CN111174972A - Pressure sensor calibration equipment - Google Patents
Pressure sensor calibration equipment Download PDFInfo
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- CN111174972A CN111174972A CN201911174416.4A CN201911174416A CN111174972A CN 111174972 A CN111174972 A CN 111174972A CN 201911174416 A CN201911174416 A CN 201911174416A CN 111174972 A CN111174972 A CN 111174972A
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- pressure sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
- G01L27/005—Apparatus for calibrating pressure sensors
Abstract
The present invention provides a pressure sensor calibration apparatus, comprising: the device comprises a feeding station, a normal temperature detection station, at least one low temperature box, a low temperature detection station, at least one high temperature box, a high temperature detection station, at least one cooling box, a retest station, a marking station and a blanking station which are sequentially arranged, wherein the normal temperature detection station, the low temperature detection station, the high temperature detection station and the retest station respectively comprise a first detection station and a second detection station; the first detection station is used for detecting a first pressure sensor, the second detection station is used for detecting a second pressure sensor, the first pressure sensor is different from the second pressure sensor, and the first detection station is different from the second detection station. The calibration device described above is suitable for calibrating a plurality of different types of pressure sensor devices.
Description
Technical Field
The invention relates to the technical field of pressure sensor calibration, in particular to calibration equipment suitable for calibrating a pressure sensor.
Background
At present, the mass production of the pressure sensor needs to test and calibrate the performance of the pressure sensor before the pressure sensor leaves a factory. The existing test calibration procedure includes: normal temperature test, high temperature test, sorting defective products, marking finished products, cooling and the like. In the process, the traditional operation mode adopts single test equipment to sequentially carry out the test and operation of single stations, so that the labor intensity of workers is high, and the test calibration efficiency is very low. And, because there is not low temperature detection station and retest station, the accuracy of test calibration is not high.
The existing single machine calibration equipment mainly adopts a high-low temperature impact machine to test a few devices and is realized by carrying out high-low temperature conversion in a sealed cavity. However, the requirement for the sealing performance is high in the test calibration process, so that workers need to pay attention to the equipment all the time, and the test calibration is easy to be abnormal.
In addition, the test process controllability of the single-machine calibration equipment and the single-station test is poor, the traceability of production test data is poor, different types of products need different test equipment to be tested, the test cost is higher, and different test equipment occupies larger space.
Disclosure of Invention
The invention aims to provide a pressure sensor calibration device which can be compatible with calibration of various pressure sensors.
The invention provides a pressure sensor calibration device, which comprises: the device comprises a feeding station, a normal temperature detection station, at least one low temperature box, a low temperature detection station, at least one high temperature box, a high temperature detection station, at least one cooling box, a retest station, a marking station and a blanking station which are sequentially arranged, wherein the normal temperature detection station, the low temperature detection station, the high temperature detection station and the retest station respectively comprise a first detection station and a second detection station; the first detection station is used for detecting a first pressure sensor, the second detection station is used for detecting a second pressure sensor, the first pressure sensor is different from the second pressure sensor, and the first detection station is different from the second detection station.
As an optional technical solution, the first pressure sensor is a differential pressure sensor; the second pressure sensor is an absolute pressure sensor.
As an optional technical scheme, the automatic feeding device further comprises a 4-axis robot, wherein the feeding station and the discharging station share the 4-axis robot.
As an optional technical solution, the first testing station includes a first probe assembly, a first carrier assembly and a first sealing assembly, and the second testing station includes a second probe assembly, a second carrier assembly and a second sealing assembly, wherein the first probe assembly is different from the second probe assembly, and the first sealing assembly is different from the second sealing assembly.
As an optional technical solution, the number of the at least one cryogenic tank is 3.
As an optional technical solution, the 3 cryogenic boxes include a first cryogenic box, a second cryogenic box and a third cryogenic box, and temperature intervals from the first cryogenic box to the third cryogenic box are sequentially increased; the first low-temperature box is close to the normal-temperature detection station, and the third low-temperature box is close to the low-temperature detection station.
As an optional technical solution, the number of the at least one high temperature box is 3.
As an optional technical solution, the 3 high temperature boxes include a first high temperature box, a second high temperature box and a third high temperature box, and temperature ranges from the first high temperature box to the third high temperature box are sequentially reduced; the first high-temperature box is close to the low-temperature detection station, and the third high-temperature box is close to the high-temperature detection station.
As an optional technical solution, the low-temperature detection station includes a low-temperature sealed box, and the first detection station and the second detection station are respectively disposed in the low-temperature sealed box.
As an optional technical solution, the high temperature detection station includes a high temperature seal box, and the first detection station and the second detection station are respectively disposed in the high temperature seal box.
