CN109513638A - A kind of comprehensive AOI detection device of high efficiency chip appearance - Google Patents

A kind of comprehensive AOI detection device of high efficiency chip appearance Download PDF

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Publication number
CN109513638A
CN109513638A CN201811571993.2A CN201811571993A CN109513638A CN 109513638 A CN109513638 A CN 109513638A CN 201811571993 A CN201811571993 A CN 201811571993A CN 109513638 A CN109513638 A CN 109513638A
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CN
China
Prior art keywords
manipulator
detection device
mould group
comprehensive
high efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811571993.2A
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Chinese (zh)
Inventor
严先文
罗昌凌
王珊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intelligent Automation Equipment Zhuhai Co Ltd
Original Assignee
Zhuhai Damien Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhuhai Damien Technology Co Ltd filed Critical Zhuhai Damien Technology Co Ltd
Priority to CN201811571993.2A priority Critical patent/CN109513638A/en
Publication of CN109513638A publication Critical patent/CN109513638A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/342Sorting according to other particular properties according to optical properties, e.g. colour
    • B07C5/3422Sorting according to other particular properties according to optical properties, e.g. colour using video scanning devices, e.g. TV-cameras
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/02Measures preceding sorting, e.g. arranging articles in a stream orientating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/38Collecting or arranging articles in groups

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  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Manipulator (AREA)

Abstract

The present invention is intended to provide a kind of comprehensive AOI detection device of high efficiency chip appearance that can effectively detect six outer surfaces of micro chip and pick and place with high accuracy positioning with high-speed motion performance.The present invention includes rack, display screen, operation button and keyboard, it further includes the pedestal set on machine frame inside, the first manipulator in the middle part of the pedestal, feed mechanism set on described pedestal one end, set on the cutting agency of the pedestal other end, the second manipulator above the feed mechanism, third manipulator above the cutting agency, upper surface camera mould group between first manipulator and second manipulator, upper surface mould group below the upper surface camera mould group and the five face mould groups set on the feed mechanism side.The present invention is applied to the technical field of chip AOI detection device.

