CN108871655A - MEMS pressure sensor and batch calibrator (-ter) unit and calibration process based on mould group - Google Patents
MEMS pressure sensor and batch calibrator (-ter) unit and calibration process based on mould group Download PDFInfo
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- CN108871655A CN108871655A CN201810426067.XA CN201810426067A CN108871655A CN 108871655 A CN108871655 A CN 108871655A CN 201810426067 A CN201810426067 A CN 201810426067A CN 108871655 A CN108871655 A CN 108871655A
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- station
- blanking
- mould group
- high temperature
- tunnel furnace
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Abstract
The invention discloses the MEMS pressure sensors based on mould group.The invention also discloses the MEMS pressure sensor batch calibrator (-ter) unit based on mould group, specific calibration process is as follows：Sensor module is placed on pallet and carries out feeding, it is circulated by double-speed chain, station, which is acquired, by low temperature data carries out the acquisition of room temperature calibration parameter, subsequently into high temperature tunnel furnace, sensor module is rapidly heated to set temperature value by high temperature tunnel furnace, station, which is acquired, by high-temperature data carries out the acquisition of high temperature calibration parameter, it transports again through double-speed chain to parameter calculating and burning station, coefficient is calculated into simultaneously burning by RS485 communication, then by carrying out blanking on blanking feeding station automatic blanking to blanking conveyer belt.It is calibrated by mould group, realization quickly heating and cooling, different station acquisition data are mutually indepedent, reduce the complexity of calibration process, it is easy to accomplish automation.
Description
Technical field
The present invention relates to a kind of pressure sensor more particularly to a kind of MEMS pressure sensors based on mould group.
The invention further relates to a kind of MEMS pressure sensor batch calibrator (-ter) units and calibration process based on mould group.
Background technique
MEMS pressure sensor batch calibration method, which is generallyd use, at present carries out different temperatures to finished product or half completed knocked down products
Parameter acquisition, calculate calibration factor and parameter be then burnt to conditioning chip.The problem of this method is product with metal
Or plastic casing, it is long to heat up or cool to the different temperature points time, and product generally is heated or cooled to not using high/low temperature baking oven
Same temperature spot can not realize the calibration parameter acquisition under different temperatures on pipelining equipment, can not be mass produced.At
For product as shown in Figure 1, sensor module 2 ' has metal shell 3 ', 2 ' top of sensor module is connector 1 '.
The following are use two temperature spots（25℃,70℃）The old process of pick up calibration：Artificial clamping is put into baking oven-
Room temperature calibration parameter acquires-it is warming up to high temperature（25 minutes）Soak（20 minutes）High temperature calibration parameter acquisition-parameter meter
It calculates and burning-cools to safe temperature-and manually takes out product.
Using normal calibration scheme as described above, have the following defects：
1）Shell is thermally conductive slow, is heated using baking oven, everything serially carries out, and a cycle minimum 2 hours, efficiency was extremely low, greatly
Batch production needs multiple devices.
2）The each product of production process needs artificial clamping feeding to take out, and human cost is high and cannot be guaranteed stable work
Skill process.
3）Different shape products need to change different toolings.
This conventional calibration methods increase personnel cost, equipment cost, and inefficiency is not suitable for large-scale production.
Summary of the invention
In order to solve the above technical problems, the present invention provides a kind of MEMS pressure sensor based on mould group.
The present invention also provides a kind of MEMS pressure sensor batch calibrator (-ter) units and calibration process based on mould group.It realizes
The rapid cooling of product is heated, and the automation of calibration process is realized by circular route, efficiency is greatly improved and guarantees to stablize
Product quality.
The present invention is based on the MEMS pressure sensor of mould group, which includes potsherd, MEMS chip and circuit
Plate, the MEMS chip are mounted on potsherd, and the MEMS chip is connect with circuit board by wiring, the circuit board and pottery
Tile is connected and fixed by bonding agent, and the MEMS chip and potsherd are connected and fixed by adhesion agent.
MEMS pressure sensor batch calibrator (-ter) unit provided by the invention based on mould group, it includes the support for feeding
Speed is arranged in disk, double-speed chain, high temperature tunnel furnace, blanking conveyer belt and the cooling device to circulate for product, the pallet rear
Chain sets up high temperature tunnel furnace in the sender of the double-speed chain, and low temperature data is arranged in the inlet side of the high temperature tunnel furnace
Station is acquired, the outlet side setting high-temperature data of the high temperature tunnel furnace acquires station, after the high-temperature data acquires station
Side's setting parameter calculates and burning station, and the parameter calculates and the rear of burning station is blanking feeding station, passes through blanking
Blanking is carried out on feeding station automatic blanking to blanking conveyer belt.
Further, which further includes cooling device, recycled for cooling down pallet.
Further, which includes potsherd, MEMS chip and circuit board, and the MEMS chip is mounted on pottery
On tile, the MEMS chip is connect with circuit board by wiring, and the circuit board and potsherd are connected and fixed by bonding agent,
The MEMS chip and potsherd are connected and fixed by adhesion agent.
MEMS pressure sensor batch calibration process provided by the invention based on mould group, is placed on pallet for sensor module
Feeding is carried out, is circulated by double-speed chain, station is acquired by low temperature data and carries out the acquisition of room temperature calibration parameter, subsequently into
Sensor module is rapidly heated to set temperature value by high temperature tunnel furnace, acquires work by high-temperature data by high temperature tunnel furnace
Position carries out the acquisition of high temperature calibration parameter, then transports through double-speed chain to parameter calculating and burning station, is communicated by RS485 by coefficient
Simultaneously burning is calculated, then by carrying out blanking on blanking feeding station automatic blanking to blanking conveyer belt.
Further, high temperature tunnel furnace set temperature section is 50-120 degrees Celsius.
Compared with prior art, beneficial effects of the present invention：It is calibrated by mould group, realizes quickly heating and cooling, no
It is mutually indepedent with station acquisition data, reduce the complexity of calibration process, it is easy to accomplish automation.
Detailed description of the invention
Fig. 1 is MEMS pressure sensor finished product schematic in the prior art.
Fig. 2 is the structural schematic diagram of inventive sensor mould group.
Fig. 2 a be the present invention along Fig. 2 G-G to cross-sectional view.
Fig. 3 is calibrator (-ter) unit schematic diagram of the present invention.
1, pallet, 2, double-speed chain, 3, low temperature data acquisition station, 4, high temperature tunnel furnace, 5, high-temperature data acquisition station, 6,
Parameter calculates and burning station, 7, blanking feeding, 8, blanking conveyer belt, 9, pallet cooling device, 10, pressure source, 11, MEMS core
Piece, 12, circuit board, 13, bonding agent, 14, potsherd.
Specific embodiment
In order to deepen the understanding of the present invention, with reference to the accompanying drawing and specific embodiment is described in detail, this explanation
The examples are only for explaining the invention described in book, is not used to limit the present invention.
Shown in Fig. 2 and 2a, sensor of the invention mould group includes potsherd 14, MEMS chip 11 and circuit board 12, MEMS
Chip 11 is mounted on potsherd 14, and MEMS chip 11 is connect with circuit board 12 by wiring, and circuit board 12 and potsherd 14 are logical
It crosses bonding agent 13 to be connected and fixed, MEMS chip 11 is connected and fixed with potsherd 14 by adhesion agent 13.
MEMS chip 11 is mounted on potsherd 14, and the linear expansion coefficient difference of the two is small, reduces MEMS to greatest extent
The influence of stress mismatch between chip and shell ensure that the stability and reliability of properties of product.Sensor has final products
Electrical characteristic, can do subsequent assembling after mould group state calibration, can be quickly cooled down or be heated to set inside component
Temperature, the product of different shapes can share same mould group, and calibration procedure is not required to remodel.Equipment uses assembly line, and product is in work
It loads onto and circulates with double-speed chain, different station mechanism and the parallel progress of data acquisition.
Shown in Fig. 3, the main station figure of calibrator (-ter) unit, the MEMS pressure sensor batch calibration of the invention based on mould group is set
Standby, it includes the pallet 1 for feeding, double-speed chain 2, high temperature tunnel furnace 4, blanking conveyer belt 8 and cooling device 9,1 rear of pallet
Double-speed chain 2 is set, sets up high temperature tunnel furnace 4 in the sender of double-speed chain 2, low temperature is arranged in the inlet side of high temperature tunnel furnace 4
Data acquire station 3, and the outlet side setting high-temperature data of high temperature tunnel furnace 4 acquires station 5, after high-temperature data acquires station 5
Side's setting parameter calculates and burning station 6, and parameter calculates and the rear of burning station 6 is blanking feeding station 7, is taken by blanking
Blanking is carried out on material station 7 automatic blanking to blanking conveyer belt 8.