Compared with the prior art, the pressure sensor calibration equipment provided by the invention is suitable for calibrating various types of pressure sensor equipment, and the detection stations in each detection station comprise two different detection stations corresponding to different pressure sensors to be detected, so that the detection range of the calibration equipment is expanded, and the calibration compatibility is improved.
The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.
Drawings
FIG. 1 is an overall schematic diagram of the sensor calibration apparatus of the present invention.
Fig. 2 is a schematic view of a normal temperature detection station of the sensor calibration apparatus in fig. 1.
FIG. 3 is an exploded view of the differential pressure sensing station of the sensing station of FIG. 2.
FIG. 4 is a schematic diagram of a differential pressure sensing probe set of the differential pressure sensing station of FIG. 2.
Fig. 5 is an exploded view of an absolute pressure testing station of the testing station of fig. 2.
Fig. 6 is a schematic diagram of an absolute pressure detection probe set of the absolute pressure detection station of fig. 2.
Fig. 7 is a schematic view of a cryostat.
Fig. 8 is a schematic view of a hot box.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
FIG. 1 is an overall schematic diagram of the sensor calibration apparatus of the present invention.
The invention provides a pressure sensor calibration device 100, which is suitable for calibrating a plurality of different types of pressure sensors simultaneously and comprises at least one detection station, wherein the at least one detection station calibrates the different types of pressure sensors.
As shown in fig. 1, the pressure sensor calibration apparatus 100 sequentially includes a feeding station 1, a normal temperature detection station 2, at least one low temperature box 3, a low temperature detection station 31, at least one high temperature box 4, a high temperature detection station 41, at least one cooling box 5, a retest station 6, a marking station 7, and a blanking station 8; the conveying track 9 penetrates through the whole pressure sensor calibration equipment 10, a product to be detected is loaded in the carrier, the carrier sequentially passes through the normal-temperature detection station 2, the at least one low-temperature box 3, the low-temperature detection station 31, the at least one high-temperature box 4, the high-temperature detection station 41, the at least one cooling box 5, the retest station 6 and the marking station 7 along the conveying track, and finally flows out of the blanking station 8.
In this embodiment, the at least one detection station of the pressure sensor calibration apparatus 100 includes a normal temperature detection station 2, a low temperature detection station 31, a high temperature detection station 41, and a retest station 6, which are sequentially disposed.
The loading station 1 comprises a 4-axis robot, a horizontal conveyor belt via which product cartridges are input and output in the pressure sensor calibration device 100, and a plurality of product cartridges to be detected.
And, in order to realize that pressure sensor calibration equipment 100 can calibrate the pressure sensor of multiple different grade type simultaneously, normal atmospheric temperature detects station 2, low temperature detection station 31, high temperature detection station 41 and retest station 6 and sets up a determine module respectively, determine module can detect the pressure sensor of at least two kinds of differences.
Taking the normal temperature detection station 2 as an example, the detection assembly at least comprises a first detection station and a second detection station, the first detection station calibrates the first pressure sensor, the second detection station calibrates the second pressure sensor, the first pressure sensor is different from the second pressure sensor, and the first detection station is different from the second detection station. Of course, the number and type of the inspection stations are not limited to two, and can be set according to actual production requirements.
The first detection station comprises a first probe assembly, a first carrier assembly and a first sealing assembly; the second detection station comprises a second probe assembly, a second carrier assembly and a second sealing assembly, wherein the first sealing assembly is different from the second sealing assembly, and the first probe assembly is different from the second probe assembly.
The first probe assembly corresponds to a first pin of the first pressure sensor; the second probe assembly corresponds to a second pin of the second pressure sensor; during calibration, the first probe assembly is driven by the first upper pressurizing cylinder and the first upper floating assembly to move towards the first side of the first carrier assembly and attach the first probe assembly to the first side, the first probe assembly contacts the first pin, the first sealing assembly is driven by the first lower pressurizing cylinder and the first lower floating assembly to move towards the second side of the first carrier assembly and attach the first sealing assembly to the second side, and first calibration pressure is transmitted to a first pressure sensor in the first carrier assembly through the first sealing cavity; the second probe assembly is driven by the second upper pressurizing cylinder and the second upper floating assembly to move towards the third side of the second carrier assembly and attach to the third side, the second probe assembly contacts the second pin, the second sealing assembly is driven by the second lower pressurizing cylinder and the second lower floating assembly to move towards the fourth side of the second carrier assembly and attach to the fourth side, and the second calibration pressure is transmitted to a second pressure sensor in the second carrier assembly through the second sealing cavity.
With continued reference to fig. 1 and 7, at least one cryostat 3 is used to provide a cryogenic test environment to calibrate the performance of the product cartridge under test after exposure to the cryogenic environment. The number of the at least one low-temperature box 3 is 3, and the at least one low-temperature box comprises a first low-temperature box, a second low-temperature box and a third low-temperature box, wherein the first low-temperature box is used for providing a first low-temperature interval, the second low-temperature box is used for providing a second low-temperature interval, and the third low-temperature box is used for providing a third low-temperature interval, wherein the temperature from the first low-temperature interval to the third low-temperature interval is increased in sequence, namely, the temperature from the first low-temperature box to the third low-temperature box is increased in sequence. The first low-temperature box is close to the normal-temperature detection station 2, and the third low-temperature box is close to the low-temperature detection station 31. A plurality of low-temperature boxes are adopted to control the low-temperature interval in a segmented manner, so that the problem that the surface of a product material box is frosted due to low temperature in a low-temperature test is avoided. In addition, based on the temperature control principle, it is fast to lower the temperature towards low temperature from low temperature towards the higher temperature of high temperature intensification, and the temperature of low-temperature box increases in proper order, is favorable to improving the holistic calibration efficiency of pressure sensor calibration equipment 100.
Further, a window 32 is provided in the cryobox 3, and the transfer rail 9 is provided in the cryobox 3 and extends into the next inspection station via the window 32. The conveying track 9 includes a sliding groove 91, and the absolute pressure carrier assembly and the differential pressure carrier assembly are respectively embedded in the sliding groove 91 and can slide in the sliding groove. Further, the conveying track 9 includes a plurality of sections, the sections are spliced by a connecting member 92, the connecting member 92 is correspondingly provided with a fixing recess, and one end of each section is clamped into the fixing recess and then fixed by a screw locking manner.
The low temperature detection station 31 is arranged close to at least one low temperature box 3, and the low temperature detection station 31 is used for calibrating the pressure sensor after the cooling operation, wherein the structure of the detection station in the low temperature detection station 31 is similar to that of the detection station in the normal temperature detection station 2, and reference can be made to the relevant description of the normal temperature detection station 2. In addition, the low temperature detection station 31 is provided with a low temperature seal box which seals the first and second detection stations therein, so that during testing, the product magazine to be tested is maintained at a relatively low temperature for calibration.
With continued reference to fig. 1 and 8, at least one high temperature box 4 is disposed behind the low temperature detection station 31, the at least one high temperature box 4 is used to provide a high temperature environment, and the product cartridge to be tested is exposed to the high temperature test environment. The number of the at least one high-temperature box 4 is 3, and the high-temperature box comprises a first high-temperature box, a second high-temperature box and a third high-temperature box. The first high-temperature box is used for providing a first high-temperature interval; the second high-temperature box is used for providing a second high-temperature interval; the third high-temperature box is used for providing a third high-temperature interval; the first high-temperature interval to the third high-temperature interval are sequentially reduced, namely, the temperature intervals in the first high-temperature box to the third high-temperature box are sequentially reduced. The first high temperature box is close to the low temperature detection station 31 and the third high temperature box is close to the high temperature detection station 41. Because the temperature intervals in the three high-temperature boxes are sequentially reduced, the temperature control is easier to realize, and in addition, the whole calibration efficiency of the pressure sensor calibration equipment 100 is also favorably improved.
The high temperature detection station 41 is arranged close to at least one high temperature box 4, the high temperature detection station 41 is used for calibrating the pressure sensor after the temperature rise operation, wherein the structure of the detection station in the high temperature detection station 41 is similar to that of the detection station in the normal temperature detection station 2, and the relevant description of the normal temperature detection station 2 can be referred. The high temperature detection station 41 comprises a high temperature sealed box 42, in which the high temperature sealed box 42 seals the detection station, so that the product cartridges to be detected are maintained at a high temperature for calibration. In addition, a window 43 is provided in the high temperature sealing box 42, and the transfer rail 9 extends out of the window 43 into the next inspection station.
At least one cooling box 5 is arranged behind the high-temperature detection station 41, and the at least one cooling box 5 is used for cooling the product material box passing through the high-temperature detection station 41. In this embodiment, the quantity of at least one cooling box 5 is 4, and it includes a plurality of ion fan and a plurality of sheet metal component subassembly, carries out the air-cooled operation to the product magazine through ion fan.
The retest station 6 is arranged behind the at least one cooling box 5, and the detection station of the retest station 6 has a similar structure to that of the detection station in the normal temperature detection station 2, and can refer to the relevant description of the normal temperature detection station 2.
In addition, the pressure sensor calibration device 100 further comprises a marking station 7 and a blanking station 8, wherein the marking station 7 comprises a laser marking machine, an industrial personal computer and a display; the blanking station 8 is adjacent to the feeding station 1, the two stations share a 4-axis robot, and the function of loading and unloading products is realized by matching with a conveying line.
In order to clearly understand the operation process of calibrating different types of pressure sensors by the pressure sensor calibration apparatus 100 of the present invention, the pressure sensor calibration apparatus 100 is described below as an example of the pressure sensor calibration apparatus 100 capable of calibrating a pressure sensor of a differential pressure type and a pressure sensor of an absolute pressure type.
It should be noted that the pressure sensor calibration apparatus 100 provided by the present invention is not limited to be able to calibrate a differential pressure type pressure sensor and an absolute pressure type pressure sensor, and the pressure sensor calibration apparatus 100 can calibrate a plurality of different types of pressure sensors by replacing corresponding probe assemblies and sealing assemblies.
FIG. 2 is a schematic view of a normal temperature detection station of the sensor calibration apparatus of FIG. 1; FIG. 3 is an exploded schematic view of a differential pressure sensing station of the sensing station of FIG. 2; FIG. 4 is a schematic diagram of a differential pressure sensing probe set of the differential pressure sensing station of FIG. 2.
In the present invention, the calibration of the differential pressure type pressure sensor 102 and the absolute pressure type pressure sensor 202 by the pressure sensor calibration apparatus 100 is taken as an example for explanation, wherein detection components in any one of the normal temperature detection station 2, the low temperature detection station 31, the high temperature detection station 41 and the retest station 6 respectively include a differential pressure type detection station a and an absolute pressure type detection station B.
The structure and calibration process of the differential pressure detection station a and the absolute pressure detection station B in the detection assembly of the room temperature detection station 2 will be described below by way of example.
As shown in fig. 2, the differential pressure type detection station a and the absolute pressure type detection station B, and a room temperature cabinet (not shown) provided around the differential pressure type detection station a and the absolute pressure type detection station B, that is, the differential pressure type detection station a and the absolute pressure type detection station B are provided inside the room temperature cabinet. In this embodiment, the differential pressure type detection station a and the absolute pressure type detection station B are arranged in parallel.
The differential pressure type detection station A comprises a first upper pressurizing cylinder 10, a first upper floating assembly 11, a first guide shaft 12, a first linear bearing 13, a differential pressure probe assembly 14, a differential pressure carrier assembly 15, a differential pressure sealing assembly 16, a first lower floating assembly 17 and a first lower pressurizing cylinder 18 from top to bottom; the differential pressure probe assembly 14 can reciprocate relative to a first side of the differential pressure carrier assembly 15 under the combined action of the first upper pressurizing cylinder 10, the first guide shaft 12 and the first linear bearing 13; the differential pressure sealing assembly 16, the first lower floating assembly 17 and the first lower pressurizing cylinder 18 are sequentially connected, the differential pressure sealing assembly 16 can reciprocate relative to the second side of the differential pressure carrier assembly 15 under the combined action of the first lower floating assembly 17 and the first lower pressurizing cylinder 18, and the second side is opposite to the first side.
The pressure insulation type detection station B comprises a second upper pressurizing cylinder 20, a second upper floating assembly, a second guide shaft, a second linear bearing, a pressure insulation probe assembly 24, a pressure insulation carrier assembly 25, a pressure insulation sealing assembly 26, a second lower floating assembly 17 and a second lower pressurizing assembly 28 from top to bottom; the second upper pressurizing cylinder 20, the second guide shaft, the second linear bearing and the absolute pressure probe assembly 24 are sequentially connected, and the absolute pressure probe assembly 24 can reciprocate relative to the third side of the absolute pressure carrier assembly 25 under the combined action of the second upper pressurizing cylinder, the second guide shaft and the second linear bearing; the absolute pressure sealing assembly 26, the second lower floating assembly 27 and the second lower pressurizing cylinder 28 are connected in sequence, the absolute pressure sealing assembly 26 can reciprocate relative to the fourth side of the absolute pressure carrier assembly 25 under the combined action of the second lower floating assembly 27 and the second lower pressurizing cylinder 28, and the third side is opposite to the fourth side.
With continued reference to fig. 2, the first upper supercharge cylinder 10 and the second upper supercharge cylinder 20 are respectively connected to the upper fixing plate 30; an upper supporting plate 50 is arranged below the upper fixing plate 30, a connecting plate 40 is arranged below the upper supporting plate 50, and the first guide shaft 12 and the second guide shaft are respectively arranged in the connecting plate 40 in a penetrating manner and are respectively connected with the corresponding first probe assembly 14 and the corresponding second probe assembly 24. The first upper floating unit 11 and the second upper floating unit (not shown) are disposed between the upper fixing plate 30 and the connection plate 40.
