CN108896180B - DMD Spectral Dimension Encoding Dual Optical Path Offner Splitting and Combining Light Mid-Wave Infrared Spectral Imaging Device - Google Patents

DMD Spectral Dimension Encoding Dual Optical Path Offner Splitting and Combining Light Mid-Wave Infrared Spectral Imaging Device Download PDF

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CN108896180B
CN108896180B CN201810714460.9A CN201810714460A CN108896180B CN 108896180 B CN108896180 B CN 108896180B CN 201810714460 A CN201810714460 A CN 201810714460A CN 108896180 B CN108896180 B CN 108896180B
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wave infrared
spectral
offner
splitting
dmd
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CN108896180A (en
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贺文俊
陈柯含
胡源
王祺
付跃刚
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Shanghai Ruian Gene Technology Co ltd
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Changchun University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804Plane gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J2003/283Investigating the spectrum computer-interfaced

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  • Spectroscopy & Molecular Physics (AREA)
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  • Spectrometry And Color Measurement (AREA)
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Abstract

DMD spectral dimension coding double-light-path Offner splitting and combining light mid-wave infrared spectrum imaging device belongs to the technical field of infrared spectrum imaging. The prior art can not meet the requirements of all-weather work. The invention is characterized in that the back focal plane of the medium wave infrared achromatic zoom objective lens group is superposed with the initial object plane of the dual-light path Offner optical splitting and combining system; the dual-light-path Offner splitting and combining system consists of a concave spherical reflector and a convex spherical reflection grating, the curvature centers of the concave spherical reflector and the convex spherical reflection grating are the same, and the ratio of the curvature radii is 2: 1; the medium wave infrared achromatic zoom objective lens group and the medium wave infrared DMD are symmetrical relative to the convex spherical reflection grating, and the medium wave infrared DMD is positioned at an image surface of the dual-light-path Offner beam splitting and combining system; the folding mirror is positioned on the secondary imaging light path of the dual-light-path Offner splitting and combining optical system, and the refrigeration type medium-wave infrared detector is positioned in the reflection light path of the folding mirror; the refrigeration type medium wave infrared detector is connected with the image acquisition card, and the computer is respectively connected with the image acquisition card and the medium wave infrared DMD.

Description

DMD spectral dimension coding double-light-path Offner splitting and combining light medium wave infrared spectrum imaging device
Technical Field
The invention relates to a DMD spectral dimension coding double-light-path Offner splitting and combining light medium-wave infrared spectrum imaging device, and belongs to the technical field of infrared spectrum imaging.
Background
Spectroscopic and spectroscopic analysis, volume 33, No. 7, describes a solution entitled "Hadamard transform imaging spectroscopy system based on DMD design". The imaging spectrum system is composed of a front mirror 1, a collimating mirror 2, a reflection grating 3, a converging mirror 4, a DMD5, a converging mirror 6, a reflection grating 7, a collimating mirror 8 and a detector 9, and is shown in figure 1. The method comprises the steps that a front lens 1 images a target scene on a primary image surface, then parallel light is formed by shaping through a collimating lens 2 and enters a reflection grating 3, the reflection grating 3 splits the incident light, a spectrum signal after splitting (namely dispersion) passes through a converging lens 4 and then is projected onto a DMD5, the DMD5 changes a coding template under the control of a preset program to code a dispersion spectrum signal, the coded dispersion spectrum signal passes through a light combination system composed of the converging lens 6, the reflection grating 7 and the collimating lens 8 and then is imaged on a detector 9 located on a focal plane of the light combination system again to obtain a coded image, and the coded image is subjected to Hadamard inverse transformation to obtain a spectrum image of the target scene.
However, the optical system of the Hadamard transform imaging spectroscopy system based on the DMD design is complex and loose in structure; the gratings for splitting and combining light are plane gratings, and the plane gratings can cause spectral line bending and color distortion, so that the recovery error of spectral data is caused, and the spectral resolution of the spectral imaging device is reduced; moreover, the working waveband of the imaging spectrum system is visible light, and the all-weather working requirement cannot be met.
Disclosure of Invention
In order to obtain a spectral imaging device which is simple and compact in structure, high in spectral resolution and capable of working all weather, the invention provides a DMD spectral dimension coding double-light-path Offner splitting light medium wave infrared spectrum imaging device, which takes a DMD as an aperture coding device and adopts a staring type imaging mode and is a Hadamard transform type medium wave infrared spectrum imaging device.
The DMD spectral dimension coding double-light-path Offner splitting and combining light medium wave infrared spectrum imaging device is characterized in that as shown in figure 2, a back focal plane of a medium wave infrared achromatic zoom objective lens group 10 is superposed with an initial object plane of a double-light-path Offner splitting and combining optical system; the dual-light-path Offner splitting and combining system consists of a concave spherical reflector 11 and a convex spherical reflection grating 12, the curvature centers of the concave spherical reflector 11 and the convex spherical reflection grating 12 are the same, and the ratio of the curvature radii is 2: 1; the medium wave infrared achromatic zoom objective lens group 10 and the medium wave infrared DMD13 are symmetrical relative to the convex spherical reflection grating 12, and the medium wave infrared DMD13 is located at an image plane of the dual-light-path Offner beam splitting and combining system; the folding mirror 14 is positioned on the secondary imaging light path of the dual-light-path Offner splitting and combining optical system, and the refrigeration type medium wave infrared detector 15 is positioned in the reflection light path of the folding mirror 14; the refrigeration type medium wave infrared detector 15 is connected with the image acquisition card 16, and the computer 17 is respectively connected with the image acquisition card 16 and the medium wave infrared DMD 13; the medium wave infrared achromatic zoom objective group 10 images the target scenery on the initial object plane of the double light path Offner splitting and combining optical system, the concave spherical reflector 11 reflects the image of the target scenery onto the convex spherical reflection grating 12, the convex spherical reflection grating 12 reflects and splits the image of the target scenery to obtain the spectral signal of the target scenery, the concave spherical reflector 11 reflects the spectral signal of the target scenery onto the medium wave infrared DMD13, the medium wave infrared DMD13 performs fast Hadamard coding modulation on the spectral signal of the target scenery under the control of the computer 17 to obtain a spectral dimension coded image, the concave spherical reflector 11 reflects the spectral dimension coded image onto the convex spherical reflection grating 12, the convex spherical reflection grating 12 reflects and combines the spectral dimension coded image to obtain a spectral and spatial mixed image, and the spectral and spatial mixed image is reflected and imaged on the refrigeration type medium wave infrared detector 15 by the concave spherical reflector 11 and the turning mirror 14 in sequence, the spectrum and space mixed image is converted into an electric signal by the refrigeration type medium wave infrared detector 15, the electric signal is transmitted to the computer 17 through the image acquisition card 15, the received electric signal is weighed and decoded by the computer 17, the spectral characteristics of the target scenery image are obtained by restoration, all spectral data are intelligently processed, and real-time imaging is carried out.
The invention has the technical effects that the introduced dual-light-path Offner splitting and combining optical system only consists of two parts, but simultaneously has the functions of splitting imaging and combining imaging, namely, the image of a target scene shot by the medium-wave infrared achromatic zoom objective lens group 10 is split and then imaged on the medium-wave infrared DMD13, and then the coded and modulated spectrum dimensional coded image is combined and imaged on the refrigeration type medium-wave infrared detector 15, so that the structure of the spectrum imaging device of the invention becomes very simple and compact. The light splitting of the image of the target scenery and the light combination of the spectral dimension coding image are both completed by the convex spherical reflection grating 12, and compared with a plane grating adopted in the prior art, the light splitting and the light combination of the spectral dimension coding image can not cause spectral line bending and color distortion, thereby avoiding the reduction of the spectral resolution of a spectral imaging device due to the recovery error of spectral data. The working waveband of the spectral imaging device is medium-wave infrared, so that the spectral imaging device can meet the requirement of all-weather work.
Meanwhile, the spectral imaging device still uses the DMD as an aperture coding device, adopts a staring type imaging mode, is an Hadamard transform type spectral imaging device, and keeps the advantages of the existing Hadamard transform imaging spectral system based on the DMD design.
Drawings
FIG. 1 is a schematic diagram of a conventional Hadamard transform imaging spectroscopy system based on a DMD design. FIG. 2 is a schematic structural diagram of a DMD spectral dimension-encoded dual-optical-path Offner splitting-combined-light mid-wave infrared spectrum imaging device of the present invention, which is also taken as an abstract attached drawing.
Detailed Description
The invention relates to a DMD spectral dimension coding double-light-path Offner splitting light medium wave infrared spectrum imaging device, which has the following specific scheme.
As shown in fig. 2, the rear focal plane of the medium wave infrared achromatic zoom objective lens assembly 10 coincides with the initial object plane of the two-optical path Offner optical splitting and combining system. In the medium wave infrared achromatic zoom objective lens group 10, a front fixed group, a zoom group, a compensation group and a rear fixed group are sequentially arranged from an object space to an image space, the intermediate wave infrared achromatic zoom objective lens group has a continuously variable field of view, and the continuity and the definition of an image of a target scene can be maintained while the field of view is changed, so that a fast moving target is prevented from being lost; the working waveband of the medium wave infrared achromatic zoom objective lens group 10 is 3-5 mu m, the focal length is 80-320 mm, and the zoom ratio is 4×The field angle is 2.2-8.81 degrees. The dual-optical-path Offner splitting and combining optical system consists of a concave spherical reflector 11 and a convex spherical reflection grating 12, the curvature centers of the concave spherical reflector 11 and the convex spherical reflection grating 12 are the same, and the ratio of the curvature radii is 2: 1. The initial object plane and image plane position of the dual-light-path Offner splitting and combining system are determined by the distance between the concave spherical reflector 11 and the convex spherical reflection grating 12 and the curvature radius ratio; the concave spherical reflector 11 is coated with a 3-5 μm high reflective film, such as aluminum film. The medium wave infrared achromatic zoom objective lens group 10 and the medium wave infrared DMD13 are symmetrical relative to the convex spherical reflection grating 12, and the medium wave infrared DMD13 is located at an image plane of the dual-light-path Offner beam splitting and combining system. The window material in the medium-wave infrared DMD13 is simple substance silicon, such as monocrystalline silicon or polycrystalline silicon, and is plated with an antireflection film of 3-5 microns; the mirror surface of the micro mirror in the medium-wave infrared DMD13 is plated with a 3-5 mu m high-reflection film, such as an aluminum film. The folding mirror 14 is located on the secondary imaging light path of the dual-light-path Offner splitting and combining optical system, and the refrigeration type medium wave infrared detector 15 is located in the reflection light path of the folding mirror 14. The reflecting mirror surface of the turning mirror 14 is plated with 3-5 mum highly reflective film, such as aluminum film. The image resolution of the refrigeration type medium wave infrared detector 15 is 320 × 256. The refrigeration type detector can effectively remove infrared imaging thermal noise. The refrigeration type medium wave infrared detector 15 is connected with the image acquisition card 16, and the computer 17 is respectively connected with the image acquisition card 16 and the medium wave infrared DMD 13. Example parameters of the DMD spectral dimension coding dual-light-path Offner spectral mid-wave infrared imaging device of the present invention include: spectral resolution: less than or equal to 66.7 nm; the number of spectral channels: 31; acting distance: 3 km; spatial resolution: 0.094-0.375 mrad.
The spectral imaging process of the DMD spectral dimension coding dual-light-path Offner splitting and combining light medium wave infrared spectrum imaging device is as follows.
As shown in FIG. 2, the medium wave infrared achromatic zoom objective lens set 10 images the target scenery on the initial object plane of the dual light path Offner splitting and combining optical system, the concave spherical reflector 11 reflects the image of the target scenery onto the convex spherical reflection grating 12, the convex spherical reflection grating 12 reflects and splits the image of the target scenery to obtain the spectral signal of the target scenery, the concave spherical reflector 11 reflects the spectral signal of the target scenery onto the medium wave infrared DMD13, under the control of the computer 17, the medium wave infrared DMD13 performs fast Hadamard coding modulation on the spectral signal of the target scenery to obtain a spectral dimension coded image, the concave spherical reflector 11 reflects the spectral dimension coded image onto the convex spherical reflection grating 12, the convex spherical reflection grating 12 reflects and combines the spectral dimension coded image to obtain a spectral and spatial mixed image, and the concave spherical reflector 11 and the refractive mirror 14 sequentially reflect and image the spectral and spatial mixed image onto the refrigeration type medium wave infrared detector 15 And the spectrum and space mixed image is converted into an electric signal by the refrigeration type medium wave infrared detector 15, then the electric signal is transmitted to the computer 17 by the image acquisition card 15, the received electric signal is weighed and decoded by the computer 17, the spectral characteristics of the target scenery image are recovered, all spectral data are intelligently processed, and real-time imaging is carried out.

Claims (7)

1.一种DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,中波红外消色差变焦物镜组(10)的后焦面与双光路Offner分合光系统的初始物面重合;所述双光路Offner分合光系统由凹球面反射镜(11)和凸球面反射光栅(12)组成,凹球面反射镜(11)和凸球面反射光栅(12)曲率中心相同,曲率半径之比为2:1;中波红外消色差变焦物镜组(10)与中波红外DMD(13)相对于凸球面反射光栅(12)对称,中波红外DMD(13)位于双光路Offner分合光系统的像面处;折转镜(14)位于双光路Offner分合光系统二次成像光路上,制冷型中波红外探测器(15)位于折转镜(14)的反射光路中;制冷型中波红外探测器(15)与图像采集卡(16)连接,计算机(17)分别与图像采集卡(16)、中波红外DMD(13)连接;中波红外消色差变焦物镜组(10)将目标景物成像在双光路Offner分合光系统的初始物面上,并由凹球面反射镜(11)将目标景物的像反射到凸球面反射光栅(12)上,由凸球面反射光栅(12)将目标景物的像反射分光得到目标景物的光谱信号,再由凹球面反射镜(11)将目标景物的光谱信号反射到中波红外DMD(13)上,在计算机(17)控制下,由中波红外DMD(13)对目标景物的光谱信号进行快速Hadamard编码调制,得到光谱维编码图像,再由凹球面反射镜(11)将所述光谱维编码图像反射到凸球面反射光栅(12)上,由凸球面反射光栅(12)将光谱维编码图像反射合光得到光谱和空间混合图像,并依次由凹球面反射镜(11)、折转镜(14)将所述光谱和空间混合图像反射成像在制冷型中波红外探测器(15)上,再由制冷型中波红外探测器(15)将光谱和空间混合图像转换为电信号,之后经由图像采集卡(16)将所述电信号传送给计算机(17),由计算机(17)对所接收的电信号进行称重解码,复原得到目标景物图像的光谱特征,智能处理所有光谱数据,并实时成像。1. a kind of DMD spectral dimension coding double optical path Offner splitting and combining light mid-wave infrared spectral imaging device, it is characterized in that, the back focal plane of the mid-wave infrared achromatic zoom objective lens group (10) and the initial stage of the double optical path Offner splitting and combining optical system The object surfaces are coincident; the dual optical path Offner light splitting and combining system is composed of a concave spherical reflector (11) and a convex spherical reflector (12), and the concave spherical reflector (11) and the convex spherical reflector (12) have the same center of curvature, The ratio of the curvature radius is 2:1; the mid-wave infrared achromatic zoom objective lens group (10) and the mid-wave infrared DMD (13) are symmetrical with respect to the convex spherical reflection grating (12), and the mid-wave infrared DMD (13) is located in the double optical path Offner at the image plane of the splitting and combining system; the folding mirror (14) is located on the secondary imaging optical path of the dual optical path Offner splitting and combining system, and the cooling medium wave infrared detector (15) is located in the reflection optical path of the folding mirror (14) ; Cooling type medium wave infrared detector (15) is connected with the image acquisition card (16), and the computer (17) is connected with the image acquisition card (16) and the medium wave infrared DMD (13) respectively; the medium wave infrared achromatic zoom objective lens group (10) The target scene is imaged on the initial object surface of the dual optical path Offner splitting and combining light system, and the image of the target scene is reflected by the concave spherical mirror (11) to the convex spherical reflection grating (12), which is reflected by the convex spherical surface The grating (12) reflects and splits the image of the target scene to obtain the spectral signal of the target scene, and then the concave spherical mirror (11) reflects the spectral signal of the target scene to the mid-wave infrared DMD (13), which is controlled by the computer (17) Then, the spectral signal of the target scene is subjected to fast Hadamard coding modulation by the mid-wave infrared DMD (13) to obtain a spectrally coded image, and the concave spherical mirror (11) reflects the spectrally coded image to a convex spherical reflection grating On (12), the spectral dimension coded image is reflected and combined by the convex spherical reflection grating (12) to obtain a spectral and spatial mixed image, and the spectrum and the space are mixed by the concave spherical reflection mirror (11) and the refraction mirror (14) in turn. The space mixed