The calibrator (-ter) unit further includes cooling device 9, and pallet 1, which is cooled to 20-25 degrees Celsius of circulation through apparatus for supercooling 9, to be made
With.
The present invention is based on the MEMS pressure sensor batch calibration process of mould group, and sensor module is placed on pallet 1 and is carried out
Feeding is circulated by double-speed chain 2, is acquired station 3 by low temperature data and is carried out the acquisition of room temperature calibration parameter, subsequently into height
Warm continuous tunnel furnace 4, temperature can flexibly be set, can set temperature section be 50-120 degrees Celsius, it is by high temperature tunnel furnace 4 that mould group is fast
Speed is warming up to set temperature value.Station 5 is acquired by high-temperature data and carries out the acquisition of high temperature calibration parameter, then is transported through double-speed chain 2
To parameter calculating and burning station 6, coefficient is calculated by simultaneously burning by RS485 communication；Under passing through blanking feeding station 7 again automatically
Expect and carries out blanking on blanking conveyer belt 8.Pallet 1 is cooled to 20-25 degrees Celsius of recycling through apparatus for supercooling 9.All works
Position comes from pressure source 10 using air pressure.
Each station mechanical action of the calibration system is mutually indepedent, and different station passes through different 485 serial ports and communicates with host computer
Data acquisition and transmission are carried out, different station mechanical action and data acquisition are all to carry out parallel.Workpiece heating cooling passes through tunnel
Road furnace is completed, and does not influence equipment beat.Calibration can complete 4 products in station 30 seconds, and single device annual capacity is up to 3,000,000
Only.
The present invention becomes sensor module after MEMS chip is mounted on potsherd and is coupled with pcb board by wiring,
The sensor module has the electric property of finished product, and calibration process is advanced to sensor module from final finished, and product can be with
It is heated rapidly to set temperature, reduces the complexity of calibration process, it is easy to accomplish automation.
Calibrator (-ter) unit uses online heating, and it is slow to solve the problems, such as that baking oven heats up, and entire heating is carried out by continuous tunnel furnace,
Equipment beat is not influenced, and there is high production efficiency.Baking oven is eliminated by assembly line and calibrates artificial clamping product, ensure that
The stability of technique.
Claims (5)
1. the MEMS pressure sensor based on mould group, it is characterised in that：The sensor module includes potsherd, MEMS chip and electricity
Road plate, the MEMS chip are mounted on potsherd, and the MEMS chip is connect with circuit board by wiring, the circuit board with
Potsherd is connected and fixed by bonding agent, and the MEMS chip and potsherd are connected and fixed by adhesion agent.
2. the MEMS pressure sensor batch calibrator (-ter) unit based on mould group, it is characterised in that：It include for feeding pallet, use
In double-speed chain, high temperature tunnel furnace, blanking conveyer belt and the cooling device of product circulation, double-speed chain is arranged in the pallet rear,
The sender of the double-speed chain sets up high temperature tunnel furnace, and the inlet side setting low temperature data of the high temperature tunnel furnace acquires work
Position, the outlet side setting high-temperature data of the high temperature tunnel furnace acquire station, the rear setting of the high-temperature data acquisition station
Parameter calculates and burning station, and the parameter calculates and the rear of burning station is blanking feeding station, passes through blanking feeding work
Blanking is carried out on the automatic blanking to blanking conveyer belt of position.
3. the MEMS pressure sensor batch calibrator (-ter) unit according to claim 2 based on mould group, it is characterised in that：It is also
It is recycled for cooling down pallet including cooling device.
4. the MEMS pressure sensor batch calibration process based on mould group, it is characterised in that：By sensor module be placed on pallet into
Row feeding, is circulated by double-speed chain, is acquired station by low temperature data and is carried out the acquisition of room temperature calibration parameter, subsequently into height
Sensor module is rapidly heated to set temperature value by high temperature tunnel furnace, acquires station by high-temperature data by warm continuous tunnel furnace
The acquisition of high temperature calibration parameter is carried out, then is transported through double-speed chain to parameter calculating and burning station, is communicated by RS485 by coefficient meter
Simultaneously burning is calculated, then by carrying out blanking on blanking feeding station automatic blanking to blanking conveyer belt.
5. the MEMS pressure sensor batch calibration process according to claim 4 based on mould group, it is characterised in that：It is described
High temperature tunnel furnace set temperature section is 50-120 degrees Celsius.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810426067.XA CN108871655A (en) | 2018-05-07 | 2018-05-07 | MEMS pressure sensor and batch calibrator (-ter) unit and calibration process based on mould group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810426067.XA CN108871655A (en) | 2018-05-07 | 2018-05-07 | MEMS pressure sensor and batch calibrator (-ter) unit and calibration process based on mould group |
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| Publication Number | Publication Date |
|---|---|
| CN108871655A true CN108871655A (en) | 2018-11-23 |
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| CN201810426067.XA Pending CN108871655A (en) | 2018-05-07 | 2018-05-07 | MEMS pressure sensor and batch calibrator (-ter) unit and calibration process based on mould group |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111174972A (en) * | 2019-11-26 | 2020-05-19 | 苏州纳芯微电子股份有限公司 | Pressure sensor calibration equipment |
| CN111562051A (en) * | 2020-05-27 | 2020-08-21 | 均普工业自动化(苏州)有限公司 | High-temperature and high-pressure calibration equipment for medium-pressure sensor |
| CN114680560A (en) * | 2020-12-11 | 2022-07-01 | 珠海优特智厨科技有限公司 | Blanking calibration method, storage medium and batching equipment |
| CN115307817A (en) * | 2022-10-12 | 2022-11-08 | 南通元景电气科技有限公司 | Pressure sensor batch test system and method thereof |
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| CN102445303A (en) * | 2011-11-28 | 2012-05-09 | 武汉理工大学 | Experiment table for mass calibration of oil pressure sensor |
| CN203011622U (en) * | 2012-11-13 | 2013-06-19 | 无锡康森斯克电子科技有限公司 | Inlet manifold pressure sensor |
| CN204461670U (en) * | 2015-03-04 | 2015-07-08 | 苏州敏芯微电子技术有限公司 | A kind of pressure sensor packaging structure |
| CN105043664A (en) * | 2015-08-21 | 2015-11-11 | 中国工程物理研究院总体工程研究所 | Calibration device for special high-temperature force measurement sensor |
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| CN206378247U (en) * | 2016-08-27 | 2017-08-04 | 河北工业大学 | Vehicular pressure sensor automates calibration equipment |
| CN207036341U (en) * | 2017-08-01 | 2018-02-23 | 苏州感芯微系统技术有限公司 | Pressure sensor module batch checking tool |
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Patent Citations (7)
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| CN102445303A (en) * | 2011-11-28 | 2012-05-09 | 武汉理工大学 | Experiment table for mass calibration of oil pressure sensor |
| CN203011622U (en) * | 2012-11-13 | 2013-06-19 | 无锡康森斯克电子科技有限公司 | Inlet manifold pressure sensor |
| CN204461670U (en) * | 2015-03-04 | 2015-07-08 | 苏州敏芯微电子技术有限公司 | A kind of pressure sensor packaging structure |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111174972A (en) * | 2019-11-26 | 2020-05-19 | 苏州纳芯微电子股份有限公司 | Pressure sensor calibration equipment |
| CN111562051A (en) * | 2020-05-27 | 2020-08-21 | 均普工业自动化(苏州)有限公司 | High-temperature and high-pressure calibration equipment for medium-pressure sensor |
| CN111562051B (en) * | 2020-05-27 | 2021-08-03 | 均普工业自动化(苏州)有限公司 | High-temperature and high-pressure calibration equipment for medium-pressure sensor |
| CN114680560A (en) * | 2020-12-11 | 2022-07-01 | 珠海优特智厨科技有限公司 | Blanking calibration method, storage medium and batching equipment |
| CN114680560B (en) * | 2020-12-11 | 2023-07-14 | 珠海优特智厨科技有限公司 | Discharging calibration method, storage medium and batching equipment |
| CN115307817A (en) * | 2022-10-12 | 2022-11-08 | 南通元景电气科技有限公司 | Pressure sensor batch test system and method thereof |
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Application publication date: 20181123 |