CN108555773A - A kind of ultra-thin part grinding and polishing fixture - Google Patents
A kind of ultra-thin part grinding and polishing fixture Download PDFInfo
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- CN108555773A CN108555773A CN201810100555.1A CN201810100555A CN108555773A CN 108555773 A CN108555773 A CN 108555773A CN 201810100555 A CN201810100555 A CN 201810100555A CN 108555773 A CN108555773 A CN 108555773A
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- grinding
- polishing
- fixture
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- workpiece
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The present invention provides a kind of ultra-thin part grinding and polishing fixture：It is provided with multiple holes on the working face of the grinding and polishing fixture and ultra-thin part is clamped by negative-pressure adsorption principle；It is regular that multiple holes are provided on the working face of the grinding and polishing fixture.The ultra-thin part grinding and polishing fixture of the present invention is applied widely to the thickness and size of workpiece, to the material of workpiece without particular/special requirement；Fixture uses air pressure as power in load and unloading piece, and shock loading is small, and workpiece is non-breakable, and workpiece is readily cleaned after processing；Workpiece is adsorbed using the regular hole of multiple dispersions, optimizes the arrangement mode and size for determining that regular hole is optimal, stress distribution is uniform in clamping process, avoids workpiece stress caused by stress concentration and deforms；Fixture clamping in actual processing is reliable, and workpiece is broken caused by film flying in reduction processing, improves the yields of processing；Clamp structure is simple, easy to operate, has good popularizing application prospect.
Description
Technical field
The present invention relates to a kind of Precision Machining fixture, especially a kind of grinding and polishing part clamp, specifically one
The ultra-thin part grinding and polishing fixture of kind.
Background technology
For example ultra-thin quartz wafer of thin part, ultra thin silicon wafers, ultra-thin stainless steel substrate, ultra thin glass substrates, ultra-thin germanium single crystal
Piece etc. is widely used in the fields such as integrated circuit, solar cell, Flexible Displays, has the very big market demand.Grinding
Main processing technology one of of the polishing technology as ultra-thin part, has high in machining efficiency, and process controllability is good, surface and sub- table
The advantages such as surface damage is low.Needed during the grinding and polishing of ultra-thin part to workpiece carry out reliable retention, existing ultra-thin zero
Part method of clamping mainly has paraffin bonding, the absorption of the surface tension of water, electrostatic chuck absorption or the absorption of hole ceramic-type vacuum cup
The methods of.But since workpiece is relatively thin, above-mentioned method of clamping is susceptible to that workpiece is heated or stress deformation in actual processing, processing
Unloading piece is difficult afterwards, has remaining paraffin to be difficult to clean on workpiece, the problems such as unreliable is clamped.
Chinese patent CN201510450081.X discloses a kind of universal optical element polishing vacuum fixture, the invention
Vacuum clip specifically include a hollow structure formed by support arm, support arm upper end is contacted with polished optical element,
Contact position is sealed by seal protection layer, and the hollow structure is connected to outside by aspirating hole.Chinese patent
CN201620215121.2 discloses a kind of novel evacuated sucker, the vacuum cup by ring on sucker bottom plate, sucker, sealing ring,
The part such as porous ceramic plate forms, and wherein porous ceramic plate is contacted with workpiece, plays the role of absorption clamping.
Invention content
Present invention aims at for workpiece after frangible, yielding, processing present in current ultra-thin part grinding and polishing
The problems such as cleaning is difficult, provides a kind of ultra-thin part grinding and polishing fixture, has to ultra-thin part by negative-pressure adsorption principle
Effect clamping, the clamp structure is simple, and reliability is high, is not easy film flying during grinding and polishing, workpiece adds without stress, temperature distortion
Unloading piece is convenient after work, is readily cleaned.
The technical solution adopted by the present invention is：A kind of ultra-thin part grinding and polishing fixture, in the grinding and polishing fixture
It is provided with multiple holes on working face, ultra-thin part is clamped by negative-pressure adsorption principle.
Further, a kind of ultra-thin part grinding and polishing fixture is provided on the working face of the grinding and polishing fixture more
A hole is regular.
