CN214471514U

CN214471514U - Pressure sensor calibration equipment

Info

Publication number: CN214471514U
Application number: CN202120840286.XU
Authority: CN
Inventors: 袁进书; 于成奇; 高洪连
Original assignee: Suzhou Novosense Microelectronics Co ltd
Current assignee: Suzhou Novosense Microelectronics Co ltd
Priority date: 2021-04-22
Filing date: 2021-04-22
Publication date: 2021-10-22
Anticipated expiration: 2031-04-22

Abstract

The utility model provides a pressure sensor calibration equipment, a serial communication port, pressure sensor calibration equipment includes: the sliding rail comprises a first sliding rail extending along a first direction and a second sliding rail extending along a second direction, wherein the junction position of the first sliding rail and the second sliding rail comprises a blank area; the plurality of support plates are slidably arranged in the first slide rail and the second slide rail; and a power device, the power device is arranged close to the blank area; when the carrier plate slides along the first slide rail and enters the blank area, the power device pushes the carrier plate in the blank area, so that the carrier plate in the blank area slides and enters the second slide rail, and the first direction is different from the second direction.

Description

Pressure sensor calibration equipment

Technical Field

The utility model relates to a pressure sensor calibration technical field, in particular to calibration equipment suitable for calibrate pressure sensor.

Background

At present, the mass production of the pressure sensor needs to test and calibrate the performance of the pressure sensor before the pressure sensor leaves a factory. The existing test calibration procedure includes: normal temperature test, high temperature test, sorting defective products, marking finished products, cooling and the like.

When the traditional operation mode is used for the calibration test, single test equipment is often adopted, and the test and the operation of single stations are sequentially carried out. The existing single machine calibration test equipment mainly adopts a high-low temperature impact machine to test a few devices, and high-low temperature conversion is realized by performing high-low temperature conversion in a sealed cavity. Therefore, the requirement on the tightness of the test equipment is high, and the probability of abnormal test calibration is easily increased.

The single machine calibration test equipment and the single station test have poor controllability in the test process and poor traceability of production test data, so that the labor intensity of workers is high, and the test calibration efficiency is very low. In addition, different test equipment is needed to test different types of products, the test cost is high, and the different test equipment occupies a large space.

In view of the above, there is a need for a new pressure sensor calibration apparatus that overcomes the disadvantages of stand-alone calibration test equipment and single-site testing.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a pressure sensor calibration equipment tests through arranging multiple test station according to the preface on the slide rail, and it can overcome the unsafe problem of test calibration that leads to of unit calibration test equipment and simplex station test.

The utility model provides a pair of pressure sensor calibration equipment, a serial communication port, pressure sensor calibration equipment includes: the sliding rail comprises a first sliding rail extending along a first direction and a second sliding rail extending along a second direction, wherein the junction position of the first sliding rail and the second sliding rail comprises a blank area; the plurality of support plates are slidably arranged in the first slide rail and the second slide rail; and a power device, the power device is arranged close to the blank area; when the carrier plate slides along the first slide rail and enters the blank area, the power device pushes the carrier plate in the blank area, so that the carrier plate in the blank area slides and enters the second slide rail, and the first direction is different from the second direction.

As an optional technical solution, the carrier plates in the blank area slide into the second slide rail, so that a plurality of carrier plates located in the second slide rail sequentially move a distance of one carrier plate along the second slide rail in a direction away from the blank area.

As an optional technical solution, the first direction is perpendicular to the second direction.

As an optional technical scheme, the number of the first slide rails is two; the number of the second sliding rails is two; wherein, two first slide rails and two second slide rails constitute a return font slide rail.

As an optional technical solution, four corners of the square-shaped slide rail respectively include the blank area.

As an optional technical scheme, the number of the power devices is four, and the four power devices correspond to the blank areas at the four corners one by one.

As an optional technical solution, the method further comprises: along feed station, normal atmospheric temperature that back font slide rail set gradually detect station, at least one low-temperature box, low temperature detection station, at least one high-temperature box, high temperature detection station, at least one return the warm box, normal atmospheric temperature retest station, beat mark station and unloading station.

As an optional technical solution, the method further comprises: the normal-temperature detection station, the low-temperature detection station, the high-temperature detection station and the normal-temperature retest station respectively comprise a first detection station and a second detection station; the first detection station is used for detecting a first pressure sensor; the second detection station is used for detecting a second pressure sensor; the first detection station comprises a first probe assembly, a first carrier assembly and a first sealing assembly; the second detection station comprises a second probe assembly, a second carrier assembly and a second sealing assembly; wherein the first pressure sensor is a differential pressure sensor; the second pressure sensor is an absolute pressure sensor.

As an optional technical solution, the number of the at least one cryogenic tank is three, the three cryogenic tanks include a first cryogenic tank, a second cryogenic tank and a third cryogenic tank, and temperature intervals from the first cryogenic tank to the third cryogenic tank are sequentially increased; the first low-temperature box is close to the normal-temperature detection station, and the third low-temperature box is close to the low-temperature detection station.

As an optional technical solution, the number of the at least one high temperature box is three, the three high temperature boxes include a first high temperature box, a second high temperature box and a third high temperature box, and temperature intervals from the first high temperature box to the third high temperature box are sequentially reduced; the first high-temperature box is close to the low-temperature detection station, and the third high-temperature box is close to the high-temperature detection station.

Compared with the prior art, the utility model provides a pressure sensor calibration equipment, including slide rail, support plate and power device control support plate remove and the switching-over along the slide rail, the support plate bears the pressure sensor who treats the calibration and realizes pressure sensor's multistation continuous calibration through a plurality of detection stations in proper order, has improved calibration precision and production efficiency.

