical connecting bracket by the cylinder connecting bracket, and stops environment light
Into in cylindrical connecting bracket.
2. a kind of substrate defects detection rotary table with back lighting according to claim 1 it is characterized by:
The substrate positioning device includes multiple positioning annulus pallets in concentric arrays.
3. a kind of substrate defects detection rotary table with back lighting according to claim 2, it is characterised in that:
The positioning annulus pallet, the chamfering slope for being 45 ° with inclination angle on the inside of it；The upper surface of the positioning annulus pallet is close
Inner circle has arc groove, convenient for the pick-and-place of annulus pallet and substrate.
4. a kind of substrate defects detection rotary table with back lighting according to claim 2, it is characterised in that:
The positioning annulus tray upper surface has scale, and the scale of each positioning annulus pallet is set along evenly spaced radial
It sets, and circumferentially interval setting is in M shape, for the relative position of positioning analysis and reading substrate defects, in measurement process
Middle tracing positional.
5. a kind of substrate defects detection rotary table with back lighting according to claim 2, it is characterised in that:
The positioning annulus pallet inner sidewall positions side with substrate；The positioning annulus pallet inner sidewall has circular platform
Rank is used to support substrate.
6. a kind of substrate defects detection rotary table with back lighting according to claim 1, it is characterised in that:
The cylindrical connecting bracket, centre are hollow structure, and the inside of hollow structure is equipped with step, for connecting substrate positioning dress
It sets and backlighting arrangement.
7. a kind of substrate defects detection rotary table with back lighting according to claim 1, it is characterised in that:
The lighting method of the backlighting arrangement includes downward back optical illumination, low angle illumination and high angle illumination, and is
Uniform Illumination chooses the mode of illumination according to the defect type of substrate material.
8. a kind of substrate defects detection rotary table with back lighting according to claim 7, it is characterised in that:
The light intensity regulating mode of the backlighting arrangement includes adjusting to the region of entire lighting device, entire lighting device according to
" rice " font is divided into 8 regions, and each region is equipped with driving switch, according to the material of tested substrate and defect
Type, orientation choose the intensity and angle of illumination.
9. a kind of substrate defects detection rotary table with back lighting according to claim 1, it is characterised in that:
The circular ring shape pinboard is reduced in turning course by the counterbore fixed backlighting arrangement and turntable
Rotation.
10. a kind of substrate defects detection rotary table with back lighting according to claim 1, feature exist
In: the two sides of the detachable base have trapezoidal groove, are convenient for manual manipulation workbench.
11. the substrate defects detection rotary table according to claim 1 with back lighting, it is characterised in that: institute
The substrate stated is the Circular wafer of transparent/translucent, and the size of substrate is current mainstream size: 2 inches, 4 inches, 6 inches,
8 inches, but it is not limited to these four sizes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811087515.4A CN109001228B (en) | 2018-09-18 | 2018-09-18 | Rotary workbench with backlight illumination for detecting substrate defects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811087515.4A CN109001228B (en) | 2018-09-18 | 2018-09-18 | Rotary workbench with backlight illumination for detecting substrate defects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109001228A true CN109001228A (en) | 2018-12-14 |
| CN109001228B CN109001228B (en) | 2024-02-27 |
Family
ID=64591540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811087515.4A Active CN109001228B (en) | 2018-09-18 | 2018-09-18 | Rotary workbench with backlight illumination for detecting substrate defects |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109001228B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6111638A (en) * | 1998-08-21 | 2000-08-29 | Trw Inc. | Method and apparatus for inspection of a solar cell by use of a rotating illumination source |
