CN208678769U - It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles - Google Patents
It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles Download PDFInfo
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- CN208678769U CN208678769U CN201821140214.9U CN201821140214U CN208678769U CN 208678769 U CN208678769 U CN 208678769U CN 201821140214 U CN201821140214 U CN 201821140214U CN 208678769 U CN208678769 U CN 208678769U
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Abstract
The utility model discloses one kind to be directed to sour gas, the rear end purification device of the exhaust gas of dust particles, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including reaction chamber, rear end washing room, cooling tower and waste water clear water tanks, after exhaust gas enters front-end purification unit, after eliminating the sour gas and dust particles in exhaust gas, remaining exhaust gas, which enters in reaction chamber, to react, organic matter in exhaust gas is reacted away, then, high-temperature gas after reaction sprays and cools using the washing of rear end washing room and cooling tower, it is discharged after reaching discharge standard from gas outlet, and the dust particles generated after reacting fall to the bottom of rear end washing room after encountering water and are flushed in waste water clear water tanks along water flow, it is recycled again by the filtration, purification of waste water clear water tanks, whole device is structurally reasonable, it is practical Property is strong.
Description
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to
It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles.
Background technique
The harmful exhausts outlet such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication also has big
The dust of amount is discharged into environment with exhaust gas, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block in long-play
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
China Patent Publication No. is that CN107051092A discloses a kind of waste gas treatment equipment, comprising: spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be successively arranged cyclone structure layer and filler along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, including the ontology with purify cavity, ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction is intracavitary to be equipped with plasma
Field generator.
Japanese patent application publication No. is that CN107206314A is disclosed at a kind of exhaust gas that can efficiently remove the NOx in exhaust gas
Reason method and emission-control equipment.The waste gas processing method of the utility model, which is characterized in that it includes to the exhaust gas containing NOx
The process that middle powder of the supply containing alkaline agent and ozone handle exhaust gas, makes NO be oxidized to NO2 by ozone, and make alkaline agent or
Its thermal decomposition product and NO2 carry out gas-solid reaction.In addition, the emission-control equipment of the utility model, which is characterized in that it has
The exhaust flow path that exhaust gas containing NOx flows through, the ozone supply portion of ozone supply into the exhaust gas for flow through exhaust flow path, and to stream
It crosses in the exhaust gas of exhaust flow path and supplies the alkaline agent supply unit of the powder containing alkaline agent, ozone supply portion is set as the ozone by supply
The NO in exhaust gas is set to be oxidized to NO2, alkaline agent supply unit is set as the alkaline agent or its thermal decomposition product contained in the powder for making supply
Gas-solid reaction is carried out with NO2.
Excessively complicated in technical solution structure involved in above-mentioned documents, maintenance cost is higher, what device occupied
Space is also larger, and inconvenience is applied in semiconductor fabrication to process gas processing is made, therefore, to applied to semiconductor system
Process gas processing equipment needs are made during making and re-start more reasonable design.
Utility model content
The purpose of this utility model is to provide a kind of rear ends for sour gas, the exhaust gas of dust particles to purify dress
It sets, to solve the above-mentioned many defects caused by the prior art.
It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, including reaction chamber, rear end washing room,
Cooling tower and waste water clear water tanks, the reaction chamber include reaction chamber, main inlet flange, auxiliary inlet flange and auxiliary charging flange, go out
Gas flange, the main inlet flange and auxiliary inlet flange are respectively welded at the top center and top both sides of reaction chamber, described auxiliary
Flange welding is fed at the middle part of reaction chamber, the outlet flange welding reaction chamber bottom and by connecting pipe one and after
Washing room is held to be connected；The rear end washing room includes that rear end washing chamber and spray head flange one, the spray head flange one are symmetrically set in
The two sides of rear end washing chamber are simultaneously interior equipped with spray head one, and the top left side of the rear end washing chamber is equipped with inlet end and and connecting pipe
Two are connected, and outlet side is equipped on the right of top and is connected with cooling tower, and the bottom of the rear end washing chamber is equipped with drainage flange and leads to
Connecting pipe two is crossed to connect with waste water clear water tanks；The inside of the cooling tower is laid with coldplate, the outside of the cooling tower
Intermediate and top is respectively welded water spray flange two and water spray flange three, is equipped with spray in the water spray flange two and water spray flange three
First two and spray head three, the top horizontal of the cooling tower is equipped with gas outlet.
Preferably, the waste water clear water tanks include cabinet and water-in flange, and the water-in flange welding is at the top of the box body
The left side, the water-in flange are connected by connecting pipe two with drainage flange, and the bosom of the cabinet is equipped with filter plate simultaneously
It is fixed on the inside of cabinet vertically by fixed frame two, the lower right side of the cabinet is equipped with water-output flange.
Preferably, the water-output flange is connected with booster water pump, and the water inlet end of the booster water pump is connected with water-output flange,
The water outlet of booster water pump is connected with shunting interface, and the shunting interface is connected with connecting pipe three, connecting pipe four, connecting tube
The spray head one that road five, connecting pipe six, the connecting pipe three and connecting pipe four wash intracavitary portion two sides with rear end respectively connects
Connect, the connecting pipe five and connecting pipe six respectively with inside cooling tower spray head three and spray head four connect.
Preferably, the connecting pipe one is equipped with motor-driven valve.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
Preferably, the coldplate is porous structure.
Utility model has the advantages that exhaust gas enters front-end purification unit, eliminate the sour gas in exhaust gas and
After dust particles, remaining exhaust gas, which enters in reaction chamber, to react, and the organic matter in exhaust gas is reacted away, then, the height after reaction
Wet body sprays and cools using the washing of rear end washing room and cooling tower, arranges after reaching discharge standard from gas outlet
Out, the dust particles that generate fall to the bottom of rear end washing room after encountering water and after reacting and to be flushed to waste water along water flow net
It in water tank, then is recycled by the filtration, purification of waste water clear water tanks, whole device is structurally reasonable, practical.
By the way that air and CDA catalyst can be passed through in the top of the reaction chamber auxiliary inlet flange of setting and auxiliary charging flange, from
And so that the organic principle in reaction chamber is obtained sufficient fully reacting, then by the way that motor-driven valve is arranged in connecting pipe one, to exhaust gas
It is sufficiently discharged into the washing room of rear end again after reaction and carries out washing spray operation.By the way that spray head one in the washing room of rear end is symmetrically set
It sets the dust generated after can allowing reaction in the left and right sides of rear end washing chamber and water comes into full contact with.By on the top of cooling tower
Portion and gas outlet installation place are also equipped with filter bag, can effectively by dust after reaction be thoroughly limited in the utility model it
In, it will not be discharged into air.By the porous structure using coldplate, then cooperate spray head two and the spray head in cooling tower
Three use can cool down to the high-temperature gas after reaction.It, can be to next by installing filter plate in waste water clear water tanks
It is filtered from the water in the washing room of rear end, then recycles booster water pump by purified water by shunting interface and connecting tube
Road is one-to-one to draw the utilization rate that water is improved to spray head, also avoids spray head external water source again.
Detailed description of the invention
Fig. 1 and Fig. 2 is the structural schematic diagram of the utility model entirety.
Wherein, 1- reaction chamber；2- connecting pipe one；The rear end 3- washing room；4- connecting pipe two；5- waste water clear water tanks；6-
Cooling tower；7- booster water pump；8- tap；Three 10- connecting pipe four of 9- connecting pipe；11- connecting pipe five；12- connection
Pipeline six；101- reaction chamber；The main inlet flange of 102-；The auxiliary inlet flange of 103-；The auxiliary charging flange of 104-；105- outlet flange；
201- motor-driven valve；Chamber is washed in the rear end 301-；302- water spray flange one；303- spray head one；304- drainage flange；501- cabinet；
502- water-in flange；503- water-output flange；504- fixed frame；505- filter plate；601- coldplate；602- water spray flange two；
603- spray head two；604- water spray flange three；605- spray head three；606- filter bag；The gas outlet 607-.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
Embodiment 1
As shown in Figure 1 to Figure 2, a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, including reaction
Chamber 1, rear end washing room 3, cooling tower 6 and waste water clear water tanks 5, the reaction chamber 1 include reaction chamber 101, main inlet flange 102,
Auxiliary inlet flange 103 and auxiliary charging flange 104, outlet flange 105, the main inlet flange 102 and auxiliary inlet flange 103 are distinguished
It is welded on the top center and top both sides of reaction chamber 101, the auxiliary charging flange 104 is welded on the middle part of reaction chamber 101, institute
Outlet flange 105 is stated to be welded on the bottom of reaction chamber 101 and be connected by connecting pipe 1 with rear end washing room 3；The rear end
Washing room 3 includes rear end washing chamber 301 and spray head flange 1, and the spray head flange 1 is symmetrically set in rear end washing chamber
301 two sides are simultaneously interior equipped with spray head 1, and the top left side of the rear end washing chamber 301 is equipped with inlet end and and connecting pipe
22 are connected, and outlet side is equipped on the right of top and is connected with cooling tower 6, and the bottom of the rear end washing chamber 301 is equipped with drainage flange
It 304 and is connected by connecting pipe 24 and waste water clear water tanks 5；The inside of the cooling tower 6 is laid with coldplate 601, described
The external intermediate and top of cooling tower 6 is respectively welded water spray flange 2 602 and water spray flange 3 604, the water spray flange two
602 is interior equipped with spray head 2 603 and spray head 3 605 with water spray flange 3 604, and the top horizontal of the cooling tower 6 is equipped with gas outlet
607。
In the present embodiment, the waste water clear water tanks 5 include cabinet 501 and water-in flange 502, the water-in flange 502
It is welded on the top left of cabinet 501, the water-in flange 502 is connected by connecting pipe 24 with drainage flange 304, described
The bosom of cabinet 501 is equipped with filter plate 504 and is fixed on the inside of cabinet 501, the case vertically by fixed frame 2 505
The lower right side of body 501 is equipped with water-output flange 503.
The working principle and the course of work of the utility model: exhaust gas enters front-end purification unit, in eliminating exhaust gas
After sour gas and dust particles, remaining exhaust gas, which enters in reaction chamber 1, to react, and the organic matter in exhaust gas is reacted away, then,
High-temperature gas after reaction sprays and cools using the washing of rear end washing room 3 and cooling tower 6, is reaching discharge standard
It is discharged afterwards from gas outlet 607, and the dust particles that generate encounter the bottom that rear end washing room 301 is fallen to after water and suitable after reacting
Water flow be flushed in waste water clear water tanks 5, then recycled by the filtration, purification of waste water clear water tanks 5, whole device structure is closed
Reason, it is practical.
By the way that auxiliary inlet flange 103 and auxiliary charging flange 104 is arranged at the top of reaction chamber 101, air and CDA can be passed through
Catalyst, so that the organic principle in reaction chamber 101 be made to obtain sufficient fully reacting.By by spray head in rear end washing room 3
One 303 are symmetricly set on the left and right sides of rear end washing chamber 301, and the dust generated after reacting and water can be allowed to come into full contact with.It is logical
The installation filter plate 504 in waste water clear water tanks 5 is crossed, the water come in rear end washing room 3 can be filtered.
Embodiment 2
As shown in Figure 1 to Figure 2, a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, including reaction
Chamber 1, rear end washing room 3, cooling tower 6 and waste water clear water tanks 5, the reaction chamber 1 include reaction chamber 101, main inlet flange 102,
Auxiliary inlet flange 103 and auxiliary charging flange 104, outlet flange 105, the main inlet flange 102 and auxiliary inlet flange 103 are distinguished
It is welded on the top center and top both sides of reaction chamber 101, the auxiliary charging flange 104 is welded on the middle part of reaction chamber 101, institute
Outlet flange 105 is stated to be welded on the bottom of reaction chamber 101 and be connected by connecting pipe 1 with rear end washing room 3；The rear end
Washing room 3 includes rear end washing chamber 301 and spray head flange 1, and the spray head flange 1 is symmetrically set in rear end washing chamber
301 two sides are simultaneously interior equipped with spray head 1, and the top left side of the rear end washing chamber 301 is equipped with inlet end and and connecting pipe
22 are connected, and outlet side is equipped on the right of top and is connected with cooling tower 6, and the bottom of the rear end washing chamber 301 is equipped with drainage flange
It 304 and is connected by connecting pipe 24 and waste water clear water tanks 5；The inside of the cooling tower 6 is laid with coldplate 601, described
The external intermediate and top of cooling tower 6 is respectively welded water spray flange 2 602 and water spray flange 3 604, the water spray flange two
602 is interior equipped with spray head 2 603 and spray head 3 605 with water spray flange 3 604, and the top horizontal of the cooling tower 6 is equipped with gas outlet
607。
In the present embodiment, the waste water clear water tanks 5 include cabinet 501 and water-in flange 502, the water-in flange 502
It is welded on the top left of cabinet 501, the water-in flange 502 is connected by connecting pipe 24 with drainage flange 304, described
The bosom of cabinet 501 is equipped with filter plate 504 and is fixed on the inside of cabinet 501, the case vertically by fixed frame 2 505
The lower right side of body 501 is equipped with water-output flange 503.
