CN206952801U - A kind of dismountable combined type polishing disk - Google Patents
A kind of dismountable combined type polishing disk Download PDFInfo
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- CN206952801U CN206952801U CN201720061831.9U CN201720061831U CN206952801U CN 206952801 U CN206952801 U CN 206952801U CN 201720061831 U CN201720061831 U CN 201720061831U CN 206952801 U CN206952801 U CN 206952801U
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- inner tray
- disk body
- outer disk
- storage tank
- polishing
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Abstract
The utility model discloses a kind of dismountable combined type polishing disk, it includes polishing disc main body, the polishing disc main body includes the inner tray being arranged on polissoir and is removably fitted together to the outer disk body for being socketed on inner tray periphery, inner tray periphery is provided with the limiting section of some equidistantly distributeds, the outer disk body bottom surface offers the storage tank of accommodating inner tray upwards, and the clamped portion of some equidistantly distributeds is set in storage tank, after inner tray is embedded in the storage tank of outer disk body, the mutually chimeric positioning of limiting section and clamped portion, inner tray and outer disk body is made to be fixed together, and outer disk body upper end has plane to paste fixed polishing pad.Traditional polishing disk is divided into two by the utility model, is divided into outer disk body and inner tray, and can freely dismantle and light installation.During dismounting, in the case where not dismantling inner tray, only outer disk body is taken apart and is cleaned, changed, due to relatively gently, more facilitating so that dismounting is got up for the relative polishing disc main body of external disk body weight.
Description
Technical field：
Chemical Mechanical Polishing Technique field is the utility model is related to, refers in particular to a kind of dismountable combined type polishing disk.
Background technology：
Chemical Mechanical Polishing Technique, abbreviation CMP technique, it is widely used in production and the IC manufacturing of semiconductor wafer
Technique, the excellent flat surface of low roughness, low-defect-density can be obtained in burnishing surface.
The typical method of CMP technique is：Specific polishing pad is pasted on the polishing disk of polissoir, is held above polishing pad
The continuous specific polishing fluid of supply, keeps polishing disk at the uniform velocity to rotate；One or more polishing clamps are placed above polishing disk, are polished
Material is fixed on below fixture, and the polished surface for being polished material directly contacts with polishing pad, in the polishing pressure that fixture applies
Corresponding polishing step is completed under power.In actual CMP application processes, it is usually directed to the CMP planarization work of a variety of or multiple steps
Skill, each step have been required for specific polishing pad and polishing fluid and have completed corresponding function to arrange in pairs or groups, however, on each polishing disk
A kind of polishing pad is only pasted, even if similar polishing pad may also be because of can not be general for different polishing fluids, in addition, every kind of
Polishing fluid can all pollute to polishing disk.Therefore, during CMP, polishing disk needs frequently to change either cleaning and maintenance,
It is the critical component of the guarantee of CMP effects and efficiency guarantee.
Traditional polishing disk is an indivisible entirety, because its volume is big, weight is big, to cause staff to exist
During to polishing disk cleaning and maintenance and replacing polishing disk, removing and installing for polishing disk is inconvenient, and easily because of behaviour
Slip up and cause machine impaired and injury to personnel.
In view of this, the present inventor proposes following technical scheme.
Utility model content：
The purpose of this utility model is overcome the deficiencies in the prior art, there is provided a kind of dismountable combined type polishing disk.
In order to solve the above-mentioned technical problem, the utility model employs following technical proposals：Dismountable combined type is thrown
CD includes polishing disc main body, and the polishing disc main body includes inner tray on polissoir and with dismountable
The chimeric outer disk body for being socketed on inner tray periphery of mode, the inner tray periphery are provided with the limiting section of some equidistantly distributeds, and
The outer disk body bottom surface offers the storage tank of the accommodating inner tray upwards, and some equidistantly distributeds are set in storage tank
Clamped portion, after the inner tray is embedded in the storage tank of outer disk body, the mutually chimeric positioning of the limiting section and clamped portion, make inner tray
It is fixed together with outer disk body, and outer disk body upper end has plane to paste fixed polishing pad.
