CN208678810U - A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere - Google Patents
A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere Download PDFInfo
- Publication number
- CN208678810U CN208678810U CN201821139552.0U CN201821139552U CN208678810U CN 208678810 U CN208678810 U CN 208678810U CN 201821139552 U CN201821139552 U CN 201821139552U CN 208678810 U CN208678810 U CN 208678810U
- Authority
- CN
- China
- Prior art keywords
- reaction chamber
- washing
- cooling tower
- flange
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Treating Waste Gases (AREA)
Abstract
The utility model discloses one kind to be suitable for sour gas, the rear end of dust atmosphere is reacted and washing spray device, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including the first reaction chamber, connecting pipe, second reaction chamber, washing room, connect hose, wastewater disposal basin and cooling tower, first reaction chamber and the second reaction chamber are connected by connecting pipe, the bottom of second reaction chamber is connected with washing room inlet end, cooling tower is connected with washing room outlet side, wastewater disposal basin is connected by connecting hose with the bottom water-output flange of washing room, the left and right sides that spray head is symmetrically set in washing room together is equipped with inside washing room, coldplate is laid with inside cooling tower, the top horizontal of cooling tower is equipped with gas outlet.After organic matter in exhaust gas is sufficiently reacted into the first and second reaction chambers, after spraying and cool using the washing of washing room and cooling tower, it is discharged after reaching discharge standard from gas outlet, whole device is structurally reasonable, practical.
Description
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to
A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere.
Background technique
The harmful exhausts outlet such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication also has big
The dust of amount is discharged into environment with exhaust gas, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block in long-play
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
Chinese Patent Application No. is that CN107051092A discloses a kind of waste gas treatment equipment, comprising: spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be successively arranged cyclone structure layer and filler along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, including the ontology with purify cavity, ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction is intracavitary to be equipped with plasma
Field generator.
Chinese Patent Application No. is that CN107051067A discloses a kind of integrated waste gas treatment equipment, comprising: cooling dress
Set, including shell and cooling spraying mechanism, shell have cooling chamber, cooling spraying mechanism be set to cool down it is intracavitary, cool down it is intracavitary from
Cooling air inlet is equipped with multiple partitions to cooling gas outlet and is divided into multiple cooling areas with the chamber that will cool down, and offers on partition logical
Hole；Spray cleaning device, including tower body and purification spraying mechanism, tower body have accommodating chamber, and tower body is equipped with and is connected to accommodating chamber
Purification air inlet, purification water outlet and purification gas outlet, purification spraying mechanism be set to accommodating chamber in, purification air inlet and cooling
Gas outlet connection；Gas cleaning plant, including the ontology with purify cavity, ontology be equipped with the air inlet that is connected to purify cavity and
Air outlet, air inlet are connected to purification gas outlet, and purify cavity includes plasma reaction chamber.
By being found after being carefully analyzed to above-mentioned documents: mistake in technical solution structure involved in documents 1
In complexity, maintenance cost is higher；Technical solution device the space occupied involved in documents 2 is larger, and inconvenience is applied to
In semiconductor fabrication to be made process gas processing, therefore, to be applied to semiconductor fabrication in process gas is made
Processing equipment needs re-start more reasonable design.
Utility model content
The purpose of this utility model is to provide a kind of rear end reaction suitable for sour gas, dust atmosphere and water washing sprays
Shower device, to solve the above-mentioned many defects caused by the prior art.
A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere, including the first reaction chamber, company
Adapter tube road, the second reaction chamber, washing room, connection hose, wastewater disposal basin and cooling tower, first reaction chamber include one He of reaction chamber
Main inlet flange one, the main inlet flange one are set to the top center of reaction chamber one, and the bottom of the reaction chamber one is equipped with
Gas flange, second reaction chamber include reaction chamber two and main inlet flange two, and the main inlet flange two is set to reaction chamber two
Top center, the outlet flange and main inlet flange two linked together by connecting pipe, the bottom of the reaction chamber two
Portion is connected with washing room, and the washing room includes washing cavity and is set to the washing intracorporal spray head one of chamber, the washing cavity
Top left is equipped with inlet end, is equipped with outlet side on the right of top, the bottom of the inlet end and reaction chamber two of washing cavity directly connects
It connects, the bottom of the outlet side and cooling tower of washing cavity is directly connected to, and the bottom of the washing cavity is equipped with water-output flange and leads to
It crosses connection hose to connect with waste water tank, coldplate is laid with inside the cooling tower, centre inside the cooling tower and upper
Portion is respectively equipped with spray head two and spray head three, and the top horizontal of the cooling tower is equipped with gas outlet.
Preferably, the both sides at the top of the reaction chamber one and reaction chamber two are respectively equipped with auxiliary inlet flange one and auxiliary air inlet
Flange two.
Preferably, the middle part of the reaction chamber one and reaction chamber two is respectively equipped with auxiliary charging flange one and auxiliary charging flange
Two.
Preferably, the spray head one is symmetrically set in the left and right sides of washing cavity.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
Utility model has the advantages that exhaust gas is after front end water washing device removes sour gas, it is anti-into first
It answers chamber and the second reaction chamber to be reacted, the organic principle in exhaust gas is reacted away, subsequently enter washing room and carry out water leaching, reaction
The dust generated afterwards falls to washing room bottom in conjunction with water and is flushed in waste water tank along water flow, and then, produces after reaction
Raw high-temperature gas enters cooling tower, and high-temperature gas is after porous coldplate cools down with internal further water leaching, from out
It is excluded at port, whole device is compact-sized, and scheme is reasonable.
By the way that auxiliary inlet flange one and auxiliary inlet flange two is respectively set at the top of reaction chamber one and reaction chamber two, can lead to
Enter air, then by the way that auxiliary charging flange one and auxiliary charging flange two is respectively set at the middle part of reaction chamber one and reaction chamber two, it can
It is passed through CDA catalyst, so that the organic principle in reaction chamber one and reaction chamber two be made to obtain sufficient fully reacting.By by water
Spray head one is symmetricly set on the left and right sides of washing cavity in chamber wash, and the dust generated after reacting and water can be allowed to come into full contact with.
By being also equipped with filter bag at the top of cooling tower and gas outlet installation place, effectively dust after reaction thoroughly can be limited
System will not be discharged into air among the utility model.Cooperate the spray head two and spray head three in cooling tower by coldplate
Use, can cool down to the high-temperature gas after reaction.
Detailed description of the invention
Fig. 1 and Fig. 2 is the structural schematic diagram of the utility model entirety.
Wherein, the first reaction chamber of 1-；11- reaction chamber one；The main inlet flange one of 12-；The auxiliary inlet flange one of 13-；14- it is auxiliary into
Expect flange one；15- outlet flange；2- connecting pipe；The second reaction chamber of 3-；31- reaction chamber two；The main inlet flange two of 32-；33-
Auxiliary inlet flange two；The auxiliary charging flange two of 34-；4- washing room；41- washes cavity；42- spray head one；43- water-output flange；5- connects
Connect hose；6- waste water tank；7- cooling tower；71- coldplate；72- spray head two；73- spray head three；74- filter bag；The gas outlet 75-.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
Embodiment 1
As shown in Figure 1 to Figure 2, a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere, packet
Include the first reaction chamber 1, connecting pipe 2, the second reaction chamber 3, washing room 4, connection hose 5, wastewater disposal basin 6 and cooling tower 7, described the
One reaction chamber 1 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to the top of reaction chamber 1
Among portion, the bottom of the reaction chamber 1 is equipped with outlet flange 15, second reaction chamber 3 include reaction chamber 2 31 and it is main into
Gas flange 2 32, the main inlet flange 2 32 are set to the top center of reaction chamber 2 31, the outlet flange 15 and main air inlet
Flange 2 32 is linked together by connecting pipe 2, and the bottom of the reaction chamber 2 31 and washing room 4 connect, the washing room 4
The top left of spray head 1 including washing cavity 41 and in washing cavity 41, the washing cavity 41 is equipped with air inlet
End, top the right are equipped with outlet side, and the bottom of the inlet end and reaction chamber 2 31 of washing cavity 41 is directly connected to, and washes cavity 41
Outlet side and the bottom of cooling tower 7 be directly connected to, the bottom of the washing cavity 41 is equipped with water-output flange 43 and passes through connection
Hose 5 and waste water tank 6 connect, and are laid with coldplate 71 inside the cooling tower 7, centre inside the cooling tower 7 and upper
Portion is respectively equipped with spray head 2 72 and spray head 3 73, and the top horizontal of the cooling tower 7 is equipped with gas outlet 75.
