CN104362057A - Pollution-free electron multiplier assembly system and assembly method thereof - Google Patents
Pollution-free electron multiplier assembly system and assembly method thereof Download PDFInfo
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- CN104362057A CN104362057A CN201410542047.0A CN201410542047A CN104362057A CN 104362057 A CN104362057 A CN 104362057A CN 201410542047 A CN201410542047 A CN 201410542047A CN 104362057 A CN104362057 A CN 104362057A
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- cabin
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- 238000000034 method Methods 0.000 title claims abstract description 27
- 239000003574 free electron Substances 0.000 title abstract 2
- 239000007789 gas Substances 0.000 claims abstract description 69
- 230000007704 transition Effects 0.000 claims abstract description 69
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 18
- 230000008569 process Effects 0.000 claims abstract description 16
- 238000005086 pumping Methods 0.000 claims abstract description 15
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 238000000746 purification Methods 0.000 claims description 38
- 238000003466 welding Methods 0.000 claims description 24
- 239000011261 inert gas Substances 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000010926 purge Methods 0.000 claims description 6
- 239000005341 toughened glass Substances 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 230000002745 absorbent Effects 0.000 claims description 3
- 239000002250 absorbent Substances 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 229920005549 butyl rubber Polymers 0.000 claims description 2
- 238000011109 contamination Methods 0.000 claims 1
- 238000004887 air purification Methods 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract description 2
- 230000003749 cleanliness Effects 0.000 abstract 1
- 238000012546 transfer Methods 0.000 description 4
- 238000005286 illumination Methods 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- NCMHKCKGHRPLCM-UHFFFAOYSA-N caesium(1+) Chemical compound [Cs+] NCMHKCKGHRPLCM-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/003—Auxiliary devices for installing or removing discharge tubes or lamps
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a pollution-free electron multiplier assembly system and an assembly method thereof. In the scheme, a vacuum pumping system and a gas purifying system are used for maintaining working pressure and a gas environment all the time during assembly, so that an electron multiplier assembly process is conducted in a non-atmospheric environment, and pollution of the atmosphere to a dynode secondary electron emission surface can be reduced. Moreover, dynodes can be protected by continuously-flowing nitrogen flow. Additionally, all parts of an electron multiplier enter a main cabinet from a transition bin, the assembled electron multiplier is conveyed out of the main cabinet from the transition bin, and the transition bin is subjected to air purification before the parts in the transition bin enter the main cabinet, so that removing gas impurities carried by the parts in advance is guaranteed, and cleanliness of the working environment of the main cabinet is further guaranteed.
Description
Technical Field
The invention relates to the technical field of electron multiplier assembly, in particular to a pollution-free assembly system of an electron multiplier and an assembly method using the system.
Background
The electron multiplier is a key component of the cesium atomic clock and is mainly used for amplifying cesium ion current signals so as to generate frequency discrimination signals. Through literature research and preliminary experiments, the electron multiplier is exposed to the atmospheric environment for 3 hours, and the multiplication performance of the electron multiplier is reduced by 50%. This is because the conventional assembly process is to assemble in the atmosphere and then to evacuate, and the electron multiplier is exposed to the air for a long time during the assembly process, and since the dynode in the electron multiplier is very sensitive to moisture and the like, the assembly process should be as fast as possible, thereby avoiding exposure to the atmosphere for a long time.
However, the electron multiplier has many parts and is relatively complicated to assemble, so that in addition to shortening the assembly time by determining the assembly sequence and skilled operation, another protection measure is taken without atmospheric treatment. The invention designs a pollution-free assembly system of an electron multiplier, which enables the assembly process of the electron multiplier to be carried out in a non-atmospheric environment, and can reduce the pollution of atmosphere on the secondary electron emission surface of a dynode, thereby ensuring that the electron multiplier is not lost.
Disclosure of Invention
In view of the above, the present invention provides a system and a method for assembling an electron multiplier without pollution, which can reduce the time of exposing the electron multiplier to the atmosphere during the assembling process and avoid the reduction of the electron multiplication performance caused by the atmospheric pollution.
In order to solve the technical problems, the specific method of the invention is as follows:
the electron multiplier non-pollution assembly system comprises:
a main case providing a closed space; the side surface of the main box body is made of corrosion-resistant stainless steel, and the front observation window is made of transparent toughened glass;
the lighting system is positioned at the upper front part of the main box body and adopts a fluorescent lamp tube for lighting;
the operation gloves are sealed and fixed at the glove openings of the transparent toughened glass arranged on the front surface of the main box body;
the transition cabin penetrates through and is fixed on the side wall of the main box body, and sealing treatment is carried out between the cabin wall of the transition cabin and the side wall of the main box body; the transition cabin is provided with two cabin doors, the inner cabin door is positioned inside the main box body, and the outer cabin door is positioned outside the main box body; all parts of the electron multiplier enter the main box body from the transition cabin, and the assembled electron multiplier is sent out of the main box body from the front transition cabin; a purifying pipeline connecting valve is arranged on the wall of the transition cabin;
the vacuum air pumping system is used for automatically maintaining constant working pressure according to the set working pressure range in the main box body; an exhaust pipe of the vacuum exhaust system extends into the main box body;
the gas purification system is used for purifying the gas extracted from the main box body and then conveying the purified gas back to the main box body to complete one cycle; the circulation continuously operates to continuously remove water and oxygen in the system, so that the main box body is kept in a high-purity inert gas protection environment; a purifying pipeline of the gas purifying system extends into the main box body;
the electric welding machine is arranged in the main box body and is controlled by an electric welding machine control system arranged outside the main box body;
and the control system is arranged outside the main box body and is used for inputting system parameters and controlling system functions of the pollution-free assembly system of the electron multiplier.
Preferably, when the main tank is gas-cleaned, an inlet and an outlet of the cleaning line are respectively provided at both ends of the assembly region.
The assembling method of the pollution-free assembling system by utilizing the electron multiplier comprises the following steps:
step 1, purifying gas in the main box body: firstly, adjusting the static pressure of a gas cylinder filled with inert gas in a gas purification system to 0.35 MPa; secondly, setting the working pressure range of the main box body to be 700Pa +/-400 Pa in a control system, and setting required purified gas target values including water content and oxygen content; finally, starting a vacuum pumping system to automatically maintain the constant working pressure in the pressure range, starting a gas purification system, and executing the subsequent steps after the gas in the main box body reaches the purified gas target value;
step 2, cleaning a transition cabin: cleaning the inner wall of the transition cabin and all components inside the transition cabin by dipping absorbent gauze in absolute ethyl alcohol;
step 3, placing the electron multiplier parts into a main box body: opening a cabin door outside the transition cabin, loading parts required by the electron multiplier into the transition cabin, and closing the cabin door outside the transition cabin; connecting a purification pipeline of a gas purification system to a purification pipeline of the transition cabin, connecting a valve, starting the gas purification system, purifying the transition cabin, opening an inner cabin door of the transition cabin after the gas in the transition cabin reaches the target value of the purified gas, putting parts of an electron multiplier into the main box body, and closing the inner cabin door of the transition cabin;
step 4, assembling the electron multiplier: turning on a lighting system, sequentially assembling parts of the electron multiplier according to an assembling sequence by using an electric welding machine, and inputting voltage, current and pressure parameters during electric welding in the process of inputting the voltage, current and pressure parameters into a control system of the electric welding machine to finish the assembling of the electron multiplier; in the assembly, a gas purification system (9) is started to purify gas in the main box body;
step 5, taking out the main box body from the electron multiplier: and opening an inner cabin door of the transition cabin, putting the assembled electron multiplier into the transition cabin, closing the inner cabin door of the transition cabin, opening an outer cabin door of the transition cabin, taking out the electron multiplier and closing the outer cabin door.
Advantageous effects
(1) The invention provides a pollution-free assembling system of an electron multiplier, wherein a vacuum air pumping system and a gas purification system are used for maintaining working pressure and gas environment all the time in the assembling process, so that the assembling process of the electron multiplier is carried out in an atmosphere-free environment, the pollution of atmosphere on a dynode secondary electron emission surface can be reduced, and the electron multiplier is ensured not to be lost. Moreover, the constantly renewed inert gas can protect the dynode.
(2) The inlet and outlet of the purge line are disposed at both ends of the assembly region, respectively, so that the flow of the inert gas is closer to the assembly region. Before assembly, inert gas is introduced from the gas inlet and flows out from the gas outlet, the process is utilized to purify the gas in the equipment assembly area, and then the inert gas is introduced all the time in the assembly process to form inert gas flow, so that the protection of the dynode is realized more effectively.
(3) All parts of the electron multiplier enter the main box body from the transition cabin, the assembled electron multiplier is sent out of the main box body from the front transition cabin, and the air purification is carried out on the transition cabin before the parts in the transition cabin enter the main box body, so that gas impurities carried by the parts are removed in advance, and the cleanness of the working environment of the main box body is ensured.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention;
the device comprises a lighting system 1, a main box body 2, an operating glove 3, an electric welding machine control system 4, a vacuum pumping system 5, an electric welding machine 6, a control system 7, a transition cabin 8 and a gas purification system 9.
Detailed Description
Embodiments of the present invention will be described below with reference to the accompanying drawings.
As shown in fig. 1, the electron multiplier contamination-free mounting system includes: the electric welding machine comprises a main box body 2, a lighting system 1, operating gloves 3, an electric welding machine control system 4, a vacuum air exhaust system 5, an electric welding machine 6, a control system 7, a transition cabin 8 and a gas purification system.
The main box body 2 provides a closed space, excellent sealing performance is required, and good sealing performance is the key for guaranteeing the use performance and safety of equipment. The side surface of the main box body is made of corrosion-resistant stainless steel, and the front observation window is made of transparent toughened glass.
The main box body 2 is internally provided with a lighting system 1, an operating glove 3 and an electric welding machine 6. Wherein,
the illumination system 1 is positioned on the upper front part of the main box body and adopts a fluorescent lamp tube for illumination.
The operation gloves 3 are fixed in the glove port of the front transparent toughened glass of the main box body 2 in a sealing mode, the opening of the operation gloves 3 is communicated with the outside of the main box body 2 through the glove port, and an operator can stretch hands into the operation gloves from the glove port, so that the operation of the electric welding machine 6 in the main box body is realized. The diameter of the glove opening is 200mm, and the glove opening is provided with an O-shaped sealing ring; the operation gloves are made of butyl rubber, so that the sealing performance is good, and the operation is convenient.
The transition cabin 8 penetrates through and is fixed on the side wall of the main box body 2, and sealing treatment is carried out between the cabin wall of the transition cabin 8 and the side wall of the main box body 2. The transition cabin 8 is provided with two cabin doors, the inner cabin door is positioned inside the main box body, and the outer cabin door is positioned outside the main box body; all parts of the electron multiplier enter the main box body from the transition cabin 8, and the assembled electron multiplier is sent out of the main box body from the front transition cabin 8; the wall of the transition chamber 8 is provided with a purge line connection valve for connecting a gas purge system.
The electric welding machine control system 4, the vacuum pumping system 5, the gas purification system 9 and the control system 7 are all arranged outside the main box body. The electric welding machine control system 4 is electrically connected with the electric welding machine and used for providing voltage, current and pressure control of the electric welding machine. The control system 7 is connected with the vacuum pumping system 5 and the gas purification system 9 and is used for parameter input and function control of the whole system, and the control system 7 can also control the lighting system. The vacuum pumping system 5 and the gas cleaning system 9 provide pressure control and mass control in the main enclosure. Specifically, the method comprises the following steps:
the vacuum pumping system 5 adopts a mechanical pump to pump vacuum, and the vacuum pumping system 5 automatically maintains constant working pressure within the working pressure range according to the set working pressure range in the main box body. The air pumping pipeline of the vacuum air pumping system 5 extends into the main box body 2 through a sealing opening. Wherein the specific value of the working pressure range can be set by the control system 7.
The gas purification system 9 is used for purifying the gas extracted from the main box body 2 and then conveying the purified gas back to the main box body to complete one cycle; the circulation continuously operates to continuously remove water and oxygen in the system, so that the main box body is kept in a high-purity inert gas protection environment; the purification pipeline of the gas purification system 9 extends into the main box body 2 through a sealing opening. The water/oxygen ratio can be set by the control system 7. Preferably, when the main box body is subjected to gas purification, the inlet and the outlet of the purification pipeline are respectively arranged at two ends of the assembly area, nitrogen is introduced from the air inlet before assembly and then flows out from the air outlet, the nitrogen purification is carried out on the equipment assembly area by utilizing the process, and the nitrogen is introduced all the time in the assembly process to form nitrogen flow, so that the protection of the dynode is realized.
The assembly method adopting the system of the invention comprises the following steps:
step 1, purifying the gas in the main box body 2:
first, the static pressure of the gas cylinder filled with an inert gas (plain nitrogen or high purity nitrogen) in the gas purification system 9 was adjusted to 0.35 MPa.
Secondly, in the control system 7, the working pressure range of the main box body 2 is set to 700Pa +/-400 Pa, and the required target value of the purified gas is set, wherein the water content is 10PPM, and the oxygen content is 10 PPM.
Finally, the vacuum pumping system 5 is turned on to automatically maintain a constant working pressure within the pressure range, and the gas purge system 9 is turned on to perform the subsequent steps after the gas in the main tank 2 reaches the purge gas target value.
Step 2, cleaning the transition cabin 8: and (4) dipping absolute ethyl alcohol by absorbent gauze to clean the inner wall of the transition cabin 8 and all components in the transition cabin.
Step 3, placing the electron multiplier parts into the main box body 2:
opening an outer cabin door of the transition cabin 8, loading parts required by the electron multiplier into the transition cabin 8, and closing the outer cabin door of the transition cabin 8; after a purification pipeline of the gas purification system 9 is connected to a purification pipeline connection valve of the transition cabin, the gas purification system 9 is opened, gas purification is carried out on the transition cabin 8, after the gas in the transition cabin 8 reaches the purified gas target value, an inner cabin door of the transition cabin 8 is opened, parts of the electron multiplier are placed into the main box body 2, and the inner cabin door of the transition cabin 8 is closed.
Step 4, assembling the electron multiplier: turning on the lighting system 1, sequentially assembling the electron multiplier parts according to an assembly sequence by using the electric welding machine 6, and inputting a voltage value and a current value during electric welding into the electric welding machine control system 4 in the process to finish the assembly of the electron multiplier; in the assembly, a gas purification system (9) is started to carry out gas purification on the main box body.
Step 5, taking out the main box body from the electron multiplier:
the inner compartment door of the transfer compartment 8 is opened, the assembled electron multiplier is placed into the transfer compartment 8, the inner compartment door of the transfer compartment 8 is closed, the outer compartment door of the transfer compartment 8 is opened, the electron multiplier is taken out, and the outer compartment door is closed.
In summary, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. A contamination-free assembly system for an electron multiplier, the system comprising:
a main case (2) providing a closed space; the side surface of the main box body is made of corrosion-resistant stainless steel, and the front observation window is made of transparent toughened glass;
the lighting system (1) is positioned on the upper front part of the main box body and adopts a fluorescent lamp tube for lighting;
the operation gloves (3) are hermetically fixed at the glove openings of the transparent toughened glass arranged on the front surface of the main box body (2);
the transition cabin (8) penetrates through and is fixed on the side wall of the main box body (2), and sealing treatment is carried out between the cabin wall of the transition cabin (8) and the side wall of the main box body (2); the transition cabin (8) is provided with two cabin doors, the inner cabin door is positioned inside the main box body, and the outer cabin door is positioned outside the main box body; all parts of the electron multiplier enter the main box body from the transition cabin (8), and the assembled electron multiplier is sent out of the main box body from the front transition cabin (8); a purifying pipeline connecting valve is arranged on the wall of the transition cabin (8);
the vacuum air pumping system (5) is used for automatically maintaining constant working pressure by the vacuum air pumping system (5) according to the set working pressure range in the main box body; an exhaust pipe of the vacuum exhaust system (5) extends into the main box body (2);
the gas purification system (9) is used for purifying the gas extracted from the main box body (2) and then conveying the purified gas back to the main box body to complete one cycle; the circulation continuously operates to continuously remove water and oxygen in the system, so that the main box body is kept in a high-purity inert gas protection environment; a purification pipeline of the gas purification system (9) extends into the main box body;
the electric welding machine (6) is arranged inside the main box body (2) and is controlled by an electric welding machine control system (4) arranged outside the main box body;
and the control system (7) is arranged outside the main box body (2) and is used for inputting system parameters and controlling system functions of the pollution-free assembly system of the electron multiplier.
2. The system of claim 1, wherein an inlet and an outlet of the purge line are respectively provided at both ends of the assembly region when the main tank is gas-purged.
3. The system of claim 1, wherein the cuff has a diameter of 200mm with an O-ring; the operation gloves are made of butyl rubber.
4. A method of assembling a contamination free assembly system using an electron multiplier according to any of claims 1 to 3, characterized by the steps of:
step 1, purifying the gas in the main box body (2): firstly, adjusting the static pressure of a gas cylinder filled with inert gas in a gas purification system (9) to be 0.35 MPa; secondly, setting the working pressure range of the main box body (2) to be 700Pa +/-400 Pa in the control system (7), and setting required purified gas target values including water content and oxygen content; finally, the vacuum air exhaust system (5) is started to automatically maintain a constant working pressure in the pressure range in the assembling process, and the gas purification system (9) is started to execute the step 2 after the gas in the main box body (2) reaches the purified gas target value;
step 2, cleaning the transition cabin (8): cleaning the inner wall of the transition cabin (8) and all components inside the transition cabin by dipping absorbent gauze in absolute ethyl alcohol;
and 3, putting the electron multiplier parts into the main box body (2): opening an outer cabin door of the transition cabin (8), loading parts required by the electron multiplier into the transition cabin (8), and closing the outer cabin door of the transition cabin (8); connecting a purification pipeline of a gas purification system (9) to a purification pipeline of a transition cabin to connect a valve, then opening the gas purification system (9), performing gas purification on the transition cabin (8), after the gas in the transition cabin (8) reaches the target value of the purified gas, opening an inner cabin door of the transition cabin (8), putting parts of an electron multiplier into a main box body (2), and closing the inner cabin door of the transition cabin (8);
step 4, assembling the electron multiplier: turning on the lighting system (1), sequentially assembling the parts of the electron multiplier according to an assembly sequence by using an electric welding machine (6), and inputting voltage, current and pressure parameters during electric welding into a control system (4) of the electric welding machine in the process to finish the assembly of the electron multiplier; in the assembly, a gas purification system (9) is started to purify gas in the main box body;
step 5, taking out the main box body from the electron multiplier: and opening an inner cabin door of the transition cabin (8), putting the assembled electron multiplier into the transition cabin (8), closing the inner cabin door of the transition cabin (8), opening an outer cabin door of the transition cabin (8), taking out the electron multiplier and closing the outer cabin door.
5. The method of claim 4, wherein the inert gas is normal nitrogen or high purity nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542047.0A CN104362057A (en) | 2014-10-15 | 2014-10-15 | Pollution-free electron multiplier assembly system and assembly method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410542047.0A CN104362057A (en) | 2014-10-15 | 2014-10-15 | Pollution-free electron multiplier assembly system and assembly method thereof |
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| Publication Number | Publication Date |
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| CN104362057A true CN104362057A (en) | 2015-02-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410542047.0A Pending CN104362057A (en) | 2014-10-15 | 2014-10-15 | Pollution-free electron multiplier assembly system and assembly method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104702230A (en) * | 2015-03-06 | 2015-06-10 | 兰州空间技术物理研究所 | Vacuum weak ion beam flux collecting and amplifying device |
| CN105159226A (en) * | 2015-06-30 | 2015-12-16 | 苏州华日金菱机械有限公司 | Circulating blowing type electric welding work case for pipeline operation |
| CN105583519A (en) * | 2016-03-16 | 2016-05-18 | 苏州北工激光技术有限公司 | Gas-shield laser forming repairing device |
| CN106082117A (en) * | 2016-07-26 | 2016-11-09 | 中国科学院声学研究所 | The method that electrostatic bonding equipment and electrostatic bonding produce |
| CN109001969A (en) * | 2018-07-02 | 2018-12-14 | 北京无线电计量测试研究所 | A kind of microchannel plate electron multiplier |
-
2014
- 2014-10-15 CN CN201410542047.0A patent/CN104362057A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104702230A (en) * | 2015-03-06 | 2015-06-10 | 兰州空间技术物理研究所 | Vacuum weak ion beam flux collecting and amplifying device |
| CN104702230B (en) * | 2015-03-06 | 2018-05-15 | 兰州空间技术物理研究所 | A kind of weak ion beam current of vacuum collects amplifying device |
| CN105159226A (en) * | 2015-06-30 | 2015-12-16 | 苏州华日金菱机械有限公司 | Circulating blowing type electric welding work case for pipeline operation |
| CN105583519A (en) * | 2016-03-16 | 2016-05-18 | 苏州北工激光技术有限公司 | Gas-shield laser forming repairing device |
| CN106082117A (en) * | 2016-07-26 | 2016-11-09 | 中国科学院声学研究所 | The method that electrostatic bonding equipment and electrostatic bonding produce |
| CN109001969A (en) * | 2018-07-02 | 2018-12-14 | 北京无线电计量测试研究所 | A kind of microchannel plate electron multiplier |
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Application publication date: 20150218 |
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