Furthermore, in above-mentioned technical proposal, the inner tray periphery is provided with the stopper slot as the limiting section,
The alignment pin as the clamped portion is provided with the storage tank, the width of the stopper slot is bigger than alignment pin width.
Furthermore, in above-mentioned technical proposal, the width of the stopper slot is bigger 0.4~2.0mm than alignment pin width.
Furthermore, in above-mentioned technical proposal, the inner tray and outer disk body are rounded, and the storage tank is circle
Groove, and the diameter of the inner tray is less than the internal diameter of storage tank.
Furthermore, in above-mentioned technical proposal, the external diameter of the inner tray is smaller 0.6~4.0mm than the internal diameter of storage tank.
Furthermore, in above-mentioned technical proposal, the outer disk body upper surface offers downwards takes disc tool spiral for T-shaped
The first fixed screwed hole；The inner tray upper end offers for T-shaped the second screwed hole for taking disc tool spiral to fix downwards.
Furthermore, in above-mentioned technical proposal, it is all provided with being set at the square edge of the inner tray and outer disk body justifying and
Angle.
Furthermore, in above-mentioned technical proposal, the outer disk body is semi-surrounding cap-type structure, its top thickness is 5~
25mm, sidewall thickness are 2~10mm.
After adopting the above technical scheme, the utility model has the advantages that compared with prior art：
1st, traditional polishing disk is divided into two by the utility model, is divided into outer disk body and inner tray, and specific design realizes two disks
Body can be dismantled freely and light installation.
2nd, inner tray when in use, is directly arranged on polissoir by the utility model, then outer disk body is fitted together into socket
In inner tray periphery, and the polishing pad that the outer disk body upper end is fixed directly is processed by shot blasting to polished product, in needs pair
When polishing disc main body cleaning or changing, or glossing needs multiple polishing pads in turn in use, need not be by whole polishing disk
Main body disassembles, i.e., in the case where not dismantling inner tray, only takes apart outer disk body and cleaned, changed, by
It is relatively light for the relative polishing disc main body of external disk body weight, more facilitate so that dismounting is got up, and processing safety substantially carries
It is high.
3rd, in use, due to the protection of outer disk body, inner tray is not polluted the utility model by liquid for polishing all the time,
It thus need not often dismount, protect the stability of rotating shaft dynamical system, and then be advantageous to the stable fortune of whole polissoir
OK.
4th, because glossing needs multiple polishing pads to use in turn, each outer disk body polished in disc main body can paste one
Kind of polishing pad, without entirely being changed on polishing disc main body, reduce polishing disk body making material usage and
Cost.
Brief description of the drawings：
Fig. 1 is structural representation of the present utility model；
Fig. 2 be in Fig. 1 along A-A to sectional view；
Fig. 3 is the structural representation of the utility model China and foreign countries disk body；
Fig. 4 is the structural representation of inner tray in the utility model.
Embodiment：
The utility model is further illustrated with reference to specific embodiments and the drawings.
As shown in Fig. 1-4, for a kind of dismountable combined type polishing disk, it includes polishing disc main body 100, the utility model
Polishing disc main body 100 is divided to for two parts, specifically, the polishing disc main body 100 includes on polissoir
Inner tray 1 and be removably fitted together to the outer disk body 2 for being socketed on the periphery of inner tray 1, it is nested structure, dismounting ten
It is convenient to divide, and the upper end of outer disk body 2 has plane to paste fixed polishing pad.
The periphery of inner tray 1 is provided with the limiting section 11 of some equidistantly distributeds, and the outer bottom surface of disk body 2 opens up upwards
There is the storage tank 21 of the accommodating inner tray 1, and the clamped portion 22 of some equidistantly distributeds, the inner disc are set in storage tank 21
After body 1 is embedded in the storage tank 21 of outer disk body 2, the mutually chimeric positioning in the limiting section 11 and clamped portion 22, inner tray 1 and outer is made
Disk body 2 is fixed together.Specifically, the periphery of inner tray 1 is provided with the stopper slot as the limiting section 11, the appearance
The alignment pin being provided with groove 21 as the clamped portion 22 is put, the width of the stopper slot is bigger than alignment pin width, specifically,
The width of the stopper slot is bigger 0.4~2.0mm than alignment pin width, makes formed with gap between alignment pin and stopper slot, so that
Make, in the case where ensureing inner tray 1 and the Stability Analysis of Structures of outer disk body 2, outer disk body 2 quickly can be separated into inner tray 1, operated
It is very convenient.
