CN207757439U - Wandering star wheel assembly and its burnishing device - Google Patents
Wandering star wheel assembly and its burnishing device Download PDFInfo
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- CN207757439U CN207757439U CN201721773581.8U CN201721773581U CN207757439U CN 207757439 U CN207757439 U CN 207757439U CN 201721773581 U CN201721773581 U CN 201721773581U CN 207757439 U CN207757439 U CN 207757439U
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- star wheel
- polished part
- protrusion
- erratic star
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- 230000002093 peripheral Effects 0.000 claims abstract description 39
- 230000002633 protecting Effects 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 18
- 239000007787 solid Substances 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims 3
- 238000005498 polishing Methods 0.000 abstract description 25
- 239000012530 fluid Substances 0.000 abstract description 6
- 238000007517 polishing process Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000001681 protective Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000116 mitigating Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
Abstract
The utility model provides a kind of wandering star wheel assembly and its burnishing device, it is related to technical field of semiconductors, during the existing polishing process of solution, the outer surface of workpiece to be added is also polished under the extruding of polishing fluid and erratic star wheel inner wall so that the problem of original appearance of polished part or the outer surface pattern of polished part are destroyed and design.It is related to a kind of wandering star wheel assembly, including：There is trepanning, the inner peripheral surface of erratic star wheel to be equipped with drive mechanism for erratic star wheel, erratic star wheel, and drive mechanism is in contact with the outer circumference surface of polished part, and the outer circumference surface for protecting polished part.A kind of burnishing device is further related to, including：Above-mentioned wandering star wheel assembly.The wandering star wheel assembly and its burnishing device can protect the outer circumference surface of polished part not squeezed by the inner peripheral surface of erratic star wheel so that the outer circumference surface pattern of the original appearance of polished part or polished part is not destroyed.
Description
Technical field
The utility model is related to technical field of semiconductors, more particularly, to a kind of wandering star wheel assembly and its burnishing device.
Background technology
Chemically mechanical polishing (CMP) technology is one of the key technology of semiconductor material surface processing, in large scale bare crystalline
It is used widely in circle and silicon member processing of surface polishing.The process of chemically mechanical polishing mainly passes through polishing pad, polishing fluid
Effect with selected chemical reagent is from chip or the process of silicon member remove materials.
For double throwing machines, the two sides to process semiconductor crystal wafer and silicon member simultaneously will will be to be processed with erratic star wheel
Component is fixed between the disk up and down of polishing machine, and upper and lower disk all posts polishing cloth, and polishing fluid is polished above to flow in disk
Get off, two disks apply pressure to chip and secure the wafer among disk, and erratic star wheel, which can then rotate, drives chip in disk
Between rotate, while two deep bids in the same direction or reversely rotate, and then achieve the purpose that polishing.
But in double throwing machine polishing process, the outer surface of workpiece to be added inside erratic star wheel because will rotate, with throwing
Light liquid flows down along the surface of workpiece, and the outer surface of workpiece to be added is also thrown under the extruding of polishing fluid and erratic star wheel inner wall
Light, this is for needing for the requirement for keeping polished part original appearance or try not to influence the polished part outer surface pattern to be extremely
Unfavorable.
Utility model content
The first of the utility model is designed to provide a kind of polishing assembly, existing in the prior art existing to solve
During polishing process, the outer surface of workpiece to be added is also polished under the extruding of polishing fluid and erratic star wheel inner wall so that polishing
The technical issues of original appearance of part or the outer surface pattern of polished part are destroyed.
Wandering star wheel assembly provided by the utility model, including：Erratic star wheel, the erratic star wheel have trepanning, the erratic star wheel
Inner peripheral surface be equipped with drive mechanism, the drive mechanism is in contact with the outer circumference surface of polished part, and is used to protect to wait throwing
The outer circumference surface of light part.
Further, the drive mechanism includes the multiple protrusions being arranged in the inner peripheral surface of the erratic star wheel, each described
Protrusion is disposed radially inwardly along the erratic star wheel.
Further, the drive mechanism includes the middle circle being arranged in the inner peripheral surface of the erratic star wheel, in described
Between the outer circumference surface of annulus be in contact with the inner peripheral surface of the erratic star wheel.
Further, the inner peripheral surface of the middle circle is equipped with multiple protrusions, and each protrusion is along the middle circle
Ring is disposed radially inwardly.
Further, the protrusion is located on the erratic star wheel, and the protrusion is identical with the material of the erratic star wheel, the two
It is integrally formed.
Either, the protrusion is different with the material of the erratic star wheel, and the protrusion and the erratic star wheel are using detachable
Formula is fixedly connected.
The protrusion is located on the middle circle, and the protrusion is identical with the material of the middle circle, the two one
Molding.
Either, the protrusion is different with the material of the middle circle, and the protrusion is used with the middle circle can
It is detachably fixed connection.
Further, along the axis direction of polished part, the thickness of each protrusion is not more than the thickness of the erratic star wheel.
Further, along the axis direction of polished part, the protrusion be from top to bottom disposed with it is multigroup, wherein each
Group includes multiple protrusions.
Further, the cross-sectional shape of the protrusion is using any one of circle, semicircle, triangle, rectangular.
Further, the protrusion uses the structure type of idler wheel, the axis of the axis direction of the idler wheel and polished part
Line is parallel, and the idler wheel is articulated on the inner peripheral surface of the erratic star wheel.
The advantageous effect of wandering star wheel assembly provided by the utility model：
In the wandering star wheel assembly, the inner peripheral surface of erratic star wheel is additionally arranged drive mechanism, since the drive mechanism treats throwing
The outer circumference surface of light part plays a certain protective role, thus the outer circumference surface of polished part can not by or it is few by the shadow polished
It rings, compared with prior art, the peripheral surface of the drive mechanism is in contact with the inner peripheral surface of erratic star wheel, the inner peripheral surface of drive mechanism
It is in contact with the outer circumference surface of polished part, the outer circumference surface for avoiding polished part directly connects with the inner peripheral surface of erratic star wheel
It touches, thus, which can protect the outer circumference surface of polished part not squeezed by the inner peripheral surface of erratic star wheel (inner wall),
So that the outer circumference surface pattern of the original appearance of polished part or polished part is not destroyed.
The second of the utility model is designed to provide a kind of burnishing device, existing in the prior art existing to solve
During polishing process, the outer surface of workpiece to be added is also polished under the extruding of polishing fluid and erratic star wheel inner wall so that polishing
The technical issues of original appearance of part or the outer surface pattern of polished part are destroyed.
Burnishing device provided by the utility model, including：Above-mentioned wandering star wheel assembly.
The advantageous effect of burnishing device provided by the utility model：
Above-mentioned wandering star wheel assembly is set in the burnishing device, wherein the concrete structure of the wandering star wheel assembly, connection are closed
System and advantageous effect etc. are described in detail in above-mentioned word, and details are not described herein.
Description of the drawings
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific implementation mode or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, other attached drawings are can also be obtained according to these attached drawings.
Fig. 1 is that a kind of structure of wandering star wheel assembly provided in this embodiment and the connection structure of polished part when in use are illustrated
Figure；
Fig. 2 is that another structure of wandering star wheel assembly provided in this embodiment and the connection structure of polished part when in use are illustrated
Figure；
Fig. 3 is that the another structure of wandering star wheel assembly provided in this embodiment and the connection structure of polished part when in use are illustrated
Figure；
Fig. 4 is the transverse sectional view of Fig. 1；
Fig. 5 is another structural schematic diagram of Fig. 4.
Icon：100- erratic star wheels；200- polished parts；300- protrusions；400- middle circles.
Specific implementation mode
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
All other embodiment that field those of ordinary skill is obtained without making creative work, belongs to this practicality
Novel protected range.
It is in the description of the present invention, it should be noted that term "center", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
The utility model and simplifying describes for ease of description, do not indicate or imply the indicated mechanism or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " the
One ", " second ", " third " are used for description purposes only, and are not understood to indicate or imply relative importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be electrical connection；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, it can understand above-mentioned art with concrete condition
The concrete meaning of language in the present invention.
Embodiment
As shown in Figures 1 to 5, a kind of wandering star wheel assembly is present embodiments provided, including：Erratic star wheel 100, erratic star wheel 100
With trepanning, the inner peripheral surface of erratic star wheel 100 is equipped with drive mechanism, and drive mechanism connects with the outer circumference surface of polished part 200
It touches, and drive mechanism is used to protect the outer circumference surface of polished part 200.
It should be noted that：
1, " trepanning " mentioned above is circular hole.
2, " outer circumference surface for protecting polished part 200 " mentioned above refers to, by above-mentioned drive mechanism to throwing
The outer circumference surface (outer circumference surface of polished part 200 is the face without polishing) of light part 200 plays the role of protection so that polishing
The outer circumference surface of part 200 is not polished or reduces polishing.
In the wandering star wheel assembly, the inner peripheral surface of erratic star wheel 100 is additionally arranged drive mechanism, since the drive mechanism is treated
The outer circumference surface of polished part 200 plays a certain protective role, thus the outer circumference surface of polished part 200 can not by or it is few by
The influence of polishing, compared with prior art, the peripheral surface of the drive mechanism are in contact with the inner peripheral surface of erratic star wheel 100, transmission
The inner peripheral surface of structure is in contact with the outer circumference surface of polished part 200, avoid the outer circumference surface of polished part 200 directly with trip
The inner peripheral surface of star-wheel 100 is in contact, thus, which can protect the outer circumference surface of polished part 200 not swum
The inner peripheral surface (inner wall) of star-wheel 100 squeezes so that the original appearance of polished part 200 or the outer circumference surface shape of polished part 200
Looks are not destroyed.
In some embodiments, the concrete form of drive mechanism can there are many, be not limited to following several.
As shown in Figure 1, drive mechanism include be arranged erratic star wheel 100 inner peripheral surface multiple raised 300, each protrusion
300 being disposed radially inwardly along erratic star wheel 100.
In this kind of structure type, " drive mechanism is in contact with the outer circumference surface of polished part 200 " mentioned above is
Refer to, multiple raised 300 outermost faces far from erratic star wheel 100 are in contact with the outer circumference surface of polished part 200.Use the wandering star
When wheel assembly is polished polished part 200, since protrusion 300 is multiple, by more between erratic star wheel 100 and polished part 200
A raised 300 are driven to realize, which makes the contact area between erratic star wheel 100 and polished part 200 greatly reduce, to
The degree that the outer circumference surface of polished part 200 is polished can be mitigated.
In practical polishing process, the excircle of raised 300 outermost faces and polished part 200 far from erratic star wheel 100
Face is in contact, and " contact " herein refers to, the outer circumference surface of the outermost face of the protrusion 300 and polished part 200 can be each other
There are small gaps between contact or both.
Please continue to refer to Fig. 1, raised 300 cross-sectional shape shown in FIG. 1 is circle, by taking this kind of structure as an example, works as trip
When star-wheel 100 rotates, protrusion 300 is driven to rotate, due to the outer circumference surface of the outermost face and polished part 200 of the protrusion 300
There are small gaps between capable of being in contact with each other or both, in real-world operation, between protrusion 300 and polished part 200
There are certain frictional force, under the action of the frictional force, while erratic star wheel 100 drives protrusion 300 to rotate, can drive and wait throwing
Light part 200 rotates.
As shown in Fig. 2, above-mentioned drive mechanism includes the middle circle 400 being arranged in the inner peripheral surface of erratic star wheel 100, it is intermediate
The outer circumference surface of annulus 400 is in contact with the inner peripheral surface of erratic star wheel 100.
In this kind of structure type, " drive mechanism is in contact with the outer circumference surface of polished part 200 " mentioned above is
Refer to, the inner peripheral surface of middle circle 400 is in contact with the outer circumference surface of polished part 200." contact " herein refers to middle circle
There are small gaps between the outer circumference surface of the inner peripheral surface of ring 400 and polished part 200 can be in contact with each other or both；
Also, there are micro- between the outer circumference surface of middle circle 400 and the inner peripheral surface of erratic star wheel 100 can be in contact with each other or both
Small gap.
Please continue to refer to Fig. 3, since middle circle 400 is between erratic star wheel 100 and polished part 200, in polishing,
The inner peripheral surface of erratic star wheel 100 first generates friction with the outer circumference surface of middle circle 400, intermediate under the action of the frictional force
Annulus 400 rotates, then polished part 200 is driven to rotate, and to reduce the polishing thread of the rotation of polished part 200, subtracts significantly
The degree that the outer circumference surface of polished part 200 is polished is lacked.
It should be noted that when drive mechanism uses middle circle 400, in same time, the circle of the rotation of erratic star wheel 100
Number is more than the number of turns that middle circle 400 rotates, and the number of turns that middle circle 400 rotates is more than the number of turns that polished part 200 rotates.
As shown in figure 3, when drive mechanism uses middle circle 400, can be also equipped on the inner peripheral surface of middle circle 400
Multiple raised 300, each raised 300 being disposed radially inwardly along middle circle 400.
Please continue to refer to Fig. 3, in this kind of structure type, the inner circle of the outer circumference surface and erratic star wheel 100 of middle circle 400
Circumferential surface is in contact, and multiple raised 300 outermost faces far from erratic star wheel 100 are in contact with the outer circumference surface of polished part 200, should
Ibid, details are not described herein for " contact " that place mentions.
