JP2006250584A - Lighting system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lighting system more precisely inspecting the surface of a sample than before by reducing the brightness irregularity of the surface of the sample even if the dimension of the sample is large. <P>SOLUTION: A diffusion reflection plate 3, which is formed into a cylindrical shape having a proper height dimension, has white matting coating applied to its inner surface and irregularly reflects incident light, and is erected on the peripheral edge of a bottom plate 1 with a diameter of about 30-50 cm. A light source 2 is attached to the center of the upper surface of the bottom plate 1 and a support member 4, which is constituted of rod bodies 40, 40, etc., rod bodies 41a, 41a, etc., rod bodies 41b, 41b, etc. and a support 42, is attached to the central part of the bottom plate 1 around the light source 2 as a center. A sample stage 5 comprising a circular plate, which is made of a metal and has a proper thickness and a proper diameter, is placed on the support 42. The circular locking groove, which is locked with the other ends of the rod bodies 42a, 42a, etc. of the support 42, is provided to the under surface of the sample stage so as to be matched with the rod bodies 42a, 42a, etc. of the support 42. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an illumination device that irradiates a sample with light in order to inspect the sample.

  In the inspection of scratches and unevenness of the coating coated on the surface of the sample piece, inspection of foreign matter on the filter paper, measurement of viable colonies on the petri dish, etc., the sample to be inspected is irradiated with light and reflected light from the sample Is imaged by an imaging device, and inspection is performed based on image data obtained by imaging.

  In these inspections, an illumination device for image processing that irradiates (side-illuminates) light obliquely from the top in the horizontal direction with respect to the sample surface, and inspects the sample based on the luminance distribution caused by fine irregularities on the sample surface. Is used.

  FIG. 9 is a schematic diagram showing the structure of a conventional lighting device. FIG. 9A is a front view, and FIG. 9B is a plan view. In FIG. 9, 51 is a rectangular sample stage (mounting plate). The sample stage 51 is arranged in the horizontal direction, and a sample is placed on the upper surface thereof. Above the sample stage 51, a ring-shaped fluorescent lamp 52 is arranged in parallel with the sample stage 51 with an appropriate separation distance. The inner diameter of the ring-shaped fluorescent lamp 52 is larger than the dimension of the sample stage 51, and the light of the ring-shaped fluorescent lamp 52 is directly projected from the periphery of the sample stage 51 onto the sample on the sample stage 51. The reflected light from the sample is imaged by an imaging device through an objective lens (not shown). Further, the light from the ring-shaped fluorescent lamp 52 is not directly incident on the objective lens.

  FIG. 10 is a schematic diagram showing the structure of a conventional lighting device. FIG. 10A is a front view, and FIG. 10B is a plan view. In FIG. 10, 51 is a rectangular sample stage. The sample stage 51 is arranged in the horizontal direction, and a sample is placed on the upper surface thereof. Above the sample stage 51, an appropriate length of separation is provided, and the ends of the four straight tube fluorescent lamps 53, 53,... Are close to each other in a square shape and arranged in parallel with the sample stage 51. It is. The length of the straight tube fluorescent lamp 53 is larger than the dimension of the sample stage 51, and the light from the straight tube fluorescent lamps 53, 53,... It is like that. The reflected light from the sample is imaged by an imaging device through an objective lens (not shown). Further, light from the straight tube fluorescent lamps 53, 53,... Is not directly incident on the objective lens.

  However, in the conventional example, since the diameter of the ring-shaped fluorescent lamp used for image processing is about 30 cm even if it is large, when the size of the sample is small, the sample should be inspected with high accuracy. However, when the size of the sample is large (for example, exceeding 10 cm), the difference in the intensity of the light emitted from the ring fluorescent lamp at the center and the end of the sample becomes significant, There is a problem in that luminance unevenness occurs on the sample surface, binarization processing based on the luminance of the sample surface cannot be performed with high accuracy, and the surface of the sample cannot be inspected with high accuracy.

  FIG. 11 is a distribution diagram showing the luminance distribution on the sample stage. In FIG. 11, the horizontal axis indicates the position on the sample stage, and the vertical axis indicates the luminance. At the center of the sample stage, there is a flat and uniform region with a luminance distribution, but the luminance increases toward the end of the sample stage, and large luminance unevenness occurs in the entire sample stage.

  In addition, when a commercially available ring-shaped fluorescent lamp is used, there is a problem in that a uniform portion of the ring-shaped fluorescent lamp cannot be incident on the sample stage because there is a socket part in the ring-shaped part. In order to solve this problem, an image processing ring fluorescent lamp that is not affected by the socket portion may be used, but it is more expensive than a commercially available ring fluorescent lamp.

  In addition, when a straight tube fluorescent lamp is used, there is a problem in that uniform light cannot be incident on the sample stage as a whole due to the difference in illuminance and changes over time of each straight tube fluorescent lamp. there were.

  In addition, when the culture medium is solidified in measuring viable colonies on a petri dish, the sample surface may be tilted as a result of which the sample surface may be tilted, and the brightness distribution on the sample surface may be tilted, thereby impairing measurement accuracy. There was also a problem.

  In addition, since light is directly incident on the sample from obliquely above the sample surface, the edge of the sample surface can be easily detected based on the brightness of the reflected light caused by minute irregularities on the sample surface. However, there is a problem in that it is difficult to obtain information on the sample surface of the shadowed portion because the brightness of the shadowed portion caused by the unevenness is low.

  The present invention has been made in view of such circumstances, and includes a mounting plate placed horizontally above a light source, and a diffuse reflection plate provided substantially vertically apart from the edge of the mounting plate. Even if the size of the sample is large by irradiating the upper surface of the mounting plate with the reflected light reflected by the diffusion reflecting plate, the light passing between the mounting plate and the diffusion reflecting plate. An object of the present invention is to provide an illuminating device that can reduce brightness unevenness on the surface of a sample and can inspect with higher accuracy than before.

  In addition, another object of the present invention is to provide a reflecting plate that faces the mounting plate with the light source in between, so that the edge portion and the shadow portion of the sample can be obtained even when the size of the sample is large. It is providing the illuminating device which can reduce the brightness nonuniformity.

  Another object of the present invention is to provide an adjusting means for adjusting the intensity of light applied to the upper surface of the mounting plate, thereby making it possible to obtain uneven brightness on the surface of the sample regardless of the size of the sample or the type of the sample. It is in providing the illuminating device which can reduce.

  Another object of the present invention is to provide an illumination device capable of adjusting the intensity of the light by including a support member that detachably supports a mounting plate having different separation dimensions between the diffuse reflection plate and the edge. Is to provide.

  Another object of the present invention is to provide an illumination device capable of adjusting the intensity of the light by changing the height of the mounting plate.

  Another object of the present invention is to make it possible to correct luminance unevenness on the sample surface even when the sample surface is inclined by making the mounting plate slidable in a substantially horizontal direction. To provide an apparatus.

  Another object of the present invention is to provide an illuminating device capable of evenly irradiating light from a light source from the periphery of the mounting plate because the diffuse reflector is provided around the mounting plate. There is.

  Another object of the present invention is to irradiate the surface of the sample uniformly even if the size of the sample is 10 cm or more by setting the distance between the opposing surfaces of the diffuse reflector to 30 cm or more. It is in providing the illuminating device which can be performed.

  An illuminating device according to a first aspect of the present invention is the illuminating device that irradiates the sample with light in order to inspect the sample. The diffusing reflection plate that is provided substantially vertically opposite to the mounting plate in between and reflects light, and a light source disposed on the lower side of the mounting plate. The reflected light obtained by reflecting the light passing between the plates by the diffuse reflection plate is irradiated on the upper surface of the mounting plate.

  The illuminating device according to a second aspect of the present invention is characterized in that, in the first aspect of the present invention, the illuminating device further comprises a reflector plate facing the mounting plate with the light source in between.

  A lighting device according to a third aspect of the invention is characterized in that, in the first or second aspect of the invention, the lighting device further comprises an adjusting means for adjusting the intensity of light applied to the top surface of the mounting plate.

  The lighting device according to a fourth aspect of the present invention is the lighting device according to the third aspect, wherein the adjusting means removably supports a mounting plate having different separation dimensions between the edge of the mounting plate and the diffuse reflector. And the intensity of the light is adjusted in accordance with a mounting plate having a different separation dimension.

  The lighting device according to a fifth aspect of the present invention is the lighting device according to the third aspect, wherein the adjusting means includes a support member having a different height for supporting the mounting plate, and the intensity of the light according to the height of the mounting plate. It is characterized by being adjusted.

  The lighting device according to a sixth aspect of the present invention is the lighting device according to the third aspect, wherein the adjusting means includes a support member that supports the mounting plate so as to be slidable in a substantially horizontal direction. The light intensity is adjusted.

  A lighting device according to a seventh aspect of the present invention is characterized in that, in any one of the first to sixth aspects, the diffusive reflecting plate is provided so as to surround the mounting plate.

  An illuminating device according to an eighth invention is characterized in that, in any one of the first to seventh inventions, a separation dimension between opposing surfaces of the diffusive reflector is 30 cm or more.

  In the first invention, the light source is disposed below the placement plate, and the diffuse reflection plate is provided substantially vertically apart from the edge of the placement plate. The light emitted from the light source passes through the gap between the mounting plate and the diffusive reflection plate, and is directly incident on the diffusive reflection plate, and is reflected by the diffusive reflection plate. The incident light that directly enters the diffuse reflector after passing through the gap between the mount plate and the diffuse reflector has a small incident angle with respect to the diffuse reflector, so that the horizontal position of the diffuse plate is the horizontal position of the diffuse plate It enters only to a slightly higher position. Thereby, light is irradiated on the upper surface of the mounting plate by the reflected light reflected at a position slightly higher than the horizontal position of the mounting plate of the diffuse reflection plate. Since the intensity of light is inversely proportional to the square of the distance traveled by the light, the reflected light once reflected by the diffuse reflector is applied to the mounting plate directly from the light source to the mounting plate. Compared with the case of irradiation, the distance traveled by the light is lengthened, and the difference in the intensity of light applied to the upper surface of the mounting plate due to the separation distance between the center and the end of the mounting plate is reduced.

