CN108789064A - Hand-held grinding Sample chuck - Google Patents
Hand-held grinding Sample chuck Download PDFInfo
- Publication number
- CN108789064A CN108789064A CN201810659965.XA CN201810659965A CN108789064A CN 108789064 A CN108789064 A CN 108789064A CN 201810659965 A CN201810659965 A CN 201810659965A CN 108789064 A CN108789064 A CN 108789064A
- Authority
- CN
- China
- Prior art keywords
- inner part
- sample
- sample stage
- side wall
- hand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B23/00—Portable grinding machines, e.g. hand-guided; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B23/00—Portable grinding machines, e.g. hand-guided; Accessories therefor
- B24B23/005—Auxiliary devices used in connection with portable grinding machines, e.g. holders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
A kind of hand-held grinding Sample chuck, including：The same sample platform is oblate cylindricality, is opened below there are three circular hole；One inner part is elongated cylindrical, has a diameter larger than the diameter of sample stage, and three threaded holes are opened in position corresponding with three circular holes on sample stage, and half eminence of inner part side wall opens that there are two threaded holes；One exterior part, for long cylindrical sleeve, its height is less than the sum of inner part and sample stage height, its underpart edge is provided with the gap of equidistant periodic arrangement rectangle, the gap depth is less than the height of sample stage, and half eminence of cylindrical side wall is provided with long stripes through hole with two threaded hole corresponding positions of inner part side wall；Wherein the sample stage is positioned by three following circular holes and three threaded holes on inner part with screw, which is located in exterior part, is positioned with screw with two threaded holes on inner part side wall by two long stripes through holes on exterior part side wall.It can be ground simultaneously to multiple small samples in sample stage effective area, and lapping uniformity is good.
Description
Technical field
The present invention relates to semiconductor light electro-technical field, be prepare by hand small size electron microscopic sample, electroluminescent sample and
The fixture that small size shines and when detection chip sample uses, particularly relates to a kind of hand-held grinding Sample chuck.
Background technology
Semiconductor photoelectric device needs to carry out substrate thinning polishing in preparation process, scribing cleavage fissure and can be carried with realizing
High heat-sinking capability, while when carrying out failure analysis using Electronic Speculum and electroluminescent, it is also desirable to it is prepared using attenuated polishing technique
Sample.For 2 inches or more large-sized samples, attenuated polishing technique has dedicated large-scale grinding instrument and equipment progress technique to add
Work, but for less than 2 inches and irregular shape samples, large size grinding instrument and equipment occurs as soon as many unfavorable feelings
Condition, especially to Electronic Speculum and electroluminescent used sample, then no process equipment can be ground sample preparation.Traditional way is to adopt
With chemical attack reduction or pure hand lapping sample preparation, drawback is that some materials do not have chemical attack characteristic and cannot adopt
With chemical method, the method for pure hand lapping it is difficult to ensure that uniformity and repeatability, to greatly affect device performance and point
Analyse conclusion.
In the implementation of the present invention, inventors realized that defect of the existing technology, passes through a large amount of technique pair
Than experiment, a kind of hand-held grinding Sample chuck is invented, which is to be based on similar right angled triangle corresponding sides
It is long etc. to realize uniformity controlling than principle.
Invention content
The object of the present invention is to provide a kind of hand-held grinding Sample chuck, being can in sample stage effective area
To be ground simultaneously to multiple small samples, lapping uniformity is good.
The present invention provides a kind of hand-held grinding Sample chuck, including：
The same sample platform is oblate cylindricality, wherein smooth above and below, opens that there are three circular holes below；
One inner part is elongated cylindrical, has a diameter larger than the diameter of sample stage, wherein it is smooth below, with sample stage
On the corresponding position of three circular holes open three threaded holes, half eminence of inner part side wall opens that there are two threaded holes；
One exterior part is long cylindrical sleeve, and internal diameter is more than the diameter of inner part, and height is less than inner part and sample
The sum of platform height, its underpart edge are provided with the gap of equidistant periodic arrangement rectangle, which is less than the height of sample stage,
Half eminence of cylindrical side wall is provided with long stripes through hole with two threaded hole corresponding positions of inner part side wall；
Wherein the sample stage is positioned by three following circular holes and three threaded holes on inner part with screw, inside this
Part is located in exterior part, passes through two long stripes through holes on exterior part side wall and two threaded hole spiral shells on inner part side wall
Nail positioning.
The invention has the advantages that the structure design of the hand-held grinding Sample chuck is simple, and handling ease, user
Just, lapping uniformity is good, efficient, which can be ground various samples material, there is the design of protection sample edge,
The generation of sample turned-down edge, angle phenomenon of collapsing can be reduced.
Description of the drawings
To make the objectives, technical solutions, and advantages of the present invention clearer, with reference to embodiments, and with reference to attached
Figure, to the detailed description of the invention as after, wherein：
Fig. 1 is the assembly structure diagram of the present invention；
Fig. 2 is the decomposition texture schematic diagram of the present invention；
Fig. 3 is the inner part schematic diagram of the present invention.
