CN108896689A - A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride - Google Patents
A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride Download PDFInfo
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- CN108896689A CN108896689A CN201810918150.9A CN201810918150A CN108896689A CN 108896689 A CN108896689 A CN 108896689A CN 201810918150 A CN201810918150 A CN 201810918150A CN 108896689 A CN108896689 A CN 108896689A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/04—Preparation or injection of sample to be analysed
- G01N30/16—Injection
- G01N30/20—Injection using a sampling valve
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Abstract
The invention discloses a kind of chromatography sampling systems for the analysis of Electronic Gases boron chloride, including helium replacement system, venturi vacuum pumping system and chromatography preprocessing system；The helium replacement system includes helium import, switch valve a, switch valve b and four-way valve；The venturi vacuum system includes venturi vacuum pump, nitrogen inlet and waste gas outlet, the nitrogen inlet and the waste gas outlet pump air circuit connection with the venturi vacuum, the venturi vacuum pump passes through switch valve d and the triple valve b air circuit connection, the present invention meets water decomposition problem for boron chloride, sample introduction pipeline is replaced and purged using ultrapure helium, and system is vacuumized, by that the moisture of sampling system can be made to be down to 0.1ppm or less after blower-vacuum displacement several times, aiming at the problem that boron chloride cannot be into vacuum pump, it is pumped using venturi vacuum, nitrogen does purge gass, it can be avoided boron chloride and decompose blockage problem.
Description
Technical field
The present invention relates to gas analysis technology field, it is specially a kind of for Electronic Gases boron chloride analysis
Chromatography sampling system.
Background technique
Boron chloride is mainly used for that technical requirements in IC manufacturing process are very high, far-reaching to circuit yield chemical gas
Mutually deposit (CVD) film forming procedure and dry plasma etch process, can bring very crucial effect to the quality of IC product, and
It cannot be replaced with other electronic gas.With the fast development of domestic integrated circuit, the demand of boron chloride is higher and higher,
The impurity content and purity of boron chloride will have a direct impact on IC, the quality of electronic component, performance, technical indicator and yield rate.
In the past, high-purity boron chloride country of 5N or more cannot still produce, which fully relies on from the U.S., Britain, Japan etc.
The import of external Ji Jia major company, recently as domestic technological development, the country can also purify out high-purity boron chloride of 5N at present,
Water is met under boron chloride room temperature can be analyzed to boron oxide and hydrogen chloride gas, and hydrogen chloride gas can not only corrode sample introduction gas circuit,
The boron oxide powder of formation is also frequently occluded gas circuit, can alleviate the decomposition of boron chloride, but tri-chlorination in vacuum sampling system
Boron gas cannot be into conventional piston vacuum pump (such vacuum pump be full of oil), therefore the sampling analysis of boron chloride is always color
The a big difficulty of spectrum analysis.
Summary of the invention
The problem of for background technique, the present invention provides one kind for Electronic Gases boron chloride point
The chromatography sampling system of analysis.
To achieve the above object, the present invention provides the following technical solutions：One kind being used for Electronic Gases boron chloride
The chromatography sampling system of analysis, including helium replacement system, venturi vacuum pumping system and chromatography preprocessing system；The helium
Gas exchange system includes helium import, switch valve a, switch valve b and four-way valve, the helium airway connection switch valve a,
The switch valve a air circuit connection has triple valve a, and institute's triple valve a air circuit connection has triple valve b, the triple valve b and the switch
Valve b air circuit connection, the switch valve b and the four-way valve air circuit connection, the four-way valve and the chromatography preprocessing system gas
Road connection, the four-way valve air circuit connection have helium purge mouth and offgas outlet, and the triple valve a air circuit connection has switch valve c,
The switch valve c air circuit connection has sample inlet；The venturi vacuum system include venturi vacuum pump, nitrogen inlet and
Waste gas outlet, the nitrogen inlet and the waste gas outlet pump air circuit connection with the venturi vacuum, and the venturi is true
Sky pump passes through switch valve d and the triple valve b air circuit connection.
It further include pressure vacuum gauge as a preferred technical solution of the present invention, the pressure vacuum gauge passes through threeway
Valve c is connected between the triple valve a and the triple valve b.
Compared with prior art, the beneficial effects of the invention are as follows：The present invention meets water decomposition problem for boron chloride, uses
Sample introduction pipeline is replaced and purged to ultrapure helium, and is vacuumized to system, by blower-vacuum displacement several times after can make into
The moisture of sample system is down to 0.1ppm hereinafter, aiming at the problem that boron chloride cannot be into vacuum pump, is pumped using venturi vacuum, nitrogen
Gas does purge gass, can be avoided boron chloride and decomposes blockage problem.
Detailed description of the invention
Fig. 1 is overall structure diagram under purging state of the present invention；
Fig. 2 is overall structure diagram under sample introduction state of the present invention；
In figure：1- sample inlet；2- switch valve c；3- triple valve a；4- helium import；5- switch valve a；6- vacuum pressure
Table；7- triple valve c；8- triple valve b；9- switch valve d；10- nitrogen inlet；11- venturi vacuum pump；12- waste gas outlet；13-
Switch valve b；14- four-way valve；15- chromatography preprocessing system；16- offgas outlet；17- helium purge mouth.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride, including helium is set
Change system, venturi vacuum pumping system and chromatography preprocessing system 15；The helium replacement system includes helium import 4, opens
Valve a5, switch valve b13 and four-way valve 14, the 4 air circuit connection switch valve a5 of helium import are closed, the switch valve a5 gas circuit connects
It is connected to triple valve a3, institute's triple valve a3 air circuit connection has triple valve b8, and the triple valve b8 and the switch valve b13 gas circuit connect
It connects, the switch valve b13 and 14 air circuit connection of four-way valve, the four-way valve 14 and 15 gas circuit of chromatography preprocessing system
Connection, 14 air circuit connection of four-way valve have helium purge mouth 17 and offgas outlet 16, and the triple valve a3 air circuit connection has out
Valve c2 is closed, the switch valve c2 air circuit connection has sample inlet 1；The venturi vacuum system include venturi vacuum pump 11,
Nitrogen inlet 10 and waste gas outlet 12, the nitrogen inlet 10 pump 10 with the venturi vacuum with the waste gas outlet 12
Air circuit connection, the venturi vacuum pump 10 pass through switch valve d9 and the triple valve b8 air circuit connection.
As shown in Figure 1, the present invention, when carrying out helium purge, switch valve c2 is closed, switch valve d9 is closed, and switch valve a5 is opened
Open, switch valve b13 is opened, helium purge sample inlet, and and then switch valve c2 and switch valve a5 are closed, switch valve b13 with open
It closes valve d9 to open, vacuum drawn sample inlet；
As shown in Fig. 2, entering the sample introduction state of sample after purging is completed, switch valve a5 and switch valve d9 is closed at this time
It closes, switch valve c2 and switch valve b13 are opened, and four-way valve is state as shown in the figure, and chromatography preprocessing system starts sample introduction, chromatography
The main effect of preprocessing system is that sample is protected to influence from the moisture in air, is provided safeguard for subsequent gas analysis.
It in the specific implementation process, further include pressure vacuum gauge 6, the pressure vacuum gauge 6 is connected to by triple valve c7
Between the triple valve a3 and the triple valve b8.