Description

A kind of comprehensive AOI detection device of high efficiency chip appearance
Technical field
The present invention relates to a kind of chip AOI detection device, in particular to a kind of comprehensive AOI detection of high efficiency chip appearance is set It is standby.
Background technique
With the fast development of artificial intelligence, electronics industry is huge rapidly, demand and production efficiency to electronic component It is gradually increased.Currently, the appearance detection to PCB, flexible screen and SMT pasting chip is gradually changed into machine vision by artificial detection Detection, carrying out the equipment that optical appearance detects automatically by machine vision is AOI detection device.With traditional artificial detection phase Than the detection efficiency of AOI detection device is higher, testing cost is lower, while detection data can be carried out feedback and archive, reliability It is higher.
Currently, AOI detection device is mainly used in PCB detection field and flat-faced screen detection field, these detections are produced Product are relatively large sized;And the AOI of micro chip is detected, corresponding AOI detection device is using less.Meanwhile chip AOI Detection device mainly carries out the detection of single side appearance to chip, mainly carries out appearance detection to an outer surface, there are certain offices It is sex-limited, it cannot detect the presentation quality and mounting quality in remaining 5 face.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide it is a kind of can effectively detect it is small It six outer surfaces of chip and is picked and placed with high accuracy positioning and the high efficiency chip appearance comprehensive AOI detection of high-speed motion performance Equipment.
The technical scheme adopted by the invention is that: the present invention includes rack, display screen, operation button and keyboard, it is also wrapped Include set on the pedestal of machine frame inside, the first manipulator in the middle part of the pedestal, set on described pedestal one end feed mechanism, Set on the cutting agency of the pedestal other end, the second manipulator above the feed mechanism, it is set to the blanking machine Third manipulator above structure, is set the upper surface camera mould group between first manipulator and second manipulator Upper surface mould group below the upper surface camera mould group and the five face mould groups set on the feed mechanism side, the upper table Face camera mould group, first manipulator, second manipulator and the third manipulator are slidably connected with the pedestal.
By above scheme as it can be seen that first manipulator, second manipulator and the third manipulator are able to achieve core The automatic transporting of each station of piece, manipulator are driven by linear motor, and the feed mechanism and the cutting agency realize core The charging tray automatic transporting of piece, the high accuracy positioning that structure in summary realizes this equipment picks and places and high-speed motion performance;Institute State the detection that five face mould groups realize five outer surfaces of chip, i.e. the appearance detection of four lateral surfaces and a bottom surface, manipulator Four chips are carried every time to the five face moulds group, and the five face moulds group successively detects four chips;The upper surface Camera mould group can successively carry out the appearance detection of upper surface to four chips being placed in the upper surface mould group;So this The automatic loading/unloading for being able to achieve chip and the AOI detection of invention are able to achieve six faces detection of chip, i.e. 3D5S detection and MSI Detection;The present invention can will test picture and detection parameters Real-time Feedback by image procossing identifying system and chip detecting system Onto the display screen, convenient for grasping real time status of the invention, have operate conveniently, high measurement accuracy, high detection efficiency and The advantages of good human-computer interaction is experienced.
One preferred embodiment is that first manipulator, second manipulator and the third manipulator include two Group manipulator, the manipulator are equipped with several vacuum slots.
As above scheme as it can be seen that the present invention is operated using the automatic clamping and placing material that manipulator described in six groups carries out chip, six groups The manipulator provides power by linear motor, is set on each manipulator there are four vacuum slot, the vacuum is inhaled Mouth is connected with external vacuum generator, has the characteristics that high accuracy positioning pick-and-place and high-speed motion.
One preferred embodiment is, manipulator described in two groups on first manipulator pass through respectively two it is disposed in parallel First sliding rail is slidably connected with the pedestal.
One preferred embodiment is that defective products collecting region is equipped between the upper surface mould group and the cutting agency.
By above scheme as it can be seen that being provided with the defective products collecting region, the accumulation of unqualified chip is realized.
One preferred embodiment is that the feed mechanism and the cutting agency include empty feed bin and the empty feed bin pair Claim the full feed bin of setting and the guide rail between the empty feed bin and the full feed bin.
By above scheme as it can be seen that movement of the charging tray between the full feed bin and the empty feed bin for heap cartridge chip is led to The guide rail is crossed to realize automatic transportation.
One preferred embodiment is that the upper surface camera mould group includes that line slide rail and the line slide rail are sequentially connected Upper surface camera and the enlarging lens that are equipped with the upper surface camera.
By above scheme as it can be seen that the upper surface camera is moved to the upper of the upper surface mould group by the line slide rail The top of Surface testing station;The setting of the enlarging lens, the image of amplification chip upper surface shooting.
One preferred embodiment is to be set in the upper surface mould group there are two upper surface detection station and examined with the upper surface The upper surface light source that station is arranged in a one-to-one correspondence is surveyed, the upper surface detection station is equipped with several upper surfaces and detects groove.
By above scheme as it can be seen that two upper surface detection stations be all provided with there are four the upper surface detect groove, four The linear uniform arrangement of a upper surface detection groove, greatly improves the detection efficiency of chip.
One preferred embodiment is that the five face moulds group is equipped with five faces and detects groove, and the five faces detection groove is equipped with Five detection cameras and five detection light sources being arranged in a one-to-one correspondence with the detection camera.
By above scheme as it can be seen that the detection light source realizes the brightness supplement of four lateral surfaces of chip and a bottom surface;Five A detection camera is shot simultaneously, completes the five faces detection an of chip every time.
One preferred embodiment is that the inside of the rack is equipped with electrically-controlled component, first manipulator, second machinery Hand, the third manipulator, the upper surface camera mould group, the upper surface mould group and the five face moulds group with it is described automatically controlled Component electrical signal connection.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention;
Fig. 2 is partial structure diagram of the invention;
Fig. 3 is the structural schematic diagram of the upper surface camera mould group and the five face moulds group;
Fig. 4 is the structural schematic diagram of the upper surface mould group and the five face moulds group;
Fig. 5 is the structural schematic diagram of second manipulator and the third manipulator;
Fig. 6 is another structural schematic diagram of second manipulator and the third manipulator;
