CN208678768U - A kind of waste gas purification apparatus of acid gas-containing, dust particles - Google Patents
A kind of waste gas purification apparatus of acid gas-containing, dust particles Download PDFInfo
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- CN208678768U CN208678768U CN201821139567.7U CN201821139567U CN208678768U CN 208678768 U CN208678768 U CN 208678768U CN 201821139567 U CN201821139567 U CN 201821139567U CN 208678768 U CN208678768 U CN 208678768U
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Abstract
The utility model discloses a kind of acid gas-containings, the waste gas purification apparatus of dust particles, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including supercharging air pump, front end washing room, reaction chamber, rear end washing room, cooling tower and waste water clear water tanks, the inlet end of supercharging air pump is connected with the waste gas outlet of external equipment, the outlet side of supercharging air pump is connected with front end washing room, after exhaust gas enters front end washing room, eliminate the sour gas and dust particles in exhaust gas, remaining exhaust gas, which enters in reaction chamber, to react, organic matter in exhaust gas is reacted away, then, high-temperature gas after reaction sprays and cools using the washing of rear end washing room and cooling tower, it is discharged after reaching discharge standard from gas outlet, whole device is structurally reasonable, it is practical.
Description
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to
A kind of waste gas purification apparatus of acid gas-containing, dust particles.
Background technique
The harmful exhausts outlet such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication also has big
The dust of amount is discharged into environment with exhaust gas, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block in long-play
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
China Patent Publication No. is that CN107051092A discloses a kind of waste gas treatment equipment, comprising: spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be successively arranged cyclone structure layer and filler along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, including the ontology with purify cavity, ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction is intracavitary to be equipped with plasma
Field generator.
China Patent Publication No. is that CN1120740C discloses a kind of waste gas treatment equipment, has coniform inner cylinder 11, spray
Mouth 19 and adsorption paper 31, the coniform inner cylinder 11 the smaller toward following diameter, which is used for along coniform cylinder 11
Top inner peripheral surface simultaneously sprays compressed air towards the direction rotated centered on coniform 11 central axis of cylinder.Coniform inner cylinder 11 exists
Upper part forms the upper opening for being taken into exhaust gas, is formed in its underpart for being discharged under the composition substance by internal exhaust gas
Portion's opening 12.Adsorption paper 31 configure exhaust gas be discharged from coniform inner cylinder 11 constitute substance by flow path.
Excessively complicated in technical solution structure involved in above-mentioned documents, maintenance cost is higher, what device occupied
Space is also larger, and inconvenience is applied in semiconductor fabrication to process gas processing is made, therefore, to applied to semiconductor system
Process gas processing equipment needs are made during making and re-start more reasonable design.
Utility model content
The purpose of this utility model is to provide a kind of acid gas-containings, the waste gas purification apparatus of dust particles, to solve
The above-mentioned defects caused by the prior art.
A kind of waste gas purification apparatus of acid gas-containing, dust particles, including supercharging air pump, front end washing room, reaction chamber,
Rear end washing room, cooling tower and waste water clear water tanks, the inlet end of the supercharging air pump are connected with the waste gas outlet of external equipment, institute
The outlet side for stating supercharging air pump is connected with front end washing room,
The front end washing room includes front end washing chamber and inlet flange, and the inlet flange is through the top of front end washing chamber
Weld together on the left of portion and with front end washing chamber, the lower end of the inlet flange is connected with air leaving cover, equal on the air leaving cover
Being laid with venthole and being immersed in front end washes intracavitary underwater, and the top right side of the front end washing chamber is welded with outlet flange
One, the outlet flange one is connected by connecting pipe one with reaction chamber, and the right end of the front end washing chamber is welded with spraying
Lan Yi, the interior underface for being located at outlet flange one together equipped with spray head of water spray flange one, the bottom of the front end washing chamber
It is welded with drainage flange one；
The reaction chamber includes reaction chamber, main inlet flange, auxiliary inlet flange and auxiliary charging flange, outlet flange two, institute
It states main inlet flange and auxiliary inlet flange is respectively welded at the top center and top both sides of reaction chamber, the auxiliary charging flange weldering
It connects at the middle part of reaction chamber, the outlet flange two is welded on the bottom of reaction chamber and by connecting pipe two and rear end washing room
It is connected；
The rear end washing room includes that rear end washing chamber and spray head flange two, the spray head flange two are symmetrically set in rear end water
Wash the two sides of chamber and interior equipped with spray head two, the top left side of the rear end washing chamber is equipped with inlet end and and connecting pipe two-phase
Even, it is equipped with outlet side on the right of top and is connected with cooling tower, the bottom of the rear end washing chamber is equipped with drainage flange two；
The inside of the cooling tower is laid with coldplate, and the external intermediate and top of the cooling tower is respectively welded spray
Spray head three and spray head four, the cooling are equipped in water law orchid three and water spray flange four, the water spray flange three and water spray flange four
The top horizontal of tower is equipped with gas outlet；
The waste water clear water tanks include cabinet and water-in flange one and water-in flange two, the water-in flange one and water inlet method
The top left that orchid two is welded on cabinet, the water-in flange one are connected by connecting pipe four with drainage flange one, it is described into
Water flange two-way crosses connecting pipe three and is connected with drainage flange two, and the bosom of the cabinet is equipped with filter plate and passes through fixation
Frame two is fixed on the inside of cabinet vertically, and the lower right side of the cabinet is equipped with water-output flange.
