CN107525406A - A kind of tubular type furnace system - Google Patents
A kind of tubular type furnace system Download PDFInfo
- Publication number
- CN107525406A CN107525406A CN201710826809.3A CN201710826809A CN107525406A CN 107525406 A CN107525406 A CN 107525406A CN 201710826809 A CN201710826809 A CN 201710826809A CN 107525406 A CN107525406 A CN 107525406A
- Authority
- CN
- China
- Prior art keywords
- tubular type
- type furnace
- vacuum
- instrumentation tubes
- furnace system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/02—Furnaces of a kind not covered by any preceding group specially designed for laboratory use
Abstract
The invention discloses a kind of tubular type furnace system, including instrumentation tubes, reducer pipe and the four-way pipe being sequentially connected, instrumentation tubes one end sealing, the other end is connected by the reducer pipe with the four-way pipe, the path that the instrumentation tubes, reducer pipe and four-way pipe are formed includes two branch roads, it is characterised in that：One branch road is rare gas path, and the rare gas path includes first baffle control valve, the first bellows and the rare protective gas tank being sequentially connected；Another branch road is vacuum passage, and the vacuum passage includes second baffle control valve, the second bellows, control system, bipolar chip select vavuum pump and the molecular pump being sequentially connected；The tubular type furnace system of the present invention, air-tightness is good, and pressure control is accurate; it can automatically control; it is easy to operate, the precision of system control and the repeatability of experiment can be greatly improved, the high temperature particularly suitable for the high temperature oxidizable material such as brazing material leads to Shielding gas or the welding of ultralow vacuum.
Description
Technical field
The invention belongs to material to prepare and atmosphere heat-treating apparatus field, more particularly to a kind of tubular type furnace system.
Background technology
Tubular type furnace system is prepared in nano material, and the field such as material soldering such as diamond is widely used.Vacuum is logical
Two path tubular type furnace systems of protective gas are that physical vapour deposition (PVD) and chemical vapor deposition prepare that nano material is the most frequently used to be set
It is one of standby, in recent years due to the research energetically of the soldering associated materials such as diamond, more need ultralow vacuum, stability
Height, good airproof performance, two path tubular type furnace systems of the accurate novel evacuated or logical protective gas of regulation.
Existing technology is mainly using the different bleed-off passage of two classes, a kind of KF16 or KF25 latus rectums with standard, generally
For the condition of high vacuum, in low latitude, control accuracy is poor, another kind of to be connected with plastic conduit, can only achieve relatively low vacuum
Degree.And both equipment can not all meet to require in the practical application of soldering, material can all aoxidize.
The content of the invention
The invention provides a kind of tubular type furnace system, which overcomes deficiency present in background technology, and the present invention solves it
Technical scheme is used by technical problem：
A kind of tubular type furnace system, including instrumentation tubes, reducer pipe and the four-way pipe being sequentially connected, described instrumentation tubes one end are close
Envelope, the other end are connected by the reducer pipe with the four-way pipe, the path that the instrumentation tubes, reducer pipe and four-way pipe are formed
Including two branch roads, a branch road is rare gas path, and the rare gas path includes the first gear being sequentially connected
Plate control valve, the first bellows and rare protective gas tank；Another branch road is vacuum passage, and the vacuum passage includes
Second baffle control valve, the second bellows, control system, bipolar chip select vavuum pump and the molecular pump being sequentially connected.
In one preferred embodiment：Also include vent valve and barometer, the barometer is connected to institute by the vent valve
State four-way pipe.
In one preferred embodiment：The instrumentation tubes, four-way pipe, vent valve, the first bellows, the second bellows, first gear
The joint of plate control valve and second baffle control valve is KF25 vacuum flange joint, and the connector interface internal diameter is 20-40
Millimeter, the joint use clip lock ring.
In one preferred embodiment：The joint of the reducer pipe is KF16-KF25 or KF25-KF40 vacuum flange joint,
The connector interface internal diameter is 16-25 millimeters or 25-40 millimeters, and the joint uses clip lock ring.
In one preferred embodiment：The instrumentation tubes are quartz glass tube.
Compared to prior art, the beneficial effects of the invention are as follows：
1st, tubular type furnace system of the invention can select two kinds of experimental situations, vacuum environment or logical protective gas, and
It is considerably less the time required to extracting vacuum, under cold conditions, vacuum can be reduced to 0.0052 pa in five minutes.Under hot, half an hour,
Vacuum can be reduced to 0.00017 pa.
2nd, the vacuum passage of tubular type furnace system of the invention is extracted using two-stage, is taken out first with the bipolar sliding vane rotary vacuum pump
Vacuum is taken, when treating vacuum to a certain extent, recycles the molecular pump to extract vacuum, exhaust capacity is very strong, and
Can be precisely controlled in wider scope, vacuum is low, and air-tightness is good, and control is accurate, solves part soldering
Material is more at high temperature compared with the phenomenon still aoxidized under rough vacuum.
3rd, tubular type furnace system of the invention, air-tightness is good, and pressure control is accurate, can automatically control, easy to operate, can pole
The repeatability of the big precision and experiment for improving system control, the high temperature particularly suitable for the high temperature oxidizable material such as brazing material
Logical Shielding gas or the welding of ultralow vacuum.
Brief description of the drawings
The invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is a kind of structural representation of tubular type furnace system of the present invention.
Embodiment
Fig. 1, a kind of tubular type furnace system are refer to, including instrumentation tubes 1, reducer pipe 2 and the four-way pipe 3 being sequentially connected, it is described
The one end of instrumentation tubes 1 is sealed, and the other end is connected by the reducer pipe 2 with the four-way pipe 3.The instrumentation tubes 1, reducer pipe 2
The path formed with four-way pipe 3 includes two branch roads, and a branch road is rare gas path, the rare gas path bag
Include the first baffle control valve 4 being sequentially connected, the first bellows 5 and rare protective gas tank 6.Another branch road is vacuum
Path, the vacuum passage include be sequentially connected second baffle control valve 7, the second bellows 8, control system 9, bipolar chip select
Vavuum pump 10 and molecular pump 11.
In this implementation, vacuum meter 12 is also associated with 3 another branch roads of the four-way pipe, the vacuum meter 12 passes through vent valve
13 are connected to four-way pipe 3.
In the present embodiment, the materials of the instrumentation tubes 1 is quartz glass, 45.0 millimeters of external diameter, 40.0 millimeters of internal diameter, error
Positive and negative 0.2 millimeter.In concrete structure, the instrumentation tubes 1, first bellows 5, the second bellows 8, four-way pipe 3, vent valve
13rd, the joint (not shown) of first baffle control valve 4 and the second baffle control valve 7 is KF25 KF vacuum flanges
Joint, the connector interface internal diameter match with KF vacuum flange joints, and length is 20-40 millimeters, and the joint uses clip
Lock ring.In addition, the reducer pipe 2 is KF standard reducer pipes, the joint of the KF standards reducer pipe is KF25-KF40 KF vacuum
Bump joint, internal diameter is 25-40 millimeters at the connector interface, and the joint uses clip lock ring.
Wherein, the instrumentation tubes 1 can select two kinds of types of cooling, and one kind is furnace cooling, and one kind is air-cooled, works as needs
When furnace cooling, then any processing need not be done by finishing experiment, remove the instrumentation tubes 1 when being cooled to room temperature again i.e.
Can；When needing wink cold, then when experiment is finished, the instrumentation tubes 1 are removed rapidly by outer rail mechanism, i.e.,
It can reach wink cold condition.
The tubular type furnace system of the present invention, can select two kinds of experimental situations, vacuum or logical protective gas, work as experiment condition
When needing logical protective gas, then the first baffle control valve 4 is opened, closes the second baffle control valve 7.Work as experiment
When condition needs ultralow vacuum, then the second baffle control valve 7 is opened, closes the first baffle control valve 4.
In the present embodiment, the vacuum passage is extracted using two-stage, is extracted very first with the bipolar sliding vane rotary vacuum pump 10
Sky, treat that vacuum is extracted to 0.0052 pa, recycle the molecular pump 11 to extract vacuum to 0.0004 pa, it is extracted by two-stage
Afterwards, brazing tests environment can be reached to the ultralow vacuum of 0.0004 pa.Exhaust capacity is very strong, and can be wider
In the range of it is precisely controlled, vacuum is low, and air-tightness is good, and control is accurate, solves part brazing material at high temperature
Some are compared with the phenomenon still aoxidized under rough vacuum.
The tubular type furnace system of the present invention, air-tightness is good, and pressure control is accurate, can automatically control, easy to operate, can be very big
The precision of raising system control and the repeatability of experiment, the high temperature particularly suitable for the high temperature oxidizable material such as brazing material lead to
Shielding gas or the welding of ultralow vacuum.
Above-described embodiment is only used for further illustrating a kind of tubular type furnace system of the present invention, but the invention is not limited in reality
Apply example, any simple modification, equivalent change and modification that every technical spirit according to the present invention is made to above example,
Fall into the protection domain of technical solution of the present invention.
Claims (5)
1. a kind of tubular type furnace system, including instrumentation tubes, reducer pipe and the four-way pipe being sequentially connected, instrumentation tubes one end sealing,
The other end is connected by the reducer pipe with the four-way pipe, the path bag that the instrumentation tubes, reducer pipe and four-way pipe are formed
Include two branch roads, it is characterised in that：One branch road is rare gas path, and the rare gas path includes being sequentially connected
First baffle control valve, the first bellows and rare protective gas tank；Another branch road is vacuum passage, the vacuum
Path includes second baffle control valve, the second bellows, control system, bipolar chip select vavuum pump and the molecular pump being sequentially connected.
A kind of 2. tubular type furnace system according to claim 1, it is characterised in that：Also include vent valve and barometer, it is described
Barometer is connected to the four-way pipe by the vent valve.
A kind of 3. tubular type furnace system according to claim 2, it is characterised in that：The instrumentation tubes, four-way pipe, vent valve,
First bellows, the second bellows, the joint of first baffle control valve and second baffle control valve are KF25 vacuum flange
Joint, the connector interface internal diameter are 20-40 millimeters, and the joint uses clip lock ring.
A kind of 4. tubular type furnace system according to claim 1, it is characterised in that：The joint of the reducer pipe is KF16-
KF25 or KF25-KF40 vacuum flange joint, the connector interface internal diameter are 16-25 millimeters or 25-40 millimeters, the joint
Using clip lock ring.
A kind of 5. tubular type furnace system according to claim 1, it is characterised in that：The instrumentation tubes are quartz glass tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710826809.3A CN107525406A (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710826809.3A CN107525406A (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107525406A true CN107525406A (en) | 2017-12-29 |
Family
ID=60736938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710826809.3A Pending CN107525406A (en) | 2017-09-14 | 2017-09-14 | A kind of tubular type furnace system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107525406A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108344764A (en) * | 2018-03-13 | 2018-07-31 | 华侨大学 | Low-temperature high-vacuum composite heating platform |
| CN114777497A (en) * | 2022-03-18 | 2022-07-22 | 浙江万里学院 | Furnace tube for three-tube cooperation high-temperature-resistant high-vacuum tube furnace |
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| JPS62137173A (en) * | 1985-12-10 | 1987-06-20 | Ishikawajima Harima Heavy Ind Co Ltd | Aluminum vacuum brazing furnace |
| JP2003071270A (en) * | 2001-08-31 | 2003-03-11 | Ulvac Japan Ltd | Vacuum treatment apparatus |
| CN201607355U (en) * | 2010-01-26 | 2010-10-13 | 宝山钢铁股份有限公司 | Oxidization and heat treatment simulation test device in controllable atmosphere or vacuum environment |
| CN101963596A (en) * | 2010-09-01 | 2011-02-02 | 中国科学院广州地球化学研究所 | Rare gas determination system based on quadrupole mass spectrometer |
| CN102425946A (en) * | 2011-11-30 | 2012-04-25 | 中国科学院地质与地球物理研究所 | Vacuum focusing furnace device for inert gas diffusion experiment |
| CN103305817A (en) * | 2013-05-30 | 2013-09-18 | 中国科学技术大学 | Tube furnace epitaxial system |
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| CN104307586A (en) * | 2014-11-04 | 2015-01-28 | 安徽师范大学 | Heat treatment device and heat treatment method for solid material at gas atmosphere |
| CN106152775A (en) * | 2016-07-08 | 2016-11-23 | 东南大学 | A kind of electron tubes type furnace system |
| CN106835065A (en) * | 2016-10-17 | 2017-06-13 | 中国矿业大学(北京) | A kind of Nano diamond silane surface vacuum pyrolysis depositing device |
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-
2017
- 2017-09-14 CN CN201710826809.3A patent/CN107525406A/en active Pending
Patent Citations (11)
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| JP2003071270A (en) * | 2001-08-31 | 2003-03-11 | Ulvac Japan Ltd | Vacuum treatment apparatus |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108344764A (en) * | 2018-03-13 | 2018-07-31 | 华侨大学 | Low-temperature high-vacuum composite heating platform |
| CN114777497A (en) * | 2022-03-18 | 2022-07-22 | 浙江万里学院 | Furnace tube for three-tube cooperation high-temperature-resistant high-vacuum tube furnace |
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