CN108998768A - 一种基于pvd技术的表面镀膜装置 - Google Patents
一种基于pvd技术的表面镀膜装置 Download PDFInfo
- Publication number
- CN108998768A CN108998768A CN201810994011.4A CN201810994011A CN108998768A CN 108998768 A CN108998768 A CN 108998768A CN 201810994011 A CN201810994011 A CN 201810994011A CN 108998768 A CN108998768 A CN 108998768A
- Authority
- CN
- China
- Prior art keywords
- support plate
- thimble
- disk
- workpiece
- plated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000007888 film coating Substances 0.000 title claims abstract description 14
- 238000009501 film coating Methods 0.000 title claims abstract description 14
- 238000001125 extrusion Methods 0.000 claims abstract description 46
- 210000000078 claw Anatomy 0.000 claims description 29
- 238000013016 damping Methods 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 13
- 230000035699 permeability Effects 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 15
- 238000000576 coating method Methods 0.000 abstract description 15
- 238000005240 physical vapour deposition Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 210000004712 air sac Anatomy 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810994011.4A CN108998768B (zh) | 2018-08-29 | 2018-08-29 | 一种基于pvd技术的表面镀膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810994011.4A CN108998768B (zh) | 2018-08-29 | 2018-08-29 | 一种基于pvd技术的表面镀膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108998768A true CN108998768A (zh) | 2018-12-14 |
CN108998768B CN108998768B (zh) | 2020-08-14 |
Family
ID=64593976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810994011.4A Active CN108998768B (zh) | 2018-08-29 | 2018-08-29 | 一种基于pvd技术的表面镀膜装置 |
Country Status (1)
Country | Link |
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CN (1) | CN108998768B (zh) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2602798A1 (fr) * | 1986-08-13 | 1988-02-19 | Alcatel Thomson Faisceaux | Procede de depot par pulverisation cathodique d'une couche de materiau sur des substrats et dispositif de mise en oeuvre d'un tel procede |
CN102864434A (zh) * | 2012-09-05 | 2013-01-09 | 常州大成绿色镀膜科技有限公司 | 一种立式镀膜机工件转架传动装置 |
CN203999799U (zh) * | 2014-08-04 | 2014-12-10 | 江苏海事职业技术学院 | 台车用齿轮滚刀pvd涂层托架 |
CN106048552A (zh) * | 2016-07-19 | 2016-10-26 | 深圳市东丽华科技有限公司 | 一种真空镀膜机 |
CN108193186A (zh) * | 2018-03-20 | 2018-06-22 | 嘉兴岱源真空科技有限公司 | 一种工件转动架及纳米材料制作设备 |
-
2018
- 2018-08-29 CN CN201810994011.4A patent/CN108998768B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2602798A1 (fr) * | 1986-08-13 | 1988-02-19 | Alcatel Thomson Faisceaux | Procede de depot par pulverisation cathodique d'une couche de materiau sur des substrats et dispositif de mise en oeuvre d'un tel procede |
CN102864434A (zh) * | 2012-09-05 | 2013-01-09 | 常州大成绿色镀膜科技有限公司 | 一种立式镀膜机工件转架传动装置 |
CN203999799U (zh) * | 2014-08-04 | 2014-12-10 | 江苏海事职业技术学院 | 台车用齿轮滚刀pvd涂层托架 |
CN106048552A (zh) * | 2016-07-19 | 2016-10-26 | 深圳市东丽华科技有限公司 | 一种真空镀膜机 |
CN108193186A (zh) * | 2018-03-20 | 2018-06-22 | 嘉兴岱源真空科技有限公司 | 一种工件转动架及纳米材料制作设备 |
Also Published As
Publication number | Publication date |
---|---|
CN108998768B (zh) | 2020-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20200721 Address after: 518000, No. 12 factory building, third industrial zone, lower village community, Gongming, Guangming District, Guangdong, Shenzhen Applicant after: SHENZHEN JINRUI NEW MATERIAL Co.,Ltd. Address before: 646002 Luzhou Changxin Hydraulic Machinery Manufacturing Co., Ltd. in Caoxi Village, Lianyu Town, Jiangyang District, Luzhou City, Sichuan Province Applicant before: Wang Zhiwei |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A surface coating device based on PVD Technology Effective date of registration: 20211222 Granted publication date: 20200814 Pledgee: Shenzhen Branch of Guoren Property Insurance Co.,Ltd. Pledgor: SHENZHEN JINRUI NEW MATERIAL CO.,LTD. Registration number: Y2021980015900 |