The inner tray 1 and outer disk body 2 are rounded, and the storage tank 21 is circular groove, and the diameter of the inner tray 1 is less than
The internal diameter of storage tank 21.Wherein, the external diameter of the inner tray 1 is smaller 0.6~4.0mm than the internal diameter of storage tank 21, to cause inner disc
Body 1 it is peripheral between the storage tank 21 of outer disk body 2 formed with gap, to cause ensureing inner tray 1 and the Stability Analysis of Structures of outer disk body 2
In the case of, outer disk body 2 quickly can be separated into inner tray 1, operated very convenient.
The gap that the inner tray 1 is peripheral to be formed between the storage tank 21 of outer disk body 2 is smaller chimeric more stable, but pacifies
Dress, dismounting are more difficult, and need periodic cleaning to safeguard, prevent inside and outside disk body to be adhered together.Therefore, between nested position
Gap is set, can be according to actual use situation adjustment, and being suitable for polissoir, polishing requirement, surrounding environment etc. is advisable.
The outer disk body 2 is semi-surrounding cap-type structure, and its top thickness is 5~25mm, and sidewall thickness is 2~10mm.
The upper end of outer disk body 2 offers for T-shaped the first screwed hole 23 for taking disc tool spiral to fix downwards, and this first
Screwed hole 23 is arranged at the outer upper surface center of disk body 2；The upper end of inner tray 1 offers downwards takes disc tool for T-shaped
The second screwed hole 12 that spiral is fixed, second screwed hole 12 are arranged at the upper surface center of inner tray 1, first screwed hole
23 and second screwed hole 12 be equally used for install rotating shaft.The utility model when mounted, using T-shaped with handle and threaded rod
Take disc tool to fix inner tray 1 by the first screwed hole 23 of inner tray 1, inner tray 1 is installed on polissoir.Then,
Disc tool is taken to carry the outer disk body of polishing pad according to same method, installation using T-shaped, installation process should be noted determines in outer disk body
Position pin is chimeric with the stopper slot in inner tray.When the utility model is integrally safeguarded, in a reverse order, first remove outer disk body,
After remove inner tray, it is necessary to when changing polishing pad or glossing, only need to change outer disk body, and inner tray is unaffected.
It is all provided with being set to rounded corner at the square edge of the inner tray 1 and outer disk body 2, in order to inner tray 1 and outer disk body 2
Chimeric installation, and it is very convenient to operate.
, it is necessary to which multiple polishing pads use in turn during CMP, the outer disk body 2 of identical size only need to be customized in turn
Use, there is simple and easy to do, safe operation, save cost, beneficial to series of advantages such as equipment stabilizations.
In summary, traditional polishing disk is divided into two by the utility model, is divided into outer disk body 2 and inner tray 1, specific design
Realize that amphidisc can be dismantled freely and light installation.Inner tray 1 when in use, is directly arranged on polissoir by the utility model
On, then outer disk body 2 is fitted together to and is socketed on the periphery of inner tray 1, and the polishing pad that the outer upper end of disk body 2 is fixed is directly to polished production
Product are processed by shot blasting, when needing to the cleaning of polishing disc main body or changing, or glossing needs multiple polishing pads to make in turn
Used time, it is not necessary to whole polishing disc main body 100 is disassembled, i.e., in the case where not dismantling inner tray 1, only torn outer disk body open
Unload out and cleaned, changed, due to relatively light for the relative polishing disc main body 100 of the outer weight of disk body 2, so that dismounting is got up
It is more convenient, and processing safety significantly improves, in addition, the utility model is in use, due to the guarantor of outer disk body 2
Shield, inner tray 1 is not polluted by liquid for polishing all the time, thus need not often be dismounted, and protects the stability of rotating shaft dynamical system,
And then be advantageous to the stable operation of whole polissoir.It is furthermore each to throw because glossing needs multiple polishing pads to use in turn
Outer disk body in optical disk main body can paste a kind of polishing pad, without entirely being changed on polishing disc main body, reduce
The material usage and cost of polishing disk body making.
