CN108801536B - Slice type high-sensitivity pressure sensor - Google Patents
Slice type high-sensitivity pressure sensor Download PDFInfo
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- CN108801536B CN108801536B CN201810549035.9A CN201810549035A CN108801536B CN 108801536 B CN108801536 B CN 108801536B CN 201810549035 A CN201810549035 A CN 201810549035A CN 108801536 B CN108801536 B CN 108801536B
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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Abstract
A slice type high-sensitivity pressure sensor comprises a polymer SiAlCO ceramic slice, wherein the upper surface and the lower surface of the polymer SiAlCO ceramic slice are respectively and tightly connected with a slice type metal electrode, the other side of the slice type metal electrode is connected with a metal pin, the slice type metal electrode, the polymer SiAlCO ceramic slice and the metal pin are completely wrapped by a high molecular polymer packaging shell to realize vacuum closed packaging, and only two metal pins are kept to extend out of the high molecular polymer packaging shell; the sheet type high-sensitivity pressure sensor is adhered to the surface of a test piece, the sheet type high-sensitivity pressure sensor and an external fixed resistor form a series circuit through a metal pin, and direct-current voltage is applied to two ends of the series circuit; the change of the external pressure can be represented by measuring the voltage at two ends of the polymer SiAlCO ceramic sheet; the invention has the characteristics of simple structure, reliable principle, high sensitivity and convenient use.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a sheet type high-sensitivity pressure sensor.
Background
With the development of intelligent manufacturing and aerospace industries, pressure measurement is required in more and more fields of industrial production and automatic control, especially under severe conditions of high temperature, high pressure, strong corrosion and the like, such as surface pressure measurement of rotor blades in rotary discs of aero-engines and gas turbines, underground pressure measurement in petroleum industry, reliability monitoring of part assembly and pre-tightening and the like. Due to the complexity of the application environment, special structural requirements of the application object and the like, a patch type pressure sensor is often required to be used, and the pressure sensor is required to have the performance characteristics of small volume, thin thickness and high sensitivity.
The traditional patch type resistance strain gauge can sense tension and pressure signals parallel to the surface of a patch, but cannot measure the pressure signals vertical to the surface of the patch. Although various types of pressure sensors based on elastic deformation structures can realize measurement of pressure signals, the sensors have large volume due to the elastic deformation structures, cannot be adhered to the surface of a test piece, and can limit the normal motion function of the test piece or influence the flow rule of fluid on the surface of the test piece after being adhered to the surface of the test piece. In order to measure the pressure formed by the fluid flow on the surface of the test piece but not influence the flow law of the fluid on the surface of the test piece, a method of punching and installing a pressure sensor on the surface of the test piece is generally adopted at present, the method can effectively solve the problem of influencing the flow law of the fluid on the surface of the test piece, but the structural integrity of the test piece is damaged, the structural strength is reduced, and the result that the test piece is damaged due to stress concentration is easily caused. Therefore, the sheet type pressure sensor which can be pasted on the surface of the test piece in design and research has great practical value and wide application prospect.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a sheet type high-sensitivity pressure sensor which has the characteristics of simple structure, reliable principle, high sensitivity and convenience in use.
In order to achieve the purpose, the invention adopts the technical scheme that:
a sheet type high-sensitivity pressure sensor comprises a polymer SiAlCO ceramic sheet 4, wherein the upper surface and the lower surface of the polymer SiAlCO ceramic sheet 4 are respectively and tightly connected with a sheet type metal electrode 3, a metal pin 5 is connected to the other side of the sheet type metal electrode 3, the polymer SiAlCO ceramic sheet 4 and the metal pin 5 are completely wrapped by a high molecular polymer packaging shell 2, so that vacuum closed packaging is realized, and only two metal pins 5 are kept to extend out of the high molecular polymer packaging shell 2.