In the present embodiment, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange
One 13 and auxiliary inlet flange 2 33, air can be passed through.
In the present embodiment, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary one 14 He of charging flange
Auxiliary charging flange 2 34, can be passed through CDA catalyst.
The working principle and the course of work of the utility model: exhaust gas by front end water washing device remove sour gas after,
It burns into the first reaction chamber 1 and the second reaction chamber 3, the organic principle in exhaust gas is reacted away, washing room is subsequently entered
Water leaching is carried out, the dust generated after reaction falls to 4 bottom of washing room in conjunction with water and is flushed in waste water tank 6 along water flow,
And then, the high-temperature gas generated after reaction enters cooling tower 7, and high-temperature gas is further by porous coldplate 71 and inside
Water leaching cooling after, 75 are excluded from gas outlet, and whole device is compact-sized, and scheme is reasonable.By in one 11 He of reaction chamber
Auxiliary inlet flange 1 and auxiliary inlet flange 2 33 is respectively set in the top of reaction chamber 2 31, can be passed through air, then by anti-
It answers the middle part of chamber 1 and reaction chamber 2 31 that auxiliary charging flange 1 and auxiliary charging flange 2 34 is respectively set, CDA can be passed through and urged
Agent, so that the organic principle in reaction chamber 1 and reaction chamber 2 31 be made to obtain sufficient fully reacting.
Embodiment 2
As shown in Figure 1 to Figure 2, a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere, packet
Include the first reaction chamber 1, connecting pipe 2, the second reaction chamber 3, washing room 4, connection hose 5, wastewater disposal basin 6 and cooling tower 7, described the
One reaction chamber 1 includes reaction chamber 1 and main inlet flange 1, and the main inlet flange 1 is set to the top of reaction chamber 1
Among portion, the bottom of the reaction chamber 1 is equipped with outlet flange 15, second reaction chamber 3 include reaction chamber 2 31 and it is main into
Gas flange 2 32, the main inlet flange 2 32 are set to the top center of reaction chamber 2 31, the outlet flange 15 and main air inlet
Flange 2 32 is linked together by connecting pipe 2, and the bottom of the reaction chamber 2 31 and washing room 4 connect, the washing room 4
The top left of spray head 1 including washing cavity 41 and in washing cavity 41, the washing cavity 41 is equipped with air inlet
End, top the right are equipped with outlet side, and the bottom of the inlet end and reaction chamber 2 31 of washing cavity 41 is directly connected to, and washes cavity 41
Outlet side and the bottom of cooling tower 7 be directly connected to, the bottom of the washing cavity 41 is equipped with water-output flange 43 and passes through connection
Hose 5 and waste water tank 6 connect, and are laid with coldplate 71 inside the cooling tower 7, centre inside the cooling tower 7 and upper
Portion is respectively equipped with spray head 2 72 and spray head 3 73, and the top horizontal of the cooling tower 7 is equipped with gas outlet 75.
In the present embodiment, the both sides at the top of the reaction chamber 1 and reaction chamber 2 31 are respectively equipped with auxiliary inlet flange
One 13 and auxiliary inlet flange 2 33, air can be passed through.
In the present embodiment, the middle part of the reaction chamber 1 and reaction chamber 2 31 is respectively equipped with auxiliary one 14 He of charging flange
Auxiliary charging flange 2 34, can be passed through CDA catalyst.
In the present embodiment, the spray head 1 be symmetrically set in washing cavity 41 the left and right sides, can allow reaction after powder
Dirt comes into full contact with water.
In the present embodiment, the top of the cooling tower 7 and 75 installation place of gas outlet are also equipped with filter bag 74, can allow anti-
Dust is effectively isolated in the present apparatus after answering.
The working principle and the course of work of the utility model: exhaust gas by front end water washing device remove sour gas after,
It burns into the first reaction chamber 1 and the second reaction chamber 3, the organic principle in exhaust gas is reacted away, washing room is subsequently entered
Water leaching is carried out, the dust generated after reaction falls to 4 bottom of washing room in conjunction with water and is flushed in waste water tank 6 along water flow,
And then, the high-temperature gas generated after reaction enters cooling tower 7, and high-temperature gas is further by porous coldplate 71 and inside
Water leaching cooling after, 75 are excluded from gas outlet, and whole device is compact-sized, and scheme is reasonable.By in one 11 He of reaction chamber
Auxiliary inlet flange 1 and auxiliary inlet flange 2 33 is respectively set in the top of reaction chamber 2 31, can be passed through air, then by anti-
It answers the middle part of chamber 1 and reaction chamber 2 31 that auxiliary charging flange 1 and auxiliary charging flange 2 34 is respectively set, CDA can be passed through and urged
Agent, so that the organic principle in reaction chamber 1 and reaction chamber 2 31 be made to obtain sufficient fully reacting.By by washing room 4
Middle spray head 1 is symmetricly set on the left and right sides of washing cavity 41, and the dust generated after reacting and water can be allowed to come into full contact with.
It, can be effectively thorough by dust after reaction by being also equipped with filter bag 74 at the top of cooling tower 7 and 75 installation place of gas outlet
Bottom is limited among the utility model, will not be discharged into air.Cooperate the spray head two in cooling tower 7 by coldplate 71
72 and spray head 3 73 use, can cool down to the high-temperature gas after reaction.
Based on above-mentioned, in the present invention, exhaust gas is after front end water washing device removes sour gas, into first
Reaction chamber 1 and the second reaction chamber 3 burn, and the organic principle in exhaust gas is reacted away, and subsequently enter washing room and carry out water leaching,
The dust generated after reaction falls to 4 bottom of washing room in conjunction with water and is flushed in waste water tank 6 along water flow, and then, instead
The high-temperature gas that should be generated afterwards enters cooling tower 7, and high-temperature gas is by porous coldplate 71 and internal further water leaching drop
Wen Hou, 75 are excluded from gas outlet, and whole device is compact-sized, and scheme is reasonable.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all
Change within the scope of the invention or equivalents of the invention is included in the utility model.
Claims (5)
1. a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere, it is characterised in that: including first
Reaction chamber (1), connecting pipe (2), the second reaction chamber (3), washing room (4), connection hose (5), waste water tank (6) and cooling tower
(7), first reaction chamber (1) includes reaction chamber one (11) and main inlet flange one (12), the main inlet flange one (12)
Set on the top center of reaction chamber one (11), the bottom of the reaction chamber one (11) is equipped with outlet flange (15), and described second is anti-
Answering chamber (3) includes reaction chamber two (31) and main inlet flange two (32), and the main inlet flange two (32) is set to reaction chamber two
(31) top center, the outlet flange (15) and main inlet flange two (32) are linked together by connecting pipe (2), institute
Bottom and washing room (4) connection of reaction chamber two (31) are stated, the washing room (4) includes washing cavity (41) and being set to wash chamber
Spray head one (42) in body (41), the top left of washing cavity (41) are equipped with inlet end, are equipped with outlet side on the right of top,
The bottom of the inlet end and reaction chamber two (31) of washing cavity (41) is directly connected to, and washes outlet side and the cooling tower of cavity (41)
(7) bottom is directly connected to, and the bottom of washing cavity (41) is equipped with water-output flange (43) and hose (5) and useless by connecting
Water tank (6) connection, the cooling tower (7) is internal to be laid with coldplate (71), the cooling tower (7) internal centre and top
It is respectively equipped with spray head two (72) and spray head three (73), the top horizontal of the cooling tower (7) is equipped with gas outlet (75).