The present invention will be described in detail with reference to the accompanying drawings and specific embodiments, but the present invention is not limited thereto.

Drawings

Fig. 1 is a schematic diagram of a slide rail, a carrier plate and a power device of the pressure sensor calibration apparatus of the present invention.

Fig. 2 is an enlarged schematic view of fig. 1 at a dotted line.

Fig. 3 is an overall schematic diagram of the pressure sensor calibration apparatus of the present invention.

Fig. 4 is a top view of the master of the pressure sensor to be calibrated according to the present invention.

Fig. 5 is a schematic view of a normal temperature detection station of the pressure sensor calibration apparatus in fig. 3.

Fig. 6 is an exploded schematic view of a differential pressure detection station in a normal temperature detection station.

FIG. 7 is a schematic diagram of a differential pressure detection probe set in a room temperature detection station.

Fig. 8 is an exploded view of an absolute pressure detection station in the normal temperature detection station.

Fig. 9 is a schematic diagram of an absolute pressure detection probe set in a normal temperature detection station.

Fig. 10 is a schematic view of a cryostat of the sensor calibration apparatus of fig. 3.

FIG. 11 is a schematic view of a high temperature chamber of the sensor calibration apparatus of FIG. 3.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the following embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

As shown in fig. 1 and 2, the pressure sensor calibration apparatus 100 includes a first slide rail 9a extending in a first direction and a second slide rail 9b extending in a second direction, and an interface position of the first slide rail 9a and the second slide rail 9b includes a blank area 9 c; a plurality of carrier plates 111 slidably disposed in the first slide rail 9a and the second slide rail 9 b; and a power unit 112 disposed near the blank space 9 c; when the carrier plate 111 slides along the first slide rail 9a and enters the blank area 9c, the power device 112 pushes the carrier plate 111 in the blank area 9c, so that the carrier plate 111 slides along the second slide rail 9b, and the first direction is different from the second direction.

In this embodiment, a blank space 9c is disposed at a boundary position of the first slide rail 9a and the second slide rail 9b, and the power device pushes the carrier plate 111 entering the blank space 9c, so that the moving direction of the carrier plate 111 is changed from a first direction to a second direction. The blank area at the junction of the slide rails is used for reversing, so that the circular operation of the carrier plate in the pressure sensor calibration equipment 100 is maintained, the loading, the receiving and the testing of each station are performed by the equipment, the artificial interference is reduced, and the calibration accuracy is improved.

As shown in fig. 2, the blank area 9c refers to an area where the carrier board 111 is not disposed.

In a preferred embodiment, the first direction is perpendicular to the second direction, but not limited thereto. In other embodiments of the present invention, the included angle between the first direction and the second direction is an acute angle or an obtuse angle.

As shown in fig. 1, the number of the first slide rails 9a is two, and the number of the second slide rails 9b is two, wherein the two first slide rails 9a and the two second slide rails 9b form a zigzag slide rail. The four corners of the square-shaped slide rail respectively include blank areas 9c, and the blank areas 9c corresponding to the four corners are respectively provided with one-to-one corresponding power devices 112.

In a preferred embodiment, the power device 112 is, for example, an air cylinder, and the air cylinder pushes against the carrier plate 111 in the blank space 9c, so that the carrier plate 111 in the blank space 9c moves in a reverse direction, and further the carrier plate 111 moves in a circular manner in the circular-shaped slide rail.

As shown in fig. 1 and 2, the plurality of carrier plates 111 disposed in the first slide rail 9a and the second slide rail 9b are closely and continuously arranged.

Describing the sliding process of the plurality of carrier plates 111 by the zigzag track, the carrier plates 111 are not disposed in the blank spaces 9c located at the upper end and the lower end of the first track 9a, and the carrier plates 111 are not disposed in the blank spaces 9c located at the right end and the left end of the second track 9b, wherein the lower right corner in fig. 1 is the starting end.

The cylinder pushes against the carrier plate 111 at the right end of the second slide rail 9b, all the carrier plates 111 in the second slide rail 9b move forward by the distance of one carrier plate in sequence, at this time, the carrier plate 111 at the leftmost side of the second slide rail 9b enters the blank space 9c at the junction of the left end of the second slide rail 9b and the lower end of the first slide rail 9a, the cylinder pushes against the carrier plate 111 at this position, the carrier plate 111 slides into the first slide rail 9a to realize reversing, and simultaneously, the cylinder drives the plurality of carrier plates 111 in the first slide rail 9a to move upward by the distance of one carrier plate.

The method can more accurately control the accuracy of the movement of the carrier plate by utilizing the power device and the blank area on the track to realize the reversing and moving modes of the carrier plate, and reduce the movement error caused by the movement inertia of the carrier plate.

As shown in fig. 1 and 3, the pressure sensor calibration apparatus 100 further includes a feeding station 1, a normal temperature detection station 2, at least one low temperature box 3, a low temperature detection station 31, at least one high temperature box 4, a high temperature detection station 41, at least one cooling box 5, a normal temperature retest station 6, a marking station 7, and a blanking station 8, which are sequentially disposed along the zigzag-shaped slide rail; the square-shaped slide rail penetrates through the whole pressure sensor calibration equipment 100, a product to be detected is loaded in the support plate 111, the support plate 111 sequentially passes through the normal-temperature detection station 2, the at least one low-temperature box 3, the low-temperature detection station 31, the at least one high-temperature box 4, the high-temperature detection station 41, the at least one cooling box 5, the normal-temperature retest station 6 and the marking station 7 along the square-shaped slide rail, and finally flows out of the blanking station 8.

