CN108637491A - A kind of bottom plate rapid cutting device for graphene chip manufacture - Google Patents
A kind of bottom plate rapid cutting device for graphene chip manufacture Download PDFInfo
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- CN108637491A CN108637491A CN201810411149.7A CN201810411149A CN108637491A CN 108637491 A CN108637491 A CN 108637491A CN 201810411149 A CN201810411149 A CN 201810411149A CN 108637491 A CN108637491 A CN 108637491A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses a kind of bottom plate rapid cutting devices for graphene chip manufacture,Including bottom plate,It is connected to box and mounting plate,There is electric cylinder on the top of the bottom plate by screw connection,And the upper end of electric cylinder is fixedly connected with the connecting plate being vertically arranged,The side of connecting plate is fixedly connected with limiting plate,The side of connecting plate is equipped with push-rod electric machine by screw,The output end of push-rod electric machine is connected with link block by shaft coupling,The downside of link block, which is glued, laser tube,The top of bottom plate is placed with protection gas holding bottle,The outlet of protection gas holding bottle is connected with communicating pipe,The upper socket of laser tube has connection box,The present apparatus is cut using laser,It avoids and graphene substrate is caused to pull,It avoids and generates a large amount of clast,The edge of graphene chip is fixed by the way of infrared induction,Facilitate cutting,During cutting,Air jet pipe can spray protective gas,Prevent graphene from being aoxidized.
Description
Technical field
The present invention relates to graphene chip manufacture technical field more particularly to a kind of bottom plates for graphene chip manufacture
Rapid cutting device.
Background technology
Graphene is the two dimension crystalline substance for the only one layer atomic thickness for being stripped out from graphite material, being made of carbon atom
Body, is that current nature is most thin, the highest material of intensity, replaces silicon with graphene, the speed of service of computer processor will
Fast hundreds times, and graphene has wide wave
Section absorbability, single-layer graphene can absorb 2.3% light, such as a kind of semiconductor refrigerating graphene core of Chinese patent
Piece, the patent No. 201610373597.3, in chip graphene in infrared acquisition field in application, cooling and warming energy can be improved
Power, improves sensitivity, and graphene chip has become popular research direction.
When preparing graphene, since graphene is very thin, graphene is typically to be grown in substrate top, the cutting to graphene
It is exactly largely the cutting to substrate, the graphene of early stage is to be grown in copper base top, currently, glass is due to PET film
Lighter, translucency is good, and more preferably, the graphene film of PET base has been obtained for being widely applied optical property, due to glass
Substrate binding force is strong, and service life is more long, and graphene thickness control is accurate, and repeatability is strong, such as Chinese patent
A kind of preparation method of Graphene glass chip, glass substrate disclosed in 201610930063.6 are also at conceptual phase.
Graphene chip is precise electronic product, and in cutting, the requirement to cleanliness factor is very high, and machine cuts will produce greatly
The clast of amount, and be easy to pull and lead to graphene substrate deformation, the quality of graphene chip is influenced, in addition, the meeting in cutting
A large amount of heat is generated, graphene is easy to cause and is aoxidized, destroy the structure of chip, lead to chip rejection.
Invention content
The purpose of the present invention is to solve disadvantages existing in the prior art, and the one kind proposed is used for graphene chip
The bottom plate rapid cutting device of processing.
To achieve the goals above, present invention employs following technical solutions：
A kind of bottom plate rapid cutting device for graphene chip manufacture, including bottom plate, connection box and mounting plate, the bottom plate
Top have electric cylinder by screw connection, and the upper end of electric cylinder is fixedly connected with the connecting plate being vertically arranged, connecting plate
Side is fixedly connected with limiting plate, and the side of connecting plate is equipped with push-rod electric machine by screw, and the output end of push-rod electric machine passes through
Shaft coupling is connected with link block, and the downside of link block, which is glued, laser tube, and the top of bottom plate is placed with protection gas holding bottle, protection
The outlet of gas holding bottle is connected with communicating pipe, and the upper socket of laser tube has connection box, one end of communicating pipe to extend to connection box
Inside, the top of bottom plate is equipped with mounting plate by bolt, and the side of mounting plate is provided with servo motor, servo motor it is defeated
Outlet is connected with ball-screw by shaft coupling, and movable plate is equipped on the upside of mounting plate, and the downside screw connection of movable plate has
Guide sleeve is socketed with guide rod on the inside of guide sleeve, fixed block is welded on the upside of movable plate, fixture block is provided on the upside of fixed block, Gu
The top for determining block offers placing groove, and connecting rod is welded on the downside of fixture block, and the lower end of connecting rod extends to the inside of placing groove,
The lower end of connecting rod is equipped with permanent magnet, and the bottom of placing groove is equipped with electromagnet.