2. a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere according to claim 1,
It is characterized by: the both sides at the top of the reaction chamber one (11) and reaction chamber two (31) are respectively equipped with auxiliary inlet flange one (13)
With auxiliary inlet flange two (33).
3. a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere according to claim 1,
It is characterized by: being respectively equipped with auxiliary one (14) He Fujin of charging flange in the middle part of the reaction chamber one (11) and reaction chamber two (31)
Expect flange two (34).
4. a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere according to claim 1,
It is characterized by: the spray head one (42) is symmetrically set in the left and right sides of washing cavity (41).
5. a kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere according to claim 1,
It is characterized by: the top and gas outlet (75) installation place of the cooling tower (7) are also equipped with filter bag (74).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821139552.0U CN208678810U (en) | 2018-07-18 | 2018-07-18 | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821139552.0U CN208678810U (en) | 2018-07-18 | 2018-07-18 | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208678810U true CN208678810U (en) | 2019-04-02 |
Family
ID=65881501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821139552.0U Active CN208678810U (en) | 2018-07-18 | 2018-07-18 | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208678810U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108939905A (en) * | 2018-07-18 | 2018-12-07 | 安徽京仪自动化装备技术有限公司 | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere |
-
2018
- 2018-07-18 CN CN201821139552.0U patent/CN208678810U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108939905A (en) * | 2018-07-18 | 2018-12-07 | 安徽京仪自动化装备技术有限公司 | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109821373A (en) | A kind of plasma emission-control equipment and method | |
| CN108619879A (en) | It is a kind of for sour gas, dust particles exhaust gas rear end purifier | |
| CN208678810U (en) | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere | |
| CN103047668B (en) | Tail gas purification treatment system of cremation machine | |
| CN202605824U (en) | Vertical type recoil filter | |
| CN207654875U (en) | Dust-extraction unit and cleaner | |
| CN208678769U (en) | It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles | |
| CN208678768U (en) | A kind of waste gas purification apparatus of acid gas-containing, dust particles | |
| CN207307578U (en) | A kind of emission-control equipment of denitrating catalyst | |
| CN207591595U (en) | A kind of spray scrubber waste gas treatment equipment | |
| CN208678767U (en) | It is a kind of suitable for sour gas, the washing spray device of dust atmosphere | |
| CN108939905A (en) | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere | |
| CN205649985U (en) | Oil and smoke filter | |
| CN213977576U (en) | Blast furnace gas desulfurization preprocessing device | |
| CN212142034U (en) | Workshop dust and gas treatment equipment | |
| CN213556188U (en) | Waste gas recovery device of setting machine | |
| CN211302512U (en) | Spray tower for chemical production | |
| CN107185379A (en) | A kind of phosphoric acid by wet process tail gas Two-way Cycle defluorinate processing system and processing method | |
| CN208865403U (en) | A kind of flue gas debrominate removing heavy-metal dedusting demisting integrated apparatus | |
| CN207012783U (en) | A kind of fluorinated tail gas absorption plant | |
| CN207071312U (en) | A kind of industrial tail gas cleaning equipment with gas detection function | |
| CN202527057U (en) | Nitrogen oxide waste gas treatment equipment | |
| CN106139854A (en) | A kind of wet-dry change combines except multiple exhaust purifier | |
| CN206631368U (en) | Being capable of smoke-purifying, the air cleaning unit of haze | |
| CN213266570U (en) | Dust collector for blast furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |