CN108619877A - A kind of washing spray device being suitable for sour gas, dust atmosphere - Google Patents
A kind of washing spray device being suitable for sour gas, dust atmosphere Download PDFInfo
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- CN108619877A CN108619877A CN201810791817.3A CN201810791817A CN108619877A CN 108619877 A CN108619877 A CN 108619877A CN 201810791817 A CN201810791817 A CN 201810791817A CN 108619877 A CN108619877 A CN 108619877A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8678—Removing components of undefined structure
- B01D53/8687—Organic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/869—Multiple step processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/30—Sulfur compounds
- B01D2257/302—Sulfur oxides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/40—Nitrogen compounds
- B01D2257/404—Nitrogen oxides other than dinitrogen oxide
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- Oil, Petroleum & Natural Gas (AREA)
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Abstract
The invention discloses one kind being suitable for sour gas, the washing spray device of dust atmosphere, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including front-end and back-end water washing device, first and second reaction chambers, cooling tower and waste water tank, front end water washing device and the first reaction chamber are connected by connecting pipe one, first reaction chamber and the second reaction chamber are connected by connecting pipe two, second reaction chamber is connected with the inlet end of rear end water washing device, cooling tower is connected with the outlet side of rear end water washing device, front-end and back-end water washing device is connected with waste water tank respectively by connection flexible pipe.The dust and sour gas contained in exhaust gas is after the water washing device of front end, it is combined with water and falls to bottom of device and be flushed in waste water tank along flow, then the organic matter in exhaust gas is fully reacted into the first and second reaction chambers, after spraying and cool using the washing of rear end water washing device and cooling tower, it is discharged from gas outlet after reaching discharge standard.
Description
Technical field
The present invention relates to the technical fields that process gas processing equipment is made in semiconductor fabrication, and in particular to a kind of
Suitable for sour gas, the washing spray device of dust atmosphere.
Background technology
It arranges, also has big outside the harmful exhausts such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication
The dust of amount is discharged into exhaust gas in environment, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment in long-play because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
Chinese Patent Application No. discloses a kind of waste gas treatment equipment for CN107051092A, including：Spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be equipped with cyclone structure layer and filler successively along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, includes the ontology with purify cavity, and ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction intracavitary is equipped with plasma
Field generator.
Chinese Patent Application No. discloses a kind of integrated waste gas treatment equipment for CN107051067A, including：Cooling dress
Set, including shell and cooling spraying mechanism, shell have cooling chamber, cooling spraying mechanism be set to cooling intracavitary, cooling intracavitary from
Cooling air inlet to cooling gas outlet is divided into multiple cooling areas equipped with multiple partition boards with the chamber that will cool down, and is offered on partition board logical
Hole；There is accommodating chamber, tower body to be equipped with and are connected to accommodating chamber for spray cleaning device, including tower body and purification spraying mechanism, tower body
Purification air inlet, purification water outlet and purification gas outlet, purification spraying mechanism be set to accommodating chamber in, purification air inlet with cooling
Gas outlet is connected to；Gas cleaning plant, includes the ontology with purify cavity, ontology be equipped with the air inlet being connected to purify cavity and
Air outlet, air inlet are connected to purification gas outlet, and purify cavity includes plasma reaction chamber.
By being found after being carefully analyzed to above-mentioned documents：Mistake in involved technical solution structure in documents 1
In complexity, maintenance cost is higher；Involved technical solution device the space occupied is larger in documents 2, and inconvenience is applied to
To process gas processing is made in semiconductor fabrication, therefore, to being applied to that process gas is made in semiconductor fabrication
Processing equipment needs re-start more rational design.
Invention content
The purpose of the present invention is to provide a kind of suitable for sour gas, the washing spray device of dust atmosphere, to solve
The above-mentioned defects caused by the prior art.