Raised 300 cross-sectional shape shown in Fig. 3 is circle, by taking this kind of structure as an example, when erratic star wheel 100 rotates,
The inner peripheral surface of erratic star wheel 100 first generates friction with the outer circumference surface of middle circle 400, intermediate under the action of the frictional force
Annulus 400 rotates, while protrusion 300 being driven to rotate, and then polished part 200 is driven to rotate again, to reduce polished part
The polishing thread of 200 rotations, is added, and protrusion 300 is directly in contact with polished part 200 so that erratic star wheel 100 and polished part
Contact area between 200 greatly reduces, the degree that the outer circumference surface to significantly reduce polished part 200 is polished.
It should be noted that when drive mechanism is using middle circle 400 plus protrusion 300, in same time, erratic star wheel
The number of turns of 100 rotations is more than the number of turns that middle circle 400 rotates, and the number of turns that middle circle 400 rotates is more than 200 turns of polished part
The dynamic number of turns.
On the basis of the above embodiments, when protrusion 300 is directly arranged on erratic star wheel 100, protrusion 300 and erratic star wheel
100 material is identical, and the two is integrally formed
Either, protrusion 300 is different with the material of erratic star wheel 100, and protrusion 300 and erratic star wheel 100 are using detachable solid
Fixed connection.
Such as：Protrusion 300 is fixed on by screw or glue on erratic star wheel 100.
When protrusion 300 is located on middle circle 400, protrusion 300 is identical with the material of middle circle 400, the two one at
Type.
Either, protrusion 300 is different with the material of middle circle 400, and protrusion 300 and middle circle 400 are using detachable
Formula is fixedly connected.
Such as：Protrusion 300 is fixed on by screw or glue on middle circle 400.
Wherein, the material of erratic star wheel 100 is using any one of metal, epoxy resin, polytetrafluoroethylene (PTFE), PVC, PP.
The material of the middle circle 400 is identical as the material of erratic star wheel 100；Either, the material of middle circle 400 uses
Glass or ceramics etc..
On the basis of the above embodiments, as shown in figure 4, along polished part 200 axis direction, each raised 300 thickness
Thickness of the degree no more than erratic star wheel 100.
On the basis of the above embodiments, as shown in figure 5, along polished part 200 axis direction, protrusion 300 by up to
Under be disposed with multigroup, wrapped in (each group herein refers to being located at the protrusion 300 being same as on horizontal plane) wherein each group
Include multiple raised 300.
On the basis of the above embodiments, protrusion 300 cross-sectional shape also can be used semicircle, triangle, it is rectangular in
It is any.
Either, protrusion 300 uses the structure type of idler wheel, wherein the axis of the axis direction of idler wheel and polished part 200
Line is parallel, and idler wheel is articulated on the inner peripheral surface of erratic star wheel 100.When polished part 200 and idler wheel contact, erratic star wheel
When 100 rotation, idler wheel rolls across on the outer circumference surface of polished part 200, and the outer circumference surface of polished part 200 will not be caused to be thrown
Light.
On the basis of the above embodiments, a kind of specific size of wandering star wheel assembly is following setting：
As shown in Figure 4 and Figure 5, the outer diameter of erratic star wheel 100 ranging from 10mm~10m；The width of the protrusion 300 (hangs down
Directly in the axis direction of polished part 200) range 100um~100mm；The thickness of the protrusion 300 is (along the axis side of polished part 200
To) ranging from 100um~100mm.
Width (perpendicular to the axis direction of polished part 200) range of the intermediate ring 400 is in 100um~100mm；Its thickness
(along the axis direction of polished part 200) ranging from 100um~100mm, thickness are less than or equal to the thickness of erratic star wheel 100.
The present embodiment also provides a kind of burnishing device, including：Above-mentioned wandering star wheel assembly.
Above-mentioned wandering star wheel assembly is set in the burnishing device, wherein the concrete structure of the wandering star wheel assembly, connection are closed
System and advantageous effect etc. are described in detail in above-mentioned word, and details are not described herein.
Above-mentioned wandering star wheel assembly is set in the burnishing device, is improved by the outer circumference surface to erratic star wheel 100,
In its inner peripheral surface setting protrusion 300, the contact area with polished part 200 in polishing process is reduced, it is polished to reach mitigation
The degree that 200 outer circumference surface of part is affected；Alternatively, middle circle 400 is added, it can be between erratic star wheel 100 and polished part
Among 200, first with the outer circumference surface friction of middle circle 400, middle circle 400 rotates 100 inner peripheral surface of erratic star wheel when polishing,
It drives polished part 200 to rotate again, reduces the polishing thread of the rotation of polished part 200, it can be significantly by both methods
Reduce the degree that the outer circumference surface of polished part 200 is polished.