The present invention meets water decomposition problem for boron chloride, is replaced and purged sample introduction pipeline using ultrapure helium, and
System is vacuumized, by that the moisture of sampling system can be made to be down to 0.1ppm after blower-vacuum displacement several times hereinafter, for three
The problem of boron chloride cannot be into vacuum pump, is pumped using venturi vacuum, and nitrogen does purge gass, can be avoided boron chloride decompose it is stifled
Plug problem.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (2)
1. a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride, it is characterised in that：It is set including helium
Change system, venturi vacuum pumping system and chromatography preprocessing system (15)；
The helium replacement system includes helium import (4), switch valve a (5), switch valve b (13) and four-way valve (14), described
Helium import (4) air circuit connection switch valve a (5), switch valve a (5) air circuit connection have triple valve a (3), institute triple valve a (3)
Air circuit connection has triple valve b (8), the triple valve b (8) and switch valve b (13) air circuit connection, the switch valve b (13)
With the four-way valve (14) air circuit connection, the four-way valve (14) and chromatography preprocessing system (15) air circuit connection are described
Four-way valve (14) air circuit connection has helium purge mouth (17) and offgas outlet (16), and triple valve a (3) air circuit connection has switch
Valve c (2), switch valve c (2) air circuit connection have sample inlet (1)；
The venturi vacuum system includes that venturi vacuum pumps (11), nitrogen inlet (10) and waste gas outlet (12), described
Nitrogen inlet (10) and the waste gas outlet (12) pump (10) air circuit connection, the venturi vacuum with the venturi vacuum
It pumps (10) and passes through switch valve d (9) and triple valve b (8) air circuit connection.
2. a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride according to claim 1,
It is characterized in that：It further include pressure vacuum gauge (6), the pressure vacuum gauge (6) is connected to the triple valve a by triple valve c (7)
(3) between the triple valve b (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810918150.9A CN108896689A (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810918150.9A CN108896689A (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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| CN108896689A true CN108896689A (en) | 2018-11-27 |
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| CN201810918150.9A Pending CN108896689A (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110529736A (en) * | 2019-09-05 | 2019-12-03 | 广东先导先进材料股份有限公司 | A kind of chemical gas-phase deposition system and feeder and air supply method |
| CN112834634A (en) * | 2020-12-28 | 2021-05-25 | 北京杰宇广谱科技有限公司 | Fast gas chromatograph |
| CN113125372A (en) * | 2021-04-21 | 2021-07-16 | 中国科学院合肥物质科学研究院 | Impurity gas detection device and method for electronic-grade boron trichloride purification system |
| CN114486810A (en) * | 2022-02-11 | 2022-05-13 | 迈射智能科技(上海)有限公司 | Oil sample oil mixing system based on multi-component standard gas system and detection method |
| CN114570183A (en) * | 2022-03-01 | 2022-06-03 | 西安热工研究院有限公司 | Derivatization reaction device of urea hydrolysis sediment |
| CN116256476A (en) * | 2023-05-15 | 2023-06-13 | 江苏一脉科技有限公司 | Hydrogen chloride concentration on-line analysis detector |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110529736A (en) * | 2019-09-05 | 2019-12-03 | 广东先导先进材料股份有限公司 | A kind of chemical gas-phase deposition system and feeder and air supply method |
| CN110529736B (en) * | 2019-09-05 | 2021-09-14 | 安徽光智科技有限公司 | Chemical vapor deposition system, gas supply device and gas supply method |
| CN112834634A (en) * | 2020-12-28 | 2021-05-25 | 北京杰宇广谱科技有限公司 | Fast gas chromatograph |
| CN112834634B (en) * | 2020-12-28 | 2022-10-04 | 北京杰宇广谱科技有限公司 | Fast gas chromatograph |
| CN113125372A (en) * | 2021-04-21 | 2021-07-16 | 中国科学院合肥物质科学研究院 | Impurity gas detection device and method for electronic-grade boron trichloride purification system |
| CN114486810A (en) * | 2022-02-11 | 2022-05-13 | 迈射智能科技(上海)有限公司 | Oil sample oil mixing system based on multi-component standard gas system and detection method |
| CN114486810B (en) * | 2022-02-11 | 2024-03-15 | 迈射智能科技(上海)有限公司 | Oil sample oil mixing system based on multicomponent gas marking system and detection method |
| CN114570183A (en) * | 2022-03-01 | 2022-06-03 | 西安热工研究院有限公司 | Derivatization reaction device of urea hydrolysis sediment |
| CN116256476A (en) * | 2023-05-15 | 2023-06-13 | 江苏一脉科技有限公司 | Hydrogen chloride concentration on-line analysis detector |
| CN116256476B (en) * | 2023-05-15 | 2023-10-20 | 江苏一脉科技有限公司 | Hydrogen chloride concentration on-line analysis detector |
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