| TW200712467A (en) * | 2005-09-26 | 2007-04-01 | Nihon Micronics Kk | Liquid crystal panel inspection device |
| WO2009021202A2 (en) * | 2007-08-09 | 2009-02-12 | Accretech Usa, Inc. | Apparatus and method for wafer edge defects detection |
| KR101347683B1 (en) * | 2012-07-31 | 2014-01-03 | (주)유텍시스템 | Apparatus for inspecting sapphire wafer |
| CN103604815A (en) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | Glass wafer detection device and calibration method |
| CN104743201A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray structure compatible with wafers of various dimensions |
| CN108267460A (en) * | 2018-02-26 | 2018-07-10 | 湖南科创信息技术股份有限公司 | For the matrix form vision detection system and method for transparent material defects detection |
| CN210136184U (en) * | 2018-09-18 | 2020-03-10 | 华侨大学 | Substrate defect detection rotary worktable with backlight illumination |
-
2018
- 2018-09-18 CN CN201811087515.4A patent/CN109001228B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6111638A (en) * | 1998-08-21 | 2000-08-29 | Trw Inc. | Method and apparatus for inspection of a solar cell by use of a rotating illumination source |
| TW200712467A (en) * | 2005-09-26 | 2007-04-01 | Nihon Micronics Kk | Liquid crystal panel inspection device |
| WO2009021202A2 (en) * | 2007-08-09 | 2009-02-12 | Accretech Usa, Inc. | Apparatus and method for wafer edge defects detection |
| KR101347683B1 (en) * | 2012-07-31 | 2014-01-03 | (주)유텍시스템 | Apparatus for inspecting sapphire wafer |
| CN103604815A (en) * | 2013-11-26 | 2014-02-26 | 上海海事大学 | Glass wafer detection device and calibration method |
| CN104743201A (en) * | 2013-12-30 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Tray structure compatible with wafers of various dimensions |
| CN108267460A (en) * | 2018-02-26 | 2018-07-10 | 湖南科创信息技术股份有限公司 | For the matrix form vision detection system and method for transparent material defects detection |
| CN210136184U (en) * | 2018-09-18 | 2020-03-10 | 华侨大学 | Substrate defect detection rotary worktable with backlight illumination |
Non-Patent Citations (1)
| Title |
|---|
| 张志忠等: "基于机器视觉的镜片表面缺陷检测系统研发", no. 22, pages 22 - 23 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109001228B (en) | 2024-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FI125320B (en) | EVENTS AND SIMILAR OPTICAL MEASUREMENT PROCEDURES | |
| TWI263791B (en) | Method of generating image and illumination device for inspecting substrate | |
| KR101322292B1 (en) | Optimizing use and performance of optical systems implemented with telecentric on-axis dark field illumination | |
| US7616317B2 (en) | Reflectometer and associated light source for use in a chemical analyzer | |
| TWI328108B (en) | ||
| SG176393A1 (en) | Wet-processing apparatus | |
| CN105424717A (en) | Optical detection device for detecting multiple defects | |
| US9239147B2 (en) | Apparatus and method for obtaining uniform light source | |
| TW201333499A (en) | Optical detection apparatus of light emission element to be tested and method thereof | |
| US20170023614A1 (en) | Image Sensor Testing Probe Card | |
| CN105652611B (en) | Position determining means and method, lithographic device and article manufacturing method | |
| CN110068534A (en) | Detection accurate electro-optical device and measuring instrument out | |
| KR960005091B1 (en) | Bonding wire inspection apparatus | |
| JPH07174522A (en) | Apparatus and method for measuring size of semiconductor device | |
| US20050180160A1 (en) | Hemispherical illuminator for three dimensional inspection | |
| CN210136184U (en) | Substrate defect detection rotary worktable with backlight illumination | |
| TWM578381U (en) | Measuring device for array type lighting unit | |
| CN109001228A (en) | A kind of substrate defects detection rotary table with back lighting | |
| CN212903819U (en) | Stray light detection device | |
| CN107179177B (en) | Optical detection device of light-emitting diode | |
| CN114264452B (en) | Light color detection system and detection method for single pixel of micro light emitting device array | |
| JP2001324450A (en) | Method and system for illuminating object with focused light at varying angles of incidence and multi-color light source for use therein | |
| TW201331560A (en) | Light-receiving apparatus capable of increasing light-receiving magnitude and angle | |
| JP2006250584A (en) | Lighting system | |
| CN211741851U (en) | Light-transmitting cylindrical lens detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |