CN208420812U - A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride - Google Patents
A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride Download PDFInfo
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- CN208420812U CN208420812U CN201821298555.9U CN201821298555U CN208420812U CN 208420812 U CN208420812 U CN 208420812U CN 201821298555 U CN201821298555 U CN 201821298555U CN 208420812 U CN208420812 U CN 208420812U
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Abstract
The utility model discloses a kind of chromatography sampling systems for the analysis of Electronic Gases boron chloride, including helium replacement system, venturi vacuum pumping system and chromatography preprocessing system；The helium replacement system includes helium import, switch valve a, switch valve b and four-way valve；The venturi vacuum system includes venturi vacuum pump, nitrogen inlet and waste gas outlet, the nitrogen inlet and the waste gas outlet pump air circuit connection with the venturi vacuum, the venturi vacuum pump passes through switch valve d and the triple valve b air circuit connection, the utility model meets water decomposition problem for boron chloride, sample introduction pipeline is replaced and purged using ultrapure helium, and system is vacuumized, by that the moisture of sampling system can be made to be down to 0.1ppm or less after blower-vacuum displacement several times, aiming at the problem that boron chloride cannot be into vacuum pump, it is pumped using venturi vacuum, nitrogen does purge gass, it can be avoided boron chloride and decompose blockage problem.
Description
Technical field
The utility model relates to gas analysis technology fields, specially a kind of for Electronic Gases boron chloride point
The chromatography sampling system of analysis.
Background technique
Boron chloride is mainly used for that technical requirements in IC manufacturing process are very high, far-reaching to circuit yield chemical gas
Mutually deposit (CVD) film forming procedure and dry plasma etch process, can bring very crucial effect to the quality of IC product, and
It cannot be replaced with other electronic gas.With the fast development of domestic integrated circuit, the demand of boron chloride is higher and higher,
The impurity content and purity of boron chloride will have a direct impact on IC, the quality of electronic component, performance, technical indicator and yield rate.
In the past, high-purity boron chloride country of 5N or more cannot still produce, which fully relies on from the U.S., Britain, Japan etc.
The import of external Ji Jia major company, recently as domestic technological development, the country can also purify out high-purity boron chloride of 5N at present,
Water is met under boron chloride room temperature can be analyzed to boron oxide and hydrogen chloride gas, and hydrogen chloride gas can not only corrode sample introduction gas circuit,
The boron oxide powder of formation is also frequently occluded gas circuit, can alleviate the decomposition of boron chloride, but tri-chlorination in vacuum sampling system
Boron gas cannot be into conventional piston vacuum pump (such vacuum pump be full of oil), therefore the sampling analysis of boron chloride is always color
The a big difficulty of spectrum analysis.
Utility model content
The problem of for background technique, the utility model provide a kind of for Electronic Gases tri-chlorination
The chromatography sampling system of boron analysis.
To achieve the above object, the utility model provides the following technical solutions: one kind being used for Electronic Gases trichlorine
Change the chromatography sampling system of boron analysis, including helium replacement system, venturi vacuum pumping system and chromatography preprocessing system；Institute
Stating helium replacement system includes helium import, switch valve a, switch valve b and four-way valve, the helium airway connection switch
Valve a, the switch valve a air circuit connection have a triple valve a, and institute's triple valve a air circuit connection has a triple valve b, the triple valve b with it is described
Switch valve b air circuit connection, the switch valve b and the four-way valve air circuit connection, the four-way valve and chromatography pre-treatment system
System air circuit connection, the four-way valve air circuit connection have helium purge mouth and offgas outlet, and the triple valve a air circuit connection has switch
Valve c, the switch valve c air circuit connection have sample inlet；The venturi vacuum system includes venturi vacuum pump, nitrogen inlet
And waste gas outlet, the nitrogen inlet and the waste gas outlet pump air circuit connection, the text mound with the venturi vacuum
In vacuum pump pass through switch valve d and the triple valve b air circuit connection.
It further include pressure vacuum gauge as the utility model a preferred technical solution, the pressure vacuum gauge passes through
Triple valve c is connected between the triple valve a and the triple valve b.
Compared with prior art, the utility model has the beneficial effects that the utility model meets water decomposition for boron chloride
Problem is replaced and is purged sample introduction pipeline using ultrapure helium, and vacuumized to system, several times by blower-vacuum displacement
The moisture of sampling system can be prevented to be down to 0.1ppm afterwards hereinafter, aiming at the problem that boron chloride is from into vacuum pump, using literary mound
In vacuum pump, nitrogen does purge gass, can be avoided boron chloride and decomposes blockage problem.
Detailed description of the invention
Fig. 1 is overall structure diagram under the utility model purging state；
Fig. 2 is overall structure diagram under the utility model sample introduction state；
In figure: 1- sample inlet；2- switch valve c；3- triple valve a；4- helium import；5- switch valve a；6- vacuum pressure
Table；7- triple valve c；8- triple valve b；9- switch valve d；10- nitrogen inlet；11- venturi vacuum pump；12- waste gas outlet；13-
Switch valve b；14- four-way valve；15- chromatography preprocessing system；16- offgas outlet；17- helium purge mouth.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride, including helium
Gas exchange system, venturi vacuum pumping system and chromatography preprocessing system 15；The helium replacement system includes helium import
4, switch valve a5, switch valve b13 and four-way valve 14, the 4 air circuit connection switch valve a5 of helium import, the switch valve a5 gas
Road is connected with triple valve a3, and institute's triple valve a3 air circuit connection has triple valve b8, the triple valve b8 and the switch valve b13 gas circuit
Connection, the switch valve b13 and 14 air circuit connection of four-way valve, the four-way valve 14 and 15 gas of chromatography preprocessing system
Road connection, 14 air circuit connection of four-way valve have helium purge mouth 17 and offgas outlet 16, and the triple valve a3 air circuit connection has
Switch valve c2, the switch valve c2 air circuit connection have sample inlet 1；The venturi vacuum system includes venturi vacuum pump
11, nitrogen inlet 10 and waste gas outlet 12, the nitrogen inlet 10 and the waste gas outlet 12 with the venturi vacuum
10 air circuit connections are pumped, the venturi vacuum pump 10 passes through switch valve d9 and the triple valve b8 air circuit connection.
As shown in Figure 1, the utility model, when carrying out helium purge, switch valve c2 is closed, switch valve d9 is closed, switch valve
A5 is opened, and switch valve b13 is opened, helium purge sample inlet, and and then switch valve c2 and switch valve a5 is closed, switch valve b13
It is opened with switch valve d9, vacuum drawn sample inlet；
As shown in Fig. 2, entering the sample introduction state of sample after purging is completed, switch valve a5 and switch valve d9 is closed at this time
It closes, switch valve c2 and switch valve b13 are opened, and four-way valve is state as shown in the figure, and chromatography preprocessing system starts sample introduction, chromatography
The main effect of preprocessing system is that sample is protected to influence from the moisture in air, is provided safeguard for subsequent gas analysis.
It in the specific implementation process, further include pressure vacuum gauge 6, the pressure vacuum gauge 6 is connected to by triple valve c7
Between the triple valve a3 and the triple valve b8.
The utility model meets water decomposition problem for boron chloride, is replaced and purged sample feeding pipe using ultrapure helium
Road, and system is vacuumized, by the moisture of sampling system capable of being made to be down to 0.1ppm after blower-vacuum displacement several times hereinafter,
Aiming at the problem that boron chloride cannot be into vacuum pump, pumped using venturi vacuum, nitrogen does purge gass, can be avoided boron chloride
Decompose blockage problem.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (2)
1. a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride, it is characterised in that: set including helium
Change system, venturi vacuum pumping system and chromatography preprocessing system (15)；
The helium replacement system includes helium import (4), switch valve a (5), switch valve b (13) and four-way valve (14), described
Helium import (4) air circuit connection switch valve a (5), switch valve a (5) air circuit connection have triple valve a (3), the triple valve a
(3) air circuit connection has triple valve b (8), the triple valve b (8) and switch valve b (13) air circuit connection, the switch valve b
(13) with the four-way valve (14) air circuit connection, the four-way valve (14) and chromatography preprocessing system (15) air circuit connection,
Four-way valve (14) air circuit connection has helium purge mouth (17) and offgas outlet (16), and triple valve a (3) air circuit connection has
Switch valve c (2), switch valve c (2) air circuit connection have sample inlet (1)；
The venturi vacuum system includes that venturi vacuum pumps (11), nitrogen inlet (10) and waste gas outlet (12), described
Nitrogen inlet (10) and the waste gas outlet (12) pump (11) air circuit connection, the venturi vacuum with the venturi vacuum
It pumps (11) and passes through switch valve d (9) and triple valve b (8) air circuit connection.
2. a kind of chromatography sampling system for the analysis of Electronic Gases boron chloride according to claim 1,
It is characterized in that: further including pressure vacuum gauge (6), the pressure vacuum gauge (6) is connected to the triple valve a by triple valve c (7)
(3) between the triple valve b (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821298555.9U CN208420812U (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821298555.9U CN208420812U (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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| Publication Number | Publication Date |
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| CN208420812U true CN208420812U (en) | 2019-01-22 |
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| CN201821298555.9U Active CN208420812U (en) | 2018-08-13 | 2018-08-13 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896689A (en) * | 2018-08-13 | 2018-11-27 | 朗析仪器（上海）有限公司 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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2018
- 2018-08-13 CN CN201821298555.9U patent/CN208420812U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896689A (en) * | 2018-08-13 | 2018-11-27 | 朗析仪器（上海）有限公司 | A kind of chromatography sampling system for the analysis of Electronic Gases boron chloride |
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