Certainly, specific embodiment of the utility model is the foregoing is only, is not to implement to limit the utility model
Scope, all equivalent change or modifications done according to construction, feature and principle described in present utility model application the scope of the claims, all should be wrapped
Include in present utility model application the scope of the claims.
Claims (8)
1. a kind of dismountable combined type polishing disk, it includes polishing disc main body (100), it is characterised in that：The polishing disk master
Body (100), which includes the inner tray (1) on polissoir and is removably fitted together to, is socketed on inner tray (1)
The outer disk body (2) of periphery, the inner tray (1) periphery are provided with the limiting section (11) of some equidistantly distributeds, and the outer disk body (2)
Bottom surface offers the storage tank (21) of the accommodating inner tray (1) upwards, and some equidistant points are set in storage tank (21)
The clamped portion (22) of cloth, after the inner tray (1) is embedded in the storage tank (21) of outer disk body (2), the limiting section (11) and clamped
The mutually chimeric positioning in portion (22), makes inner tray (1) and outer disk body (2) be fixed together, and outer disk body (2) upper end have plane with
Paste fixed polishing pad.
A kind of 2. dismountable combined type polishing disk according to claim 1, it is characterised in that：The inner tray (1) is outside
The stopper slot being provided with as the limiting section (11) is enclosed, is provided with the storage tank (21) as the clamped portion (22)
Alignment pin, the width of the stopper slot are bigger than alignment pin width.
A kind of 3. dismountable combined type polishing disk according to claim 2, it is characterised in that：The width of the stopper slot
It is bigger 0.4~2.0mm than alignment pin width.
A kind of 4. dismountable combined type polishing disk according to claim 1, it is characterised in that：The inner tray (1) and
Outer disk body (2) is rounded, and the storage tank (21) is circular groove, and the diameter of the inner tray (1) is less than the interior of storage tank (21)
Footpath.
A kind of 5. dismountable combined type polishing disk according to claim 4, it is characterised in that：The inner tray (1)
External diameter is smaller 0.6~4.0mm than the internal diameter of storage tank (21).
A kind of 6. dismountable combined type polishing disk according to claim 1, it is characterised in that：On the outer disk body (2)
End face is offered downwards for T-shaped the first screwed hole (23) for taking disc tool spiral to fix；Open downwards inner tray (1) upper end
Provided with for T-shaped the second screwed hole (12) for taking disc tool spiral to fix.
A kind of 7. dismountable combined type polishing disk according to claim 1, it is characterised in that：The inner tray (1) and
It is all provided with being set to rounded corner at the square edge of outer disk body (2).
A kind of 8. dismountable combined type polishing disk according to claim 1, it is characterised in that：The outer disk body (2) is
Semi-surrounding cap-type structure, its top thickness are 5~25mm, and sidewall thickness is 2~10mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720061831.9U CN206952801U (en) | 2017-01-17 | 2017-01-17 | A kind of dismountable combined type polishing disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720061831.9U CN206952801U (en) | 2017-01-17 | 2017-01-17 | A kind of dismountable combined type polishing disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206952801U true CN206952801U (en) | 2018-02-02 |
Family
ID=61376504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720061831.9U Active CN206952801U (en) | 2017-01-17 | 2017-01-17 | A kind of dismountable combined type polishing disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206952801U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106863156A (en) * | 2017-01-17 | 2017-06-20 | 东莞市天域半导体科技有限公司 | A kind of dismountable combined type polishing disk and its application method |
-
2017
- 2017-01-17 CN CN201720061831.9U patent/CN206952801U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106863156A (en) * | 2017-01-17 | 2017-06-20 | 东莞市天域半导体科技有限公司 | A kind of dismountable combined type polishing disk and its application method |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 523000 second floor office building, No.5, Gongye North 1st Road, Hubei Industrial City, Songshan, Dongguan City, Guangdong Province Patentee after: Guangdong Tianyu Semiconductor Co.,Ltd. Address before: 523000 second floor office building, No.5, Gongye North 1st Road, Hubei Industrial City, Songshan, Dongguan City, Guangdong Province Patentee before: DONGGUAN TIANYU SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |