CN105081962A - Device used for grinding and polishing small sample hard sheets - Google Patents
Device used for grinding and polishing small sample hard sheets Download PDFInfo
- Publication number
- CN105081962A CN105081962A CN201510406801.2A CN201510406801A CN105081962A CN 105081962 A CN105081962 A CN 105081962A CN 201510406801 A CN201510406801 A CN 201510406801A CN 105081962 A CN105081962 A CN 105081962A
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- CN
- China
- Prior art keywords
- sample
- disk ring
- repairing
- grinding
- polishing
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
Abstract
The invention discloses a device used for grinding and polishing small sample hard sheets. The device comprises a repairing disk ring and a sample carrying disk. A plurality of fixing holes are formed in the surface of the repairing disk ring and distributed in the surface of the repairing disk ring in a central symmetry manner; or one of the fixing holes is formed in the centre of the repairing disk ring, the other fixing holes are distributed in the central symmetry manner, and the fixing holes in the repairing disk ring are formed according to the size of samples needing to be ground and polished. A groove with the outer diameter smaller than that of the bottom of the repairing disk ring is formed in the bottom of the repairing disk ring, and a plurality of liquid draining grooves are formed in the periphery of the bottom of the repairing disk ring. By means of the device, the single small sample can be ground and polished or the multiple small samples can be simultaneously ground and polished; meanwhile, the grinding precision is guaranteed, and influences of sample deformation on the polishing quality are avoided; and when the samples with the large hardness are ground and polished, the grinding efficiency and the grinding quality can be improved through balance weights.
Description
Technical field
The present invention relates to plant equipment manufacture field, relate to a kind of device for small sample hard sheet grinding and polishing particularly.
Background technology
In the field of the specialties such as machinery, metallurgy and material, people in order to observe and study composition, institutional framework, preparation technology and material property and the relation between applying of some materials, and wish to become to assign to improve the performance of its each side to meet various instructions for use by process for modifying surface or the interior tissue that changes material.Needing to carry out Metallographic Analysis when observing material microstructure, must grind sample before doing Metallographic Analysis, then carrying out being polished to minute surface, just can do the performance evaluation such as microscopic appearance or hardness.
Sample tray on existing automatic grinding and polishing device, when carrying out the less single sample grinding of diameter, can slant because sample is too little relative to size carrying disk and cause burnishing surface uneven, affect Metallographic Analysis; Meanwhile, the sample tray of existing automatic grinding and polishing device configuration when grinding and polishing sample cannot simultaneous grinding polishing one, two or more dissimilar comparatively small samples.
The sample tray that existing automatic grinding and polishing device is equipped with is a simple diameter 80mm, and the disk of high 35mm, repairing disk ring is external diameter 90mm, internal diameter 80.5mm, the annulus of high 30mm.When the sample less to multiple size carries out polishing, must sample be evenly distributed on sample tray, and this device cannot the less small sample of the single diameter of grinding and polishing, also cannot simultaneous grinding polishing one, two or more dissimilar samples the less sample of diameter, because sample is less relative to sample tray size, sample can be caused when carrying out grinding and polishing to slant and to cause burnishing surface uneven.
Summary of the invention
Technical problem: for the sample tray on existing automatic grinding and polishing device with repair disk ring when the small sample that grinding and polishing diameter is less, because sample tray is too large, the sample of required polishing is too little and cause the burnishing surface of sample uneven, and can not simultaneous grinding one, hard sheet small sample that two or more are dissimilar defect, the invention provides a kind of device for small sample hard sheet grinding and polishing, sample tray external diameter and sample size are more or less the same, when avoiding grinding and polishing, sample slants, and prevents burnishing surface uneven.
Technical scheme: for realizing above-mentioned technical purpose, device for small sample hard sheet grinding and polishing of the present invention, comprise and repair disk ring and sample tray, described disk ring surface of repairing is provided with multiple fixing hole, described fixing hole to be centrosymmetric distribution on described disk ring surface of repairing, or one of them fixing hole is arranged at repaiies dish Ring current distribution, remaining fixing hole is centrosymmetric distribution, repaiies fixing hole on disk ring according to the manufacture of required grinding and polishing sample size; The described bottom of repairing disk ring is provided with external diameter and is less than the groove repaiied bottom disk ring, is provided with some sump pits repairing the surrounding bottom disk ring, impacts repairing bottom disk ring to prevent polishing fluid long term accumulation to sample;
Described sample tray comprises interconnective load sample body and connector, and described sample tray and the described fixing hole repairing disk ring keep matched in clearance.
Wherein, the degree of depth of described circular groove is less than the thickness of pending sample.
Preferably, described sump pit is rectangle, is evenly distributed on the surrounding of repairing bottom disk ring, and such design can avoid polishing fluid long term accumulation repairing bottom disk ring and sample tray.In a preferred embodiment, described disk ring surface of repairing is provided with five fixing holes, wherein three fixing holes parallel be positioned at carrying disk wherein one diametrically another two fixing holes are in both sides, and this diameter symmetry relatively.
In another preferred embodiment, described disk ring surface of repairing is provided with seven or nine fixing holes, and one of them fixed hole position is in repairing disk ring center, and remaining fixing hole is centrosymmetric distribution around the fixing hole at center.So not only can the single small sample of grinding and polishing but also can the multiple small sample of simultaneous grinding polishing, and at most can the multiple sample of simultaneous grinding, both improve efficiency, turn avoid that sample slants and the burnishing surface that causes is uneven.
In one embodiment, described sample tray comprises load sample body, connector and weightening finish body, and three is threaded, and wherein, described load sample body is cylindric.Weightening finish body when unnecessary can, when only having the sample when some hardness ratios of grinding and polishing are larger, in order to improve Grinding Quality and efficiency, weightening finish body can be added on connector.When the sample that some hardness of grinding and polishing are less, can to increase weight body to prevent sample deformations.Column type load sample body is used for the grinding and polishing of the less sample of size.
As another kind of embodiment, described sample tray comprises load sample body and connector, and both are threaded, and wherein, is provided with boss bottom described load sample body.Projective table type load sample body is used for the grinding and polishing of larger-size single sample.Use projective table type sample tray time connector also can because projective table type load sample body length is longer.Wherein, the thickness of described boss is lower than the degree of depth of repairing disk ring bottom circular groove.
Preferably, the external diameter of above-mentioned sample tray and the size of pending sample suitable.
When grinding and polishing sample, first sample tray is threaded connection and connects, again sample paraffin is bonded at bottom load sample body, then sample tray is repaiied in the hole of disk ring from repairing insertion bottom disk ring, finally will repair disk ring and sample tray entirety to be placed on polishing dish and to support with support, and open switch polishing dish and rotate and can carry out grinding and polishing.Polishing is carried out except in two of interstitial hole symmetrical holes if sample tray can be placed on when needing simultaneous grinding polishing two small samples; The present invention can the multiple small sample of simultaneous grinding polishing, both substantially increases efficiency, turn avoid that sample slants and the burnishing surface that causes is uneven.
Beneficial effect: the present invention disk ring is provided with multiple through hole of being evenly distributed by repairing and has sample tray supporting with it, so both can the single small sample of grinding and polishing or the multiple small sample of simultaneous grinding polishing, in turn ensure that grinding precision; Weightening finish body in sample tray when the sample that grinding and polishing hardness is less can, to avoid sample deformations to affect quality of finish, weightening finish body can be used to be used for improving grinding efficiency and quality when the sample that grinding and polishing hardness is larger.
Accompanying drawing explanation
Fig. 1 is sample tray of the present invention and the assembling schematic diagram repairing disk ring;
Fig. 2 is the structural representation of cylindric sample tray of the present invention;
Fig. 3 is projective table type sample tray and the assembling schematic diagram repairing disk ring;
Fig. 4 is the structural representation of projective table type sample tray;
Fig. 5 is the structural representation that five fixing holes repair disk ring;
Fig. 6 is the layout schematic diagram repairing sump pit bottom disk ring;
Fig. 7 is the A-A interface schematic diagram of Fig. 6.
Detailed description of the invention
Below by specific embodiment, and by reference to the accompanying drawings, technical scheme of the present invention is described in further detail.Be below exemplary embodiment of the present invention, only for explaining the present invention, but not for limiting the present invention, and the improvement done by this explanation all belongs to the scope that claims of the present invention are protected.
Embodiment 1
A kind of device for small sample hard sheet grinding and polishing, as shown in Figure 1, comprise sample tray 1 and repair disk ring 2, repair on disk ring and have five fixing holes 3, as shown in Figure 5, the size of fixing hole and the size of pending sample are suitable, wherein three fixing holes parallel be in repair disk ring wherein one diametrically, another two fixing holes are in both sides, and this diameter symmetry relatively.Be the circular groove that external diameter is slightly little in the middle part of the bottom surface of repairing disk ring, surrounding has the sump pit 4 of some cuboids, as shown in Figure 6 and Figure 7.As shown in Figure 2, sample tray 1 is made up of three parts: cylindrical load sample body 7, connector 6 and weightening finish body 5, load sample body is threaded with between connector and between connector with weightening finish body, namely screwed hole is arranged at load sample body top, it is screw bottom connector, also there is screwed hole at top, has screw bottom weightening finish body.Load sample body and fixing hole are matched in clearance.Weightening finish body when unnecessary can, when only having the sample when some hardness ratios of grinding and polishing are larger, in order to improve Grinding Quality and efficiency, weightening finish body can be added on connector.When the sample that some hardness of grinding and polishing are less, can to increase weight body to prevent sample deformations.Column type load sample body is used for the grinding and polishing of the less sample of size.
During grinding and polishing sample, first will repair disk ring to be placed on polishing dish and to support with support, again sample tray is connected, and the sample of required grinding or polishing is adhered to insert correspondence bottom sample tray and repair in disk ring hole, open switch polishing dish and rotate and can carry out grinding and polishing.The placement location quantity per sample of sample is selected, during as being simple sample, directly sample is positioned over the fixing hole position being positioned at and repairing disk ring center, when two samples, sample is positioned over respectively about in centrosymmetric two fixing holes of this center fixing hole; When for 3, by another one centering fixing hole.
Embodiment 2
A kind of device for small sample hard sheet grinding and polishing, comprise the sample tray 1 of grinding and polishing light and repair disk ring 2 (see accompanying drawing 3), repair on disk ring and have five fixing holes 3, as shown in Figure 5, the size of fixing hole is suitable with the size of pending sample, wherein three fixing holes parallel be in repair disk ring wherein one diametrically another two fixing holes are in both sides, and this diameter symmetry relatively.Be the circular groove that external diameter is slightly little in the middle part of the bottom surface of repairing disk ring, surrounding has the sump pit 4 of some cuboids, as shown in Figure 6 and Figure 7.As shown in Figure 4, sample tray is made up of two parts: projective table type load sample body 7 and connector 6.Use projective table type sample tray time connector also can because projective table type load sample body length is longer.Wherein, the thickness of described boss is lower than the degree of depth of repairing disk ring bottom circular groove.Be threaded between load sample body and weightening finish body, meanwhile, load sample body and fixing hole are matched in clearance.Its using method is with embodiment 1.
Claims (9)
1., for a device for small sample hard sheet grinding and polishing, comprise and repair disk ring and sample tray, it is characterized in that,
Described disk ring surface of repairing is provided with multiple fixing hole, and described fixing hole to be centrosymmetric distribution on described disk ring surface of repairing, or one of them fixing hole is arranged at and repaiies dish Ring current distribution, and remaining fixing hole is centrosymmetric distribution; The described bottom of repairing disk ring is provided with external diameter and is less than the groove repaiied bottom disk ring, is provided with some sump pits repairing the surrounding bottom disk ring;
Described sample tray comprises interconnective load sample body and connector, and described sample tray and the described fixing hole repairing disk ring keep matched in clearance.
2. the device for small sample hard sheet grinding and polishing according to claim 1, is characterized in that, the degree of depth of described circular groove is less than the thickness of pending sample.
3. the device for small sample hard sheet grinding and polishing according to claim 1, is characterized in that, described sump pit is rectangle, is evenly distributed on the surrounding of repairing bottom disk ring.
4. the device for small sample hard sheet grinding and polishing according to claim 1, it is characterized in that, described disk ring surface of repairing is provided with five fixing holes, wherein three fixing holes parallel be positioned at carrying disk wherein one diametrically, another two fixing holes are in both sides, and this diameter symmetry relatively.
5. the device for small sample hard sheet grinding and polishing according to claim 1, it is characterized in that, described disk ring surface of repairing is provided with seven or nine fixing holes, and one of them fixed hole position is in repairing disk ring center, and remaining fixing hole is centrosymmetric distribution around the fixing hole at center.
6. the device for small sample hard sheet grinding and polishing according to any one of Claims 1 to 5, is characterized in that, described sample tray comprises load sample body, connector and weightening finish body, and three is threaded, and wherein, described load sample body is cylindric.
7. the device for small sample hard sheet grinding and polishing according to any one of Claims 1 to 5, is characterized in that, described sample tray comprises load sample body and connector, and both are threaded, and wherein, is provided with boss bottom described load sample body.
8. the device for small sample hard sheet grinding and polishing according to claim 7, is characterized in that, the thickness of described boss is lower than the degree of depth of repairing disk ring bottom circular groove.
9. the device for small sample hard sheet grinding and polishing according to claim 6 or 7, is characterized in that, the external diameter of described sample tray and the size of pending sample suitable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510406801.2A CN105081962B (en) | 2015-07-10 | 2015-07-10 | A kind of device for small sample hard sheet grinding and polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510406801.2A CN105081962B (en) | 2015-07-10 | 2015-07-10 | A kind of device for small sample hard sheet grinding and polishing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105081962A true CN105081962A (en) | 2015-11-25 |
| CN105081962B CN105081962B (en) | 2018-10-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510406801.2A Active CN105081962B (en) | 2015-07-10 | 2015-07-10 | A kind of device for small sample hard sheet grinding and polishing |
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| CN (1) | CN105081962B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108789064A (en) * | 2018-06-25 | 2018-11-13 | 中国科学院半导体研究所 | Hand-held grinding Sample chuck |
| CN110707007A (en) * | 2019-09-26 | 2020-01-17 | 芜湖德锐电子技术有限公司 | Chip polishing method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112548883A (en) * | 2020-12-02 | 2021-03-26 | 西安奕斯伟硅片技术有限公司 | Grinding wheel and grinding equipment |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH054165A (en) * | 1991-06-25 | 1993-01-14 | Toshiba Ceramics Co Ltd | Wafer retaining carrier |
| US6062963A (en) * | 1997-12-01 | 2000-05-16 | United Microelectronics Corp. | Retainer ring design for polishing head of chemical-mechanical polishing machine |
| CN2778468Y (en) * | 2005-03-10 | 2006-05-10 | 郑明真 | Grinding disc |
| CN202622547U (en) * | 2012-04-23 | 2012-12-26 | 中芯国际集成电路制造(上海)有限公司 | Grinding disc, grinding pad finisher and grinding device |
| CN203156552U (en) * | 2013-03-15 | 2013-08-28 | 上海超硅半导体有限公司 | Wafer maintaining device for wax burnish |
| CN203401397U (en) * | 2013-08-31 | 2014-01-22 | 莱州市蔚仪试验器械制造有限公司 | Single-point compressing sample holder of metallographic sample grinding and burnishing machine |
| CN203817964U (en) * | 2014-05-09 | 2014-09-10 | 山东省科学院新材料研究所 | Combined sample carrying plate for wafer grinding and polishing |
-
2015
- 2015-07-10 CN CN201510406801.2A patent/CN105081962B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH054165A (en) * | 1991-06-25 | 1993-01-14 | Toshiba Ceramics Co Ltd | Wafer retaining carrier |
| US6062963A (en) * | 1997-12-01 | 2000-05-16 | United Microelectronics Corp. | Retainer ring design for polishing head of chemical-mechanical polishing machine |
| CN2778468Y (en) * | 2005-03-10 | 2006-05-10 | 郑明真 | Grinding disc |
| CN202622547U (en) * | 2012-04-23 | 2012-12-26 | 中芯国际集成电路制造(上海)有限公司 | Grinding disc, grinding pad finisher and grinding device |
| CN203156552U (en) * | 2013-03-15 | 2013-08-28 | 上海超硅半导体有限公司 | Wafer maintaining device for wax burnish |
| CN203401397U (en) * | 2013-08-31 | 2014-01-22 | 莱州市蔚仪试验器械制造有限公司 | Single-point compressing sample holder of metallographic sample grinding and burnishing machine |
| CN203817964U (en) * | 2014-05-09 | 2014-09-10 | 山东省科学院新材料研究所 | Combined sample carrying plate for wafer grinding and polishing |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108789064A (en) * | 2018-06-25 | 2018-11-13 | 中国科学院半导体研究所 | Hand-held grinding Sample chuck |
| CN110707007A (en) * | 2019-09-26 | 2020-01-17 | 芜湖德锐电子技术有限公司 | Chip polishing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105081962B (en) | 2018-10-23 |
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