A kind of washing spray device being suitable for sour gas, dust atmosphere, including front end water washing device, the first reaction
Chamber, the second reaction chamber, rear end water washing device, cooling tower and waste water tank, the front end water washing device include front end washing cavity and
Inlet flange, outlet flange and water-output flange one on front end washing cavity, the inlet flange and outlet flange point
Top left side and the right side of front end washing cavity it are not welded on vertically, the water-output flange one is welded on front end washing cavity vertically
Bottom and connected with waste water tank by connection flexible pipe one, horizontal welding is distinguished in the left upper portion of front end washing cavity and lower part
It is connected to nozzle flange one and nozzle flange two, the lower right side level of the front end washing cavity is welded with nozzle flange three, institute
It states in nozzle flange one, nozzle flange two and nozzle flange three and is equipped with nozzle one；
First reaction chamber includes reaction chamber one and main inlet flange one, and the main inlet flange one is set to reaction chamber one
Top center, the outlet flange one by connecting pipe one and main inlet flange one connection and connecting pipe one be equipped with
The bottom of control valve, the reaction chamber one is equipped with outlet flange two, and second reaction chamber includes reaction chamber two and main air inlet method
Orchid two, the main inlet flange two are set to the top center of reaction chamber two, and the outlet flange two and main inlet flange two pass through
Connecting pipe two links together, and the bottom of the reaction chamber two is connected with rear end water washing device, the rear end water washing device packet
Rear end washing cavity and the nozzle two in washing cavity are included, the nozzle two is symmetrically set in the left and right two of rear end washing cavity
The top left of side, the rear end washing cavity is equipped with inlet end, outlet side is equipped on the right of top, the air inlet of cavity is washed in rear end
End and the bottom of reaction chamber two are directly connected to, and the outlet side of rear end washing cavity and the bottom of cooling tower are directly connected to, after described
The bottom of end washing cavity is equipped with water-output flange two and is connected with waste water tank by connection flexible pipe two, uniformly distributed inside the cooling tower
Equipped with coldplate, the material of the coldplate is porous aluminium oxide ceramics, the centre inside the cooling tower and top difference
Equipped with nozzle three and nozzle four, the top horizontal of the cooling tower is equipped with gas outlet.
Preferably, the bosom of the front end washing cavity is vertically-mounted has baffle, the baffle and front end to wash chamber
The top of body connects and the inside of front end washing cavity is separated into left and right two chambers.
Preferably, the front side of the front end washing cavity is correspondingly provided with the observation panel of rectangle in one installation place of each nozzle,
Self-clinching nut is uniformly welded on the inside of the observation panel, the outside at the observation is equipped with transparent area by lock-screw
Plate, adds gasket between the transparent panel and front end washing cavity, the material of the gasket is to contain glass fibre
Ptfe composite.
Preferably, the lower section of the inside of the front end washing cavity is equipped with filter plate, and the lower section of the filter plate is equipped with branch
Fagging is simultaneously welded on the inner wall of front end washing cavity, and the filter plate is horizontally arranged at front end by support plate and washes cavity
It is interior.
Preferably, the left lower of the front end washing cavity also is provided with the observation panel of rectangle, the bottom of the observation panel
It is in identical level height with support plate.
Preferably, the inside of the front end washing cavity and the support plate and self-clinching nut of inside do polytetrafluorethylecoatings coatings
Covering treatment.
Preferably, the quantity of the inlet flange and outlet flange one is respectively four and one.
Preferably, the both sides at the top of the reaction chamber one and reaction chamber two are respectively equipped with auxiliary inlet flange one and auxiliary air inlet
Flange two.
Preferably, the middle part of the reaction chamber one and reaction chamber two is respectively equipped with auxiliary charging flange one and auxiliary charging flange
Two.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
The advantage of the invention is that：Exhaust gas by front end water washing device after removing dust and sour gas, into first
Reaction chamber and the second reaction chamber are reacted, and the organic principle in exhaust gas is reacted away, and are subsequently entered rear end water washing device and are carried out
Water drenches, and the dust generated after reaction is combined with water to be fallen to rear end washing cavity bottom and be flushed in waste water tank along flow,
And then, the high-temperature gas generated after reaction enters cooling tower, and high-temperature gas is drenched by porous coldplate and further water
It after cooling, is excluded from gas outlet, whole device is compact-sized, and scheme is reasonable.
Front side by washing cavity in front end is correspondingly provided with the observation panel of rectangle, observation panel in one installation place of each nozzle
Inside be uniformly welded with self-clinching nut, the outside at observation is equipped with transparent panel by lock-screw, be convenient for personal observations
Internal working condition, and by adding gasket between washing cavity in transparent panel and front end, the material of gasket is
Ptfe composite containing glass fibre avoids exhaust gas from installing gap between transparent panel and front end washing cavity
The leakage at place, meanwhile, the corrosion resistance of the gasket of this material is stronger, longer life expectancy.By the inside for washing cavity to front end
And inner support panels and self-clinching nut do polytetrafluorethylecoatings coatings covering treatment, have delayed sour gas to front end water washing device
Corrosion, extend the plant maintenance period.Multiple inlet flanges are set by being washed on cavity in front end, can once be accessed more
A exhaust gas source improves front end water washing device to the working efficiency containing sour gas and the exhaust-gas treatment of dust, reduces semiconductor
Production cost.
By the way that auxiliary inlet flange one and auxiliary inlet flange two is respectively set at the top of reaction chamber one and reaction chamber two, can lead to
Enter air, then by the way that auxiliary charging flange one and auxiliary charging flange two is respectively set at the middle part of reaction chamber one and reaction chamber two, it can
It is passed through CDA catalyst, the reaction was complete to make the organic principle in reaction chamber one and reaction chamber two obtain adequately.By will after
Nozzle two in the water washing device of end is symmetricly set on the left and right sides of rear end washing cavity, can allow after reaction the dust that generates and
Water comes into full contact with.By being also equipped with filter bag at the top of cooling tower and gas outlet installation place, after can effectively reacting
Dust is thoroughly limited among the device of the invention, will not be discharged into air.It is more by the way that the material of coldplate to be selected as
The aluminium oxide ceramics in hole because aluminium oxide ceramics itself has preferable conductibility, mechanical strength and heat-resisting quantity, then coordinates cooling tower
The use of interior nozzle three and nozzle four can cool down to the high-temperature gas after reaction.
Description of the drawings
Fig. 1 is the whole structural schematic diagram of the present invention.
Fig. 2-1 is the structural schematic diagram of front end water washing device in the present invention.
Fig. 2-2 is the structural schematic diagram faced that cavity is washed in front end in the present invention.
Fig. 2-3 is the structural schematic diagram for the left view that cavity is washed in front end in the present invention.
Fig. 2-4 is the structural schematic diagram for the bottom that cavity is washed in front end in the present invention.
Fig. 3 is the structural schematic diagram of reaction chamber and rear end water washing device in the present invention.
Wherein, the front ends 1- water washing device；The first reaction chambers of 2-；The second reaction chambers of 3-；The rear ends 4- water washing device；5- is cooled down
Tower；6- connecting pipes one；7- control valves；8- connecting pipes two；9- connection flexible pipes one；10- connection flexible pipes two；11- waste water tanks；
Cavity is washed in the front ends 101-；102- inlet flanges；103- outlets flange one；104- water-output flanges one；105- nozzles one；106- sprays
Head flange one；107- nozzles flange two；108- nozzles flange three；109- lock-screws；110- gaskets；111- transparent panels；
112- self-clinching nuts；113- baffles；114- filter plates；115- support plates；21- reaction chambers one；The main inlet flanges of 22- one；23- is auxiliary
Inlet flange one；The auxiliary charging flanges of 24- one；25- outlets flange two；31- reaction chambers two；The main inlet flanges of 32- two；33- it is auxiliary into
Gas flange two；The auxiliary charging flanges of 34- two；Cavity is washed in the rear ends 41-；42- nozzles two；43- water-output flanges two；51- coldplates；
52- nozzles three；53- nozzles four；54- filter bags；The gas outlets 55-.