Specific implementation mode
Refering to fig. 1 to shown in Fig. 3, the present invention provides a kind of hand-held grinding Sample chuck, including：
The same sample platform 10 is oblate cylindricality, wherein smooth above and below, opens that there are three circular holes 11 below, described
The height of sample stage 10 is 5-10mm, a diameter of 1-6cm of the sample stage 10；
One inner part 20 is elongated cylindrical, has a diameter larger than the diameter of sample stage 10, wherein it is smooth below, with sample
Three threaded holes 21 are opened in three circular holes, 11 corresponding position in sample platform 10, and 20 height 5-8cm side walls of inner part, half eminence is provided with
Two threaded holes 22；
One exterior part 30 is long cylindrical sleeve, and internal diameter is more than the diameter of inner part 20, and height is less than inner part 20
The sum of with the height of sample stage 10, its underpart edge is provided with the gap 31 of equidistant periodic arrangement rectangle, and 31 depth of gap is less than sample
The thickness of sample platform 10, half eminence of cylindrical side wall are provided with long stripes through hole with 20 side wall of inner part, two 21 corresponding positions of threaded hole
32, the wall thickness of the exterior part 30 is 2-5mm, and the length of the long stripes through hole 32 on 30 side wall of exterior part is 1-
2cm, to facilitate displacement of the adjustment inner part 20 inside exterior part 30；
Wherein the sample stage 10 is fixed with screw by three threaded holes 21 on three following circular holes 11 and inner part 20
Position, which is located in exterior part 30, passes through two long stripes through holes 32 on 30 side wall of exterior part and 20 side of inner part
Two threaded holes 21 on wall are positioned with screw.
Wherein the material of the sample stage 10, inner part 20 and exterior part 30 is stainless steel, brass, ceramics or tempering glass
Glass.
The operation principle of the present invention is that：Refering to fig. 1
Core of the invention principle is that similar triangles correspond to length of side etc. than principle realization uniformity controlling, i.e. inner part 20
Diameter and 30 difference in internal diameters of exterior part determine the uniformity of ground sample with exterior part difference in height ratio.
Inner part 20 is packed into inside exterior part 30 as shown in Figure 1, passes through two strips opened on 30 side wall of exterior part
Two screws are fixed on two threaded holes 22 on 20 side wall of inner part, play inner part 20 and exterior part by through-hole 32
Rotation interlink function between 30, while allowing 20 opposite outer part 30 of inner part can be with upper and lower displacement.
The gap 31 for the equidistant periodic arrangement rectangle opened on 30 bottom surface of exterior part play water conservancy diversion abrasive material and polishing fluid and
Protect the effect of ground sample.
Polishing sample to be ground is pasted onto sample stage lower surface, and 20 bottom surface of inner part fixes three screws, is inserted into sample
Platform 10 upper bottom surface, three circular holes, play and rotate interlink function between sample stage 10 and inner part 20.
Pre-grinding：
It needs to be ground bottom surface on 20 bottom surface of inner part and sample stage after first assembling, to realize under inner part 20
Stickiness between bottom surface and 10 upper bottom surface of sample stage and sample and sample stage.Concrete operation method is that index finger presses inner part
20 upper bottom surfaces, thumb and other 30 side walls of fingerhold exterior part, bottom surface is placed on abrasive disk, on abrasive disk plus is ground
Material is to push track to draw 8 words, is ground to 20 bottom surface of inner part, intermittently picks up observation, wait for that entire bottom surface is all ground
After being ground to, rinse well.Three screws are fixed in three threaded holes on 20 bottom surface of inner part.
10 upper bottom surface of sample stage is placed on abrasive disk, adds abrasive material, Handheld clamp that 20 bottom surface of inner part is pressed in sample
On 21 on sample platform bottom surface, same index finger applies pressure and draws 8 words, grinds to 10 upper bottom surface of sample stage, rinses well after the completion.
Three screws are fixed in three threaded holes on 20 bottom surface of inner part, 10 bottom surface of sample stage, which is placed on, to be ground
On mill, add abrasive material, three circular holes on three 10 upper bottom surfaces of screw counter sample platform on Handheld clamp inner part bottom surface
It is inserted into, same index finger applies pressure and draws 8 words, is ground to 10 lower surface of sample stage and completes red rinse well.
Pre-grinding process when above-mentioned first assembling after use after a period of time, is needing to repeat at periodic or other desired, to ensure fixture
Lapping uniformity.
Formal grinding：It will be pasted onto with sample to be ground paraffin or glue on 10 bottom surface of sample stage, and need to ensure viscous
Sample stage 10, after cleaning up residual paraffin or glue, is stained with the bottom of sample by the thickness evenness of patch paraffin used or glue
Face is placed on abrasive disk, and Handheld clamp is corresponding by three screws insertion 10 upper bottom surface of sample stage on 20 bottom surface of inner part
In three circular holes 12, on abrasive disk plus abrasive material, index finger apply pressure and draw 8 words to push track to be ground sample, periodically
Sample stage is removed, is slitted using the instrument of spiral device for carrying-bit or other detection thickness and detects thickness difference, until reaching technique initialization thickness
Until it is required that.