Fig. 7 is the structural schematic diagram of first manipulator;
Fig. 8 is the operation principle schematic diagram of the upper surface mould group;
Fig. 9 is the operation principle schematic diagram of the five face moulds group.
Specific embodiment
As shown in Figures 1 to 9, in the present embodiment, the present invention include rack 1, display screen 2, operation button 3, keyboard 4, Pedestal 5 inside rack 1, the first manipulator 11, the feeding set on described 5 one end of pedestal set on 5 middle part of pedestal Mechanism 12, set on the cutting agency 13 of 5 other end of pedestal, the second manipulator 14 above the feed mechanism 12, Third manipulator 15 above the cutting agency 13, be set to first manipulator 11 and second manipulator 14 it Between upper surface camera mould group 16, set on 16 lower section of the upper surface camera mould group upper surface mould group 17 and be set to the feeding Five face mould groups 18 of 12 side of mechanism, the upper surface camera mould group 16, first manipulator 11, second manipulator 14 And the third manipulator 15 is slidably connected with the pedestal 5, in this design, cabinet of the invention mainly by sheet metal shell, Guaranteeing the stability of this equipment, the quadrangle of 1 bottom of rack is equipped with footed glass castor, facilitates the movement of this equipment, inside It is provided with electric controling element;The operation of this AOI detection device and real-time detection state mainly pass through the keyboard 4, the behaviour Make button 3 and display screen 2 to complete, the performance parameter of equipment can be carried out by the operation keyboard 4 and the display screen 2 Setting, and real time inspection detecting state can start equipment by the operation button 3, be resetted and the operation of emergency stop, this It invents simple to operate, has good human-computer interaction experience.
First manipulator 11, second manipulator 14 and the third manipulator 15 include two groups of manipulators, The manipulator is equipped with several vacuum slots, and manipulator described in two groups on first manipulator 11 passes through two respectively First sliding rail 111 disposed in parallel is slidably connected with the pedestal 5, between the upper surface mould group 17 and the cutting agency 13 Equipped with defective products collecting region 19, in this design, it is all provided with that there are four vacuum slots on each manipulator, the manipulator is by straight Line motor provides power, and the vacuum slot is connected with external vacuum generator, and the manipulator draws four chips every time; Manipulator described in one on first manipulator 11 and second manipulator 14 can be by chips from the feed mechanism 12 Successively it is transported to the operation that detection and upper and lower material process are carried out in the five face moulds group 18 and the upper surface mould group 17, described the Chip can be successively transported to the upper surface mould group from the five face moulds group 18 by another manipulator on one manipulator 11 17 and the cutting agency 13 on carry out detection and upper and lower material process operation;The third manipulator 15 can be by chip from described Upper surface mould group 17 is transported to the cutting agency 13 and carries out blanking procedure;It has been detected via the upper surface camera mould group 16 Chip, when chip is undesirable, it is enterprising which by the corresponding manipulator is transported to the defective products collecting region 19 Row accumulation, when chip meets the requirements, which is just transported in the charging tray on the cutting agency 13.
The feed mechanism 12 and the cutting agency 13 include that empty feed bin 121 and the empty feed bin 121 are symmetrical arranged Full feed bin 122 and the guide rail 123 between the empty feed bin 121 and the full feed bin 122, in this design, the empty material For accumulating empty tray, the full feed bin 122 is used to accumulate the charging tray of full material in storehouse 121, charging tray the empty feed bin 121 with it is described The motor that is transported through between full feed bin 122 provides power and is combined the guide rail 123 and transported.
The upper surface camera mould group 16 includes line slide rail 161, the upper surface with the line slide rail 161 transmission connection Camera 162 and the enlarging lens 163 being equipped with the upper surface camera 162, this design in, the upper surface camera 162 Detection of taking pictures is carried out to chip through the enlarging lens 163.
It sets in the upper surface mould group 17 there are two upper surface detection station and a pair of with the upper surface detection station one The upper surface light source 171 that should be arranged, the upper surface detection station are equipped with several upper surfaces and detect groove 172, this design In, two upper surface detection stations are all provided with there are four upper surface detection groove 172, and four upper surfaces detections are recessed The linearly uniformly arrangement of slot 172, greatly improves the detection efficiency of chip.
The five face moulds group 18 is equipped with five faces and detects groove 181, sets that there are five detections on five face detection groove 181 Camera and five detection light sources being arranged in a one-to-one correspondence with the detection camera.
The inside of the rack 1 is equipped with electrically-controlled component 6, first manipulator 11, second manipulator 14, described the Three manipulators 15, the upper surface camera mould group 16, the upper surface mould group 17 and the five face moulds group 18 with it is described automatically controlled The connection of 6 electric signal of component.
The working principle of the invention:
The charging tray for filling chip to be measured is stacked in the area Man Liao of the feed mechanism 12, will be expired by the guide rail 123 Charging tray is transplanted on workspace, and manipulator described in one group of first manipulator 11 or second manipulator 14 is inhaled from charging tray It takes four chips to be moved in the five face moulds group 18 successively to carry out the appearance detection in five faces and pass through the machine after detection is qualified Groove 172, the upper surface are detected in four upper surfaces that four chips are placed into the upper surface detection station by tool hand Camera 162 successively carries out upper surface appearance detection to four chips, detects underproof chip by the manipulator and is put into institute It states and is accumulated in defective products collecting region 19, detect the charging tray that qualified chip is manually placed at the cutting agency 13 by the machinery It is interior;After the chip in a charging tray has detected, the empty tray of the feed mechanism 12 is moved to described by the guide rail 123 In the empty feed bin 121 of feed mechanism 12, while full charging tray being moved to from the full feed bin 122 of the feed mechanism 12 Workspace, full charging tray is moved in the full feed bin 122 of the cutting agency 13 by the cutting agency 13, while sky being expected Disk is moved to workspace from the empty feed bin 121 of the cutting agency 13.
In conclusion can completely of the present invention realizes the AOI detection process to six outer surfaces of chip, chip oneself is completed Dynamic loading and unloading.
The invention has the characteristics that:
1. being able to achieve comprehensive AOI detection of micro chip;
2. there is high accuracy positioning pick-and-place, high-speed motion and efficient spy by manipulator described in six groups of linear motor driving Point;
3. by image procossing identifying system and chip detecting system, this equipment can will test picture and detection parameters Real-time Feedback Onto display screen 2, convenient for grasping the real time status of AOI detection device, have operate conveniently, high-precision, high efficiency and good The advantages of human-computer interaction is experienced.
The present invention is applied to the technical field of chip AOI detection device.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (9)

1. a kind of comprehensive AOI detection device of high efficiency chip appearance, including rack (1), display screen (2), operation button (3) and key Disk (4), it is characterised in that: it further includes set on rack (1) internal pedestal (5), the first machine in the middle part of the pedestal (5) Tool hand (11), the feed mechanism (12) for being set to the pedestal (5) one end, the cutting agency for being set to the pedestal (5) other end (13), the third for being set to the second manipulator (14) above the feed mechanism (12), being set to above the cutting agency (13) Manipulator (15), the upper surface camera mould group being set between first manipulator (11) and second manipulator (14) (16), be set to the upper surface camera mould group (16) below upper surface mould group (17) and be set to the feed mechanism (12) side Five face mould groups (18), the upper surface camera mould group (16), first manipulator (11), second manipulator (14) and The third manipulator (15) is slidably connected with the pedestal (5).
2. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: described One manipulator (11), second manipulator (14) and the third manipulator (15) include two groups of manipulators, the machinery It is equipped with several vacuum slots on hand.
3. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 2, it is characterised in that: described Manipulator described in two groups on one manipulator (11) passes through two the first sliding rails (111) disposed in parallel and the pedestal respectively (5) it is slidably connected.
4. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: on described Defective products collecting region (19) are equipped between surface modes group (17) and the cutting agency (13).
5. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: on described Expecting mechanism (12) and the cutting agency (13) includes empty feed bin (121) and described empty feed bin (121) symmetrically arranged full material Storehouse (122) and the guide rail (123) being set between the empty feed bin (121) and full feed bin (122).
6. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: on described Surface camera mould group (16) includes line slide rail (161), the upper surface camera with the line slide rail (161) transmission connection (162) and with the upper surface camera (162) enlarging lens (163) being equipped with.
7. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: on described Upper surface detection station and the upper table being arranged in a one-to-one correspondence with the upper surface detection station there are two being set in surface modes group (17) Area source (171), the upper surface detection station are equipped with several upper surfaces detection groove (172).
8. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: described five Face mould group (18) is equipped with five faces detection groove (181), sets that there are five detect camera and five in five face detection groove (181) A detection light source being arranged in a one-to-one correspondence with the detection camera.
9. the comprehensive AOI detection device of a kind of high efficiency chip appearance according to claim 1, it is characterised in that: the machine The inside of frame (1) is equipped with electrically-controlled component (6), and first manipulator (11), second manipulator (14), the third are mechanical Hand (15), the upper surface camera mould group (16), the upper surface mould group (17) and the five face moulds group (18) with the electricity Control the connection of component (6) electric signal.
CN201811571993.2A 2018-12-21 2018-12-21 A kind of comprehensive AOI detection device of high efficiency chip appearance Pending CN109513638A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811571993.2A CN109513638A (en) 2018-12-21 2018-12-21 A kind of comprehensive AOI detection device of high efficiency chip appearance

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Application Number Priority Date Filing Date Title
CN201811571993.2A CN109513638A (en) 2018-12-21 2018-12-21 A kind of comprehensive AOI detection device of high efficiency chip appearance

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CN109513638A true CN109513638A (en) 2019-03-26

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110153040A (en) * 2019-06-23 2019-08-23 东莞广达智能科技有限公司 Efficient chip visual detection equipment
CN111729869A (en) * 2020-07-15 2020-10-02 珠海市精实测控技术有限公司 Machine vision analysis's car power device detecting system
CN113406081A (en) * 2021-06-21 2021-09-17 儒众智能科技(苏州)有限公司 Semiconductor probe appearance AOI detection equipment
CN113663933A (en) * 2021-09-14 2021-11-19 苏州天准科技股份有限公司 Workpiece vision sorting system

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Publication number Priority date Publication date Assignee Title
CN206038558U (en) * 2016-09-20 2017-03-22 深圳市希帝澳工业自动化设备有限公司 Multistation visual detection equipment
CN108080293A (en) * 2018-02-09 2018-05-29 桂林立德爱博半导体装备有限公司 A kind of chip-detecting apparatus of six faces inspection
CN109029268A (en) * 2018-08-01 2018-12-18 东莞盛翔精密金属有限公司 A kind of highly automated detection machine of mute key verticality
CN209491069U (en) * 2018-12-21 2019-10-15 珠海达明科技有限公司 A kind of comprehensive AOI detection device of high efficiency chip appearance

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN206038558U (en) * 2016-09-20 2017-03-22 深圳市希帝澳工业自动化设备有限公司 Multistation visual detection equipment
CN108080293A (en) * 2018-02-09 2018-05-29 桂林立德爱博半导体装备有限公司 A kind of chip-detecting apparatus of six faces inspection
CN109029268A (en) * 2018-08-01 2018-12-18 东莞盛翔精密金属有限公司 A kind of highly automated detection machine of mute key verticality
CN209491069U (en) * 2018-12-21 2019-10-15 珠海达明科技有限公司 A kind of comprehensive AOI detection device of high efficiency chip appearance

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110153040A (en) * 2019-06-23 2019-08-23 东莞广达智能科技有限公司 Efficient chip visual detection equipment
CN111729869A (en) * 2020-07-15 2020-10-02 珠海市精实测控技术有限公司 Machine vision analysis's car power device detecting system
CN113406081A (en) * 2021-06-21 2021-09-17 儒众智能科技(苏州)有限公司 Semiconductor probe appearance AOI detection equipment
CN113663933A (en) * 2021-09-14 2021-11-19 苏州天准科技股份有限公司 Workpiece vision sorting system

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