The lower surface of the slice type high-sensitivity pressure sensor is pasted on the surface of a test piece 6 by adopting high-temperature-resistant glue 8, and the upper surface bears pressure P from the outside.
The polymer SiAlCO ceramic plate 4 is a polymer ceramic material obtained by a thermal decomposition method of a polymer precursor, has an outstanding piezoresistive effect, the piezoresistive coefficient of the polymer SiAlCO ceramic material reaches 7000-16000, and the polymer SiAlCO ceramic material is manufactured into a sheet with the thickness of 50 mu m, generates resistance value change under the action of external pressure and is used for pressure measurement.
The preparation process of the polymer SiAlCO ceramic sheet (4) comprises the following steps:
① mixing liquid-phase organic silicon resin with tributyl aluminum in a mass ratio of 1: 5%, and treating for 6 hours at room temperature by adopting an electromagnetic stirring technology;
② placing the uniformly mixed liquid phase mixture in a high temperature oven, and performing thermal crosslinking treatment at 150 deg.C for 18 hr;
③ heat treating the thermally cross-linked material at 350 deg.C in high purity argon gas for 4 hr;
④ the solid formed after complete cross-linking is treated by ball milling and sieving to obtain small granular powder with diameter of 1 micron;
⑤ preparing the powder into a film with a thickness of 50 μm and a diameter of the actual required size by screen printing;
⑥ the obtained film is pressed into sensor wafer under the pressure of 20MPa, and then cold isostatic pressing is carried out under the pressure of 200 MPa;
⑦ the cold isostatic pressed wafer from the previous step was placed in a tube furnace and pyrolysed for 4 hours at 1100 ℃ in a high purity argon atmosphere to obtain a polymeric SiAlCO ceramic sheet 4.
And transferring the polymer SiAlCO ceramic plate 4 onto the sheet metal electrode 3 by a film transfer technology and packaging to obtain the sheet high-sensitivity pressure sensor.
The sheet type high-sensitivity pressure sensor has an initial resistance value of R, and is connected with an external fixed resistor R through a metal pin 50Forming a series circuit, and applying a DC voltage U to both ends of the series circuit0(ii) a When the external pressure P acts on the thin-sheet high-sensitivity pressure sensor, the resistance value of the polymer SiAlCO ceramic sheet 4 is changed, the voltage U at two ends of the polymer SiAlCO ceramic sheet 4 is further changed, the voltage U and the pressure P acting on the thin-sheet high-sensitivity pressure sensor form a linear relation, and the change of the external pressure can be represented by measuring the voltage U.
The sheet-type high-sensitivity pressure sensor 1 is manufactured into a sheet-type pressure sensor array 7 through a micro-manufacturing process, the sheet-type pressure sensor array 7 is pasted on the surface of a test piece 6, and the change condition of a flow field is reflected through the measurement of the sheet-type pressure sensor array 7 on the surface pressure P of the test piece 6.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention can be used for pasting and measuring the pressure distribution information vertical to the surface of the test piece on a large scale on the surface of the test piece, and fills the technical blank in the application field in China. At present, the sheet type resistance strain gauges existing at home and abroad can only measure the stress and strain parallel to the surface of the strain gauge and can not measure the pressure vertical to the surface of the sheet type resistance strain gauge. The normal pressure of the surface of the test piece can be measured only by drilling a test hole on the surface of the test piece and installing a pressure sensor with a larger volume in the test hole, so that the method is very easy to destroy the strength of the test piece and the flow field motion rule of the surface of the test piece, and the error between the measured pressure distribution rule and the actual condition is larger. The sheet-type pressure sensor has the characteristic that the SiAlCO ceramic material has very obvious piezoresistive effect under the action of front pressure, can be manufactured into a large-scale skin-type sensor array, is directly adhered to the surface of a test piece for pressure measurement, is simple and convenient to mount, does not influence the strength of the test piece and the distribution rule of a surface flow field, and has accurate and reliable measurement results.
2. The invention adopts the polymer SiAlCO ceramic material as the sensitive resistor of the sensor, and the piezoresistive coefficient of the sensor is 2 to 3 orders of magnitude higher than that of the traditional semiconductor silicon material, so that the sensitivity of the sensor can be greatly improved. The polymer SiAlCO ceramic material is high temperature resistant, has excellent high temperature thermal mechanical property, can enable the sensor to meet the pressure measurement requirement in a normal temperature environment by reasonably selecting a high temperature resistant packaging material, and has good application prospect in high temperature pressure test environments such as oil well pressure, engine pressure and the like.
3. The invention is suitable for measuring various pressure conditions such as gauge pressure, absolute pressure and the like. The sensor is in a fully-closed structure and a vacuum state, and can be used for gauge pressure measurement when the sensor is positioned in a standard atmospheric pressure environment; when the sensor is stuck on the surface of the test piece to form a whole, the sensor is completely stuck with the test piece without air, and the device can be used for testing the absolute pressure of the environment where the test piece is located, including the negative pressure condition. Compared with the traditional absolute pressure sensor, the absolute pressure sensor has the advantages of small volume, thin thickness and wide application range under the condition that the absolute pressure can be measured only by designing a pressure sensitive film and a vacuum cavity structure.
4. The array film can be manufactured to be stuck on the surface of a test piece in a large scale and carry out surface pressure measurement. The manufacturing process of the SiAlCO ceramic material is compatible with a plurality of micro manufacturing processes, so the invention has large-scale and batch manufacturing capability, can be made into sheet type pressure sensor arrays with various shapes and sizes by the micro manufacturing process and the screen printing technology, meets the requirement of large-area sticking use on the surfaces of test pieces with different structures and shapes, can realize accurate measurement of the surface pressure and the flow field of the test pieces by sticking the film type pressure sensor array in a large area, solves the problem that the traditional pressure sensor is difficult to arrange and apply on the surfaces of the test pieces in a large quantity, and is beneficial to a tester to obtain richer and more accurate flow field information.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
FIG. 2 is a schematic diagram of a measurement circuit of an embodiment of the invention.
Fig. 3 is a schematic diagram of an actual application of the embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Referring to fig. 1 and 3, a sheet-type high-sensitivity pressure sensor comprises a polymer SiAlCO ceramic sheet 4, wherein the upper surface and the lower surface of the polymer SiAlCO ceramic sheet 4 are respectively and tightly connected with a sheet-type metal electrode 3, a metal pin 5 is connected to the other side of the sheet-type metal electrode 3, the polymer SiAlCO ceramic sheet 4 and the metal pin 5 are completely wrapped by a high-molecular polymer packaging shell 2 to realize vacuum closed packaging, and only two metal pins 5 are kept to extend out of the high-molecular polymer packaging shell 2; the lower surface of the slice type high-sensitivity pressure sensor is pasted on the surface of a test piece 6 by adopting high-temperature-resistant glue 8, and the upper surface bears pressure P from the outside.
① liquid-phase organic silicon resin and tributyl aluminum are mixed according to the mass ratio of 1: 5%, the polymer SiAlCO ceramic sheet 4 is processed for 6 hours under the condition of room temperature by adopting an electromagnetic stirring technology to achieve the purpose of full mixing, ② the uniformly mixed liquid-phase mixture is placed in a high-temperature oven, heat crosslinking treatment is carried out for 18 hours at the ambient temperature of 150 ℃, ③ the material after the heat crosslinking is subjected to heat treatment for 4 hours in a high-purity argon environment at 350 ℃, ④ the solid formed after the complete crosslinking is subjected to ball milling and filtering treatment to obtain small granular powder with the diameter of about 1 micron, ⑤ the obtained powder is manufactured into a film with the thickness of 50 mu m and the diameter of an actual required size by a screen printing technology, the film obtained by ⑥ is pressed into a sensor wafer under the pressure action of 20MPa, then cold isostatic pressing forming is carried out under the pressure of 200MPa, ⑦ the wafer formed by one step in a cold isostatic pressing furnace, the film obtained by carrying out thermal decomposition in a thermal decomposition process in a high-pressure-pressing technology, the high-pressure-resistance-based on a SiAlCO material, the film obtained by using a high-piezoresistive pressure sensor, and a piezoresistive high-pressure sensor is obtained by using a high-piezoresistive high-pressure-resistance-pressure-based on-pressure sensor, wherein the high-resistance-based high-pressure-resistance-based high-pressure-based high-pressure-resistance-pressure-based high-resistance-pressure-resistance-based high-pressure-resistance-based sensor is suitable for the SiAlCO sensor, and-based high-resistance-based high-.