Specific implementation mode
To make the technical means, the creative features, the aims and the efficiencies achieved by the present invention be easy to understand, with reference to
Specific implementation mode, the present invention is further explained.
Embodiment 1
As shown in Figure 1 to Figure 3, a kind of suitable for sour gas, the washing spray device of dust atmosphere, including front end washing
Device 1, the first reaction chamber 2, the second reaction chamber 3, rear end water washing device 4, cooling tower 5 and waste water tank 11, the front end washing dress
It includes that front end is washed cavity 101 and the inlet flange 102 washed on cavity 101 mounted on front end, outlet flange 103 and gone out to set 1
Water law orchid 1, the inlet flange 102 and outlet flange 103 are welded on the top left of front end washing cavity 101 vertically respectively
Side and right side, the water-output flange 1 are welded on the bottom of front end washing cavity 101 and vertically by one 9 Hes of connection flexible pipe
Waste water tank 11 connects, and horizontal welding is connected to one 106 He of nozzle flange respectively for the left upper portion of the front end washing cavity 101 and lower part
The lower right side level of nozzle flange 2 107, the front end washing cavity 101 is welded with nozzle flange 3 108, the nozzle method
It is equipped with nozzle 1 in orchid 1, nozzle flange 2 107 and nozzle flange 3 108；
First reaction chamber 2 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to
The top center of reaction chamber 1, the outlet flange 1 by connecting pipe 1 and main inlet flange 1 connection and
Connecting pipe 1 is equipped with control valve 7, and the bottom of the reaction chamber 1 is equipped with outlet flange 2 25, second reaction chamber 3
Including reaction chamber 2 31 and main inlet flange 2 32, the main inlet flange 2 32 is set to the top center of reaction chamber 2 31, institute
It states outlet flange 2 25 and main inlet flange 2 32 is linked together by connecting pipe 28, the bottom of the reaction chamber 2 31
It is connected with rear end water washing device 4, the rear end water washing device 4 includes rear end washing cavity 41 and the spray in washing cavity 41
First 2 42, the nozzle 2 42 is symmetrically set in the left and right sides of rear end washing cavity 41, the top of the rear end washing cavity 41
The left side is equipped with inlet end, and outlet side is equipped on the right of top, and the inlet end of rear end washing cavity 41 and the bottom of reaction chamber 2 31 are straight
It connects in succession, the outlet side of rear end washing cavity 41 and the bottom of cooling tower 5 are directly connected to, the bottom of the rear end washing cavity 41
It is connected equipped with water-output flange 2 43 and by connection flexible pipe 2 10 and waste water tank 11, cooling is laid with inside the cooling tower 5
The material of plate 51, the coldplate 51 is porous aluminium oxide ceramics, and the centre and top inside the cooling tower 5 are respectively equipped with
The top horizontal of nozzle 3 52 and nozzle 4 53, the cooling tower 7 is equipped with gas outlet 55.
In the present invention, the bosom of the front end washing cavity 101 is vertically-mounted baffle 113, the baffle 113
The top that cavity 101 is washed with front end connects and the inside of front end washing cavity 101 is separated into left and right two chambers.
In the present invention, the quantity of the inlet flange 102 and outlet flange 1 is respectively four and one.
In the present invention, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange one
13 and auxiliary inlet flange 2 33, air can be passed through.
In the present invention, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary charging flange 1 and auxiliary
Flange 2 34 is fed, CDA catalyst can be passed through.
The operation principle and the course of work of the present invention：Exhaust gas enters the left side that cavity 101 is washed in front end by inlet flange 102
Chamber, then sprayed water to exhaust gas by the nozzle 105 in nozzle flange 1 and nozzle flange 2 107, make in exhaust gas dust with
Water combines the bottom for falling to front end washing cavity 101 and is flushed in waste water tank 11 along flow, before then exhaust gas enters back into
The right chamber of end washing chamber 101, then water spray dust is carried out by the nozzle 105 in flange 3 108 of spraying water again to exhaust gas, so
Afterwards, exhaust gas enters the first reaction chamber 2 by outlet flange 1 and the second reaction chamber 3 is reacted, and the sour gas in exhaust gas
For body after front end water washing device 1, sour gas is dissolved in water, becomes liquid from gaseous state, then be flushed in waste water tank along flow,
Organic principle in exhaust gas is reacted away, is connect after carrying out fully reaction into the first reaction chamber 2 and the second reaction chamber 3 by exhaust gas
It into rear end water washing device 4 and carries out water leaching, the dust generated after reaction is combined with water falls to rear end 41 bottom of washing cavity
And be flushed in waste water tank along flow, and then, the high-temperature gas generated after reaction enters cooling tower 5, and high-temperature gas passes through
After porous coldplate 51 and the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, and scheme is closed
Reason.Multiple inlet flanges 102 are set by being washed on cavity 101 in front end, can once access multiple exhaust gas sources, improve front end
Water washing device 1 reduces semiconductor production cost to the working efficiency containing sour gas and the exhaust-gas treatment of dust.By anti-
It answers the top of chamber 1 and reaction chamber 2 31 that auxiliary inlet flange 1 and auxiliary inlet flange 2 33 is respectively set, air can be passed through,
It, can again by the way that auxiliary charging flange 1 and auxiliary charging flange 2 34 is respectively set at the middle part of reaction chamber 1 and reaction chamber 2 31
It is passed through CDA catalyst, the reaction was complete to make the organic principle in reaction chamber 1 and reaction chamber 2 34 obtain adequately.
Embodiment 2
As shown in Figure 1 to Figure 3, a kind of suitable for sour gas, the washing spray device of dust atmosphere, including front end washing
Device 1, the first reaction chamber 2, the second reaction chamber 3, rear end water washing device 4, cooling tower 5 and waste water tank 11, the front end washing dress
It includes that front end is washed cavity 101 and the inlet flange 102 washed on cavity 101 mounted on front end, outlet flange 103 and gone out to set 1
Water law orchid 1, the inlet flange 102 and outlet flange 103 are welded on the top left of front end washing cavity 101 vertically respectively
Side and right side, the water-output flange 1 are welded on the bottom of front end washing cavity 101 and vertically by one 9 Hes of connection flexible pipe
Waste water tank 11 connects, and horizontal welding is connected to one 106 He of nozzle flange respectively for the left upper portion of the front end washing cavity 101 and lower part
The lower right side level of nozzle flange 2 107, the front end washing cavity 101 is welded with nozzle flange 3 108, the nozzle method
It is equipped with nozzle 1 in orchid 1, nozzle flange 2 107 and nozzle flange 3 108；
First reaction chamber 2 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to
The top center of reaction chamber 1, the outlet flange 1 by connecting pipe 1 and main inlet flange 1 connection and
Connecting pipe 1 is equipped with control valve 7, and the bottom of the reaction chamber 1 is equipped with outlet flange 2 25, second reaction chamber 3
Including reaction chamber 2 31 and main inlet flange 2 32, the main inlet flange 2 32 is set to the top center of reaction chamber 2 31, institute
It states outlet flange 2 25 and main inlet flange 2 32 is linked together by connecting pipe 28, the bottom of the reaction chamber 2 31
It is connected with rear end water washing device 4, the rear end water washing device 4 includes rear end washing cavity 41 and the spray in washing cavity 41
First 2 42, the nozzle 2 42 is symmetrically set in the left and right sides of rear end washing cavity 41, the top of the rear end washing cavity 41
The left side is equipped with inlet end, and outlet side is equipped on the right of top, and the inlet end of rear end washing cavity 41 and the bottom of reaction chamber 2 31 are straight
It connects in succession, the outlet side of rear end washing cavity 41 and the bottom of cooling tower 5 are directly connected to, the bottom of the rear end washing cavity 41
It is connected equipped with water-output flange 2 43 and by connection flexible pipe 2 10 and waste water tank 11, cooling is laid with inside the cooling tower 5
The material of plate 51, the coldplate 51 is porous aluminium oxide ceramics, and the centre and top inside the cooling tower 5 are respectively equipped with
The top horizontal of nozzle 3 52 and nozzle 4 53, the cooling tower 7 is equipped with gas outlet 55.