  In the second aspect of the invention, the reflector is provided to face the mounting plate with the light source in between. The light emitted from the light source repeats reflection between the incident light passing through the gap between the mounting plate and the diffuse reflection plate and directly entering the diffuse reflection plate, and between the reflection plate and the mounting plate lower surface. After that, it becomes incident light that passes through the gap between the mounting plate and the diffuse reflector and enters the diffuse reflector.

  The incident light that directly enters the diffuse reflector after passing through the gap between the mount plate and the diffuse reflector has a small incident angle with respect to the diffuse reflector, so that the horizontal position of the diffuse plate is the horizontal position of the diffuse plate It enters only to a slightly higher position. On the other hand, incident light incident on the diffuse reflector after passing through the gap between the mount plate and the diffuse reflector after repeating reflection between the reflector and the lower surface of the mount plate is incident on the diffuse reflector. As the position reflected by the reflection plate approaches the diffusion reflection plate before entering, the incident angle with respect to the diffusion reflection plate increases and is higher than the horizontal position of the mounting plate described above of the diffusion reflection plate. Incident to the position.

  The intensity of light is inversely proportional to the square of the distance traveled by the light, and is weakened by reflection. Accordingly, the intensity of the incident light incident on the diffuse reflector, that is, the intensity of the reflected light reflected by the diffuse reflector is increased as the horizontal position of the mounting plate is increased. become weak. Thereby, the light irradiated on the surface of the mounting plate by the reflected light reflected at a position slightly higher than the horizontal position of the mounting plate of the diffuse reflection plate (the light irradiated substantially parallel to the upper surface of the mounting plate) ) Becomes stronger, and the light irradiated on the upper surface of the mounting plate by the reflected light reflected at a position higher than the horizontal position of the mounting plate of the diffuse reflection plate (irradiated from obliquely above the upper surface of the mounting plate) Light) is weakened. That is, the sample placed on the mounting plate is irradiated with light having a high light intensity from the substantially horizontal direction (side emission), and at the same time, light having a low light intensity is applied from the obliquely upward direction (falling down). .

  In the third invention, the adjusting means adjusts the intensity of light applied to the top surface of the mounting plate.

  In the fourth aspect of the invention, a support member is provided that detachably supports a mounting plate having a different separation dimension between the edge and the diffuse reflection plate. When a mounting plate having a large separation dimension from the diffuse reflector is attached, incident light that directly enters the diffuse reflector through the gap between the mount plate and the diffuse reflector, and the reflector and the mount are mounted. Incident light that passes through the gap between the mounting plate and the diffuse reflecting plate after being repeatedly reflected between the lower surface of the mounting plate and enters the diffuse reflecting plate reaches a higher position of the diffuse reflecting plate, Reflected by the diffuse reflector. That is, the upper surface of the mounting plate is irradiated with reflected light from a higher position of the diffuse reflector.

  When a mounting plate having a small separation distance from the diffuse reflector is attached, incident light that directly enters the diffuse reflector through the gap between the mount plate and the diffuse reflector, and the reflector and the mount are mounted. Incident light that passes through the gap between the mounting plate and the diffusive reflecting plate after being repeatedly reflected between the lower surface of the mounting plate and enters the diffusing reflective plate can reach a high position of the diffusing reflective plate. Instead, it is reflected by the diffuse reflector. That is, the upper surface of the mounting plate is irradiated with reflected light from a lower position of the diffuse reflector, and the reflected light from a higher position of the diffuse reflector is reduced.

  In the fifth invention, the support members having different heights are provided. When the height of the mounting plate is high, incident light that directly enters the diffuse reflecting plate through the gap between the mounting plate and the diffuse reflecting plate, and between the reflecting plate and the mounting plate lower surface The incident light that enters the diffuse reflector after passing through the gap between the mounting plate and the diffuse reflector after reaching the higher position of the diffuse reflector is reflected by the diffuse reflector. Is done. That is, the upper surface of the mounting plate is irradiated with reflected light from a higher position of the diffuse reflector.

  When the height of the mounting plate is low, incident light that directly enters the diffuse reflecting plate through the gap between the mounting plate and the diffuse reflecting plate, and between the reflecting plate and the mounting plate lower surface The incident light that enters the diffuse reflector after passing through the gap between the mounting plate and the diffuse reflector is not able to reach a high position of the diffuse reflector without being diffused and reflected. Reflected by the board. That is, the upper surface of the mounting plate is irradiated with reflected light from a lower position of the diffuse reflector, and the reflected light from a higher position of the diffuse reflector is reduced.

  In the sixth aspect of the invention, the support member can slide the mounting plate in the substantially horizontal direction. When the surface of the sample placed on the mounting plate is inclined, the reflected light from the diffuse reflecting plate on the side substantially facing the inclined surface is reflected on the diffuse reflecting plate on the side not facing the inclined surface. The incident angle with respect to the sample surface is smaller by the inclination angle of the inclined surface than the reflected light from the light, and the intensity of the irradiated light is increased. Accordingly, since the intensity of light irradiated on the lower side of the sample with the inclined surface is higher than that on the higher side, luminance unevenness occurs on the sample surface. By allowing the mounting plate to slide freely in a substantially horizontal direction, by horizontally moving the mounting plate away from the diffuse reflection plate facing the high side of the sample surface, The distance between the high surface side and the opposing diffuse reflector is increased, the intensity of light irradiated to the high surface side of the sample is increased, and the sample surface is low. The intensity of light irradiated on the side is weakened, and luminance unevenness caused by the difference in height of the sample whose surface is inclined is corrected.

  In the seventh aspect of the invention, the diffuse reflection plate is provided around the placement plate. Since the distance from the light source to the diffuse reflection plate is equal over the entire circumference, the reflected light reflected by the diffuse reflection plate is evenly applied from the periphery of the placement plate to the top surface of the placement plate.

  In the eighth invention, the distance between the opposing surfaces of the diffuse reflector is set to 30 cm or more. By increasing the distance that the light travels from the light source to the mounting plate, the difference in the intensity of light irradiated at the center and the end of the mounting plate is reduced. Thereby, for example, even if the sample has a side of 10 cm or more or a diameter of 10 cm or more, the surface of the sample is irradiated with substantially uniform light.

  In the first aspect of the invention, the light that has passed between the mounting plate and the diffuse reflector is reflected on the top surface of the sample plate by reflecting the reflected light reflected by the diffuse reflector to the sample surface. Therefore, even when the size of the sample is large, uneven brightness on the sample surface can be reduced and inspection can be performed with higher accuracy than in the past.

  In the second aspect of the invention, by providing the reflector plate with the light source in between and facing the mounting plate, the side light emitted from the substantially horizontal direction to the sample surface and the sample surface from obliquely above The incident light can be irradiated at the same time, and even when the sample size is large, the brightness unevenness on the sample surface can be reduced, and inspection can be performed more accurately than before, and the edge portion of the sample And the luminance unevenness between the shadow portions can be reduced.

  In the third aspect of the invention, by providing the adjusting means for adjusting the intensity of the light irradiated on the upper surface of the mounting plate, it is possible to inspect various samples regardless of the size and type of the sample.

  In the fourth invention, by providing a support member that detachably supports a mounting plate having a different separation dimension between the diffuse reflection plate and the edge, the intensity of the reflected light reflected by the diffuse reflection plate can be increased. It can be changed according to the height of the diffuse reflector, and the illumination height, intensity, and angle of side illumination and epi-illumination from the diffuse reflector can be changed, and illumination according to various samples Can be realized with a simple configuration.

  In the fifth invention, by varying the height of the mounting plate, the intensity of the reflected light reflected by the diffuse reflector can be changed according to the height of the diffuse reflector, The irradiation height, irradiation intensity, and irradiation angle of side illumination and epi-illumination from the diffuse reflector can be changed, and illumination according to various samples can be realized with a simple configuration.

  In the sixth aspect of the invention, by allowing the mounting plate to slide in a substantially horizontal direction, the reflected light from the diffuse reflection plate facing the sample can be reflected even when the sample surface is inclined. The intensity can be changed to correct luminance unevenness on the sample surface. Further, since the luminance distribution on the sample surface can be changed, it is possible to easily obtain an image that is easy to observe.

  In the seventh invention, the diffuse reflection plate is provided around the mounting plate, so that the light from the light source can be evenly irradiated from the periphery of the mounting plate.

  In the eighth invention, the difference in the intensity of light irradiated between the center and the end of the mounting plate can be reduced by setting the distance between the opposing surfaces of the diffuse reflector to 30 cm or more. Even in the case of a sample having a side of 10 cm or more or a diameter of 10 cm or more, which has conventionally been difficult to inspect, the sample surface can be irradiated with substantially uniform light, enabling inspection.

  Hereinafter, the present invention will be described with reference to the drawings illustrating embodiments thereof. FIG. 1 is a partially broken schematic view showing the configuration of a lighting device according to the present invention. In the figure, 1 is a circular metal bottom plate. For example, the bottom plate 1 has a diameter of about 30 to 50 cm, a cylindrical shape having an appropriate height at the periphery, a white matte coating on the inner surface, and a diffuse reflector 3 that irregularly reflects incident light. Is set up.

  A light source 2 (for example, a spiral fluorescent lamp or a capsule fluorescent lamp) is attached to the center of the upper surface of the bottom plate 1. The bottom plate 1 is made of metal and is screwed at one end at the position where the square apex having an appropriate separation distance from the mounting position of the light source 2 is formed, and the other end is formed in a cylindrical shape having an appropriate diameter. An appropriate length rod body 40, 40,... Provided with a recess is screwed in the vertical direction.