Preferably, the quantity of the electric cylinder is 2 to 10, and the top of electric cylinder passes through the downside of bolt and connecting plate
Connection.
Preferably, the quantity of the limiting plate is two pieces, and two pieces of limiting plates are separately mounted to the both sides of link block, limit
Plate offers limiting slot close to the side of link block, and the both sides of link block are respectively welded connecting shaft, and the top of connecting shaft passes through
Bearing is connected with lantern ring, and lantern ring is socketed in the inside of limiting slot.
Preferably, the cross section structure annular in shape of the connection box, and the bottom for being connected to box offers fumarole, fumarole
Inside be plugged with air jet pipe, air jet pipe is arranged using the central axes for being connected to box as axis circular array, and air jet pipe is from inside to outside
Including 2 to 5 layers, the length of air jet pipe is successively decreased successively from inside to outside.
Preferably, the upper socket of the ball-screw has feed screw nut bearing, and feed screw nut bearing and movable plate are logical
Screw connection is crossed, one end of ball-screw is connected with mounting plate by single-row bearing.
Preferably, the top of the mounting plate offers sliding slot, and one end of guide rod and the inner wall of sliding slot are welded to connect.
Preferably, the quantity of the fixed block is two pieces, and two pieces of fixed blocks are vertical with ball-screw.
Preferably, the bottom interior wall splicing of the placing groove has spring, and the upper end of spring and connecting rod are glued, permanent magnet
The inside of spring is socketed in electromagnet.
Preferably, the top of the fixed block offers the first mounting groove, and the inside of the first mounting groove be equipped with it is infrared
Receiver offers the second mounting groove on the downside of fixture block, and the inside of the second mounting groove is equipped with infrared emittance, the first mounting groove
Upside and the second mounting groove on the downside of be separately installed with glass plate.
The beneficial effects of the invention are as follows：
1, the present invention cuts graphene substrate using laser in place machinery knives, avoids and causes to draw to graphene substrate
It pulls, also avoids generating a large amount of clast, be conducive to the quality for improving graphene chip.
2, the present invention is fixed the edge of graphene chip by the way of infrared induction, when infrared light is blocked,
Fixture block falls and fixed block together clamps graphene substrate together with backing plate, facilitates cutting.
3, for the present invention during cutting, air jet pipe can spray protective gas, on the one hand the graphene to just having cut
Substrate cools down, and on the other hand prevents the graphene just cut from being contacted with oxygen, and graphene is avoided to be aoxidized.
Description of the drawings
Fig. 1 is that a kind of side view structure of bottom plate rapid cutting device for graphene chip manufacture proposed by the present invention is shown
It is intended to；
Fig. 2 is a kind of mounting plate plan structure of bottom plate rapid cutting device for graphene chip manufacture proposed by the present invention
Schematic diagram；
Fig. 3 is that a kind of local overlooking structure of bottom plate rapid cutting device for graphene chip manufacture proposed by the present invention is shown
It is intended to；
Fig. 4 is that enlarged structure is shown at a kind of A of bottom plate rapid cutting device for graphene chip manufacture proposed by the present invention
It is intended to；
Fig. 5 is that a kind of local front view structure of bottom plate rapid cutting device for graphene chip manufacture proposed by the present invention is shown
It is intended to.
In figure：1 bottom plate, 2 electric cylinders, 3 connecting plates, 4 limiting plates, 41 limiting slots, 5 push-rod electric machines, 6 link blocks, 7 lantern rings, 8
Laser tube, 9 protection gas holding bottles, 10 communicating pipes, 11 connection boxes, 12 air jet pipes, 13 mounting plates, 14 servo motors, 15 ball wires
Thick stick, 16 movable plates, 17 guide sleeves, 18 guide rods, 19 fixed blocks, 191 infrared remote receivers, 20 fixture blocks, 201 infrared emittances, 202 connections
Bar, 21 placing grooves, 22 permanent magnets, 23 springs, 24 electromagnets.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
Embodiment one：A kind of bottom plate rapid cutting device for graphene chip manufacture, referring to Fig.1-5, including bottom plate
1, it is connected to box 11 and mounting plate 13, there is electric cylinder 2 on the top of bottom plate 1 by screw connection, and the quantity of electric cylinder 2 is 3, and electricity
The top of dynamic cylinder 2 is connected by bolt with the downside of connecting plate 3, and the side of connecting plate 3 is fixedly connected with limiting plate 4, connecting plate 3
Side push-rod electric machine 5 is equipped with by screw, the output end of push-rod electric machine 5 is connected with link block 6, link block by shaft coupling
6 downside, which is glued, laser tube 8, and 6 downside of link block is also equipped with miniature webcam, and the top of bottom plate 1 is placed with laser
Device, the model MFSC-500W of laser generator, laser generator and laser tube 8 connect, and the top of bottom plate 1 is placed with protection
Gas holding bottle 9, protection gas holding bottle 9 are equipped with automatically controlled airtight valve, the other end series connection pressure reducer of automatically controlled airtight valve, pressure reducer
The other end communicating pipe 10 is installed, the upper socket of laser tube 8 has connection box 11, and one end of communicating pipe 10 extends to connection box
11 inside is connected to the cross section structure annular in shape of box 11, and the bottom for being connected to box 11 offers fumarole, the inside of fumarole
Be plugged with air jet pipe 12, air jet pipe 12 is arranged using the central axes for being connected to box 11 as axis circular array, and air jet pipe 12 by interior and
Outer includes 2 layers, and the length of air jet pipe 12 is successively decreased successively from inside to outside, and the top of bottom plate 1 is equipped with mounting plate 13 by bolt, peace
The side of loading board 13 is provided with servo motor 14, and the output end of servo motor 14 is connected with ball-screw 15 by shaft coupling, peace
The upside of loading board 13 is equipped with movable plate 16, and the upper socket of ball-screw 15 has feed screw nut bearing, and feed screw nut bearing
With movable plate 16 by screw connection, one end of ball-screw 15 is connected with mounting plate 13 by single-row bearing, movable plate 16
Downside screw connection has guide sleeve 17, the inside of guide sleeve 17 to be socketed with guide rod 18, and the top of mounting plate 13 offers sliding slot, and guide rod
18 one end and the inner wall of sliding slot are welded to connect, and the upside of movable plate 16 is welded with fixed block 19, and the quantity of fixed block 19 is two
Block, and two pieces of fixed blocks 19 are vertical with ball-screw 15, the upside of fixed block 19 is provided with fixture block 20, the top of fixed block 19
The first mounting groove is offered, and the inside of the first mounting groove is equipped with infrared remote receiver 191, the downside of fixture block 20 offers second
The inside of mounting groove, the second mounting groove is equipped with infrared emittance 201, and infrared remote receiver 191 and infrared emittance 201 are one
It covers, model E76-5JA (GDK-5), glass plate is separately installed on the downside of the upside of the first mounting groove and the second mounting groove, Gu
The top for determining block 19 offers placing groove 21, and the downside of fixture block 20 is welded with connecting rod 202, and the lower end of connecting rod 202 extends to
The cross section of the inside of placing groove 21, connecting rod 202 is rectangle, prevents fixture block 20 from rotating, the lower end of connecting rod 202 is equipped with forever
The bottom of magnet 22, placing groove 21 is equipped with electromagnet 24, and infrared remote receiver 191 is electrically connected with control switch, control switch
It is electrically connected with electromagnet 24, control switch is in normal off state, and the bottom interior wall splicing of placing groove 21 has spring 23, spring 23
Material be copper, do not have magnetism, the upper end of spring 23 and connecting rod 202 are glued, and permanent magnet 22 and electromagnet 24 are socketed in spring
23 inside.