In the present invention, the bosom of the front end washing cavity 101 is vertically-mounted baffle 113, the baffle 113
The top that cavity 101 is washed with front end connects and the inside of front end washing cavity 101 is separated into left and right two chambers.
In the present invention, the front side of the front end washing cavity 101 is correspondingly provided with rectangle in one 105 installation place of each nozzle
Observation panel, be uniformly welded with self-clinching nut 112 on the inside of the observation panel, the outside at the observation passes through lock-screw
109 are equipped with transparent panel 111, and gasket 110 is added between the transparent panel 111 and front end washing cavity 101, described
The material of gasket 110 is the ptfe composite containing glass fibre.
In the present invention, the lower section of the inside of the front end washing cavity 101 is equipped with filter plate 114, the filter plate 14
Lower section be equipped with support plate 115 and be welded on front end washing cavity 101 inner wall on, the filter plate 114 passes through support plate 115
It is horizontally arranged in front end washing cavity 101.
In the present invention, the left lower of the front end washing cavity 101 also is provided with the observation panel of rectangle, the observation panel
Bottom and support plate 115 be in identical level height.
In the present invention, the inside of the front end washing cavity 101 and the support plate 115 and self-clinching nut 112 of inside are done
Polytetrafluorethylecoatings coatings covering treatment increases service life.
In the present invention, the quantity of the inlet flange 102 and outlet flange 1 is respectively four and one.
In the present invention, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange one
13 and auxiliary inlet flange 2 33, air can be passed through.
In the present invention, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary charging flange 1 and auxiliary
Flange 2 34 is fed, CDA catalyst can be passed through.
In the present invention, 55 installation place of top and gas outlet of the cooling tower 5 is also equipped with filter bag 54, can allow reaction
Dust is effectively isolated in the present apparatus afterwards.
The operation principle and the course of work of the present invention：Exhaust gas enters the left side that cavity 101 is washed in front end by inlet flange 102
Chamber, then sprayed water to exhaust gas by the nozzle 105 in nozzle flange 1 and nozzle flange 2 107, make in exhaust gas dust with
Water combines the bottom for falling to front end washing cavity 101 and is flushed in waste water tank 11 along flow, before then exhaust gas enters back into
The right chamber of end washing chamber 101, then water spray dust is carried out by the nozzle 105 in flange 3 108 of spraying water again to exhaust gas, so
Afterwards, exhaust gas enters the first reaction chamber 2 by outlet flange 1 and the second reaction chamber 3 is reacted, and the sour gas in exhaust gas
For body after front end water washing device 1, sour gas is dissolved in water, becomes liquid from gaseous state, then be flushed in waste water tank along flow,
Organic principle in exhaust gas is reacted away, is connect after carrying out fully reaction into the first reaction chamber 2 and the second reaction chamber 3 by exhaust gas
It into rear end water washing device 4 and carries out water leaching, the dust generated after reaction is combined with water falls to rear end 41 bottom of washing cavity
And be flushed in waste water tank along flow, and then, the high-temperature gas generated after reaction enters cooling tower 5, and high-temperature gas passes through
After porous coldplate 51 and the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, and scheme is closed
Reason.