  The rods 40, 40,... Are made of metal and provided with rods 41a, 41a,... Each provided with a cylindrical projection having an appropriate diameter at one end. ,... Are detachably attached by fitting into a recess provided at the other end of.

  The other end of the rod bodies 41a, 41a,... Is provided with a cylindrical recess having an appropriate diameter, and the other end of the rod bodies 41a, 41a,. The two rod bodies 41a and 41b are connected in series by fitting one end of the rod bodies 41b, 41b,.

  A metal support 42 is detachably attached to the recesses at the other ends of the rods 41b, 41b,. The support 42 has an appropriate length of an annular plate fixed to four lengths of rods 42a, 42a,... Corresponding to the rods 41b, 41b,. One end is provided with a cylindrical convex portion having an appropriate diameter that is detachably fitted into the concave portion of the rod bodies 41b, 41b,..., And the other end of the rod bodies 42a, 42a,. .

  .., Rods 41a, 41a,..., Rods 41b, 41b,..., And a support 42 are attached to the central portion of the bottom plate 1. . The height of the support 42 from the bottom plate 1 (that is, the height of the sample stage 5 to be described later) can be adjusted by changing the number of the rods 41a or 41b that are connected.

  On the support 42, a sample stage 5 made of a metal and made of a circular plate having an appropriate thickness and an appropriate diameter is placed. On the lower surface of the sample stage 5, circular engagement grooves that engage with the other ends of the rod bodies 42a, 42a,... Are provided in accordance with the positions of the rod bodies 42a, 42a,. Thereby, the center of the sample stage 5 and the center position of the light source can be matched. For the sample stage 5, depending on the size and type of the sample to be placed, for example, a plurality of samples having an appropriate diameter in the range of 15 cm to 40 cm are prepared. The stage 5 can be placed on the support 42.

  Further, the sample stage 5 can be moved while its lower surface is in contact with the other end of the rods 42a, 42a,..., And moves in an arbitrary horizontal direction on the support 42 according to the state of the sample. be able to. In addition, the sample stage 5 with a small diameter can be mounted on the support body 42, and the sample stage 5 with a large diameter can be slid on it and moved in the horizontal direction.

  An objective lens 6 for condensing light from above the sample stage 5 is disposed at an appropriate height above the center of the light source 2. The viewing angle of the objective lens 6 is adjusted to the maximum diameter of the sample stage 5. Since the sample stage 5 is disposed between the light source 2 and the objective lens 6, the sample stage 5 prevents light from the light source 2 from directly entering the objective lens 6. The light condensed by the objective lens 6 is imaged by an imaging device (for example, a camera) (not shown), so that predetermined image processing is performed.

  Next, the operation of the lighting device according to the present invention will be described. FIG. 2 is an explanatory diagram showing the state of the reflected light reflected by the diffusive reflecting plate 3. As shown in FIG. 2A, the light source 2 is arranged at the center of the bottom plate 1, and the sample stage 5 is arranged horizontally with the light source 2 in between. Around the peripheral edge of the bottom plate 1, a diffuse reflection plate 3 whose inner periphery is painted with white matte is provided. A sample 7 is placed on the sample stage 5.

  The light emitted from the light source 2 passes through the gap between the sample stage 5 and the diffuse reflector 3 and directly enters the diffuse reflector 3, and is reflected by the diffuse reflector 3, and the sample stage 5 and the bottom plate. 1 is reflected by the bottom plate 1 (or directly reflected by the bottom plate 1), passes through the gap between the sample stage 5 and the diffuse reflector 3, and enters the diffuse reflector 3. The reflected light P2 reflected by the plate 3 is obtained.

  Since light emitted from the light source 2 is blocked by the edge of the sample stage 5, incident light that directly enters the diffuse reflector 3 through the gap between the sample stage 5 and the diffuse reflector 3 is incident on the diffuse reflector 3. The incident angle is small and the diffuse reflector 3 is incident only up to a position slightly higher than the same horizontal position as the sample stage 5.

  On the other hand, after repeating reflection between the bottom plate 1 and the sample stage 5, incident light that enters the diffuse reflector 3 through the gap between the sample stage 5 and the diffuse reflector 3 enters the diffuse reflector 3. As the position reflected by the bottom plate 1 approaches the diffuse reflector 3, the incident angle with respect to the diffuse reflector 3 increases and the position of the diffuse reflector 3 higher than the same horizontal position as the sample stage 5 is increased. Incident.

  The intensity of light is inversely proportional to the square of the distance traveled by the light, and is weakened by reflection. Accordingly, the intensity of incident light incident on the diffuse reflector 3, that is, the intensity of the reflected light reflected by the diffuse reflector 3 increases as the sample stage 5 of the diffuse reflector 3 increases from the same horizontal position. become weak. That is, the light irradiated on the upper surface of the sample stage 5 by the reflected light P1 reflected at a position slightly higher than the same horizontal position as the sample stage 5 of the diffuse reflector 3 (side light irradiated substantially parallel to the upper surface of the sample stage 5). The light that is irradiated on the upper surface of the sample stage 5 by the reflected light P2 reflected at a position higher than the same horizontal position as the sample stage 5 of the diffuse reflector 3 (Light) is weakened. Further, the intensity of the reflected light P <b> 2 becomes weaker as the height of the reflection position of the diffuse reflector 3 becomes higher.