The fixed base plate 60 is disposed below the connecting plate 40, and the intermediate support plate 70 is disposed between the connecting plate 40 and the fixed base plate 60, wherein a space between the connecting plate 40 and the fixed base plate 60 is used for calibrating the pressure sensor, and specifically, the differential pressure probe assembly 14, the differential pressure carrier assembly 15, and the differential pressure seal assembly 16, and the absolute pressure probe assembly 24, the absolute pressure carrier assembly 25, and the absolute pressure seal assembly 26 are respectively located in the space.
The lower fixing plate 80 is disposed under the fixing base plate 60, and a lower supporting plate 90 is disposed between the lower fixing plate 80 and the fixing base plate 60, wherein the first lower floating assembly 17 and the second lower floating assembly (not shown) are respectively disposed between the fixing base plate 60 and the lower fixing plate 80. The first lower supercharging cylinder 18 and the second lower supercharging cylinder 28 are respectively fixed on one side of the lower fixing plate 80 far away from the fixing base plate 60.
In addition, a conveying rail 9 is disposed between the differential pressure probe assembly 14 and the differential pressure sealing assembly 15, and between the absolute pressure probe assembly 24 and the absolute pressure sealing assembly 25, and the differential pressure carrier assembly 15 and the absolute pressure carrier assembly 25 are respectively embedded in a sliding groove 91 (as shown in fig. 7) of the conveying rail 9, and can slide along the sliding groove 91 to realize input and output of the tray to be calibrated.
FIG. 3 is an exploded schematic view of a differential pressure sensing station of the sensing station of FIG. 2; FIG. 4 is a schematic diagram of a differential pressure sensing probe set of the differential pressure sensing station of FIG. 2.
As shown in fig. 3 and 4, the differential pressure probe assembly 14 includes a first positioning post 141, the first positioning post 141 corresponds to a first positioning hole 151 on the differential pressure carrier assembly 15, and when the differential pressure probe assembly 14 moves toward and fits to the first side of the differential pressure carrier assembly 15, the first positioning post 141 enters the first positioning hole 151, so that the differential pressure probe assembly 14 is aligned with the differential pressure carrier assembly 15. Preferably, the first alignment post 141 is disposed on a diagonal of the differential pressure probe assembly 14 to improve the alignment accuracy of the differential pressure probe assembly 14 and the differential pressure carrier 15.
The first bottom surface 142 of the differential pressure probe assembly 14 faces the differential pressure carrier assembly 15, an inward concave first accommodating cavity 143 is formed on the first bottom surface 142, and when the differential pressure probe assembly 14 is attached to the first side of the differential pressure carrier assembly 101, the differential pressure sensor chip 102 of the differential pressure sensor magazine 101 partially enters the first accommodating cavity 143.
The first receiving cavity 143 has a first pin plate 1431, the plurality of first probes 144 and the plurality of first pre-pressing blocks 145 protrude from the first pin plate 1431, wherein each differential pressure sensor chip 102 is pressed by one first pre-pressing block 145, so as to prevent the differential pressure sensor chip 102 from shaking when the first probes 144 contact with the first pins 1021, which may cause poor contact. In this embodiment, each of the first pre-pressing blocks 145 corresponds to two rows of the first probes 144, and the number of the first probes 144 in each row is 3. In other embodiments of the present invention, the number of the first probes 144 may be adjusted according to the structure of the product, and is not limited to the above.
In addition, the first receiving cavity 143 further includes a first sealing groove 1432, a top of the first probe 144 is flush with or slightly lower than a top of the first sealing groove 1432, and the first sealing groove 1432 is higher than the first needle plate 1431. In the present embodiment, the first sealing groove 1432 is disposed around the first probe 144 and the first pre-pressing block 145, but not limited thereto. The first seal groove 1432 is configured to prevent the first probe 144 from impacting the first pin 1021 during movement of the differential pressure probe assembly 14 toward the differential pressure carrier assembly 15, which may cause damage to the differential pressure sensor die 102. First seal groove 1432 may be, for example, an elastomeric material. Additionally, the differential pressure probe assembly 14 is affixed to a first side of the differential pressure carrier assembly 14, and the first seal groove 1432 is used to seal the differential pressure sensor cartridge 101.
The differential pressure carrier assembly 15 includes a carrier plate and a differential pressure sensor magazine 101 disposed on the carrier plate, the carrier plate includes a plurality of first receiving holes 152, the plurality of first receiving holes 152 correspond to the differential pressure sensor chips 102 in the differential pressure sensor magazine 101 one to one, and a lower end 1022 of the differential pressure sensor chip 102 extends toward the differential pressure seal assembly 16 through the first receiving hole 152. In addition, a first magazine positioning post 153 is disposed on the carrier plate of the differential pressure carrier assembly 15, a first magazine positioning hole (not shown) is disposed on the corresponding differential pressure sensor magazine 101, and the first magazine positioning post 153 and the first magazine positioning hole are matched with each other to assist the assembly positioning of the carrier plate of the differential pressure carrier assembly 15 and the differential pressure sensor magazine 101.