In the present embodiment, the water-output flange 503 is connected with booster water pump 7, the water inlet end of the booster water pump 7 and goes out
Water law orchid 503 connects, and the water outlet of booster water pump 7, which is connected with, shunts interface 8, and the shunting interface 8 is connected with connecting pipe three
9, connecting pipe 4 10, connecting pipe 5 11, connecting pipe 6 12, the connecting pipe 39 and connecting pipe 4 10 respectively and
The spray head 1 that 301 inside two sides of chamber are washed in rear end connects, and the connecting pipe 5 11 and connecting pipe 6 12 are respectively and cooling
Spray head 3 603 and spray head 4 605 inside tower 6 connect.
In the present embodiment, the connecting pipe 1 is equipped with motor-driven valve 201.
In the present embodiment, the top of the cooling tower 6 and 607 installation place of gas outlet are also equipped with filter bag 606.
In the present embodiment, the coldplate 601 is porous structure.
The working principle and the course of work of the utility model: exhaust gas enters front-end purification unit, in eliminating exhaust gas
After sour gas and dust particles, remaining exhaust gas, which enters in reaction chamber 1, to react, and the organic matter in exhaust gas is reacted away, then,
High-temperature gas after reaction sprays and cools using the washing of rear end washing room 3 and cooling tower 6, is reaching discharge standard
It is discharged afterwards from gas outlet 607, and the dust particles that generate encounter the bottom that rear end washing room 301 is fallen to after water and suitable after reacting
Water flow be flushed in waste water clear water tanks 5, then recycled by the filtration, purification of waste water clear water tanks 5, whole device structure is closed
Reason, it is practical.
By the way that auxiliary inlet flange 103 and auxiliary charging flange 104 is arranged at the top of reaction chamber 101, air and CDA can be passed through
Catalyst, to make the organic principle in reaction chamber 101 obtain sufficient fully reacting, then by being arranged in connecting pipe 1
Motor-driven valve 201 is discharged into rear end washing room 3 again after exhaust gas sufficiently reacts and carries out washing spray operation.By by rear end water
Spray head 1 is symmetricly set on the left and right sides of rear end washing chamber 301 in chamber wash 3, can allow the dust and water that generate after reaction
It comes into full contact with.It, can effectively will be anti-by being also equipped with filter bag 606 at the top of cooling tower 6 and 607 installation place of gas outlet
Dust is thoroughly limited among the utility model after answering, and will not be discharged into air.By porous using coldplate 601
Structure, then cooperate the use of the spray head 2 606 and spray head 3 605 in cooling tower 6, the high-temperature gas after reaction can be dropped
Temperature.By installing filter plate 504 in waste water clear water tanks 5, the water come in rear end washing room 3 can be filtered, then again
Using booster water pump 7 by purified water by shunt interface 8 and connecting line it is one-to-one draw the utilization of water is improved to spray head
Rate also avoids spray head external water source again.
Based on above-mentioned, in the present invention, exhaust gas enters front-end purification unit, is eliminating the sour gas in exhaust gas
After dust particles, remaining exhaust gas, which enters in reaction chamber 1, to react, and the organic matter in exhaust gas is reacted away, then, after reaction
High-temperature gas sprays and cools using the washing of rear end washing room 3 and cooling tower 6, from outlet after reaching discharge standard
Mouth 607 is discharged, and the dust particles generated after reacting fall to the bottom of rear end washing room 301 after encountering water and rush along water flow
It washes in waste water clear water tanks 5, then is recycled by the filtration, purification of waste water clear water tanks 5, whole device is structurally reasonable, practicability
By force.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all
Change within the scope of the invention or equivalents of the invention is included in the utility model.
Claims (6)
1. a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, it is characterised in that: including reaction chamber (1),
Rear end washing room (3), cooling tower (6) and waste water clear water tanks (5), the reaction chamber (1) include reaction chamber (101), main air inlet method
Blue (102), auxiliary inlet flange (103) and auxiliary charging flange (104), outlet flange (105), the main inlet flange (102) and
Auxiliary inlet flange (103) is respectively welded at the top center and top both sides of reaction chamber (101), the auxiliary charging flange (104)
It is welded on the middle part of reaction chamber (101), the outlet flange (105) is welded on the bottom of reaction chamber (101) and passes through connecting tube
Road one (2) is connected with rear end washing room (3)；The rear end washing room (3) includes rear end washing chamber (301) and spray head flange one
(302), the spray head flange one (302) be symmetrically set in rear end washing chamber (301) two sides and in be equipped with spray head one (303), institute
The top left side for stating rear end washing chamber (301) is equipped with inlet end and is connected with connecting pipe two (4), and outlet side is equipped on the right of top
And be connected with cooling tower (6), the bottom of rear end washing chamber (301) is equipped with drainage flange (304) and passes through connecting pipe two
(4) it is connected with waste water clear water tanks (5)；The inside of the cooling tower (6) is laid with coldplate (601), the cooling tower (6)
External intermediate and top is respectively welded water spray flange two (602) and water spray flange three (604), the water spray flange two (602)
Interior equipped with spray head two (603) and spray head three (605) with water spray flange three (604), the top horizontal of the cooling tower (6) is equipped with
Port (607).
2. according to claim 1 a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, feature
Be: the waste water clear water tanks (5) include cabinet (501) and water-in flange (502), and the water-in flange (502) is welded on case
The top left of body (501), the water-in flange (502) is connected by connecting pipe two (4) with drainage flange (304), described
The bosom of cabinet (501) is equipped with filter plate (504) and is fixed on the interior of cabinet (501) vertically by fixed frame two (505)
The lower right side in portion, the cabinet (501) is equipped with water-output flange (503).
3. according to claim 2 a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, feature
Be: the water-output flange (503) is connected with booster water pump (7), the water inlet end and water-output flange of the booster water pump (7)
(503) it connects, the water outlet of booster water pump (7), which is connected with, shunts interface (8), and the shunting interface (8) is connected with connecting pipe
Three (9), connecting pipe four (10), connecting pipe five (11), connecting pipe six (12), the connecting pipe three (9) and connecting tube
Road four (10) spray head one (303) connection with two sides inside rear end washing chamber (301) respectively, the connecting pipe five (11) and company
Adapter tube road six (12) is connected with the spray head two (603) of cooling tower (6) inside and spray head three (605) respectively.
4. according to claim 1 a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, feature
Be: the connecting pipe one (2) is equipped with motor-driven valve (201).
5. according to claim 1 a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, feature
Be: the top and gas outlet (607) installation place of the cooling tower (6) are also equipped with filter bag (606).
6. according to claim 1 a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles, feature
Be: the coldplate (601) is porous structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821140214.9U CN208678769U (en) | 2018-07-18 | 2018-07-18 | It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821140214.9U CN208678769U (en) | 2018-07-18 | 2018-07-18 | It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles |
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| Publication Number | Publication Date |
|---|---|
| CN208678769U true CN208678769U (en) | 2019-04-02 |
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ID=65881407
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821140214.9U Active CN208678769U (en) | 2018-07-18 | 2018-07-18 | It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108619879A (en) * | 2018-07-18 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | It is a kind of for sour gas, dust particles exhaust gas rear end purifier |
-
2018
- 2018-07-18 CN CN201821140214.9U patent/CN208678769U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108619879A (en) * | 2018-07-18 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | It is a kind of for sour gas, dust particles exhaust gas rear end purifier |
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