  FIG. 2B shows a change in the intensity of the reflected light in accordance with the height of the reflection surface of the diffuse reflector 3. As shown in the figure, in the range where the distance in the height direction from the same horizontal position as the sample stage 5 of the diffuse reflector 3 is L1, the reflected light P1 that reflects the light directly incident from the light source 2 is reflected on the upper surface of the sample stage 5. Irradiate. In this range, the intensity of the reflected light P1 is substantially constant according to the height.

  Further, in the range where the distance in the height direction is L2, the upper surface of the sample stage 5 is irradiated with the reflected light P2 that reflects the light repeatedly reflected between the bottom plate 1 and the sample stage 5 by the diffuse reflector 3. . In this range, the intensity of the reflected light P2 decreases as the height increases. As a result, light with high light intensity is irradiated (side-fired) from the substantially horizontal direction on the upper surface of the sample stage 5, and at the same time, light that gradually decreases in intensity according to the height is irradiated obliquely from above. It can be (shot down).

  FIG. 3 is a distribution diagram showing the luminance distribution on the sample stage 5. While irradiating the reflected light P1 having a high light intensity from the substantially horizontal direction (side-emitting) on the upper surface of the sample stage 5, the reflected light P2 having a low light intensity is simultaneously irradiated (falling down) obliquely from above and a light source By irradiating the upper surface of the sample stage 5 with the reflected light once reflected from the diffuse reflector 3 by diffusing the light emitted from the light source 2, the distance traveled by the light is made longer than when directly irradiating the sample stage 5 from the light source. The difference in brightness between the center and the end of the stage can be reduced and made almost constant.

  FIG. 4 is an explanatory view showing the state of the reflected light reflected by the diffuse reflector 3 when the size of the sample stage 5 is changed. When the diameter of the sample stage 5 is small (for example, 15 cm), the reflected light P1 that passes through the gap between the sample stage 5 and the diffuse reflector 3 and directly enters the diffuse reflector and is reflected by the diffuse reflector 3, and the bottom plate The reflected light P2 that is incident on the diffuse reflector 3 through the gap between the sample stage 5 and the diffuse reflector 3 after being repeatedly reflected between the sample stage 5 and the sample stage 5 and reflected by the diffuse reflector 3 is diffused. The light is reflected at a higher position on the reflector 3. That is, the upper surface of the sample stage 5 can be irradiated with reflected light from a higher position of the diffuse reflector 3.

  Thereby, even if the drop of the unevenness on the sample surface is large, light can be sufficiently irradiated to the concave portion of the sample, and information on the concave portion of the sample is acquired based on the image data captured by the camera. be able to.

  On the other hand, when the diameter of the sample stage 5 is large (for example, 40 cm), the reflected light P1 that passes through the gap between the sample stage 5 and the diffuse reflector 3 and directly enters the diffuse reflector and is reflected by the diffuse reflector 3; The reflected light P2 reflected by the diffuse reflector 3 after passing through the gap between the sample stage 5 and the diffuse reflector 3 after being repeatedly reflected between the bottom plate 1 and the sample stage 5 is incident on the diffuse reflector 3. Therefore, the light cannot reach the high position of the diffuse reflector 3 and is reflected at a lower position of the diffuse reflector 3. That is, the upper surface of the sample stage 5 is irradiated with reflected light from a lower position of the diffuse reflector 3 to reduce reflected light from a higher position of the diffuse reflector 3.

  Thereby, it becomes easy to emphasize the outline of the convex portion on the sample surface and to separate and detect fine scratches or foreign matters on the sample surface by luminance.

  FIG. 5 is a distribution diagram showing the luminance distribution on the sample surface. 5A shows a case where the sample stage 5 having a small diameter is used, and FIG. 5B shows a case where the sample stage 5 having a large diameter is used. As shown in the figure, when the sample stage 5 having a small diameter is used, the reflected light is irradiated from a higher position of the diffuse reflector 3, so that the contour of the convex portion of the sample is emphasized and the concave portion of the sample is applied. Is sufficiently irradiated with light, and the information on the recesses can be easily obtained.

  When the sample stage 5 having a large diameter is used, in order to reduce the reflected light from a high position of the diffuse reflector 3, the information on the concave portion of the sample is intentionally excluded, and the contour of the convex portion of the sample is emphasized. Can do. Further, by using a plurality of sample stages 5 having different sizes, it is possible to change the information amount of the concave portion of the sample stepwise, and it is possible to irradiate desired light according to various samples.