The high molecular polymer packaging shell 2 has the characteristics of high temperature resistance, acid corrosion resistance and alkali corrosion resistance, such as epoxy resin, polytetrafluoroethylene and the like;
referring to fig. 2, the sheet type high-sensitivity pressure sensor has an initial resistance value R, and the sheet type high-sensitivity pressure sensor is connected to an external fixed resistor R through a metal pin 50Forming a series circuit, and applying a DC voltage U to both ends of the series circuit0(ii) a When the external pressure P acts on the thin-sheet high-sensitivity pressure sensor, the resistance value of the polymer SiAlCO ceramic sheet 4 is changed, the voltage U at two ends of the polymer SiAlCO ceramic sheet 4 is further changed, the voltage U and the pressure P acting on the thin-sheet high-sensitivity pressure sensor form a linear relation, and the change of the external pressure can be represented by measuring the voltage U.
Referring to fig. 3, the sheet-type high-sensitivity pressure sensor 1 can be adhered to the surface of a test piece 6 alone to measure the pressure P in a local area, or can be manufactured into a sheet-type pressure sensor array 7 through a microfabrication process, the sheet-type pressure sensor array 7 is adhered to the surface of the test piece 6, and the change of a flow field is reflected by the measurement of the pressure P on the surface of the test piece 6 by the sheet-type pressure sensor array 7.
Claims (4)
1. A thin-sheet type high-sensitivity pressure sensor for measuring the pressure on the surface of a test piece so as to reflect the flow field change on the surface of the test piece, which is characterized in that: the packaging structure comprises a polymer SiAlCO ceramic chip (4), wherein the upper surface and the lower surface of the polymer SiAlCO ceramic chip (4) are respectively and tightly connected with a sheet-type metal electrode (3), the other side of the sheet-type metal electrode (3) is connected with a metal pin (5), the sheet-type metal electrode (3), the polymer SiAlCO ceramic chip (4) and the metal pin (5) are completely wrapped by a high molecular polymer packaging shell (2) to realize vacuum closed packaging, and only two metal pins (5) are kept to extend out of the high molecular polymer packaging shell (2);
the polymer SiAlCO ceramic sheet (4) is a polymer ceramic material obtained by a thermal decomposition method of a polymer precursor, has an outstanding piezoresistive effect, the piezoresistive coefficient of the polymer SiAlCO ceramic material is 7000-16000, the polymer SiAlCO ceramic material is made into a sheet with the thickness of 50 mu m, and the resistance value is changed under the action of external pressure for pressure measurement;
the sheet-type high-sensitivity pressure sensor (1) is manufactured into a sheet-type pressure sensor array (7) through a micro-manufacturing process, the sheet-type pressure sensor array (7) is pasted on the surface of a test piece (6), and the change condition of a flow field is reflected through the measurement of the sheet-type pressure sensor array (7) on the surface pressure P of the test piece (6);
the initial resistance value of the sheet type high-sensitivity pressure sensor is R, and the sheet type high-sensitivity pressure sensor is connected with an external fixed resistor R through a metal pin (5)0Forming a series circuit, and applying a DC voltage U to both ends of the series circuit0(ii) a When external pressure P acts on the sheet type high-sensitivity pressure sensor, the resistance value of the polymer SiAlCO ceramic sheet (4) changes, voltage U at two ends of the polymer SiAlCO ceramic sheet (4) further changes, the voltage U and the pressure P acting on the sheet type high-sensitivity pressure sensor form a linear relation, and the change of the external pressure can be represented by measuring the voltage U.
