CN108732182A - 片材检查装置及检查系统 - Google Patents

片材检查装置及检查系统 Download PDF

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Publication number
CN108732182A
CN108732182A CN201810139060.XA CN201810139060A CN108732182A CN 108732182 A CN108732182 A CN 108732182A CN 201810139060 A CN201810139060 A CN 201810139060A CN 108732182 A CN108732182 A CN 108732182A
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CN
China
Prior art keywords
checked property
check device
sheet material
characteristic quantity
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810139060.XA
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English (en)
Chinese (zh)
Inventor
宫田佳昭
松下明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Publication of CN108732182A publication Critical patent/CN108732182A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N2021/8909—Scan signal processing specially adapted for inspection of running sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
CN201810139060.XA 2017-04-21 2018-02-09 片材检查装置及检查系统 Pending CN108732182A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-084561 2017-04-21
JP2017084561A JP7005930B2 (ja) 2017-04-21 2017-04-21 シート検査装置及び検査システム

Publications (1)

Publication Number Publication Date
CN108732182A true CN108732182A (zh) 2018-11-02

Family

ID=63940505

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810139060.XA Pending CN108732182A (zh) 2017-04-21 2018-02-09 片材检查装置及检查系统

Country Status (3)

Country Link
JP (1) JP7005930B2 (ja)
KR (1) KR20180118513A (ja)
CN (1) CN108732182A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358566A (zh) * 2020-03-06 2021-09-07 株式会社东芝 检查终端装置、检查装置、检查系统以及检查程序
TWI753424B (zh) * 2019-06-25 2022-01-21 日商歐姆龍股份有限公司 外觀檢查管理系統、外觀檢查管理裝置、外觀檢查管理方法以及程式
CN114303451A (zh) * 2019-09-11 2022-04-08 株式会社富士 元件安装机
TWI767229B (zh) * 2019-06-25 2022-06-11 日商歐姆龍股份有限公司 外觀檢查管理系統、外觀檢查管理裝置、外觀檢查管理方法以及程式
CN115298539A (zh) * 2020-03-24 2022-11-04 日本电产株式会社 外观检查系统和计算机程序

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11435059B2 (en) 2018-09-26 2022-09-06 Panasonic Intellectual Property Management Co., Ltd. Wavelength conversion member and white light emitting device using same
KR102272037B1 (ko) * 2019-04-01 2021-07-02 주식회사 성우하이텍 피어싱 홀 검사 장치 및 방법
JP7502590B2 (ja) * 2019-08-21 2024-06-19 ダイキン工業株式会社 空気処理装置および汚れ推定システムならびに汚れ推定方法
WO2022153743A1 (ja) * 2021-01-15 2022-07-21 パナソニックＩｐマネジメント株式会社 判定システム、判定方法及びプログラム
JP7330524B2 (ja) * 2021-04-22 2023-08-22 株式会社ヒューテック 紙製品検査装置、および紙製品加工システム
JP2023032770A (ja) * 2021-08-27 2023-03-09 株式会社東芝 二次電池のための検査システム及び検査方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101669023A (zh) * 2007-04-20 2010-03-10 株式会社名南制作所 木材的检测方法及装置及程序
CN103575737A (zh) * 2012-07-18 2014-02-12 欧姆龙株式会社 缺陷检查方法及缺陷检查装置
CN104903712A (zh) * 2013-01-30 2015-09-09 株式会社日立高新技术 缺陷观察方法以及缺陷观察装置
JP2016130672A (ja) * 2015-01-13 2016-07-21 倉敷紡績株式会社 シート検査装置および方法

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JPH05172752A (ja) * 1991-10-24 1993-07-09 Kawasaki Steel Corp 複合鋼板の溶接性に寄与する金属粒子の分布状態測定方法および装置
JP3728965B2 (ja) 1999-02-01 2005-12-21 Ｊｆｅスチール株式会社 表面検査装置
JP2003114197A (ja) 2001-10-05 2003-04-18 Nippon Steel Corp 疵判定のための画像処理装置、方法、コンピュータプログラム、及びコンピュータ読み取り可能な記憶媒体
JP4950951B2 (ja) 2008-06-25 2012-06-13 パナソニック株式会社 光透過性フィルムの欠陥検出装置及び光透過性フィルムの切断装置
JP2011013007A (ja) 2009-06-30 2011-01-20 Kobe Steel Ltd 磁粉探傷装置
JP5825278B2 (ja) 2013-02-21 2015-12-02 オムロン株式会社 欠陥検査装置および欠陥検査方法
JP6314557B2 (ja) 2014-03-12 2018-04-25 オムロン株式会社 シート検査装置
TWI627588B (zh) 2015-04-23 2018-06-21 日商思可林集團股份有限公司 檢查裝置及基板處理裝置
JP6473047B2 (ja) 2015-05-26 2019-02-20 株式会社Ｓｃｒｅｅｎホールディングス 検査装置および基板処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101669023A (zh) * 2007-04-20 2010-03-10 株式会社名南制作所 木材的检测方法及装置及程序
CN103575737A (zh) * 2012-07-18 2014-02-12 欧姆龙株式会社 缺陷检查方法及缺陷检查装置
CN104903712A (zh) * 2013-01-30 2015-09-09 株式会社日立高新技术 缺陷观察方法以及缺陷观察装置
JP2016130672A (ja) * 2015-01-13 2016-07-21 倉敷紡績株式会社 シート検査装置および方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI753424B (zh) * 2019-06-25 2022-01-21 日商歐姆龍股份有限公司 外觀檢查管理系統、外觀檢查管理裝置、外觀檢查管理方法以及程式
TWI767229B (zh) * 2019-06-25 2022-06-11 日商歐姆龍股份有限公司 外觀檢查管理系統、外觀檢查管理裝置、外觀檢查管理方法以及程式
CN114303451A (zh) * 2019-09-11 2022-04-08 株式会社富士 元件安装机
CN114303451B (zh) * 2019-09-11 2024-01-30 株式会社富士 元件安装机
CN113358566A (zh) * 2020-03-06 2021-09-07 株式会社东芝 检查终端装置、检查装置、检查系统以及检查程序
CN115298539A (zh) * 2020-03-24 2022-11-04 日本电产株式会社 外观检查系统和计算机程序

Also Published As

Publication number Publication date
JP2018179939A (ja) 2018-11-15
KR20180118513A (ko) 2018-10-31
JP7005930B2 (ja) 2022-01-24

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Application publication date: 20181102