CN208678767U - It is a kind of suitable for sour gas, the washing spray device of dust atmosphere - Google Patents
It is a kind of suitable for sour gas, the washing spray device of dust atmosphere Download PDFInfo
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- CN208678767U CN208678767U CN201821138811.8U CN201821138811U CN208678767U CN 208678767 U CN208678767 U CN 208678767U CN 201821138811 U CN201821138811 U CN 201821138811U CN 208678767 U CN208678767 U CN 208678767U
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Abstract
The utility model discloses one kind to be suitable for sour gas, the washing spray device of dust atmosphere, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including front-end and back-end water washing device, first and second reaction chambers, cooling tower and waste water tank, front end water washing device and the first reaction chamber are connected by connecting pipe one, first reaction chamber and the second reaction chamber are connected by connecting pipe two, second reaction chamber is connected with the inlet end of rear end water washing device, cooling tower is connected with the outlet side of rear end water washing device, front-end and back-end water washing device is connected with waste water tank respectively by connecting hose.The dust and sour gas contained in exhaust gas is after the water washing device of front end, bottom of device is fallen in conjunction with water and is flushed in waste water tank along water flow, then the organic matter in exhaust gas enters the first and second reaction chambers and sufficiently reacts, using the washing of rear end water washing device and cooling tower and after cooling, it is discharged after reaching discharge standard from gas outlet.
Description
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to
It is a kind of suitable for sour gas, the washing spray device of dust atmosphere.
Background technique
The harmful exhausts outlet such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication also has big
The dust of amount is discharged into environment with exhaust gas, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block in long-play
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
Chinese Patent Application No. is that CN107051092A discloses a kind of waste gas treatment equipment, comprising: spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be successively arranged cyclone structure layer and filler along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, including the ontology with purify cavity, ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction is intracavitary to be equipped with plasma
Field generator.
Chinese Patent Application No. is that CN107051067A discloses a kind of integrated waste gas treatment equipment, comprising: cooling dress
Set, including shell and cooling spraying mechanism, shell have cooling chamber, cooling spraying mechanism be set to cool down it is intracavitary, cool down it is intracavitary from
Cooling air inlet is equipped with multiple partitions to cooling gas outlet and is divided into multiple cooling areas with the chamber that will cool down, and offers on partition logical
Hole；Spray cleaning device, including tower body and purification spraying mechanism, tower body have accommodating chamber, and tower body is equipped with and is connected to accommodating chamber
Purification air inlet, purification water outlet and purification gas outlet, purification spraying mechanism be set to accommodating chamber in, purification air inlet and cooling
Gas outlet connection；Gas cleaning plant, including the ontology with purify cavity, ontology be equipped with the air inlet that is connected to purify cavity and
Air outlet, air inlet are connected to purification gas outlet, and purify cavity includes plasma reaction chamber.
By being found after being carefully analyzed to above-mentioned documents: mistake in technical solution structure involved in documents 1
In complexity, maintenance cost is higher；Technical solution device the space occupied involved in documents 2 is larger, and inconvenience is applied to
In semiconductor fabrication to be made process gas processing, therefore, to be applied to semiconductor fabrication in process gas is made
Processing equipment needs re-start more reasonable design.
Utility model content
The purpose of this utility model is to provide a kind of suitable for sour gas, the washing spray device of dust atmosphere, with
It solves the above-mentioned multiple defects caused by the prior art.