2. The sheet-type high-sensitivity pressure sensor according to claim 1, wherein: the lower surface of the slice type high-sensitivity pressure sensor is pasted on the surface of a test piece (6) by adopting high-temperature-resistant glue (8), and the upper surface bears external pressure P.
3. The thin-sheet high-sensitivity pressure sensor according to claim 1, wherein the polymer SiAlCO ceramic sheet (4) is prepared by the following steps:
① mixing liquid-phase organic silicon resin with tributyl aluminum in a mass ratio of 1: 5%, and treating for 6 hours at room temperature by adopting an electromagnetic stirring technology;
② placing the uniformly mixed liquid phase mixture in a high temperature oven, and performing thermal crosslinking treatment at 150 deg.C for 18 hr;
③ heat treating the thermally cross-linked material at 350 deg.C in high purity argon gas for 4 hr;
④ the solid formed after complete cross-linking is treated by ball milling and sieving to obtain small granular powder with diameter of 1 micron;
⑤ preparing the powder into a film with a thickness of 50 μm and a diameter of the actual required size by screen printing;
⑥ the obtained film is pressed into sensor wafer under the pressure of 20MPa, and then cold isostatic pressing is carried out under the pressure of 200 MPa;
⑦ the cold isostatic pressed wafer from the previous step was placed in a tube furnace and pyrolysed for 4 hours at 1100 ℃ in a high purity argon atmosphere to obtain a polymeric SiAlCO ceramic sheet (4).
4. A sheet-type high-sensitivity pressure sensor according to claim 3, characterized in that the polymer SiAlCO ceramic sheet (4) is transferred to the sheet-type metal electrode (3) by a thin film transfer technique and packaged to obtain the sheet-type high-sensitivity pressure sensor.
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| CN109678519B (en) * | 2018-12-13 | 2021-09-07 | 西南交通大学 | High-temperature pressure sensor based on polymer precursor ceramic |
| CN111906592B (en) * | 2020-07-02 | 2021-11-19 | 西安交通大学 | Cutting force and cutting temperature measuring device and preparation and temperature compensation method thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102924020A (en) * | 2012-10-26 | 2013-02-13 | 青岛理工大学 | Piezoresistance/piezoelectric composite material, manufacturing method of material, sensor utilizing material and manufacturing method of sensor |
| CN104535253A (en) * | 2015-01-19 | 2015-04-22 | 北京大学 | High temperature pressure sensor and process method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102924020A (en) * | 2012-10-26 | 2013-02-13 | 青岛理工大学 | Piezoresistance/piezoelectric composite material, manufacturing method of material, sensor utilizing material and manufacturing method of sensor |
| CN104535253A (en) * | 2015-01-19 | 2015-04-22 | 北京大学 | High temperature pressure sensor and process method thereof |
Non-Patent Citations (1)
| Title |
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| Giant piezoresistivity in polymer-derived amorphous SiAlCO ceramics;Yejie Cao etc.;《J Mater Sci》;20161231;第5646-5650页 * |
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Effective date of registration: 20220208 Address after: No. 158, Xiangyuan Road, high tech Industrial Development Zone, Yangzhou, Jiangsu 225000 Patentee after: JIANGSU OLIVE SENSORS HIGH-TECH Co.,Ltd. Address before: Beilin District Xianning West Road 710049, Shaanxi city of Xi'an province No. 28 Patentee before: XI'AN JIAOTONG University |
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