Preferably, the water-output flange is connected with booster water pump, and the water inlet end of the booster water pump is connected with water-output flange,
The water outlet of booster water pump is connected with shunting interface, and the shunting interface is connected with connecting pipe five, connecting pipe six, connecting tube
Road seven, connecting pipe eight, connecting pipe nine, the connecting pipe five and spray head one connect, the connecting pipe six and connecting tube
The spray head two that intracavitary portion two sides are washed in road seven with rear end respectively connects, the connecting pipe eight and the connecting pipe nine respectively and
Spray head three and spray head four inside cooling tower connect.
Preferably, the front side of the front end washing chamber is correspondingly provided with the observation panel of rectangle, the sight in one installation place of spray head
Self-clinching nut is uniformly welded on the inside of Cha Kou, the outside at the observation is equipped with transparent panel by lock-screw, described
Gasket is added between transparent panel and front end washing chamber.
Preferably, the inside of the front end washing chamber is equipped with active carbon and partition, and the partition is equipped with aperture and passes through
Active carbon is isolated in the bottom of front end washing chamber by partition.
Preferably, motor-driven valve one and motor-driven valve two, the company are respectively equipped in the connecting pipe one and connecting pipe two
Baroceptor is equipped in adapter tube road one, the connecting pipe one is externally provided with air gauge, the baroceptor and air gauge, electricity
Signal connection between dynamic valve one and motor-driven valve two.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
Utility model has the advantages that sour gas and dust particles are met in exhaust gas after exhaust gas enters front end washing room
The bottom of front end washing chamber is fallen to after to water and is flushed in waste water clear water tanks along water flow, to eliminate the acid in exhaust gas
Property gas and dust particles, remaining exhaust gas, which enters in reaction chamber, to react, and then the organic matter in exhaust gas is reacted away, then,
High-temperature gas after reaction sprays and cools using the washing of rear end washing room and cooling tower, reach after discharge standard from
Gas outlet discharge, whole device is compact-sized, and scheme is reasonable.
Active carbon is arranged in inside by washing chamber in front end, can significantly more efficient sour gas and powder by exhaust gas
Dirt granular absorption concentrates on being flushed in waste water clear water tanks that (active carbon continues to stay in front end washing chamber below water body and along water flow
Inside).It is correspondingly provided with the observation panel of rectangle in one installation place of spray head by the front side for washing chamber in front end, the outside at observation
Transparent panel is installed by lock-screw, the working condition of the inside of front end washing chamber is observed convenient for personnel, and by saturating
Gasket is added between bright panel and front end washing chamber, avoids exhaust gas that gap is installed between transparent panel and front end washing chamber
The leakage at place.By the way that air and CDA catalyst can be passed through in the top of the reaction chamber auxiliary inlet flange of setting and auxiliary charging flange,
To make the organic principle in reaction chamber obtain sufficient fully reacting.By the way that spray head two in the washing room of rear end is symmetricly set on
The left and right sides of chamber is washed in rear end, and the dust generated after reacting and water can be allowed to come into full contact with.By top in cooling tower and
Gas outlet installation place is also equipped with filter bag, can effectively thoroughly be limited in dust after reaction among the utility model,
It will not be discharged into air.By being porous structure by coldplate, then cooperate spray head three in cooling tower and spray head four
It uses, can cool down to the high-temperature gas after reaction.By installing filter plate in waste water clear water tanks, can be to coming from before
Water in end washing room and rear end washing room is filtered, and then recycles booster water pump by purified water by shunting interface
With connecting line it is one-to-one draw the utilization rate of water is improved to spray head, also avoid spray head external water source again.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model entirety.
Fig. 2 is the positive structure diagram of front end washing room in the utility model.