The loading station 1 comprises a 4-axis robot, a horizontal conveyor belt via which product cartridges are input and output in the pressure sensor calibration device 100, and a plurality of product cartridges to be detected.

As shown in fig. 4, in another embodiment of the present invention, there is further provided a mother plate 2000 of pressure sensors to be calibrated, which includes a body 2001 and a plurality of pressure sensors 2002 electrically connected to the body 2001, wherein a connection region corresponding to each pressure sensor 2002 on the body 2001 includes a plurality of pins including an input terminal pin 2003, an input terminal pin 2004 and at least one connection terminal pin 2005, and the input terminal pin 2003, the input terminal pin 2004 and the at least one connection terminal pin 2005 are electrically isolated from the body 2001 respectively.

In this embodiment, the input terminal pin 2003, the output terminal pin 2004, and at least one of the connection terminal pins 2005 and the body 2001 are cut off by mechanical cutting, so that they are electrically isolated from the body 2001.

In a preferred embodiment, the input terminal 2003 is, for example, a power supply terminal (VDDHV) with power supply protection function; the output terminal pin 2004 is, for example, an analog voltage output terminal (VOUT); the connection terminal pins 2005 are, for example, communication pins.

The utility model discloses in other embodiments, according to pressure sensor's external connection's actual demand, the quantity of the link pin of deciding on the body can be two or more than two.

In this embodiment, the plurality of pins further includes a ground pin 2006, wherein the ground pin 2006 and the output pin 2004 are located on one side of the pressure sensor 2002 and are adjacently arranged; the input terminal pin 2003 and the connection terminal pin 2005 are located on the opposite side of the pressure sensor 2002, and are adjacently arranged. It is noted that in other embodiments, the positions of the various types of pins may be arranged according to actual use requirements.

As shown in fig. 4, in the test of the pressure sensor 2000 to be calibrated, the input terminal pin 2003, the output terminal pin 2004 and at least one connection terminal pin 2005 are electrically connected through respective independent probes, wherein a voltage is input from the input terminal pin 2003 of the pressure sensor 2002, and a current is output from the output terminal pin 2004, and if the output current is within a preset range, the pressure sensor 2002 is determined to be qualified, otherwise, the pressure sensor 2002 is determined to be abnormal.

In this embodiment, several pressure sensors 2002 are integrated, so that when the master 2000 of the body 2001 is tested, the body 201 provides a deformation-resistant force, and the problem of pin deformation caused when the probe contacts the pin is avoided.

In addition, during testing, the pressure sensor mother board 2000 to be calibrated is placed on the carrier for positioning, and compared with the situation that a plurality of single sensors to be calibrated are placed for positioning, the pressure sensor mother board 2000 to be calibrated has the advantages of being simple and convenient to operate, accurate in positioning, capable of saving working hours and the like.

As shown in fig. 4, a plurality of alignment holes 2100 are further disposed on the body 2001, and the alignment holes 2100 are aligned with the alignment posts on the carrier plate 111, so that the alignment between the pins to be tested on the pressure sensor 2002 and the probes in the testing station is easier and the accuracy is higher.

In a preferred embodiment, the plurality of pressure sensors 2002 are arranged in an array on the body 2001, and the body 2001 further includes a hollow 2200, and the hollow 2200 is formed between the plurality of pressure sensors 202 arranged in the array. The hollow-out grooves 2200 are used for reducing the weight of the body 2001 and releasing the pressure generated by the probe contact pins.

In a preferred embodiment, the pressure sensor 2002 may be a differential pressure sensor or an absolute pressure sensor.

Further, in order to realize that the pressure sensor calibration equipment 100 can calibrate the pressure sensors of various different types at the same time, the normal temperature detection station 2, the low temperature detection station 31, the high temperature detection station 41 and the normal temperature retest station 6 are respectively provided with a detection component capable of detecting at least two different pressure sensors.

As shown in fig. 5 to 9, taking the normal temperature detection station 2 as an example, the detection assembly at least includes a first detection station and a second detection station, the first detection station calibrates the first pressure sensor, the second detection station calibrates the second pressure sensor, the first pressure sensor is different from the second pressure sensor, and the first detection station is different from the second detection station. Of course, the number and type of the inspection stations are not limited to two, and can be set according to actual production requirements.

The first detection station comprises a first probe assembly, a first carrier assembly and a first sealing assembly; the second detection station comprises a second probe assembly, a second carrier assembly and a second sealing assembly, wherein the first sealing assembly is different from the second sealing assembly, and the first probe assembly is different from the second probe assembly.

The first probe assembly corresponds to a first pin of the first pressure sensor; the second probe assembly corresponds to a second pin of the second pressure sensor; during calibration, the first probe assembly is driven by the first upper pressurizing cylinder and the first upper floating assembly to move towards the first side of the first carrier assembly and attach the first probe assembly to the first side, the first probe assembly contacts the first pin, the first sealing assembly is driven by the first lower pressurizing cylinder and the first lower floating assembly to move towards the second side of the first carrier assembly and attach the first sealing assembly to the second side, and first calibration pressure is transmitted to a first pressure sensor in the first carrier assembly through the first sealing cavity; the second probe assembly is driven by the second upper pressurizing cylinder and the second upper floating assembly to move towards the third side of the second carrier assembly and attach to the third side, the second probe assembly contacts the second pin, the second sealing assembly is driven by the second lower pressurizing cylinder and the second lower floating assembly to move towards the fourth side of the second carrier assembly and attach to the fourth side, and the second calibration pressure is transmitted to a second pressure sensor in the second carrier assembly through the second sealing cavity.

With continued reference to fig. 3 and 10, at least one cryostat 3 is used to provide a cryogenic test environment to calibrate the performance of the product cartridge under test after exposure to the cryogenic environment. The number of the at least one low-temperature box 3 is 3, and the at least one low-temperature box comprises a first low-temperature box, a second low-temperature box and a third low-temperature box, wherein the first low-temperature box is used for providing a first low-temperature interval, the second low-temperature box is used for providing a second low-temperature interval, and the third low-temperature box is used for providing a third low-temperature interval, wherein the temperature from the first low-temperature interval to the third low-temperature interval is increased in sequence, namely, the temperature from the first low-temperature box to the third low-temperature box is increased in sequence. The first low-temperature box is close to the normal-temperature detection station 2, and the third low-temperature box is close to the low-temperature detection station 31. A plurality of low-temperature boxes are adopted to control the low-temperature interval in a segmented manner, so that the problem that the surface of a product material box is frosted due to low temperature in a low-temperature test is avoided. In addition, based on the temperature control principle, it is fast to lower the temperature towards low temperature from low temperature towards the higher temperature of high temperature intensification, and the temperature of low-temperature box increases in proper order, is favorable to improving the holistic calibration efficiency of pressure sensor calibration equipment 100.

As shown in fig. 10, a window 32 is provided in the cryostat 3, and the slide rail 9 is provided in the cryostat 3 and extends into the next inspection station through the window 32. The slide rail 9 includes a slide groove 91, and the absolute pressure carrier assembly and the differential pressure carrier assembly are respectively embedded in the slide groove 91 and can slide in the slide groove. Further, the slide rail 9 includes a plurality of sections, the plurality of sections are spliced by a connecting member 92, the connecting member 92 is correspondingly provided with a fixing recess, and one end of each section is clamped into the fixing recess and then fixed by a screw locking manner.

The low temperature detection station 31 is arranged close to at least one low temperature box 3, and the low temperature detection station 31 is used for calibrating the pressure sensor after the cooling operation, wherein the structure of the detection station in the low temperature detection station 31 is similar to that of the detection station in the normal temperature detection station 2, and reference can be made to the relevant description of the normal temperature detection station 2. In addition, the low temperature detection station 31 is provided with a low temperature seal box which seals the first and second detection stations therein, so that during testing, the product magazine to be tested is maintained at a relatively low temperature for calibration.

With continued reference to fig. 1 and 11, at least one high temperature box 4 is disposed behind the low temperature detection station 31, the at least one high temperature box 4 is used to provide a high temperature environment, and the product cartridge to be tested is exposed to the high temperature test environment. The number of the at least one high-temperature box 4 is 3, and the high-temperature box comprises a first high-temperature box, a second high-temperature box and a third high-temperature box. The first high-temperature box is used for providing a first high-temperature interval; the second high-temperature box is used for providing a second high-temperature interval; the third high-temperature box is used for providing a third high-temperature interval; the first high-temperature interval to the third high-temperature interval are sequentially reduced, namely, the temperature intervals in the first high-temperature box to the third high-temperature box are sequentially reduced. The first high temperature box is close to the low temperature detection station 31 and the third high temperature box is close to the high temperature detection station 41. Because the temperature intervals in the three high-temperature boxes are sequentially reduced, the temperature control is easier to realize, and in addition, the whole calibration efficiency of the pressure sensor calibration equipment 100 is also favorably improved.

The high temperature detection station 41 is arranged close to at least one high temperature box 4, the high temperature detection station 41 is used for calibrating the pressure sensor after the temperature rise operation, wherein the structure of the detection station in the high temperature detection station 41 is similar to that of the detection station in the normal temperature detection station 2, and the relevant description of the normal temperature detection station 2 can be referred. The high temperature detection station 41 comprises a high temperature sealed box 42, in which the high temperature sealed box 42 seals the detection station, so that the product cartridges to be detected are maintained at a high temperature for calibration. In addition, a window 43 is arranged on the high-temperature sealing box 42, and the slide rail 9 extends out of the window 43 to enter the next detection station.

At least one cooling box 5 is arranged behind the high-temperature detection station 41, and the at least one cooling box 5 is used for cooling the product material box passing through the high-temperature detection station 41. In this embodiment, the quantity of at least one cooling box 5 is 4, and it includes a plurality of ion fan and a plurality of sheet metal component subassembly, carries out the air-cooled operation to the product magazine through ion fan.

The normal temperature retest station 6 is arranged behind the at least one cooling box 5, and the detection station of the normal temperature retest station 6 is similar to the detection station in the normal temperature detection station 2 in structure, and reference can be made to the relevant description of the normal temperature detection station 2.

In addition, the pressure sensor calibration device 100 further comprises a marking station 7 and a blanking station 8, wherein the marking station 7 comprises a laser marking machine, an industrial personal computer and a display; the blanking station 8 is adjacent to the feeding station 1, the two stations share a 4-axis robot, and the function of loading and unloading products is realized by matching with a conveying line.

For clearer understanding of the operation processes of the pressure sensors of different calibration types of the pressure sensor calibration apparatus 100 of the present invention, the following description will be given by taking the pressure sensor calibration apparatus 100 capable of calibrating a differential pressure type pressure sensor and an absolute pressure type pressure sensor as an example.

It should be noted that the present invention provides a pressure sensor calibration apparatus 100 that does not limit the ability to calibrate differential pressure type pressure sensors and absolute pressure type pressure sensors, and that can enable the pressure sensor calibration apparatus 100 to calibrate pressure sensors of various different types by replacing corresponding probe assemblies and sealing assemblies.