It is a kind of suitable for sour gas, the washing spray device of dust atmosphere, including front end water washing device, the first reaction
Chamber, the second reaction chamber, rear end water washing device, cooling tower and waste water tank, the front end water washing device include front end washing cavity and
Inlet flange, outlet flange and the water-output flange one being mounted on front end washing cavity, the inlet flange and outlet flange point
Top left side and the right side of front end washing cavity it are not welded on vertically, the water-output flange one is welded on front end washing cavity vertically
Bottom and connect by connecting hose one with waste water tank, the left upper portion and lower part difference horizontal welding of front end washing cavity
It is connected to spray head flange one and spray head flange two, the lower right side level of the front end washing cavity is welded with spray head flange three, institute
It states in spray head flange one, spray head flange two and spray head flange three and is equipped with spray head one；
First reaction chamber includes reaction chamber one and main inlet flange one, and the main inlet flange one is set to reaction chamber one
Top center, the outlet flange one by connecting pipe one and main inlet flange one connection and connecting pipe one be equipped with
The bottom of control valve, the reaction chamber one is equipped with outlet flange two, and second reaction chamber includes reaction chamber two and main air inlet method
Orchid two, the main inlet flange two are set to the top center of reaction chamber two, and the outlet flange two and main inlet flange two pass through
Connecting pipe two links together, and the bottom of the reaction chamber two is connected with rear end water washing device, the rear end water washing device packet
It includes rear end washing cavity and is set to the washing intracorporal spray head two of chamber, the spray head two is symmetrically set in the left and right two of rear end washing cavity
Side, the top left of the rear end washing cavity are equipped with inlet end, outlet side are equipped on the right of top, and the air inlet of cavity is washed in rear end
End and the bottom of reaction chamber two are directly connected to, and the outlet side of rear end washing cavity and the bottom of cooling tower are directly connected to, after described
The bottom of end washing cavity is equipped with water-output flange two and is connected by connecting hose two with waste water tank, uniformly distributed inside the cooling tower
Equipped with coldplate, centre and top inside the cooling tower are respectively equipped with spray head three and spray head four, the top of the cooling tower
Level is equipped with gas outlet.
Preferably, the bosom of the front end washing cavity is vertically-mounted baffle, and chamber is washed in the baffle and front end
The top of body connects and the inside of front end washing cavity is separated into left and right two chambers.
Preferably, the front side of the front end washing cavity is correspondingly provided with the observation panel of rectangle in each one installation place of spray head,
Self-clinching nut is uniformly welded on the inside of the observation panel, the outside at the observation is equipped with transparent side by lock-screw
Plate adds gasket between the transparent panel and front end washing cavity.
Preferably, the lower section of the inside of the front end washing cavity is equipped with filter plate, and the lower section of the filter plate is equipped with branch
Fagging is simultaneously welded on the inner wall of front end washing cavity, and the filter plate is horizontally arranged at front end by support plate and washes cavity
It is interior.
Preferably, the left lower of the front end washing cavity also is provided with the observation panel of rectangle, the bottom of the observation panel
Identical level height is in support plate.
Preferably, the quantity of the inlet flange and outlet flange one is respectively four and one.
Preferably, the both sides at the top of the reaction chamber one and reaction chamber two are respectively equipped with auxiliary inlet flange one and auxiliary air inlet
Flange two.
Preferably, the middle part of the reaction chamber one and reaction chamber two is respectively equipped with auxiliary charging flange one and auxiliary charging flange
Two.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
Utility model has the advantages that exhaust gas enters after front end water washing device removes dust and sour gas
First reaction chamber and the second reaction chamber are reacted, and the organic principle in exhaust gas is reacted away, and subsequently enter rear end water washing device
Water leaching is carried out, the dust generated after reaction falls to rear end washing cavity bottom in conjunction with water and is flushed to waste water tank along water flow
In, and then, the high-temperature gas generated after reaction enters cooling tower, and high-temperature gas passes through porous coldplate and further water
After leaching cooling, it is excluded from gas outlet, whole device is compact-sized, and scheme is reasonable.
The observation panel of rectangle, observation panel are correspondingly provided in each one installation place of spray head by the front side for washing cavity in front end
Inside be uniformly welded with self-clinching nut, the outside at observation is equipped with transparent panel by lock-screw, convenient for personnel observe
Internal working condition, and add gasket by washing between cavity in transparent panel and front end avoids exhaust gas from transparent
Leakage at gap is installed between panel and front end washing cavity.By washing on cavity in front end, multiple inlet flanges are set,
Multiple exhaust gas sources can be once accessed, front end water washing device is improved and the work containing sour gas and the exhaust-gas treatment of dust is imitated
Rate reduces semiconductor production cost.
By the way that auxiliary inlet flange one and auxiliary inlet flange two is respectively set at the top of reaction chamber one and reaction chamber two, can lead to
Enter air, then by the way that auxiliary charging flange one and auxiliary charging flange two is respectively set at the middle part of reaction chamber one and reaction chamber two, it can
It is passed through CDA catalyst, so that the organic principle in reaction chamber one and reaction chamber two be made to obtain sufficient fully reacting.By will after
Spray head two in the water washing device of end is symmetricly set on the left and right sides of rear end washing cavity, can allow after reaction the dust that generates and
Water comes into full contact with.By being also equipped with filter bag at the top of cooling tower and gas outlet installation place, after can effectively reacting
Dust is thoroughly limited among the device of the utility model, will not be discharged into air.By coldplate, then cooperate cooling
The use of spray head three and spray head four in tower, can cool down to the high-temperature gas after reaction.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model entirety.
Fig. 2-1 is the structural schematic diagram of front end water washing device in the utility model.
Fig. 2-2 is the structural schematic diagram faced that cavity is washed in front end in the utility model.
Fig. 2-3 is the structural schematic diagram for the left view that cavity is washed in front end in the utility model.
Fig. 2-4 is the structural schematic diagram for the bottom that cavity is washed in front end in the utility model.
Fig. 3 is the structural schematic diagram of reaction chamber and rear end water washing device in the utility model.
Wherein, the front end 1- water washing device；The first reaction chamber of 2-；The second reaction chamber of 3-；The rear end 4- water washing device；5- is cooling
Tower；6- connecting pipe one；7- control valve；8- connecting pipe two；9- connection hose one；10- connection hose two；11- waste water tank；
Cavity is washed in the front end 101-；102- inlet flange；103- outlet flange one；104- water-output flange one；105- spray head one；106- spray
Head flange one；107- spray head flange two；108- spray head flange three；109- lock-screw；110- gasket；111- transparent panel；
112- self-clinching nut；113- baffle；114- filter plate；115- support plate；21- reaction chamber one；The main inlet flange one of 22-；23- is auxiliary
Inlet flange one；The auxiliary charging flange one of 24-；25- outlet flange two；31- reaction chamber two；The main inlet flange two of 32-；33- it is auxiliary into
Gas flange two；The auxiliary charging flange two of 34-；Cavity is washed in the rear end 41-；42- spray head two；43- water-output flange two；51- coldplate；
52- spray head three；53- spray head four；54- filter bag；The gas outlet 55-.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
Embodiment 1
As shown in Figure 1 to Figure 3, a kind of to be washed suitable for sour gas, the washing spray device of dust atmosphere, including front end
Device 1, the first reaction chamber 2, the second reaction chamber 3, rear end water washing device 4, cooling tower 5 and waste water tank 11, the front end washing dress
Setting 1 includes that front end washes cavity 101 and is mounted on the inlet flange 102 washed on cavity 101 front end, outlet flange 103 and goes out
Water law orchid 1, the inlet flange 102 and outlet flange 103 are welded on the top left of front end washing cavity 101 vertically respectively
Side and right side, the water-output flange 1 are welded on the bottom of front end washing cavity 101 and vertically by connection one 9 Hes of hose
Waste water tank 11 connects, and level is welded with one 106 He of spray head flange respectively for the left upper portion of the front end washing cavity 101 and lower part
The lower right side level of spray head flange 2 107, the front end washing cavity 101 is welded with spray head flange 3 108, the spray head method
Spray head 1 is equipped in orchid 1, spray head flange 2 107 and spray head flange 3 108；
First reaction chamber 2 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to
The top center of reaction chamber 1, the outlet flange 1 by connecting pipe 1 and main inlet flange 1 connection and
Connecting pipe 1 is equipped with control valve 7, and the bottom of the reaction chamber 1 is equipped with outlet flange 2 25, second reaction chamber 3
Including reaction chamber 2 31 and main inlet flange 2 32, the main inlet flange 2 32 is set to the top center of reaction chamber 2 31, institute
It states outlet flange 2 25 and main inlet flange 2 32 to link together by connecting pipe 28, the bottom of the reaction chamber 2 31
It is connected with rear end water washing device 4, the rear end water washing device 4 includes rear end washing cavity 41 and the spray in washing cavity 41
First 2 42, the spray head 2 42 is symmetrically set in the left and right sides of rear end washing cavity 41, the top of the rear end washing cavity 41
The left side is equipped with inlet end, and outlet side is equipped on the right of top, and the inlet end of rear end washing cavity 41 and the bottom of reaction chamber 2 31 are straight
It connects in succession, the outlet side of rear end washing cavity 41 and the bottom of cooling tower 5 are directly connected to, the bottom of the rear end washing cavity 41
It is connected equipped with water-output flange 2 43 and by connection hose 2 10 and waste water tank 11, is laid with cooling inside the cooling tower 5
Plate 51, the material of the coldplate 51 are porous aluminium oxide ceramics, and the centre and top inside the cooling tower 5 are respectively equipped with
The top horizontal of spray head 3 52 and spray head 4 53, the cooling tower 7 is equipped with gas outlet 55.