In conclusion the present invention, which is one kind, being related to semiconductor light electro-technical field, small size Electronic Speculum is especially prepared by hand
The fixture that sample, electroluminescent sample and small size shine and when detection chip sample uses, the fixture have it is simple in structure,
Handling ease, advantage easy to use, the fixture and its application method can improve the uniformity of grinding and polishing, by adjusting grinding
The whole grinding rate of pressure adjustable is ground, simple and flexible is convenient.
Above the told specific embodiment has carried out further the purpose of the present invention, technical solution and advantageous effect
Be described in detail, it should be understood that the foregoing is merely the present invention specific implementation example, be not intended to restrict the invention, it is all
Within spirit and principles of the present invention, any modification, equivalent substitution, improvement and etc. done, be all contained in the present invention includes model
Within enclosing.
Claims (7)
1. a kind of hand-held grinding Sample chuck, including：
The same sample platform is oblate cylindricality, wherein smooth above and below, opens that there are three circular holes below；
One inner part is elongated cylindrical, has a diameter larger than the diameter of sample stage, wherein it is smooth below, and on sample stage
Three threaded holes are opened in the corresponding position of three circular holes, and half eminence of inner part side wall opens that there are two threaded holes；
One exterior part is long cylindrical sleeve, and internal diameter is more than the diameter of inner part, and height is high less than inner part and sample stage
The sum of degree, its underpart edge is provided with the gap of equidistant periodic arrangement rectangle, which is less than the height of sample stage, cylinder
Half eminence of shape side wall is provided with long stripes through hole with two threaded hole corresponding positions of inner part side wall；
Wherein the sample stage is positioned by three following circular holes and three threaded holes on inner part with screw, the inner part position
In in exterior part, determined with the screw of two threaded holes on inner part side wall by two long stripes through holes on exterior part side wall
Position.
2. hand-held grinding Sample chuck according to claim 1, wherein the height of the sample stage is 5-10mm.
3. hand-held grinding Sample chuck according to claim 2, wherein a diameter of 1-6cm of the sample stage.
4. hand-held grinding Sample chuck according to claim 1, wherein the inner part height is 5-8cm.
5. hand-held grinding Sample chuck according to claim 1, wherein the wall thickness of the exterior part is 2-5mm.
6. hand-held grinding Sample chuck according to claim 5, wherein the strip on the exterior part side wall is logical
The length in hole is 1-2cm, to limit displacement of the inner part in outer components interior.
7. hand-held grinding Sample chuck according to claim 1, wherein the sample stage, inner part and exterior part
Material is stainless steel, brass, ceramics or tempered glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810659965.XA CN108789064A (en) | 2018-06-25 | 2018-06-25 | Hand-held grinding Sample chuck |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810659965.XA CN108789064A (en) | 2018-06-25 | 2018-06-25 | Hand-held grinding Sample chuck |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108789064A true CN108789064A (en) | 2018-11-13 |
Family
ID=64070732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810659965.XA Pending CN108789064A (en) | 2018-06-25 | 2018-06-25 | Hand-held grinding Sample chuck |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108789064A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2409506A1 (en) * | 1977-11-16 | 1979-06-15 | Lam Plan Sa | Holder for metal samples to be polished - has tapered holes in circular platform receiving samples held in frusto-conical covers |
| JPH068132A (en) * | 1991-05-31 | 1994-01-18 | Mitsumi Electric Co Ltd | Polishing method |
| CN101526449A (en) * | 2009-04-03 | 2009-09-09 | 大连交通大学 | Handheld grinding pan and use method thereof |
| CN204546276U (en) * | 2015-04-03 | 2015-08-12 | 福州大学 | Be applicable to the sample preparation auxiliary clamp of irregularly shaped sheet sample |
| CN105081962A (en) * | 2015-07-10 | 2015-11-25 | 河海大学 | Device used for grinding and polishing small sample hard sheets |
-
2018
- 2018-06-25 CN CN201810659965.XA patent/CN108789064A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2409506A1 (en) * | 1977-11-16 | 1979-06-15 | Lam Plan Sa | Holder for metal samples to be polished - has tapered holes in circular platform receiving samples held in frusto-conical covers |
| JPH068132A (en) * | 1991-05-31 | 1994-01-18 | Mitsumi Electric Co Ltd | Polishing method |
| CN101526449A (en) * | 2009-04-03 | 2009-09-09 | 大连交通大学 | Handheld grinding pan and use method thereof |
| CN204546276U (en) * | 2015-04-03 | 2015-08-12 | 福州大学 | Be applicable to the sample preparation auxiliary clamp of irregularly shaped sheet sample |
| CN105081962A (en) * | 2015-07-10 | 2015-11-25 | 河海大学 | Device used for grinding and polishing small sample hard sheets |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181113 |