Front side by washing cavity 101 in front end is correspondingly provided with the observation panel of rectangle in one 105 installation place of each nozzle,
Self-clinching nut 112 is uniformly welded on the inside of observation panel, the outside at observation is equipped with transparent panel by lock-screw 109
111, convenient for the working condition inside personal observations, and by being added between washing cavity 101 in transparent panel 111 and front end
The material of gasket 110, gasket 110 is the ptfe composite containing glass fibre, avoids exhaust gas from transparent area
Leakage between plate 111 and front end washing cavity 101 at installation gap, meanwhile, the corrosion resistance of the gasket 110 of this material is more
By force, longer life expectancy.By washing the inside of cavity 101 to front end and inner support panels 115 and self-clinching nut 112 do polytetrafluoro
Vinyl coating covering treatment has delayed sour gas to extend the plant maintenance period to the corrosion of front end water washing device 1.Pass through
Multiple inlet flanges 102 are set on front end washing cavity 101, can once access multiple exhaust gas sources, improve front end washing dress
The working efficiency of 1 pair of exhaust-gas treatment containing sour gas and dust is set, semiconductor production cost is reduced.
By the way that auxiliary inlet flange 1 and auxiliary inlet flange is respectively set at the top of reaction chamber 1 and reaction chamber 2 31
2 33, it can be passed through air, then by the way that auxiliary one 24 He of charging flange is respectively set at the middle part of reaction chamber 1 and reaction chamber 2 31
Auxiliary charging flange 2 34, can be passed through CDA catalyst, to make the organic principle in reaction chamber 1 and reaction chamber 2 34 be filled
Point the reaction was complete.By the way that the nozzle 2 42 in rear end water washing device 4 is symmetricly set on the left and right two that cavity 41 is washed in rear end
Side can allow the dust generated after reacting and water to come into full contact with.By also being installed at the top of cooling tower 5 and gas outlet installation place
There is filter bag 54, among can dust after reaction being thoroughly effectively limited in the device of the invention, sky will not be discharged into
In gas.By the way that the material of coldplate 51 is selected as porous aluminium oxide ceramics, because aluminium oxide ceramics itself have preferable conductibility,
Mechanical strength and heat-resisting quantity, then coordinate the use of the nozzle 3 52 and nozzle 4 53 in cooling tower 5, it can be to the height after reaction
Wet body cools down.
Based on above-mentioned, in the present invention, exhaust gas enters after removing dust and sour gas by front end water washing device 1
First reaction chamber 2 and the second reaction chamber 3 are reacted, and the organic principle in exhaust gas is reacted away, and subsequently enter rear end washing dress
4 carry out water leaching are set, the dust generated after reaction is combined with water to be fallen to rear end washing 41 bottom of cavity and be flushed to along flow
In waste water tank 11, and then, the high-temperature gas generated after reaction enters cooling tower 5, and high-temperature gas passes through porous coldplate 51
After the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, and scheme is reasonable.
Therefore, embodiment disclosed above, all things considered are all merely illustrative, not the only.It is all
It is included in the invention within the scope of the present invention or in the change being equal in the scope of the present invention.
Claims (10)
1. a kind of suitable for sour gas, the washing spray device of dust atmosphere, it is characterised in that：Including front end water washing device
(1), the first reaction chamber (2), the second reaction chamber (3), rear end water washing device (4), cooling tower (5) and waste water tank (11), before described
End water washing device (1) include front end washing cavity (101) and inlet flange (102) in front end washing cavity (101),
Outlet flange (103) and water-output flange one (104), the inlet flange (102) and outlet flange (103) are welded on vertically respectively
Top left side and the right side of cavity (101) are washed in front end, and the water-output flange one (104) is welded on front end washing cavity vertically
(101) bottom is simultaneously connected by connection flexible pipe one (9) and waste water tank (11), on the left side of the front end washing cavity (101)
Horizontal welding is connected to nozzle flange one (106) and nozzle flange two (107), the front end washing cavity (101) respectively for portion and lower part
Lower right side level be welded with nozzle flange three (108), the nozzle flange one (106), nozzle flange two (107) and nozzle
It is equipped with nozzle one (105) in flange three (108)；
First reaction chamber (2) includes reaction chamber one (21) and main inlet flange one (22), the main inlet flange one (22)
Set on the top center of reaction chamber one (21), the outlet flange one (103) passes through connecting pipe one (6) and main inlet flange one