image is reflected and imaged on the cooling medium wave infrared detector (15), and the spectral and space mixed images are converted into electrical signals by the cooling medium wave infrared detector (15), and then the image acquisition card (16) converts the spectral and space mixed images into electrical signals. The electrical signal is transmitted to a computer (17), the computer (17) weighs and decodes the received electrical signal, restores the spectral characteristics of the target scene image, intelligently processes all spectral data, and performs real-time imaging. 2.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,在所述中波红外消色差变焦物镜组(10)中,自物方至像方依次为前固定组、变倍组、补偿组和后固定组,具有连续可变的视场,并且在视场变换的同时能够保持目标景物图像的连续性和清晰度,避免丢失快速运动的目标;中波红外消色差变焦物镜组(10)的工作波段为3~5μm,焦距为80~320mm,变倍比为4×,视场角为2.2°~8.81°。2. The DMD spectral dimensional coding double optical path Offner splitting and combining light mid-wave infrared spectral imaging device according to claim 1, is characterized in that, in the mid-wave infrared achromatic zoom objective lens group (10), from the object side to The image side is the front fixed group, the zoom group, the compensation group and the rear fixed group in sequence, with a continuously variable field of view, and can maintain the continuity and clarity of the target scene image while changing the field of view, avoiding the loss of fast motion The target; the mid-wave infrared achromatic zoom objective lens group (10) has a working band of 3-5 μm, a focal length of 80-320 mm, a zoom ratio of 4 × , and a field of view of 2.2° to 8.81°. 3.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,凹球面反射镜(11)镀有3~5μm高反射膜。3 . The DMD spectral dimensional encoding dual optical path Offner splitting and combining light mid-wave infrared spectroscopy imaging device according to claim 1 , wherein the concave spherical mirror ( 11 ) is coated with a 3-5 μm high reflection film. 4 . 4.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,中波红外DMD(13)中的窗口材料为单质硅,镀有3~5μm增透膜;中波红外DMD(13)中的微镜镜面镀有3~5μm高反射膜。4. The DMD spectral dimensional encoding dual optical path Offner splitting and combining light mid-wave infrared spectral imaging device according to claim 1, wherein the window material in the mid-wave infrared DMD (13) is elemental silicon, which is plated with 3-5 μm Anti-reflection coating; the mirror surface of the micro-mirror in the mid-wave infrared DMD (13) is coated with a 3-5 μm high-reflection coating. 5.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,折转镜(14)的反射镜面镀有3~5μm高反射膜。5 . The DMD spectral dimensional encoding dual optical path Offner splitting and combining light mid-wave infrared spectroscopy imaging device according to claim 1 , wherein the reflecting mirror surface of the folding mirror ( 14 ) is coated with a 3-5 μm high-reflection film. 6 . 6.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,制冷型中波红外探测器(15)的图像分辨率为320×256。6 . The DMD spectral dimensional encoding dual optical path Offner splitting and combining light medium wave infrared spectral imaging device according to claim 1 , wherein the image resolution of the cooling medium wave infrared detector ( 15 ) is 320×256. 7 . 7.根据权利要求1所述的DMD光谱维编码双光路Offner分合光中波红外光谱成像装置,其特征在于,光谱分辨率:≤66.7nm;光谱通道数:31;作用距离:3km;空间分辨率:0.094~0.375mrad。7. The DMD spectral dimensional coding dual optical path Offner splitting and combining light mid-wave infrared spectral imaging device according to claim 1, wherein the spectral resolution: ≤66.7nm; the number of spectral channels: 31; the working distance: 3km; Resolution: 0.094~0.375mrad.
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