CN207231222U - A kind of tubular type furnace system - Google Patents
A kind of tubular type furnace system Download PDFInfo
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- CN207231222U CN207231222U CN201721177632.0U CN201721177632U CN207231222U CN 207231222 U CN207231222 U CN 207231222U CN 201721177632 U CN201721177632 U CN 201721177632U CN 207231222 U CN207231222 U CN 207231222U
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- vacuum
- tubular type
- type furnace
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- instrumentation tubes
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Abstract
The utility model discloses a kind of tubular type furnace system, including sequentially connected instrumentation tubes, reducer pipe and four-way pipe, instrumentation tubes one end sealing, the other end is connected by the reducer pipe with the four-way pipe, the path that the instrumentation tubes, reducer pipe and four-way pipe are formed includes two branches, it is characterised in that：One branch is rare gas path, and the rare gas path includes sequentially connected first baffle control valve, the first bellows and rare protective gas tank；Another branch is vacuum passage, and the vacuum passage includes sequentially connected second baffle control valve, the second bellows, control system, bipolar chip select vacuum pump and molecular pump；The tubular type furnace system of the utility model; air-tightness is good; pressure control is accurate; it can automatically control; it is easy to operate; the precision of system control and the repeatability of experiment can be greatly improved, the high temperature particularly suitable for the high temperature oxidizable material such as brazing material leads to Shielding gas or the welding of ultralow vacuum.
Description
Technical field
The utility model belongs to material and prepares and atmosphere heat-treating apparatus field, more particularly to a kind of tubular type furnace system.
Background technology
Tubular type furnace system is prepared in nano material, and the field such as material soldering such as diamond is widely used.Vacuum is logical
Two path tubular type furnace systems of protective gas are that physical vapour deposition (PVD) and chemical vapor deposition prepare that nano material is most common to be set
It is one of standby, in recent years due to the research energetically of the soldering associated materials such as diamond, more need ultralow vacuum, stability
Height, good airproof performance, two path tubular type furnace systems of the accurate novel evacuated or logical protective gas of adjusting.
Existing technology is mainly using the different bleed-off passage of two classes, a kind of KF16 or KF25 latus rectums with standard, usually
For the condition of high vacuum, in low latitude, control accuracy is poor, another kind of to be connected with plastic conduit, can only achieve relatively low vacuum
Degree.And both equipment cannot all be met the requirements in the practical application of soldering, material can all aoxidize.
Utility model content
The utility model provides a kind of tubular type furnace system, which overcomes deficiency present in background technology, this practicality is new
Technical solution is used by type solves its technical problem：
A kind of tubular type furnace system, including sequentially connected instrumentation tubes, reducer pipe and four-way pipe, described instrumentation tubes one end are close
Envelope, the other end are connected by the reducer pipe with the four-way pipe, the path that the instrumentation tubes, reducer pipe and four-way pipe are formed
Including two branches, a branch is rare gas path, and the rare gas path includes sequentially connected first gear
Plate control valve, the first bellows and rare protective gas tank；Another branch is vacuum passage, and the vacuum passage includes
Sequentially connected second baffle control valve, the second bellows, control system, bipolar chip select vacuum pump and molecular pump.
In one preferred embodiment：Vent valve and barometer are further included, the barometer is connected to institute by the vent valve
State four-way pipe.
In one preferred embodiment：The instrumentation tubes, four-way pipe, vent valve, the first bellows, the second bellows, first gear
The connector of plate control valve and second baffle control valve is the vacuum flange connector of KF25, and the connector interface internal diameter is 20-40
Millimeter, the connector use clip lock ring.
In one preferred embodiment：The connector of the reducer pipe is the vacuum flange connector of KF16-KF25 or KF25-KF40,
The connector interface internal diameter is 16-25 millimeters or 25-40 millimeters, and the connector uses clip lock ring.
In one preferred embodiment：The instrumentation tubes are quartz glass tube.
Compared with the prior art, the beneficial effects of the utility model are：
1st, the tubular type furnace system of the utility model can select two kinds of experimental situations, vacuum environment or logical protective gas,
And it is considerably less the time required to extracting vacuum, under cold conditions, vacuum can be reduced to 0.0052 pa in five minutes.Under hot, half
Hour, you can vacuum is reduced to 0.00017 pa.
2nd, the vacuum passage of the tubular type furnace system of the utility model is extracted using two-stage, first with the bipolar blade vacuum
Pumping takes vacuum, when treating vacuum to a certain extent, recycles the molecular pump to extract vacuum, and exhaust capacity is very strong,
And can be precisely controlled in a wider scope, vacuum is low, and air-tightness is good, and control is accurate, solves part
Brazing material is more at high temperature compared with the phenomenon still aoxidized under rough vacuum.
3rd, the tubular type furnace system of the utility model, air-tightness is good, and pressure control is accurate, can automatically control, easy to operate,
The precision of system control and the repeatability of experiment can be greatly improved, particularly suitable for the high temperature oxidizable material such as brazing material
High temperature leads to Shielding gas or the welding of ultralow vacuum.
Brief description of the drawings
The utility model is described in further detail with reference to the accompanying drawings and examples.
Fig. 1 is a kind of structure diagram of tubular type furnace system of the utility model.
Embodiment
Fig. 1, a kind of tubular type furnace system, including sequentially connected instrumentation tubes 1, reducer pipe 2 and four-way pipe 3 are refer to, it is described
1 one end of instrumentation tubes seals, and the other end is connected by the reducer pipe 2 with the four-way pipe 3.The instrumentation tubes 1, reducer pipe 2
The path formed with four-way pipe 3 includes two branches, and a branch is rare gas path, the rare gas path bag
Include sequentially connected first baffle control valve 4, the first bellows 5 and rare protective gas tank 6.Another branch is vacuum
Path, the vacuum passage include sequentially connected second baffle control valve 7, the second bellows 8, control system 9, bipolar chip select
Vacuum pump 10 and molecular pump 11.
In this implementation, vacuum meter 12 is also associated with 3 another branches of the four-way pipe, the vacuum meter 12 passes through vent valve
13 are connected to four-way pipe 3.
In the present embodiment, the materials of the instrumentation tubes 1 is quartz glass, 45.0 millimeters of outside diameter, 40.0 millimeters of internal diameter, error
Positive and negative 0.2 millimeter.In concrete structure, the instrumentation tubes 1, first bellows 5, the second bellows 8, four-way pipe 3, vent valve
13rd, the connector (not shown) of first baffle control valve 4 and the second baffle control valve 7 is the KF vacuum flanges of KF25
Connector, the connector interface internal diameter match with KF vacuum flange connectors, and length is 20-40 millimeters, and the connector uses clip
Lock ring.In addition, the reducer pipe 2 is KF standard reducer pipes, the connector of the KF standards reducer pipe is the KF vacuum of KF25-KF40
Bump joint, internal diameter is 25-40 millimeters at the connector interface, and the connector uses clip lock ring.
Wherein, the instrumentation tubes 1 can select two kinds of types of cooling, and one kind is furnace cooling, and one kind is air-cooled, works as needs
When furnace cooling, then any processing need not be done by finishing experiment, remove the instrumentation tubes 1 when being cooled to room temperature again i.e.
Can；When needing wink cold then when experiment is finished, the instrumentation tubes 1 are removed rapidly by outer rail mechanism, i.e.,
It can reach wink cold condition.
The tubular type furnace system of the utility model, can select two kinds of experimental situations, vacuum or logical protective gas, work as experiment
When condition needs logical protective gas, then the first baffle control valve 4 is opened, closes the second baffle control valve 7.When
When experiment condition needs ultralow vacuum, then the second baffle control valve 7 is opened, closes the first baffle control valve
4。
In the present embodiment, the vacuum passage is extracted using two-stage, is extracted very first with the bipolar sliding vane rotary vacuum pump 10
Sky, treats that vacuum is extracted to 0.0052 pa, recycles the molecular pump 11 to extract vacuum to 0.0004 pa, it is extracted by two-stage
Afterwards, brazing tests environment can be reached to the ultralow vacuum of 0.0004 pa.Exhaust capacity is very strong, and can be wider
In the range of it is precisely controlled, vacuum is low, and air-tightness is good, and control is accurate, solves part brazing material at high temperature
Some are compared with the phenomenon still aoxidized under rough vacuum.
The tubular type furnace system of the utility model, air-tightness is good, and pressure control is accurate, can automatically control, easy to operate, can
The precision of system control and the repeatability of experiment, the height particularly suitable for the high temperature oxidizable material such as brazing material is greatly improved
The logical Shielding gas of temperature or the welding of ultralow vacuum.
The above, is only the utility model preferred embodiment, therefore cannot limit the utility model implementation according to this
Scope, i.e., the equivalent changes and modifications made according to the utility model patent scope and description, it is new all should still to belong to this practicality
In the range of type covers.
Claims (5)
1. a kind of tubular type furnace system, including sequentially connected instrumentation tubes, reducer pipe and four-way pipe, instrumentation tubes one end sealing,
The other end is connected by the reducer pipe with the four-way pipe, the path bag that the instrumentation tubes, reducer pipe and four-way pipe are formed
Include two branches, it is characterised in that：One branch is rare gas path, and the rare gas path includes being sequentially connected
First baffle control valve, the first bellows and rare protective gas tank；Another branch is vacuum passage, the vacuum
Path includes sequentially connected second baffle control valve, the second bellows, control system, bipolar chip select vacuum pump and molecular pump.
A kind of 2. tubular type furnace system according to claim 1, it is characterised in that：Vent valve and barometer are further included, it is described
Barometer is connected to the four-way pipe by the vent valve.
A kind of 3. tubular type furnace system according to claim 2, it is characterised in that：The instrumentation tubes, four-way pipe, vent valve,
First bellows, the second bellows, the connector of first baffle control valve and second baffle control valve are the vacuum flange of KF25
Connector, the connector interface internal diameter are 20-40 millimeters, and the connector uses clip lock ring.
A kind of 4. tubular type furnace system according to claim 1, it is characterised in that：The connector of the reducer pipe is KF16-
The vacuum flange connector of KF25 or KF25-KF40, the connector interface internal diameter are 16-25 millimeters or 25-40 millimeters, the connector
Using clip lock ring.
A kind of 5. tubular type furnace system according to claim 1, it is characterised in that：The instrumentation tubes are quartz glass tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721177632.0U CN207231222U (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721177632.0U CN207231222U (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
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| Publication Number | Publication Date |
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| CN207231222U true CN207231222U (en) | 2018-04-13 |
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| CN201721177632.0U Active CN207231222U (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525406A (en) * | 2017-09-14 | 2017-12-29 | 华侨大学 | A kind of tubular type furnace system |
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2017
- 2017-09-14 CN CN201721177632.0U patent/CN207231222U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107525406A (en) * | 2017-09-14 | 2017-12-29 | 华侨大学 | A kind of tubular type furnace system |
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