(22) connection and connecting pipe one (6) are equipped with control valve (7), and the bottom of the reaction chamber one (21) is equipped with outlet flange two
(25), second reaction chamber (3) includes reaction chamber two (31) and main inlet flange two (32), the main inlet flange two (32)
Set on the top center of reaction chamber two (31), the outlet flange two (25) and main inlet flange two (32) pass through connecting pipe two
(8) it links together, the bottom of the reaction chamber two (31) and rear end water washing device (4) connection, the rear end water washing device (4)
Nozzle two (42) including rear end washing cavity (41) and in washing cavity (41), after the nozzle two (42) is symmetrically set in
The top left of the left and right sides of end washing cavity (41), the rear end washing cavity (41) is equipped with inlet end, is set on the right of top
There are outlet side, the inlet end of rear end washing cavity (41) and the bottom of reaction chamber two (31) to be directly connected to, cavity is washed in rear end
(41) bottom of outlet side and cooling tower (5) is directly connected to, and the bottom of the rear end washing cavity (41) is equipped with water-output flange
Two (43) are simultaneously connected by connection flexible pipe two (10) and waste water tank (11), and coldplate is laid with inside the cooling tower (5)
(51), the material of the coldplate (51) is porous aluminium oxide ceramics, the internal centre of the cooling tower (5) and top difference
Equipped with nozzle three (52) and nozzle four (53), the top horizontal of the cooling tower (7) is equipped with gas outlet (55).
2. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The bosom of the front end washing cavity (101) is vertically-mounted baffle (113), the baffle (113) and front end washing
The top of cavity (101) connects and the inside of front end washing cavity (101) is separated into left and right two chambers.
3. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The front side of the front end washing cavity (101) is correspondingly provided with the observation panel of rectangle, institute in each nozzle one (105) installation place
It states and is uniformly welded with self-clinching nut (112) on the inside of observation panel, the outside at the observation is equipped with by lock-screw (109)
Transparent panel (111) adds gasket (110) between the transparent panel (111) and front end washing cavity (101), described
The material of gasket (110) is the ptfe composite containing glass fibre.
4. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The lower section of the inside of the front end washing cavity (101) is equipped with filter plate (114), and the lower section of the filter plate (114) is equipped with
Support plate (115) is simultaneously welded on the inner wall of front end washing cavity (101), and the filter plate (114) passes through support plate (115) water
Safety is in front end washing cavity (101).
5. according to claim 3 or 4 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature
It is：The left lower of the front end washing cavity (101) also is provided with the observation panel of rectangle, the bottom of the observation panel and support
Plate (115) is in identical level height.
6. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The inside of the front end washing cavity (101) and the support plate (115) and self-clinching nut (112) of inside do polytetrafluoroethylene (PTFE)
Coating covering treatment.
7. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The quantity of the inlet flange (102) and outlet flange one (103) is respectively four and one.
8. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The both sides at the top of the reaction chamber one (1) and reaction chamber two (31) are respectively equipped with auxiliary inlet flange one (13) and auxiliary air inlet
Flange two (33).
9. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：Auxiliary charging flange one (24) and auxiliary charging flange two are respectively equipped in the middle part of the reaction chamber one (21) and reaction chamber two (31)
(34)。
10. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In：The top and gas outlet (55) installation place of the cooling tower (5) are also equipped with filter bag (54).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810791817.3A CN108619877A (en) | 2018-07-18 | 2018-07-18 | A kind of washing spray device being suitable for sour gas, dust atmosphere |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810791817.3A CN108619877A (en) | 2018-07-18 | 2018-07-18 | A kind of washing spray device being suitable for sour gas, dust atmosphere |
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| CN108619877A true CN108619877A (en) | 2018-10-09 |
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ID=63688965
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| CN201810791817.3A Pending CN108619877A (en) | 2018-07-18 | 2018-07-18 | A kind of washing spray device being suitable for sour gas, dust atmosphere |
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