The utility model discloses in to explain for example pressure sensor calibration equipment 100 to the calibration of differential pressure type pressure sensor 102 and absolute pressure type pressure sensor 202, wherein, the detection element in arbitrary detection station in normal atmospheric temperature detection station 2, low temperature detection station 31, high temperature detection station 41 and the normal atmospheric temperature retest station 6 equally divide and do not include differential pressure type detection station A and absolute pressure type detection station B.

The structure and calibration process of the differential pressure detection station a and the absolute pressure detection station B in the detection assembly of the room temperature detection station 2 will be described below by way of example.

As shown in fig. 5 to 9, the differential pressure type detection station a and the absolute pressure type detection station B and a room temperature cabinet (not shown) provided around the differential pressure type detection station a and the absolute pressure type detection station B, that is, the differential pressure type detection station a and the absolute pressure type detection station B are provided inside the room temperature cabinet. In this embodiment, the differential pressure type detection station a and the absolute pressure type detection station B are arranged in parallel.

The differential pressure type detection station A comprises a first upper pressurizing cylinder 10, a first upper floating assembly 11, a first guide shaft 12, a first linear bearing 13, a differential pressure probe assembly 14, a first carrier plate assembly 15, a differential pressure sealing assembly 16, a first lower floating assembly 17 and a first lower pressurizing cylinder 18 from top to bottom; the first upper pressurizing cylinder 10, the first guide shaft 12, the first linear bearing 13 and the differential pressure probe assembly 14 are sequentially connected, and the differential pressure probe assembly 14 can reciprocate relative to the first side of the first carrier plate assembly 15 under the combined action of the first upper pressurizing cylinder 10, the first guide shaft 12 and the first linear bearing 13; the differential pressure sealing assembly 16, the first lower floating assembly 17 and the first lower pressurizing cylinder 18 are sequentially connected, the differential pressure sealing assembly 16 can reciprocate relative to the second side of the first carrier plate assembly 15 under the combined action of the first lower floating assembly 17 and the first lower pressurizing cylinder 18, and the second side is opposite to the first side.

The pressure insulation type detection station B comprises a second upper pressurizing cylinder 20, a second upper floating assembly, a second guide shaft, a second linear bearing, a pressure insulation probe assembly 24, a second carrier plate assembly 25, a pressure insulation sealing assembly 26, a second lower floating assembly 17 and a second lower pressurizing assembly 28 from top to bottom; the second upper pressurizing cylinder 20, the second guide shaft, the second linear bearing and the absolute pressure probe assembly 24 are sequentially connected, and the absolute pressure probe assembly 24 can reciprocate relative to the third side of the second carrier plate assembly 25 under the combined action of the second upper pressurizing cylinder, the second guide shaft and the second linear bearing; the absolute pressure sealing assembly 26, the second lower floating assembly 27 and the second lower pressurizing cylinder 28 are connected in sequence, the absolute pressure sealing assembly 26 can reciprocate relative to a fourth side of the second carrier plate assembly 25 under the combined action of the second lower floating assembly 27 and the second lower pressurizing cylinder 28, and the third side is opposite to the fourth side.

With continued reference to fig. 5, the first upper supercharge cylinder 10 and the second upper supercharge cylinder 20 are respectively connected to the upper fixing plate 30; an upper supporting plate 50 is arranged below the upper fixing plate 30, a connecting plate 40 is arranged below the upper supporting plate 50, and the first guide shaft 12 and the second guide shaft are respectively arranged in the connecting plate 40 in a penetrating manner and are respectively connected with the corresponding first probe assembly 14 and the corresponding second probe assembly 24. The first upper floating unit 11 and the second upper floating unit (not shown) are disposed between the upper fixing plate 30 and the connection plate 40.

The fixed base plate 60 is disposed below the connecting plate 40, and the intermediate support plate 70 is disposed between the connecting plate 40 and the fixed base plate 60, wherein a space between the connecting plate 40 and the fixed base plate 60 is used for performing a calibration operation on the pressure sensor, specifically, the differential pressure probe assembly 14, the first carrier plate assembly 15, and the differential pressure sealing assembly 16, and the absolute pressure probe assembly 24, the second carrier plate assembly 25, and the absolute pressure sealing assembly 26 are respectively located in the above space.

The lower fixing plate 80 is disposed under the fixing base plate 60, and a lower supporting plate 90 is disposed between the lower fixing plate 80 and the fixing base plate 60, wherein the first lower floating assembly 17 and the second lower floating assembly (not shown) are respectively disposed between the fixing base plate 60 and the lower fixing plate 80. The first lower supercharging cylinder 18 and the second lower supercharging cylinder 28 are respectively fixed on one side of the lower fixing plate 80 far away from the fixing base plate 60.

In addition, a slide rail 9 is disposed between the differential pressure probe assembly 14 and the differential pressure sealing assembly 16 and between the absolute pressure probe assembly 24 and the absolute pressure sealing assembly 25, and the first carrier plate assembly 15 and the second carrier plate assembly 25 are respectively embedded in a slide groove 91 of the slide rail 9 (as shown in fig. 7) and can slide along the slide groove 91 to realize input and output of the tray to be calibrated.

As shown in fig. 6 and 7, the differential pressure probe assembly 14 includes a first positioning post 141, the first positioning post 141 corresponds to a first positioning hole 151 on the first carrier assembly 15, and when the differential pressure probe assembly 14 moves toward and attaches to the first side of the first carrier assembly 15, the first positioning post 141 enters the first positioning hole 151, so that the differential pressure probe assembly 14 is aligned with the first carrier assembly 15. Preferably, the first alignment post 141 is disposed on a diagonal of the differential pressure probe assembly 14 to improve the alignment accuracy of the differential pressure probe assembly 14 and the differential pressure carrier 15.