In the present embodiment, the bosom of the front end washing cavity 101 is vertically-mounted baffle 113, the baffle
113 connect with the top of front end washing cavity 101 and the inside of front end washing cavity 101 are separated into left and right two chambers.
In the present embodiment, the quantity of the inlet flange 102 and outlet flange 1 is respectively four and one.
In the present embodiment, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange
One 13 and auxiliary inlet flange 2 33, air can be passed through.
In the present embodiment, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary one 24 He of charging flange
Auxiliary charging flange 2 34, can be passed through CDA catalyst.
The working principle and the course of work of the utility model: exhaust gas enters front end by inlet flange 102 and washes cavity 101
Left chamber, then sprayed water by the spray head 105 in spray head flange 1 and spray head flange 2 107 to exhaust gas, make powder in exhaust gas
Dirt fallen in conjunction with water front end washing cavity 101 bottom and be flushed in waste water tank 11 along water flow, then exhaust gas again into
Enter the right chamber of front end washing chamber 101, then water spray dust carried out to exhaust gas by the spray head 105 in water spray flange 3 108 again,
Then, exhaust gas enters the first reaction chamber 2 by outlet flange 1 and the second reaction chamber 3 is reacted, and the acidity in exhaust gas
For gas after front end water washing device 1, sour gas is dissolved in water, becomes liquid from gaseous state, then be flushed to waste water tank along water flow
In, exhaust gas reacts away the organic principle in exhaust gas after carrying out sufficiently reaction into the first reaction chamber 2 and the second reaction chamber 3,
It subsequently enters rear end water washing device 4 and carries out water leaching, the dust generated after reaction falls to rear end washing 41 bottom of cavity in conjunction with water
Portion is simultaneously flushed in waste water tank along water flow, and and then, the high-temperature gas generated after reaction enters cooling tower 5, high-temperature gas warp
After crossing porous coldplate 51 and the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, scheme
Rationally.Multiple inlet flanges 102 are set by washing on cavity 101 in front end, multiple exhaust gas sources can be once accessed, before raising
It holds water washing device 1 to the working efficiency containing sour gas and the exhaust-gas treatment of dust, reduces semiconductor production cost.By
Auxiliary inlet flange 1 and auxiliary inlet flange 2 33 is respectively set in the top of reaction chamber 1 and reaction chamber 2 31, can be passed through sky
Gas, then by the way that auxiliary charging flange 1 and auxiliary charging flange two is respectively set at the middle part of reaction chamber 1 and reaction chamber 2 31
34, it can be passed through CDA catalyst, so that the organic principle in reaction chamber 1 and reaction chamber 2 34 be made adequately to have been reacted
Entirely.
Embodiment 2
As shown in Figure 1 to Figure 3, a kind of to be washed suitable for sour gas, the washing spray device of dust atmosphere, including front end
Device 1, the first reaction chamber 2, the second reaction chamber 3, rear end water washing device 4, cooling tower 5 and waste water tank 11, the front end washing dress
Setting 1 includes that front end washes cavity 101 and is mounted on the inlet flange 102 washed on cavity 101 front end, outlet flange 103 and goes out
Water law orchid 1, the inlet flange 102 and outlet flange 103 are welded on the top left of front end washing cavity 101 vertically respectively
Side and right side, the water-output flange 1 are welded on the bottom of front end washing cavity 101 and vertically by connection one 9 Hes of hose
Waste water tank 11 connects, and level is welded with one 106 He of spray head flange respectively for the left upper portion of the front end washing cavity 101 and lower part
The lower right side level of spray head flange 2 107, the front end washing cavity 101 is welded with spray head flange 3 108, the spray head method
Spray head 1 is equipped in orchid 1, spray head flange 2 107 and spray head flange 3 108；
First reaction chamber 2 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to
The top center of reaction chamber 1, the outlet flange 1 by connecting pipe 1 and main inlet flange 1 connection and
Connecting pipe 1 is equipped with control valve 7, and the bottom of the reaction chamber 1 is equipped with outlet flange 2 25, second reaction chamber 3
Including reaction chamber 2 31 and main inlet flange 2 32, the main inlet flange 2 32 is set to the top center of reaction chamber 2 31, institute
It states outlet flange 2 25 and main inlet flange 2 32 to link together by connecting pipe 28, the bottom of the reaction chamber 2 31
It is connected with rear end water washing device 4, the rear end water washing device 4 includes rear end washing cavity 41 and the spray in washing cavity 41
First 2 42, the spray head 2 42 is symmetrically set in the left and right sides of rear end washing cavity 41, the top of the rear end washing cavity 41
The left side is equipped with inlet end, and outlet side is equipped on the right of top, and the inlet end of rear end washing cavity 41 and the bottom of reaction chamber 2 31 are straight
It connects in succession, the outlet side of rear end washing cavity 41 and the bottom of cooling tower 5 are directly connected to, the bottom of the rear end washing cavity 41
It is connected equipped with water-output flange 2 43 and by connection hose 2 10 and waste water tank 11, is laid with cooling inside the cooling tower 5
Plate 51, the material of the coldplate 51 are porous aluminium oxide ceramics, and the centre and top inside the cooling tower 5 are respectively equipped with
The top horizontal of spray head 3 52 and spray head 4 53, the cooling tower 7 is equipped with gas outlet 55.
In the present embodiment, the bosom of the front end washing cavity 101 is vertically-mounted baffle 113, the baffle
113 connect with the top of front end washing cavity 101 and the inside of front end washing cavity 101 are separated into left and right two chambers.
In the present embodiment, the front side of the front end washing cavity 101 is correspondingly provided with square in each one 105 installation place of spray head
The observation panel of shape is uniformly welded with self-clinching nut 112 on the inside of the observation panel, and the outside at the observation passes through lock-screw
109 are equipped with transparent panel 111, add gasket 110 between the transparent panel 111 and front end washing cavity 101.
In the present embodiment, the lower section of the inside of the front end washing cavity 101 is equipped with filter plate 114, the filter plate
14 lower section is equipped with support plate 115 and is welded on the inner wall of front end washing cavity 101, and the filter plate 114 passes through support plate
115 are horizontally arranged in front end washing cavity 101.
In the present embodiment, the left lower of the front end washing cavity 101 also is provided with the observation panel of rectangle, the observation
The bottom and support plate 115 of mouth are in identical level height.
In the present embodiment, the quantity of the inlet flange 102 and outlet flange 1 is respectively four and one.
In the present embodiment, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange
One 13 and auxiliary inlet flange 2 33, air can be passed through.
In the present embodiment, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary one 24 He of charging flange
Auxiliary charging flange 2 34, can be passed through CDA catalyst.
In the present embodiment, the top of the cooling tower 5 and 55 installation place of gas outlet are also equipped with filter bag 54, can allow anti-
Dust is effectively isolated in the present apparatus after answering.
The working principle and the course of work of the utility model: exhaust gas enters front end by inlet flange 102 and washes cavity 101
Left chamber, then sprayed water by the spray head 105 in spray head flange 1 and spray head flange 2 107 to exhaust gas, make powder in exhaust gas
Dirt fallen in conjunction with water front end washing cavity 101 bottom and be flushed in waste water tank 11 along water flow, then exhaust gas again into
Enter the right chamber of front end washing chamber 101, then water spray dust carried out to exhaust gas by the spray head 105 in water spray flange 3 108 again,
Then, exhaust gas enters the first reaction chamber 2 by outlet flange 1 and the second reaction chamber 3 is reacted, and the acidity in exhaust gas
For gas after front end water washing device 1, sour gas is dissolved in water, becomes liquid from gaseous state, then be flushed to waste water tank along water flow
In, exhaust gas reacts away the organic principle in exhaust gas after carrying out sufficiently reaction into the first reaction chamber 2 and the second reaction chamber 3,
It subsequently enters rear end water washing device 4 and carries out water leaching, the dust generated after reaction falls to rear end washing 41 bottom of cavity in conjunction with water
Portion is simultaneously flushed in waste water tank along water flow, and and then, the high-temperature gas generated after reaction enters cooling tower 5, high-temperature gas warp
After crossing porous coldplate 51 and the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, scheme
Rationally.
It is correspondingly provided with the observation panel of rectangle in each one 105 installation place of spray head by the front side for washing cavity 101 in front end,
Self-clinching nut 112 is uniformly welded on the inside of observation panel, the outside at observation is equipped with transparent panel by lock-screw 109
111, convenient for the working condition inside personnel's observation, and added by being washed between cavity 101 in transparent panel 111 and front end
Gasket 110 avoids exhaust gas from installing the leakage from gap between transparent panel 111 and front end washing cavity 101.By preceding
Multiple inlet flanges 102 are set on end washing cavity 101, can once access multiple exhaust gas sources, it is right to improve front end water washing device 1
The working efficiency of exhaust-gas treatment containing sour gas and dust reduces semiconductor production cost.
By the way that auxiliary inlet flange 1 and auxiliary inlet flange is respectively set at the top of reaction chamber 1 and reaction chamber 2 31
2 33, it can be passed through air, then by the way that auxiliary one 24 He of charging flange is respectively set at the middle part of reaction chamber 1 and reaction chamber 2 31
Auxiliary charging flange 2 34, can be passed through CDA catalyst, so that the organic principle in reaction chamber 1 and reaction chamber 2 34 be made to be filled
The fully reacting divided.By the way that the spray head 2 42 in rear end water washing device 4 is symmetricly set on the left and right two that cavity 41 is washed in rear end
Side can allow the dust generated after reacting and water to come into full contact with.By also being installed at the top of cooling tower 5 and gas outlet installation place
There is filter bag 54, effectively dust after reaction can be thoroughly limited among the device of the utility model, will not be discharged
Into air.By coldplate 51, then cooperate the use of the spray head 3 52 and spray head 4 53 in cooling tower 5, can be to reaction after
High-temperature gas cool down.
Based on above-mentioned, in the present invention, exhaust gas after front end water washing device 1 removes dust and sour gas,
It is reacted into the first reaction chamber 2 and the second reaction chamber 3, the organic principle in exhaust gas is reacted away, subsequently enter rear end water
Cleaning device 4 carries out water leaching, and the dust generated after reaction falls to rear end washing 41 bottom of cavity in conjunction with water and rushes along water flow
It washes in waste water tank 11, and then, the high-temperature gas generated after reaction enters cooling tower 5, and high-temperature gas passes through porous cooling
After plate 51 and the leaching cooling of further water, it is excluded from gas outlet 55, whole device is compact-sized, and scheme is reasonable.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all
Change within the scope of the invention or equivalents of the invention is included in the utility model.
Claims (9)
1. a kind of suitable for sour gas, the washing spray device of dust atmosphere, it is characterised in that: including front end water washing device
(1), the first reaction chamber (2), the second reaction chamber (3), rear end water washing device (4), cooling tower (5) and waste water tank (11), before described
End water washing device (1) include front end washing cavity (101) and be mounted on front end wash cavity (101) on inlet flange (102),
The vertical weldering respectively of outlet flange one (103) and water-output flange one (104), the inlet flange (102) and outlet flange one (103)
The top left side in front end washing cavity (101) and right side are connect, the water-output flange one (104) is welded on front end washing chamber vertically
The bottom of body (101) simultaneously passes through connection hose one (9) and waste water tank (11) connection, the left side of front end washing cavity (101)
Level is welded with spray head flange one (106) and spray head flange two (107) respectively for upper and lower part, and cavity is washed in the front end
(101) lower right side level is welded with spray head flange three (108), the spray head flange one (106), spray head flange two (107)
With spray head flange three (108) in be equipped with spray head one (105)；
First reaction chamber (2) includes reaction chamber one (21) and main inlet flange one (22), the main inlet flange one (22)
Set on the top center of reaction chamber one (21), the outlet flange one (103) passes through connecting pipe one (6) and main inlet flange one
(22) it connects and connecting pipe one (6) is equipped with control valve (7), the bottom of the reaction chamber one (21) is equipped with outlet flange two
(25), second reaction chamber (3) includes reaction chamber two (31) and main inlet flange two (32), the main inlet flange two (32)
Set on the top center of reaction chamber two (31), the outlet flange two (25) and main inlet flange two (32) pass through connecting pipe two
(8) it links together, the bottom of the reaction chamber two (31) and rear end water washing device (4) connection, the rear end water washing device (4)
Including rear end washing cavity (41) and the spray head two (42) being set in washing cavity (41), after the spray head two (42) is symmetrically set in
The left and right sides of end washing cavity (41), the top left of rear end washing cavity (41) are equipped with inlet end, set on the right of top
There is outlet side, the inlet end of rear end washing cavity (41) and the bottom of reaction chamber two (31) are directly connected to, and cavity is washed in rear end
(41) bottom of outlet side and cooling tower (5) is directly connected to, and the bottom of rear end washing cavity (41) is equipped with water-output flange
Two (43) are simultaneously connected by connection hose two (10) and waste water tank (11), are laid with coldplate inside the cooling tower (5)
(51), the internal centre of the cooling tower (5) and top are respectively equipped with spray head three (52) and spray head four (53), the cooling tower
(5) top horizontal is equipped with gas outlet (55).
2. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the bosom of front end washing cavity (101) is vertically-mounted to be had baffle (113), the baffle (113) and front end washing
The top of cavity (101) connects and the inside of front end washing cavity (101) is separated into left and right two chambers.
3. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the front side of front end washing cavity (101) is correspondingly provided with the observation panel of rectangle, institute in each spray head one (105) installation place
It states and is uniformly welded on the inside of observation panel self-clinching nut (112), the outside of the observation panel is equipped with by lock-screw (109)
Transparent panel (111) adds gasket (110) between the transparent panel (111) and front end washing cavity (101).
4. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the lower section of the inside of front end washing cavity (101) is equipped with filter plate (114), and the lower section of the filter plate (114) is equipped with
Support plate (115) is simultaneously welded on the inner wall of front end washing cavity (101), and the filter plate (114) passes through support plate (115) water
Safety is in front end washing cavity (101).
5. according to claim 3 or 4 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature
Be: the left lower of front end washing cavity (101) also is provided with the observation panel of rectangle, the bottom of the observation panel and support
Plate (115) is in identical level height.
6. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the quantity of the inlet flange (102) and outlet flange one (103) is respectively four and one.
7. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the both sides at the top of the reaction chamber one (21) and reaction chamber two (31) are respectively equipped with auxiliary inlet flange one (13) and auxiliary air inlet
Flange two (33).
8. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: auxiliary charging flange one (24) and auxiliary charging flange two are respectively equipped in the middle part of the reaction chamber one (21) and reaction chamber two (31)
(34)。
9. according to claim 1 a kind of suitable for sour gas, the washing spray device of dust atmosphere, feature exists
In: the top and gas outlet (55) installation place of the cooling tower (5) are also equipped with filter bag (54).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821138811.8U CN208678767U (en) | 2018-07-18 | 2018-07-18 | It is a kind of suitable for sour gas, the washing spray device of dust atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821138811.8U CN208678767U (en) | 2018-07-18 | 2018-07-18 | It is a kind of suitable for sour gas, the washing spray device of dust atmosphere |
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| Publication Number | Publication Date |
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| CN208678767U true CN208678767U (en) | 2019-04-02 |
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| CN201821138811.8U Active CN208678767U (en) | 2018-07-18 | 2018-07-18 | It is a kind of suitable for sour gas, the washing spray device of dust atmosphere |
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| Country | Link |
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| CN (1) | CN208678767U (en) |
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2018
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