In the present embodiment, when carrying out graphene substrate cut, device is powered, closing device master switch will be graphene-based
The quadrangle of plate is pasted onto backing plate top, and a certain angle of graphene substrate is printed on positioning origin, together together with backing plate by graphene substrate
It is placed on the top of two fixed blocks 19, the infrared ray that infrared emittance 201 emits at this time is blocked, and infrared remote receiver 191 receives
Transmitting electric signal is switched less than infrared ray and to control, control switch is closed, and electromagnet 24 is powered, and electromagnet 24 is to permanent magnet 22
Attraction is generated, permanent magnet 22 falls by attraction, spring 23 is compressed, and connecting rod 202 is to being retracted inside placing groove 21, fixture block
20 move downward, and graphene substrate and backing plate are clamped, and electric cylinder 2, push-rod electric machine 5, automatically controlled airtight valve, laser generator and watch
It takes motor 14 to be controlled by the central processing unit of the device, in equipment debugging, dimension data is programmed into the form of program and is deposited
Module is stored up, when cutting, cutting process is selected by man-machine interface, presses starting switch, electric cylinder 2, push-rod electric machine 5 and servo electricity
Machine 14 starts, and push-rod electric machine 5 drives link block 6 to be moved along the length direction of limiting plate 4, and the lantern ring 7 on 6 top of link block is limiting
41 internal slide of slot, lantern ring 7 rotates when sliding, reduces frictional force, and two limiting plates 4 play the role of limit to link block 6, prevent
It shakes, and plays the stability of height cutting, and servo motor 14 rotates, and drives ball-screw 15 to rotate, ball-screw 15 is around leading screw
Nut bearing rotates, and converts circular motion to linear motion, ball-screw 15 drives movable plate 16 along the length of ball-screw 15
Direction movement is spent, guide sleeve 17 slides on guide rod 18, prevents movable plate 16 from shaking, with the movement of movable plate 16 and laser tube 8,
Miniature webcam is imaged, and by the image processing module of image transmitting to mainboard, image processing module processing identifies image, until
When the launch point alignment positioning origin of laser tube 8, electric signal is sent to central processing unit, central processing unit enables 14 He of servo motor
Push-rod electric machine 5 suspends, and controls electric cylinder and move down, and 3 electric cylinders 2 move synchronously, and enables the decline of connecting plate 3, reduces laser tube 8
Height, after laser tube 8 positions, central processing unit controls automatically controlled airtight valve and opens, and protection gas holding bottle 9 stores nitrogen, protection
Gas enters from communicating pipe 10 is connected to box 11, then is sprayed through air jet pipe 12, is protected to cutting part, central processing unit control swashs
Optical generator is opened, and laser beam is projected through laser tube 8, and at the same time, servo motor 14 and push-rod electric machine 5 coordinate according to pre-set programs
The cutting to graphene substrate is completed in movement, and after cutting, the automatically controlled airtight valve of central controller controls and laser generator close
It closes, disconnects device master switch, drop carries 24 every time and loses magnetism, and spring 23 is sprung back, and pushes connecting rod 202 to move up, by fixture block 20
It jacks up, you can be removed together graphene substrate together with backing plate.
Embodiment two：A kind of bottom plate rapid cutting device for graphene chip manufacture, referring to Fig.1-5, with embodiment
Unlike one, protection gas holding bottle 9 stores helium, can avoid because device electric leakage causes in the state of electric discharge, nitrogen
Nitric oxide is generated with the oxygen reaction in air, improves safety coefficient.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (9)
1. a kind of bottom plate rapid cutting device for graphene chip manufacture, including bottom plate（1）, connection box（11）And mounting plate
（13）, which is characterized in that the bottom plate（1）Top have electric cylinder by screw connection（2）, and electric cylinder（2）Upper end it is solid
Surely it is connected with the connecting plate being vertically arranged（3）, connecting plate（3）Side be fixedly connected with limiting plate（4）, connecting plate（3）One
Side is equipped with push-rod electric machine by screw（5）, push-rod electric machine（5）Output end link block is connected with by shaft coupling（6）, connection
Block（6）Downside be glued have laser tube（8）, bottom plate（1）Top be placed with protection gas holding bottle（9）, protect gas holding bottle（9）
Outlet be connected with communicating pipe（10）, laser tube（8）Upper socket have connection box（11）, communicating pipe（10）One end extend to
It is connected to box（11）Inside, bottom plate（1）Top mounting plate is equipped with by bolt（13）, mounting plate（13）Side be provided with
Servo motor（14）, servo motor（14）Output end ball-screw is connected with by shaft coupling（15）, mounting plate（13）It is upper
Side is equipped with movable plate（16）, movable plate（16）Downside screw connection have guide sleeve（17）, guide sleeve（17）Inside be socketed with and lead
Bar（18）, movable plate（16）Upside be welded with fixed block（19）, fixed block（19）Upside be provided with fixture block（20）, fixed block
（19）Top offer placing groove（21）, fixture block（20）Downside be welded with connecting rod（202）, connecting rod（202）Lower end
Extend to placing groove（21）Inside, connecting rod（202）Lower end permanent magnet is installed（22）, placing groove（21）Bottom installation
There is electromagnet（24）.
2. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The electric cylinder（2）Quantity be 2 to 10, and electric cylinder（2）Top pass through bolt and connecting plate（3）Downside connection.
3. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The limiting plate（4）Quantity be two pieces, and two pieces of limiting plates（4）It is separately mounted to link block（6）Both sides, limiting plate（4）
Close to link block（6）Side offer limiting slot（41）, link block（6）Both sides be respectively welded connecting shaft, connecting shaft
Top is connected with lantern ring by bearing（7）, lantern ring（7）It is socketed in limiting slot（41）Inside.
4. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The connection box（11）Cross section structure annular in shape, and be connected to box（11）Bottom offer fumarole, the inside of fumarole
It is plugged with air jet pipe（12）, air jet pipe（12）To be connected to box（11）Central axes be the arrangement of axis circular array, and air jet pipe
（12）Include 2 to 5 layers from inside to outside, air jet pipe（12）Length successively decrease successively from inside to outside.
5. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The ball-screw（15）Upper socket have feed screw nut bearing, and feed screw nut bearing and movable plate（16）Connected by screw
It connects, ball-screw（15）One end and mounting plate（13）It is connected by single-row bearing.
6. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The mounting plate（13）Top offer sliding slot, and guide rod（18）One end and the inner wall of sliding slot be welded to connect.
7. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The fixed block（19）Quantity be two pieces, and two pieces of fixed blocks（19）And ball-screw（15）Vertically.
8. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The placing groove（21）Bottom interior wall splicing have spring（23）, and spring（23）Upper end and connecting rod（202）It is glued, permanent magnetism
Body（22）And electromagnet（24）It is socketed in spring（23）Inside.
9. a kind of bottom plate rapid cutting device for graphene chip manufacture according to claim 1, which is characterized in that
The fixed block（19）Top offer the first mounting groove, and the inside of the first mounting groove is equipped with infrared remote receiver（191）,
Fixture block（20）Downside offer the second mounting groove, the inside of the second mounting groove is equipped with infrared emittance（201）, the first installation
It is separately installed with glass plate on the downside of the upside of slot and the second mounting groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810411149.7A CN108637491A (en) | 2018-05-02 | 2018-05-02 | A kind of bottom plate rapid cutting device for graphene chip manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810411149.7A CN108637491A (en) | 2018-05-02 | 2018-05-02 | A kind of bottom plate rapid cutting device for graphene chip manufacture |
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| CN108637491A true CN108637491A (en) | 2018-10-12 |
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| CN201810411149.7A Pending CN108637491A (en) | 2018-05-02 | 2018-05-02 | A kind of bottom plate rapid cutting device for graphene chip manufacture |
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| CN111162443A (en) * | 2019-12-31 | 2020-05-15 | 芯思杰技术(深圳)股份有限公司 | Welding method and welding apparatus |
| CN113582527A (en) * | 2021-08-24 | 2021-11-02 | 江西艺品高玻璃有限公司 | High-end glass-cutting device for equipment manufacturing |
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| CN113617790A (en) * | 2021-07-15 | 2021-11-09 | 荆门市格林美新材料有限公司 | Battery electrified safety cutting device |
| CN113582527A (en) * | 2021-08-24 | 2021-11-02 | 江西艺品高玻璃有限公司 | High-end glass-cutting device for equipment manufacturing |
| CN113878249A (en) * | 2021-11-08 | 2022-01-04 | 湖南南松光电科技有限公司 | Laser cutting equipment is used in processing of cell-phone screen |
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