Finally it should be noted that：The above various embodiments is only to illustrate the technical solution of the utility model, rather than limits it
System；Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should
Understand：It still can be with technical scheme described in the above embodiments is modified, either to which part or whole
Technical characteristic carries out equivalent replacement；And these modifications or replacements, this practicality that it does not separate the essence of the corresponding technical solution are new
The range of each embodiment technical solution of type.
Claims (10)
1. a kind of wandering star wheel assembly, which is characterized in that including：Erratic star wheel (100), the erratic star wheel (100) has trepanning, described
The inner peripheral surface of erratic star wheel (100) is equipped with drive mechanism, and the drive mechanism connects with the outer circumference surface of polished part (200)
It touches, and the drive mechanism is used to protect the outer circumference surface of polished part (200).
2. wandering star wheel assembly according to claim 1, which is characterized in that the drive mechanism includes being arranged in the wandering star
It takes turns multiple raised (300) of the inner peripheral surface of (100), each described raised (300) radially-inwardly setting along the erratic star wheel (100)
It sets.
3. wandering star wheel assembly according to claim 1, which is characterized in that the drive mechanism includes being arranged in the wandering star
Take turns the middle circle (400) of the inner peripheral surface of (100), outer circumference surface and the erratic star wheel (100) of the middle circle (400)
Inner peripheral surface be in contact.
4. wandering star wheel assembly according to claim 3, which is characterized in that on the inner peripheral surface of the middle circle (400)
Equipped with multiple raised (300), each described raised (300) being disposed radially inwardly along the middle circle (400).
5. wandering star wheel assembly according to claim 4, which is characterized in that the protrusion (300) is located at the erratic star wheel
(100) on, the protrusion (300) is identical with the material of the erratic star wheel (100), and the two is integrally formed；Either, the protrusion
(300) different with the material of the erratic star wheel (100), the protrusion (300) and the erratic star wheel (100) are using detachable solid
Fixed connection；
The protrusion (300) is located on the middle circle (400), the material of protrusion (300) and the middle circle (400)
Matter is identical, and the two is integrally formed；Either, raised (300) are different with the material of the middle circle (400), described convex
(300) are played to be fixedly connected using detachable with the middle circle (400).
6. wandering star wheel assembly according to claim 5, which is characterized in that the axis direction along polished part (200), each institute
The thickness for stating raised (300) is not more than the thickness of the erratic star wheel (100).
7. wandering star wheel assembly according to claim 5, which is characterized in that the axis direction along polished part (200), it is described
Raised (300) be from top to bottom disposed with it is multigroup, wherein each group includes multiple protrusions (300).
8. according to claim 2,4,6-7 any one of them wandering star wheel assemblies, which is characterized in that the cross of the protrusion (300)
Cross sectional shape is using any one of circle, semicircle, triangle, rectangular.
9. according to claim 2,4,6-7 any one of them wandering star wheel assemblies, which is characterized in that the protrusion (300) uses
The structure type of idler wheel, the axis direction of the idler wheel is parallel with the axis of polished part (200), and the idler wheel is articulated in institute
On the inner peripheral surface for stating erratic star wheel (100).
10. a kind of burnishing device, which is characterized in that including the claims 1-9 any one of them wandering star wheel assemblies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721773581.8U CN207757439U (en) | 2017-12-18 | 2017-12-18 | Wandering star wheel assembly and its burnishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721773581.8U CN207757439U (en) | 2017-12-18 | 2017-12-18 | Wandering star wheel assembly and its burnishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207757439U true CN207757439U (en) | 2018-08-24 |
Family
ID=63187416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721773581.8U Active CN207757439U (en) | 2017-12-18 | 2017-12-18 | Wandering star wheel assembly and its burnishing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207757439U (en) |
-
2017
- 2017-12-18 CN CN201721773581.8U patent/CN207757439U/en active Active
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Address after: 215000 room 103, building C, North District, Founder science park, No. 188, Suhong East Road, Suzhou Industrial Park, Suzhou area, China (Jiangsu) pilot Free Trade Zone, Suzhou City, Jiangsu Province Patentee after: New Meguiar (Suzhou) semiconductor technology Co.,Ltd. Address before: 215000 Suzhou nano city nw-20 107, 108, 109, 110, No. 99, Jinjihu Avenue, Suzhou Industrial Park, Jiangsu Province Patentee before: SUZHOU SICREAT NANOTECH Co.,Ltd. |
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