The differential pressure sealing assembly 16 includes a plurality of air connectors, the air connectors correspond to the differential pressure sensor chips 102 one by one, the outlet 161 of each air connector corresponds to the lower end 1022 of each pressure sensor chip 102, the lower end 1022 enters the outlet 161 partially, the inlet 162 of the air connector communicates with the outside, the outside calibration pressure enters the air connector through the inlet 162 and enters the lower end 1022 of the differential pressure sensor chip 102 through the outlet 161, and the outside calibration pressure is transmitted to the inside of the differential pressure sensor chip 102 for calibration.
In this embodiment, the plurality of air connectors provided in the differential pressure seal assembly 16 correspond to the plurality of differential pressure sensor dies 102 on the differential pressure sensor magazine 101, i.e., the calibration pressure of each differential pressure sensor die 102 is communicated with the external calibration pressure through a separate air connector.
When the differential pressure detection station a calibrates the differential pressure sensor chip 102, firstly, the first lower pressurizing cylinder 18 interacts with the first lower floating assembly 17 to drive the differential pressure sealing assembly 16 to move toward the second side of the carrier assembly 15 and attach to the second side, and the outlet 161 of the differential pressure sealing assembly 16 is sleeved on the lower end 1022 of the differential pressure sensor chip 102; secondly, the first upper pressurizing cylinder 10 interacts with the first upper floating assembly 11 and the like to drive the differential pressure probe assembly 14 to move towards the first side of the differential pressure carrier assembly 15 and attach to the first side, the first positioning column 141 is inserted into the first positioning hole 151, the differential pressure probe assembly 14 and the differential pressure carrier assembly 15 are aligned with each other, part of the differential pressure sensor magazine 101 enters the first accommodating cavity 143, the first pre-pressing block 144 presses the differential pressure sensor chip 102, and the probe 145 contacts with the first pin 1022; then, the outside calibration pressure is introduced into the gas joint through the inlet 162 of the gas joint of the differential pressure seal assembly 16, enters the lower end 1022 of the differential pressure sensor 102 through the outlet 161, and continues to enter the interior of the differential pressure sensor 102; finally, in the power-on state, the differential pressure sensor 102 converts the pressure signal generated by the calibration pressure into an electrical signal and outputs the electrical signal through the first pin 1021, and the electronic device determines the electrical signal to obtain a calibration result.
After the test is finished, the first lower pressurizing cylinder 18 interacts with the first lower floating assembly 17 to drive the differential pressure sealing assembly 16 to move towards the second side far away from the differential pressure carrier assembly 15; the first upper pressurizing cylinder 10 interacts with the first upper floating assembly 11 and the like to drive the differential pressure probe assembly 14 to move towards a first side far away from the differential pressure carrier assembly 15; so that the differential pressure carrier assembly 15 can be moved along the slide slot 92 by the conveyor belt into the next calibration step, such as a cold box, for a cool down operation.
It is defined herein that the movement of the differential pressure seal assembly 16 toward or away from the differential pressure carrier assembly 15 is a "shuttle", and likewise, the movement of the differential pressure probe assembly 14 toward or away from the differential pressure carrier assembly 15 is a "shuttle".
FIG. 5 is an exploded view of an absolute pressure test station of the test station of FIG. 2; fig. 6 is a schematic diagram of an absolute pressure detection probe set of the absolute pressure detection station of fig. 2.
As shown in fig. 5 and 6, the insulation probe assembly 24 includes a second positioning post 241, the second positioning post 241 corresponds to the second positioning hole 251 of the insulation carrier assembly 25, and when the insulation probe assembly 24 moves toward and is attached to the third side of the insulation carrier assembly 25, the second positioning post 241 enters the second positioning hole 251, so that the insulation probe assembly 24 is aligned with the insulation carrier assembly 25. Preferably, the second positioning posts 241 are disposed on the diagonal of the absolute pressure probe assembly 24 to improve the alignment accuracy between the absolute pressure probe assembly 24 and the absolute pressure carrier 25.
The second bottom surface 242 of the absolute pressure probe assembly 24 faces the absolute pressure carrier assembly 25, an inward-concave second accommodating cavity 243 is formed on the second bottom surface 242, and when the absolute pressure probe assembly 24 is attached to the third side of the absolute pressure carrier assembly 25, the second pins 2021 on the upper side of the absolute pressure sensor magazine 201 enter the second accommodating cavity 243.
The second receiving cavity 243 has a second pin plate 2431, and the second probes 244 and the second pre-pressing blocks 245 respectively protrude from the second pin plate 2431, wherein each absolute pressure sensor chip 202 is pressed by one second pre-pressing block 245, so as to prevent the absolute pressure sensor chip 202 from shaking when the second probes 244 contact the second leads 2021, which may cause poor contact. In this embodiment, each second pre-pressing block 245 corresponds to two rows of second probes 244, and the number of the second probes 244 in each row is 3. The number of the second probes 244 may be adjusted according to the structure of the product.
In addition, the second receiving cavity 243 further includes a second sealing groove 2432, the top of the second probe 244 is flush with or slightly lower than the top of the second sealing groove 2432, and the second sealing groove 2432 is higher than the second needle plate 1431. In this embodiment, the first sealing groove 1432 is disposed around the second probe 244 and the second pre-pressing block 245, but not limited thereto. The second sealing groove 2432 is used to prevent the second probe 244 from impacting the second pin 2021 during the movement of the absolute pressure probe assembly 24 toward the absolute pressure carrier assembly 25, which may cause damage to the absolute pressure sensor chip 202. The second seal groove 2432 may be, for example, an elastomeric material. In addition, the absolute pressure probe assembly 24 is attached to a third side of the absolute pressure carrier assembly 24, and the second sealing groove 2432 is used for sealing the absolute pressure sensor magazine 201.
The absolute pressure carrier assembly 25 comprises a carrier plate and an absolute pressure sensor magazine 201 arranged on the carrier plate, the carrier plate comprises a plurality of second accommodating holes 252, the second accommodating holes 252 correspond to the absolute pressure sensor chips 202 in the absolute pressure sensor magazine 201 one by one, the upper portions of the absolute pressure sensor chips 202 are embedded in the second accommodating holes 252, and the second pins 2021 are stacked on the third side of the absolute pressure carrier assembly 25. In addition, the carrier plate of the pressure-insulating carrier assembly 25 is provided with a second magazine positioning post 253, the corresponding pressure-insulating pressure sensor magazine 201 is provided with a second magazine positioning hole (not shown), and the second magazine positioning post 253 and the first magazine positioning hole are mutually matched to assist the assembly and positioning of the carrier plate of the pressure-insulating carrier assembly 25 and the pressure-insulating pressure sensor magazine 201. The second receiving hole 252 is, for example, a through groove, which communicates with an inner groove 262 on the upper side of the absolute pressure seal assembly 26.
The insulating seal assembly 26 includes an air chamber with an air inlet 264 on one side of the air chamber and an air outlet (not shown) on the other side of the air chamber, the air outlet being generally disposed on the side of the air chamber facing the insulating carrier assembly 25. In this embodiment, the air outlet is disposed on the top surface 261 of the pressure-insulated sealing component 26, and the top surface 261 faces the pressure-insulated carrier component 25. An inner groove 262 is provided in the top surface 261 and the air outlet is located at the bottom of the inner groove 262. In addition, a plurality of flow guide blocks 263 are arranged in the inner groove 262, and the flow guide blocks 263 uniformly guide the air pressure in the air outlet to the absolute pressure sensor 202 in the absolute pressure sensor magazine 201. In addition, the top of the inner groove 262 and the fourth side of the insulating carrier component 25 are attached to each other, so that a sealing state is formed between the insulating seal component 26 and the fourth side of the insulating carrier component 25.
In this embodiment, the flow guiding blocks 263 are disposed at intervals, and a plurality of flow guiding channels are implemented to uniformly distribute the pressure in the air outlet to the absolute pressure sensor 202.
In this embodiment, the calibration pressure is provided in the absolute pressure seal assembly 26 through an air chamber toward the plurality of absolute pressure sensor chips 202 in the absolute pressure sensor magazine 201.
When the absolute pressure detection station B calibrates the absolute pressure sensor chip 202, first, the second lower pressurizing cylinder 28 interacts with the second lower floating assembly 27 to drive the absolute pressure sealing assembly 26 to move toward and attach to the fourth side of the absolute pressure carrier assembly 25; secondly, the second upper pressurizing cylinder 20 interacts with the second upper floating assembly and the like to drive the absolute pressure probe assembly 24 to move towards the third side of the absolute pressure carrier assembly 25 and attach to the third side, the second positioning column 241 is inserted into the second positioning hole 251, the absolute pressure probe assembly 24 is aligned with the absolute pressure carrier assembly 25, the second pin 2021 on the absolute pressure sensor magazine 201 enters the second accommodating cavity 243, the second pre-pressing block 244 presses the absolute pressure sensor chip 202, and the second probe 245 contacts the second pin 2021; then, the external calibration pressure is introduced through the air inlet 264 of the absolute pressure sealing assembly 26, and is led out to the inner groove 262 through the air outlet, and the pressure is uniformly led to the absolute pressure sensor 202 through the flow guiding block 263; finally, in the power-on state, the absolute pressure sensor 202 converts the pressure signal generated by the calibration pressure into an electrical signal and outputs the electrical signal through the second pin 2021, and the electrical signal is determined by the electronic device to obtain a calibration result.
After the test is finished, the second lower pressurizing cylinder 28 interacts with the second lower floating assembly 27 to drive the absolute pressure sealing assembly 26 to move towards the fourth side far away from the absolute pressure carrier assembly 25; the second upper pressurizing cylinder 20 interacts with the second upper floating assembly and the like to drive the absolute pressure probe assembly 24 to move towards a third side far away from the absolute pressure carrier assembly 25; so that the insulated carrier assembly 25 can move along the slide groove 92 under the action of the conveyor belt to enter the next calibration step, such as a low temperature box, for cooling operation.
It is defined in the present invention that the movement of the absolute pressure sealing assembly 26 toward or away from the absolute pressure carrier assembly 25 is a "reciprocating movement", and that the movement of the absolute pressure probe assembly 24 toward or away from the absolute pressure carrier assembly 25 is a "reciprocating movement".
In summary, the pressure sensor calibration device provided by the invention is suitable for calibrating various different types of pressure sensor devices, and the detection stations in each detection station comprise two different detection stations corresponding to different pressure sensors to be detected, so that the detection range of the calibration device is expanded, and the calibration compatibility is improved.
The present invention is capable of other embodiments, and various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention.
Claims (10)
1. A pressure sensor calibration device, comprising:
the device comprises a feeding station, a normal temperature detection station, at least one low temperature box, a low temperature detection station, at least one high temperature box, a high temperature detection station, at least one cooling box, a retest station, a marking station and a blanking station which are sequentially arranged, wherein the normal temperature detection station, the low temperature detection station, the high temperature detection station and the retest station respectively comprise a first detection station and a second detection station;
the first detection station is used for detecting a first pressure sensor, the second detection station is used for detecting a second pressure sensor, the first pressure sensor is different from the second pressure sensor, and the first detection station is different from the second detection station.
2. The pressure sensor calibration device of claim 1, wherein the first pressure sensor is a differential pressure sensor; the second pressure sensor is an absolute pressure sensor.
3. The pressure sensor calibration apparatus of claim 1 further comprising a 4-axis robot, wherein the loading station and the unloading station share the one 4-axis robot.
4. The pressure sensor calibration apparatus of claim 1, wherein the first test station comprises a first probe assembly, a first carrier assembly, and a first seal assembly, and the second test station comprises a second probe assembly, a second carrier assembly, and a second seal assembly, wherein the first probe assembly is distinct from the second probe assembly and the first seal assembly is distinct from the second seal assembly.
5. The pressure sensor calibration apparatus of claim 1 wherein the at least one cold box is 3 in number.
6. The pressure sensor calibration apparatus of claim 5, wherein the 3 cryotanks include a first cryotank, a second cryotank, and a third cryotank, and temperature ranges from the first cryotank to the third cryotank are sequentially increased; the first low-temperature box is close to the normal-temperature detection station, and the third low-temperature box is close to the low-temperature detection station.
7. The pressure sensor calibration device of claim 1, wherein the number of at least one hot box is 3.
8. The pressure sensor calibration apparatus of claim 7, wherein the 3 hot boxes comprise a first hot box, a second hot box and a third hot box, and the temperature ranges from the first hot box to the third hot box are sequentially decreased; the first high-temperature box is close to the low-temperature detection station, and the third high-temperature box is close to the high-temperature detection station.
9. The pressure sensor calibration apparatus of claim 1 wherein the cryogenic detection station comprises a cryogenic seal box, the first detection station and the second detection station being disposed in the cryogenic seal box, respectively.
10. The pressure sensor calibration apparatus of claim 1 wherein the high temperature detection station comprises a high temperature capsule, the first detection station and the second detection station being disposed in the high temperature capsule, respectively.
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| CN201911174416.4A CN111174972A (en) | 2019-11-26 | 2019-11-26 | Pressure sensor calibration equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911174416.4A CN111174972A (en) | 2019-11-26 | 2019-11-26 | Pressure sensor calibration equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114273268A (en) * | 2021-12-29 | 2022-04-05 | 中国振华(集团)新云电子元器件有限责任公司(国营第四三二六厂) | Test apparatus and method |
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Application publication date: 20200519 |