The first bottom surface 142 of the differential pressure probe assembly 14 faces the first carrier plate assembly 15, an inward-concave first receiving cavity 143 is formed on the first bottom surface 142, and when the differential pressure probe assembly 14 is attached to the first side of the differential pressure carrier assembly 101, the differential pressure sensor chip 102 of the differential pressure sensor magazine 101 partially enters the first receiving cavity 143.

The first receiving cavity 143 has a first pin plate 1431, the plurality of first probes 144 and the plurality of first pre-pressing blocks 145 protrude from the first pin plate 1431, wherein each differential pressure sensor chip 102 is pressed by one first pre-pressing block 145, so as to prevent the differential pressure sensor chip 102 from shaking when the first probes 144 contact with the first pins 1021, which may cause poor contact. In this embodiment, each of the first pre-pressing blocks 145 corresponds to two rows of the first probes 144, and the number of the first probes 144 in each row is 3. In other embodiments of the present invention, the number of the first probes 144 can be adjusted according to the structure of the product, and is not limited to the above.

In addition, the first receiving cavity 143 further includes a first sealing groove 1432, a top of the first probe 144 is flush with or slightly lower than a top of the first sealing groove 1432, and the first sealing groove 1432 is higher than the first needle plate 1431. In the present embodiment, the first sealing groove 1432 is disposed around the first probe 144 and the first pre-pressing block 145, but not limited thereto. The first seal groove 1432 is used to prevent the differential pressure sensor die 102 from being damaged due to the first probe 144 striking the first pin 1021 during the movement of the differential pressure probe assembly 14 toward the first carrier plate assembly 15. First seal groove 1432 may be, for example, an elastomeric material. In addition, differential pressure probe assembly 14 is attached to a first side of differential pressure carrier assembly 14, and first seal groove 1432 is used for sealing differential pressure sensor master 101.

The first carrier plate assembly 15 includes a carrier plate and a differential pressure sensor mother plate 101 disposed on the carrier plate, the carrier plate includes a plurality of first accommodating holes 152, the plurality of first accommodating holes 152 correspond to the differential pressure sensor chips 102 in the differential pressure sensor mother plate 101 one to one, and the lower ends 1022 of the differential pressure sensor chips 102 extend toward the differential pressure seal assembly 16 through the first accommodating holes 152. In addition, a first positioning post 153 is disposed on the carrier plate of the first carrier plate assembly 15, a first positioning hole (not shown) is disposed on the corresponding differential pressure sensor mother plate 101, and the first positioning post 153 and the first positioning hole cooperate with each other to assist the carrier plate of the first carrier plate assembly 15 and the differential pressure sensor mother plate 101 in assembling and positioning.

As shown in fig. 4 and 6, the structure of the differential pressure sensor master 101 is similar to that of the pressure sensor master 200 to be calibrated, that is, the structure of the pins of the differential pressure sensor 102 on the differential pressure sensor master 101 is similar to that of the pins of the pressure sensor 2002 on the pressure sensor master 2000.

The differential pressure sealing assembly 16 includes a plurality of air connectors, the air connectors correspond to the differential pressure sensor chips 102 one by one, the outlet 161 of each air connector corresponds to the lower end 1022 of each pressure sensor chip 102, the lower end 1022 enters the outlet 161 partially, the inlet 162 of the air connector communicates with the outside, the outside calibration pressure enters the air connector through the inlet 162 and enters the lower end 1022 of the differential pressure sensor chip 102 through the outlet 161, and the outside calibration pressure is transmitted to the inside of the differential pressure sensor chip 102 for calibration.

In this embodiment, the plurality of air connectors provided in the differential pressure seal assembly 16 correspond to the plurality of differential pressure sensor dies 102 on the differential pressure sensor master 101, that is, the calibration pressure of each differential pressure sensor die 102 is communicated with the calibration pressure of the outside through a single air connector.

When the differential pressure detection station a calibrates the differential pressure sensor chip 102, firstly, the first lower pressurizing cylinder 18 interacts with the first lower floating assembly 17 to drive the differential pressure sealing assembly 16 to move toward the second side of the carrier assembly 15 and attach to the second side, and the outlet 161 of the differential pressure sealing assembly 16 is sleeved on the lower end 1022 of the differential pressure sensor chip 102; secondly, the first upper booster cylinder 10 interacts with the first upper floating assembly 11 and the like to drive the differential pressure probe assembly 14 to move towards the first side of the first carrier plate assembly 15 and attach to the first side, the first positioning column 141 is inserted into the first positioning hole 151, the differential pressure probe assembly 14 and the first carrier plate assembly 15 are aligned with each other, the differential pressure sensor master plate 101 partially enters the first accommodating cavity 143, the first pre-pressing block 144 presses the differential pressure sensor chip 102, and the probe 145 contacts with the first pin 1022; then, the outside calibration pressure is introduced into the gas joint through the inlet 162 of the gas joint of the differential pressure seal assembly 16, enters the lower end 1022 of the differential pressure sensor 102 through the outlet 161, and continues to enter the interior of the differential pressure sensor 102; finally, in the power-on state, the differential pressure sensor 102 converts the pressure signal generated by the calibration pressure into an electrical signal and outputs the electrical signal through the first pin 1021, and the electronic device determines the electrical signal to obtain a calibration result.

After the test is finished, the first lower pressurizing cylinder 18 interacts with the first lower floating assembly 17 to drive the differential pressure sealing assembly 16 to move towards the second side far away from the first carrier plate assembly 15; the first upper pressurizing cylinder 10 interacts with the first upper floating assembly 11 and the like to drive the differential pressure probe assembly 14 to move towards a first side far away from the first carrier plate assembly 15; so that the first carrier plate assembly 15 can move along the slide groove 92 under the action of the conveyor belt to enter the next calibration step, such as a low temperature box, for cooling operation.