  FIG. 6 is an explanatory diagram showing the state of the reflected light reflected by the diffuse reflector 3 when the height of the sample stage 5 is changed. When the height of the sample stage 5 is high (for example, 15 cm from the light source 2), it passes through the gap between the sample stage 5 and the diffuse reflector 3 and directly enters the diffuse reflector and is reflected by the diffuse reflector 3 Reflected light reflected by the diffuse reflector 3 after passing through the gap between the sample stage 5 and the diffuse reflector 3 after repeating reflection between P1 and the bottom plate 1 and the specimen stage 5 P2 is reflected at a higher position on the diffuse reflector 3. That is, the upper surface of the sample stage 5 can be irradiated with reflected light from a higher position of the diffuse reflector 3.

  Thereby, even if the drop of the unevenness on the sample surface is large, light can be sufficiently irradiated to the concave portion of the sample, and information on the concave portion of the sample is acquired based on the image data captured by the camera. be able to.

  On the other hand, when the height of the sample stage 5 is low (for example, 10 cm from the light source 2), it passes through the gap between the sample stage 5 and the diffuse reflector 3 and directly enters the diffuse reflector, and is reflected by the diffuse reflector 3. After the reflection between the reflected light P 1 and the bottom plate 1 and the sample stage 5 is repeated, the light passes through the gap between the sample stage 5 and the diffuse reflector 3 and enters the diffuse reflector 3, and is reflected by the diffuse reflector 3. The reflected light P <b> 2 cannot reach a high position of the diffuse reflector 3 and is reflected at a lower position of the diffuse reflector 3. That is, the upper surface of the sample stage 5 is irradiated with reflected light from a lower position of the diffuse reflector 3 to reduce reflected light from a higher position of the diffuse reflector 3.

  Thereby, it becomes easy to emphasize the outline of the convex portion on the sample surface and to separate and detect fine scratches or foreign matters on the sample surface by luminance.

  FIG. 7 is an explanatory view showing the state of the reflected light reflected by the diffuse reflector 3 before moving the sample stage 5 horizontally, and FIG. 8 is reflected by the diffuse reflector 3 after moving the sample stage 5 horizontally. It is explanatory drawing which shows the mode of the reflected light. The surface of the sample placed on the sample stage 5 is not necessarily horizontal. For example, in the case where viable colonies are measured on a petri dish, the surface of the sample may be hardened obliquely when the medium is hardened. In FIG. 7, the surface of the sample 7 is inclined, and the sample stage 5 on which the sample 7 is placed is arranged at the center position. In the figure, the height of the sample 7 is low in the right direction and high in the left direction.

  As shown in FIG. 7A, the reflected light from the diffuse reflector 3 on the side substantially facing the inclined surface of the sample 7 (right side in the figure) is the side not facing the inclined surface (left side in the figure). ), The incident angle with respect to the surface of the sample 7 is small by the inclination angle of the inclined surface, and the intensity of the irradiated light is increased. Therefore, as shown in FIG. 7B, the intensity of light irradiated on the lower side of the sample 7 whose surface is inclined is higher than that on the higher side. Occurs.

  As shown in FIG. 8 (a), the sample stage 5 and the diffuse reflector 3 are moved horizontally so as to be away from the diffuse reflector 3 facing the side of the sample 7 where the surface height is high. Is increased, and the intensity of the light applied to the higher surface of the sample 7 is increased. Thereby, as shown in FIG. 8B, luminance unevenness caused by the difference in height of the sample 7 whose surface is inclined can be corrected.

  As described above, in the present invention, even if one side or the diameter of the sample is about 10 cm or more, since the separation distance of the diffuse reflector 3 is 30 cm or more, there is no luminance unevenness in the entire sample. An illumination device that can irradiate light, can perform binarization processing based on image data with high accuracy, and can accurately measure the length, area, number, etc. of a sample to be measured Can be provided.

  Further, since the diffuse reflector 3 is arranged in a circular shape with the sample stage 5 as the center, the light from the light source 2 can be evenly irradiated from the entire periphery of the sample stage 5.

  In addition, the size of the sample stage can be changed, and the position of the sample stage can be moved in the horizontal and vertical directions. The intensity, irradiation angle, and irradiation position can be changed in stages, making it easy to adjust the edge and shadow of the sample surface, and for a wide variety of samples with a very simple configuration. Can be irradiated. Furthermore, luminance unevenness caused by the inclination of the sample surface can be corrected.

  In the above-described embodiment, the diameter of the diffusive reflector 3 is about 30 cm to 50 cm, but the diameter may be at least 30 cm or 60 cm and 70 cm. However, when the diameter is increased, the overall size of the apparatus increases, and when the diameter is smaller than 30 cm, one side of the sample or the surface of the sample when the diameter exceeds 10 cm (the upper surface of the sample stage corresponding to the size of the sample) Since unevenness in luminance occurs, the diameter of the diffuse reflector 3 is preferably 30 cm to 50 cm.

  In the above-described embodiment, the inside of the diffuse reflector 3 is painted with white matte, but the present invention is not limited to this. For example, the inside may be coated with a diffusely reflecting material such as barium sulfate.