Further, a kind of ultra-thin part grinding and polishing fixture is provided on the working face of the grinding and polishing fixture more
It arranges for array in a hole.
Further, a kind of ultra-thin part grinding and polishing fixture, the array in the hole are arranged size according to workpiece, material
Matter, shape are arranged, including fan-shaped distribution, the distribution of the circular arcs such as concentric circles, rectangular distribution, pentagon distribution, hexagon distribution.
Further, a kind of ultra-thin part grinding and polishing fixture, number and the size in the hole meet formula π f1nd2P=μ
f2F and formula d=(0.02~0.06) × D；The distance between adjacent holes meets formula L=(1~2) × d；Wherein：π is circle
Frequency, f1Friction coefficient between fixture and workpiece, n are the total quantity in regular hole, and d is the diameter dimension in regular hole, and P is folder
The negative pressure pressure of tool, μ are safety coefficient, f2For the friction system during grinding and polishing between grinding pad or polishing pad and workpiece
Number, F be grinding and polishing during operating pressure, D be fixture working region full-size, L between adjacent holes away from
From.
Further, a kind of ultra-thin part grinding and polishing fixture, the grinding and polishing fixture can drive workpiece throwing together
According to the reciprocating swing of certain functional relation on ray machine, functional relation includes SIN function formula, cosine function formula, linear function
Formula, quadratic function formula.
Further, a kind of ultra-thin part grinding and polishing fixture, the material of the fixture include：It is ceramics, aluminium alloy, stainless
Steel, polytetrafluoro.
The present invention compares existing ultra-thin part grinding and polishing method of clamping and has the advantage that：
1. the ultra-thin part grinding and polishing fixture of the present invention is applied widely to the thickness and size of workpiece, to the material of workpiece
Material is without particular/special requirement；2. the fixture of the present invention uses air pressure as power in load and unloading piece, shock loading is small, and workpiece is not easy
It is broken, and new pollution will not be introduced in clamping process, workpiece is readily cleaned after processing；3. the fixture of the present invention utilizes multiple points
Workpiece is adsorbed in scattered regular hole, optimizes determining regular hole optimal arrangement mode and size, stress in clamping process
It is evenly distributed, avoids workpiece stress caused by stress concentration and deform；4. the fixture of present invention clamping in actual processing is reliable,
It can effectively reduce in processing that workpiece is broken caused by film flying, improve the yields of processing；5. the clamp structure of the present invention is simple,
It is easy to operate, there is good popularizing application prospect.
Description of the drawings
Fig. 1 is regular hole arrangement mode schematic diagram on a kind of ultra-thin part grinding and polishing fixture working face of the present invention；Wherein：
A is fan-shaped distribution, and b is the distribution of the circular arcs such as concentric circles, the rectangular distributions of c, the distribution of d pentagons, the distribution of e hexagons.
Specific implementation mode
Technical solution to further understand the present invention is described in detail below in conjunction with the accompanying drawings.
A kind of ultra-thin part grinding and polishing fixture, on the working face of the grinding and polishing fixture being provided with multiple holes passes through
Ultra-thin part is clamped in negative-pressure adsorption principle.Using negative-pressure adsorption principle, i.e., with negative pressure come " absorption " workpiece to reach clamping workpiece
Purpose.When ultra-thin part and working face contact, the sky on the working face of grinding and polishing fixture is sealing, the sky inside hole
Atmospheric pressure is P2, outside atmospheric pressure P1, as P2 ＜ P1, as negative pressure；When P2 is 0, as vacuum is adsorbed as true at this time
Suction is attached, and workpiece is firmly inhaled on the working face of grinding and polishing fixture at this time.
In the present embodiment, a kind of ultra-thin part grinding and polishing fixture is more when being provided on the working face of grinding and polishing fixture
When a hole is rule, grinding and polishing fixture is evenly distributed to the nip stress of ultra-thin part, and avoiding stress concentration causes
Workpiece stress deformation.It is preferred that multiple holes are the rule of array arrangement.
According to the characteristic, including material, size, shape etc. of different ultra-thin parts, the arrangement mode in regular hole is also different, packet
Include fan-shaped distribution, the distribution of the circular arcs such as concentric circles, rectangular distribution, pentagon distribution, hexagon distribution.Specifically, the number in hole
It should meet formula π f with size1nd2P=μ f2F and formula d=(0.02~0.06) × D；The distance between adjacent holes meets public
Formula L=(1~2) × d；Wherein：π is pi, f1Friction coefficient between fixture and workpiece, n are the total quantity in regular hole,
D is the diameter dimension in regular hole, and P is the negative pressure pressure of fixture, and μ is safety coefficient, f2For grinding pad during grinding and polishing or
Friction coefficient between polishing pad and workpiece, F are the operating pressure during grinding and polishing, and D is the maximum of fixture working region
Size, L are the distance between adjacent holes.
A kind of ultra-thin part grinding and polishing fixture, the material of fixture can be in the present invention：Ceramics, stainless steel, gather aluminium alloy
Tetrafluoro.
A kind of ultra-thin part grinding and polishing fixture, during grinding and polishing, the grinding and polishing fixture can drive workpiece one
It rises on polishing machine according to the reciprocating swing of certain functional relation, functional relation includes SIN function formula, cosine function formula, once
Functional expression, quadratic function formula.
It is different reciprocal in four different holes arrangement modes, different fixture materials, different ultra-thin parts, process below
The embodiment that formula is swung.
Embodiment 1：A kind of ultra-thin part grinding and polishing fixture, clamp material are ceramics, the regular hole on fixture working face
It is distributed in sector, the quartz glass workpiece of clamping thickness 0.6mm, the progress grinding and polishing experiment on glass polishing machine, in grinding and polishing
Clamp strap starts building part together on polisher lapper according to the reciprocating swing of SIN function relationship.Thickness of workpiece is less than after processing
0.2mm, and planeness of workpiece is good, stressless deformation and thermal deformation.
Embodiment 2：A kind of ultra-thin part grinding and polishing fixture, clamp material are aluminium alloy, the rule on fixture working face
The rectangular distribution in hole, the YAG crystal workpiece of clamping thickness 0.4mm carry out grinding and polishing experiment, in grinding and polishing on glass polishing machine
Clamp strap starts building part together on polisher lapper according to the reciprocating swing of linear function relationship.Thickness of workpiece is less than after processing
0.1mm, and planeness of workpiece is good, fixture load and unloading piece process are easy to operate, easy to use.
Embodiment 3：A kind of ultra-thin part grinding and polishing fixture, clamp material are polytetrafluoro, the rule on fixture working face
Hole carries out grinding and polishing experiment, grinding in the distribution of the circular arcs such as concentric circles, the silicon slice workpiece of clamping thickness 0.5mm on glass polishing machine
Clamp strap starts building part together on polisher lapper according to the reciprocating swing of quadratic function relation in polishing.Thickness of workpiece after processing
Less than 0.15mm, and planeness of workpiece is good, and workpiece is not easy film flying in processing, and processing yields is high.
Embodiment 4：A kind of ultra-thin part grinding and polishing fixture, clamp material are stainless steel, the rule on fixture working face
Hole is distributed in pentagon, the k9 glass pieces of clamping thickness 0.6mm, and grinding and polishing experiment, grinding and polishing are carried out on glass polishing machine
Middle clamp strap starts building part together on polisher lapper according to the reciprocating swing of cosine function relationship.Thickness of workpiece is less than after processing
0.2mm, and planeness of workpiece is good, it is easy to clean.
Claims (7)
1. a kind of ultra-thin part grinding and polishing fixture, it is characterised in that：It is provided on the working face of the grinding and polishing fixture
Ultra-thin part is clamped by negative-pressure adsorption principle in multiple holes.
2. a kind of ultra-thin part grinding and polishing fixture according to claim 1, it is characterised in that：The grinding and polishing fixture
Working face on be provided with multiple holes be it is regular.
3. a kind of ultra-thin part grinding and polishing fixture according to claim 2, it is characterised in that：The grinding and polishing fixture
Working face on be provided with multiple holes for array arrange.
4. a kind of ultra-thin part grinding and polishing fixture according to claim 3, it is characterised in that：The array in the hole is arranged
Cloth is arranged according to the material of ultrathin workpieces, size, shape, including fan-shaped distribution, the distribution of the circular arcs such as concentric circles, rectangular distribution,
Pentagon is distributed, hexagon distribution.
5. a kind of ultra-thin part grinding and polishing fixture according to claim 4, it is characterised in that：The number and ruler in the hole
It is very little to meet formula π f1nd2P=μ f2F and formula d=(0.02~0.06) × D；The distance between adjacent holes meets formula L=
(1~2) × d；Wherein：π is pi, f1Friction coefficient between fixture and workpiece, n are the total quantity in regular hole, and d is rule
The then diameter dimension in hole, P are the negative pressure pressure of fixture, and μ is safety coefficient, f2For grinding pad during grinding and polishing or polishing pad
Friction coefficient between workpiece, F are the operating pressure during grinding and polishing, and D is the full-size of fixture working region, L
For the distance between adjacent holes.
6. according to a kind of any ultra-thin part grinding and polishing fixtures of claim 1-5, it is characterised in that：The fixture
Material includes：Ceramics, aluminium alloy, stainless steel, polytetrafluoro.
7. a kind of ultra-thin part grinding and polishing fixture according to claim 1, it is characterised in that：The grinding and polishing fixture
It can drive workpiece together on polishing machine according to the reciprocating swing of certain functional relation, functional relation includes SIN function formula, remaining
String functional expression, linear function formula, quadratic function formula.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810100555.1A CN108555773B (en) | 2018-02-01 | 2018-02-01 | Ultra-thin part grinding and polishing clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810100555.1A CN108555773B (en) | 2018-02-01 | 2018-02-01 | Ultra-thin part grinding and polishing clamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108555773A true CN108555773A (en) | 2018-09-21 |
| CN108555773B CN108555773B (en) | 2019-12-10 |
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ID=63530110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810100555.1A Active CN108555773B (en) | 2018-02-01 | 2018-02-01 | Ultra-thin part grinding and polishing clamp |
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| Country | Link |
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| CN (1) | CN108555773B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109304664A (en) * | 2018-09-29 | 2019-02-05 | 大连理工大学 | A kind of substrate uniform polish device and its working method |
| CN110539212A (en) * | 2019-09-28 | 2019-12-06 | 长沙埃福思科技有限公司 | multi-workpiece ion beam polishing system and method |
| CN114302563A (en) * | 2021-12-28 | 2022-04-08 | 龙南骏亚柔性智能科技有限公司 | Production method applied to grinding of ultrathin circuit board |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103465424A (en) * | 2013-08-20 | 2013-12-25 | 李建勇 | Forming process and special processing device for ultrathin protective cover sleeve |
| CN103769922A (en) * | 2012-10-24 | 2014-05-07 | 西安志越机电科技有限公司 | Clamp special for thin plate part milling |
| CN106217087A (en) * | 2016-06-30 | 2016-12-14 | 山东鲁南机床有限公司 | A kind of lossless clamping device for thick gum base sheet |
-
2018
- 2018-02-01 CN CN201810100555.1A patent/CN108555773B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103769922A (en) * | 2012-10-24 | 2014-05-07 | 西安志越机电科技有限公司 | Clamp special for thin plate part milling |
| CN103465424A (en) * | 2013-08-20 | 2013-12-25 | 李建勇 | Forming process and special processing device for ultrathin protective cover sleeve |
| CN106217087A (en) * | 2016-06-30 | 2016-12-14 | 山东鲁南机床有限公司 | A kind of lossless clamping device for thick gum base sheet |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109304664A (en) * | 2018-09-29 | 2019-02-05 | 大连理工大学 | A kind of substrate uniform polish device and its working method |
| CN109304664B (en) * | 2018-09-29 | 2020-12-11 | 大连理工大学 | Substrate uniform polishing device and working method thereof |
| CN110539212A (en) * | 2019-09-28 | 2019-12-06 | 长沙埃福思科技有限公司 | multi-workpiece ion beam polishing system and method |
| CN114302563A (en) * | 2021-12-28 | 2022-04-08 | 龙南骏亚柔性智能科技有限公司 | Production method applied to grinding of ultrathin circuit board |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108555773B (en) | 2019-12-10 |
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