The utility model discloses in define, the process that differential pressure seal assembly 16 removed towards or keep away from first support plate subassembly 15 is "reciprocating motion", and equally, the process that differential pressure probe subassembly 14 removed towards or keep away from first support plate subassembly 15 is "reciprocating motion".

As shown in fig. 8 and 9, the absolute pressure probe assembly 24 includes a second positioning post 241, the second positioning post 241 corresponds to a second positioning hole 251 of the second carrier assembly 25, and when the absolute pressure probe assembly 24 moves toward and attaches to a third side of the second carrier assembly 25, the second positioning post 241 enters the second positioning hole 251, so that the absolute pressure probe assembly 24 is aligned with the second carrier assembly 25. Preferably, the second positioning posts 241 are disposed on the diagonal of the absolute pressure probe assembly 24 to improve the alignment accuracy between the absolute pressure probe assembly 24 and the absolute pressure carrier 25.

The second bottom surface 242 of the absolute pressure probe assembly 24 faces the second carrier plate assembly 25, an inwardly concave second accommodating cavity 243 is formed on the second bottom surface 242, and when the absolute pressure probe assembly 24 is attached to the third side of the second carrier plate assembly 25, the second lead 2021 on the upper side of the absolute pressure sensor motherboard 201 enters the second accommodating cavity 243.

The second receiving cavity 243 has a second pin plate 2431, and the second probes 244 and the second pre-pressing blocks 245 respectively protrude from the second pin plate 2431, wherein each absolute pressure sensor chip 202 is pressed by one second pre-pressing block 245, so as to prevent the absolute pressure sensor chip 202 from shaking when the second probes 244 contact the second leads 2021, which may cause poor contact. In this embodiment, each second pre-pressing block 245 corresponds to two rows of second probes 244, and the number of the second probes 244 in each row is 3. The number of the second probes 244 may be adjusted according to the structure of the product.

In addition, the second receiving cavity 243 further includes a second sealing groove 2432, the top of the second probe 244 is flush with or slightly lower than the top of the second sealing groove 2432, and the second sealing groove 2432 is higher than the second needle plate 1431. In this embodiment, the first sealing groove 1432 is disposed around the second probe 244 and the second pre-pressing block 245, but not limited thereto. The second sealing groove 2432 is used to prevent the second probe 244 from hitting the second pin 2021 during the movement of the absolute pressure probe assembly 24 toward the second carrier assembly 25, which may cause damage to the absolute pressure sensor die 202. The second seal groove 2432 may be, for example, an elastomeric material. In addition, the absolute pressure probe assembly 24 is attached to a third side of the absolute pressure carrier assembly 24, and the second sealing groove 2432 is used for sealing the absolute pressure sensor master 201.

The second carrier plate assembly 25 includes a carrier plate and an absolute pressure sensor mother plate 201 disposed on the carrier plate, the carrier plate includes a plurality of second accommodating holes 252, the plurality of second accommodating holes 252 correspond to the absolute pressure sensor chips 202 in the absolute pressure sensor mother plate 201 one to one, the upper portions of the absolute pressure sensor chips 202 are embedded in the second accommodating holes 252, and the second pins 2021 are stacked on the third side of the second carrier plate assembly 25. In addition, a second positioning post 253 is disposed on the carrier plate of the second carrier plate assembly 25, a second positioning hole (not shown) is disposed on the corresponding absolute pressure sensor mother plate 201, and the second positioning post 253 and the first positioning hole are matched with each other to assist the carrier plate of the second carrier plate assembly 25 and the absolute pressure sensor mother plate 201 in assembling and positioning. The second receiving hole 252 is, for example, a through groove, which communicates with an inner groove 262 on the upper side of the absolute pressure seal assembly 26.

As shown in fig. 4 and 8, the structure of the absolute pressure sensor master 201 is similar to that of the pressure sensor master 200 to be calibrated, that is, the structure of the pins of the absolute pressure sensor 202 on the absolute pressure sensor master 201 is similar to that of the pins of the pressure sensor 2002 on the pressure sensor master 2000.

The pressure-insulating seal assembly 26 includes an air chamber having an air inlet 264 on one side and an air outlet (not shown) on the other side, the air outlet being generally disposed on the side of the air chamber facing the second carrier plate assembly 25. In this embodiment, the air outlet is disposed on the top surface 261 of the pressure-insulating sealing assembly 26, and the top surface 261 faces the second carrier assembly 25. An inner groove 262 is provided in the top surface 261 and the air outlet is located at the bottom of the inner groove 262. In addition, a plurality of flow guide blocks 263 are arranged in the inner groove 262, and the flow guide blocks 263 guide the air pressure in the air outlet uniformly to the absolute pressure sensor 202 in the absolute pressure sensor master 201. In addition, the top of the inner groove 262 and the fourth side of the second carrier assembly 25 are attached to each other, so that a sealing state is formed between the absolute pressure sealing assembly 26 and the fourth side of the second carrier assembly 25.

In this embodiment, the flow guiding blocks 263 are disposed at intervals, and a plurality of flow guiding channels are implemented to uniformly distribute the pressure in the air outlet to the absolute pressure sensor 202.

In this embodiment, the calibration pressure is provided in the absolute pressure sealing assembly 26 through one air chamber toward the plurality of absolute pressure sensor chips 202 in the absolute pressure sensor master 201.

When the absolute pressure detection station B calibrates the absolute pressure sensor chip 202, firstly, the second lower pressurizing cylinder 28 interacts with the second lower floating assembly 27 to drive the absolute pressure sealing assembly 26 to move toward and attach to the fourth side of the second carrier assembly 25; secondly, the second upper pressurizing cylinder 20 interacts with the second upper floating assembly and the like to drive the absolute pressure probe assembly 24 to move towards the third side of the second carrier plate assembly 25 and attach to the third side, the second positioning column 241 is inserted into the second positioning hole 251, the absolute pressure probe assembly 24 and the second carrier plate assembly 25 are aligned with each other, the second pin 2021 on the absolute pressure sensor mother plate 201 enters the second accommodating cavity 243, the second pre-pressing block 244 presses the absolute pressure sensor chip 202, and the second probe 245 contacts the second pin 2021; then, the external calibration pressure is introduced through the air inlet 264 of the absolute pressure sealing assembly 26, and is led out to the inner groove 262 through the air outlet, and the pressure is uniformly led to the absolute pressure sensor 202 through the flow guiding block 263; finally, in the power-on state, the absolute pressure sensor 202 converts the pressure signal generated by the calibration pressure into an electrical signal and outputs the electrical signal through the second pin 2021, and the electrical signal is determined by the electronic device to obtain a calibration result.

After the test is completed, the second lower pressurizing cylinder 28 interacts with the second lower floating assembly 27 to drive the absolute pressure sealing assembly 26 to move towards the fourth side far away from the second carrier plate assembly 25; the second upper pressurizing cylinder 20 interacts with the second upper floating assembly and the like to drive the absolute pressure probe assembly 24 to move towards a third side far away from the second carrier plate assembly 25; so that the second carrier plate assembly 25 can move along the slide groove 92 under the action of the conveyor belt to enter the next calibration step, such as a low temperature box, for cooling operation.

The utility model discloses in the definition, the process that the absolute pressure seal assembly 26 removed towards or keep away from second support plate subassembly 25 is "reciprocating motion", and equally, the process that absolute pressure probe assembly 24 removed towards or keep away from second support plate subassembly 25 is "reciprocating motion".

To sum up, the utility model provides a pressure sensor calibration equipment, including slide rail, support plate and power device control support plate remove and the switching-over along the slide rail, the support plate bears the pressure sensor who treats the calibration and realizes pressure sensor's multistation continuous calibration through a plurality of detection stations in proper order, has improved calibration precision and production efficiency s.

Of course, the present invention can have other various embodiments, and those skilled in the art can make various corresponding changes and modifications according to the present invention without departing from the spirit and the essence of the present invention, and these corresponding changes and modifications should fall within the protection scope of the appended claims.

Claims

1. A pressure sensor calibration apparatus, characterized in that the pressure sensor calibration apparatus comprises:

the sliding rail comprises a first sliding rail extending along a first direction and a second sliding rail extending along a second direction, wherein the junction position of the first sliding rail and the second sliding rail comprises a blank area;

the plurality of support plates are slidably arranged in the first slide rail and the second slide rail; and

a power device disposed proximate to the blank area;

when the carrier plate slides along the first slide rail and enters the blank area, the power device pushes the carrier plate in the blank area, so that the carrier plate in the blank area slides and enters the second slide rail, and the first direction is different from the second direction.

2. The pressure sensor calibration apparatus of claim 1, wherein the carrier plate in the blank area slides into the second slide rail, such that a plurality of carrier plates located in the second slide rail sequentially move along the second slide rail by a distance of one carrier plate toward a direction away from the blank area.

3. The pressure sensor calibration device of claim 1 wherein the first direction is perpendicular to the second direction.

4. The pressure sensor calibration device of claim 1 wherein the first slide rails are two in number; the number of the second sliding rails is two; wherein, two first slide rails and two second slide rails constitute a return font slide rail.

5. The pressure sensor calibration apparatus of claim 4 wherein four corners of the zigzag track respectively include the blank areas.

6. A pressure sensor calibration device according to claim 5 wherein the number of powered means is four, four powered means corresponding one to the empty spaces at the four corners.

7. The pressure sensor calibration apparatus of claim 4, further comprising: along feed station, normal atmospheric temperature that back font slide rail set gradually detect station, at least one low-temperature box, low temperature detection station, at least one high-temperature box, high temperature detection station, at least one return the warm box, normal atmospheric temperature retest station, beat mark station and unloading station.

8. The pressure sensor calibration apparatus of claim 7, further comprising: the normal-temperature detection station, the low-temperature detection station, the high-temperature detection station and the normal-temperature retest station respectively comprise a first detection station and a second detection station; the first detection station is used for detecting a first pressure sensor; the second detection station is used for detecting a second pressure sensor; the first detection station comprises a first probe assembly, a first carrier assembly and a first sealing assembly; the second detection station comprises a second probe assembly, a second carrier assembly and a second sealing assembly; wherein the first pressure sensor is a differential pressure sensor; the second pressure sensor is an absolute pressure sensor.

9. The pressure sensor calibration apparatus of claim 7, wherein the at least one cold box is three in number, the three cold boxes include a first cold box, a second cold box, and a third cold box, and temperature ranges from the first cold box to the third cold box are sequentially increased; the first low-temperature box is close to the normal-temperature detection station, and the third low-temperature box is close to the low-temperature detection station.

10. The pressure sensor calibration apparatus according to claim 7, wherein the number of the at least one high temperature chamber is three, the three high temperature chambers include a first high temperature chamber, a second high temperature chamber, and a third high temperature chamber, and temperature ranges from the first high temperature chamber to the third high temperature chamber are sequentially decreased; the first high-temperature box is close to the low-temperature detection station, and the third high-temperature box is close to the high-temperature detection station.