  In the above-described embodiment, the diffusive reflecting plate 3 is provided in a circular shape on the circular bottom plate 1, but the present invention is not limited to this. For example, a configuration may be employed in which a diffuse reflector is opposed to each of the four sides of the rectangular bottom plate. In this case, the planar shape of the sample stage is not circular but may be rectangular.

  In the above-described embodiment, the support member 4 that supports the sample stage 5 has a configuration in which metallic rods are combined. However, the present invention is not limited to this. For example, the structure may be a hollow cylindrical shape using a transparent glass or synthetic resin support member provided with a vent hole. In this case, the light source can be arranged inside the hollow cylinder.

  In the above-described embodiment, the light source is a spiral fluorescent lamp, a capsule fluorescent lamp, or the like, but the light source is not limited to this. For example, other light sources can be used as long as light emitting portions are limited to some extent, such as small halogen lamps and incandescent bulbs.

  In the above-described embodiment, the configuration is such that the sample stage 5 can be moved in an arbitrary horizontal direction by placing it on the support member 4 and sliding it, but the present invention is not limited to this. As long as the sample stage 5 is moved in the horizontal direction, any configuration may be used. For example, a support member may be configured by providing a rail groove in parallel on the upper surface of a rotatable circular plate, and standing a rod body slidably movable in the rail groove. .

  In the above-described embodiment, the height of the sample stage 5 is adjusted by changing the number of metal rods. However, the present invention is not limited to this. For example, instead of providing a plurality of rod bodies, a plurality of cylinders are accommodated so as to be slidable in the axial direction, and a support member that supports the sample stage 5 by sliding the cylinders accommodated inside to the outside. Alternatively, the height of the sample stage 5 may be changed by changing the length of the cylindrical body constituting the.

  In the above-described embodiment, the bottom plate 1 is configured to reflect the light from the light source 2, but is not limited thereto, and a configuration in which a separate reflecting plate is provided on the upper surface of the bottom plate 1 may be used.

  In the above-described embodiment, the intensity of the light applied to the upper surface of the sample stage 5 is adjusted as the luminance. However, the present invention is not limited to this. For example, color information (for example, RGB) or the like can be used instead of luminance.

It is a partially broken schematic diagram which shows the structure of the illuminating device which concerns on this invention. It is explanatory drawing which shows the mode of the reflected light reflected by a diffuse reflection board. It is a distribution map which shows the luminance distribution on a sample stage. It is explanatory drawing which shows the mode of the reflected light reflected by the diffuse reflection board at the time of changing the magnitude | size of a sample stage. It is a distribution map which shows the luminance distribution of the sample surface. It is explanatory drawing which shows the mode of the reflected light reflected by the diffuse reflection board at the time of changing the height of a sample stage. It is explanatory drawing which shows the mode of the reflected light reflected by the diffuse reflection board before moving a sample stage horizontally. It is explanatory drawing which shows the mode of the reflected light reflected by the diffuse reflection board after moving a sample stage horizontally. It is a schematic diagram which shows the structure of the conventional illuminating device. It is a schematic diagram which shows the structure of the conventional illuminating device. It is a distribution map which shows the luminance distribution on a sample stage.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Bottom plate 2 Light source 3 Diffuse reflecting plate 4 Support member 5 Sample stage 6 Objective lens 7 Sample 40, 41a, 41b Bar body 42 Support body 42a Bar body

Claims (8)

In an illumination device that irradiates the sample with light to inspect the sample,
A placing plate placed horizontally and placing a sample;
A diffusive reflecting plate that is spaced from the edge of the mounting plate and is substantially vertically opposed to the mounting plate, and reflects light;
A light source disposed under the mounting plate, and
An illuminating device characterized in that the upper surface of the mounting plate is irradiated with reflected light obtained by reflecting the light that has passed between the mounting plate and the diffusing reflecting plate with the diffusing reflecting plate.   The illuminating device according to claim 1, further comprising a reflector plate facing the mounting plate with the light source interposed therebetween.   The lighting device according to claim 1, further comprising an adjusting unit that adjusts the intensity of light irradiated on the upper surface of the mounting plate. The adjusting means is
A support member for detachably supporting a mounting plate having different separation dimensions between the edge of the mounting plate and the diffuse reflection plate;
4. The illumination device according to claim 3, wherein the intensity of the light is adjusted according to mounting plates having different separation dimensions. The adjusting means is
Provided with a support member of different height to support the mounting plate,
The lighting device according to claim 3, wherein the intensity of the light is adjusted according to the height of the mounting plate. The adjusting means is
A support member for supporting the mounting plate slidably in a substantially horizontal direction;
4. The illumination device according to claim 3, wherein the intensity of the light is adjusted according to the sliding of the mounting plate. The diffuse reflector is
The lighting device according to claim 1, wherein the lighting device is provided around the mounting plate.   The illumination device according to any one of claims 1 to 7, wherein a distance between the opposing surfaces of the diffuse reflector is 30 cm or more.

Images