Fig. 3 is the side structure schematic view of front end washing room in the utility model.
Fig. 4 is the structural schematic diagram of rear end washing room in the utility model.
Wherein, 1- supercharging air pump；The front end 2- washing room；3- connecting pipe one；4- reaction chamber；5- connecting pipe two；After 6-
Hold washing room；7- cooling tower；8- connecting pipe three；9- waste water clear water tanks；10- connecting pipe four；11- connecting pipe five；12- connects
Adapter tube road six；13- connecting pipe seven；14- connecting pipe eight；15- connecting pipe nine；16- tap；17- booster water pump；
101- waste gas outlet；Chamber is washed in the front end 201-；202- inlet flange；203- outlet flange one；204- water spray flange one；205- row
Water law orchid one；206- air leaving cover；207- fixed frame one；208- partition；209- active carbon；210- spray head one；211- transparent panel；
212- gasket；213- lock-screw；214- riveting screw；301- motor-driven valve one；302- air gauge；303- baroceptor；
401- reaction chamber；The main inlet flange of 402-；The auxiliary inlet flange of 403-；The auxiliary charging flange of 404-；405- outlet flange two；501- electricity
Dynamic valve two；Chamber is washed in the rear end 601-；602- water spray flange two；603- spray head two；604- drainage flange two；701- coldplate；
702- water spray flange three；703- spray head three；704- water spray flange four；705- spray head four；706- filter bag；The gas outlet 707-；
901- cabinet；902- water-in flange one；903- water-in flange two；904- water-output flange；905- fixed frame two；906- filter plate.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
Embodiment 1
As shown in Figures 1 to 4, the waste gas purification apparatus of a kind of acid gas-containing, dust particles, including it is supercharging air pump 1, preceding
Hold washing room 2, reaction chamber 4, rear end washing room 6, cooling tower 7 and waste water clear water tanks 9, the inlet end of the supercharging air pump 1 and outer
The waste gas outlet 101 for connecing equipment connects, and the outlet side of the supercharging air pump 1 and front end washing room 2 connect,
The front end washing room 2 includes front end washing chamber 201 and inlet flange 202, and the inlet flange 202 runs through front end
It washes the top left side of chamber 201 and welds together with front end washing chamber 201, the lower end of the inlet flange 202 is connected with out
Gas hood 206, underwater, the front end water for being laid with venthole on the air leaving cover 206 and being immersed in front end washing chamber 201
The top right side for washing chamber 201 is welded with outlet flange 1, and the outlet flange 1 passes through connecting pipe 1 and reaction chamber
4 are connected, and the right end of the front end washing chamber 201 is welded with water spray flange 1, are equipped with spray head in the water spray flange 1
One 210 and it is located at the underface of outlet flange 1, the bottom of front end washing chamber 201 is welded with drainage flange 1；
The reaction chamber 4 include reaction chamber 401, main inlet flange 402, auxiliary inlet flange 403 and auxiliary charging flange 404,
Outlet flange 2 405, the main inlet flange 402 and auxiliary inlet flange 403 be respectively welded at reaction chamber 401 top center and
Top both sides, the auxiliary charging flange 404 are welded on the middle part of reaction chamber 401, and the outlet flange 2 405 is welded on reaction chamber
401 bottom is simultaneously connected by connecting pipe 25 with rear end washing room 6；
The rear end washing room 6 includes rear end washing chamber 601 and spray head flange 2 602, and the spray head flange 2 602 is symmetrical
Simultaneously interior equipped with spray head 2 603 set on the two sides of rear end washing chamber 601, the top left side of the rear end washing chamber 601 is equipped with air inlet
It holds and is connected with connecting pipe 25, outlet side is equipped on the right of top and is connected with cooling tower 7, the bottom of the rear end washing chamber 601
Portion is equipped with drainage flange 2 604；
The inside of the cooling tower 7 is laid with coldplate 701, and the external intermediate and top of the cooling tower 7 is welded respectively
It is connected to water spray flange 3 702 and water spray flange 4 704, is equipped with spray head three in the water spray flange 3 702 and water spray flange 4 704
703 and spray head 4 705, the top horizontal of the cooling tower 7 is equipped with gas outlet 707；
The waste water clear water tanks 9 include cabinet 901 and water-in flange 1 and water-in flange 2 903, the water-in flange
1 and water-in flange 2 903 be welded on the top left of cabinet 901, the water-in flange 1 passes through connecting pipe 4 10
It is connected with drainage flange 1, the water-in flange 2 903 is connected by connecting pipe 38 with drainage flange 2 604, described
The bosom of cabinet 901 is equipped with filter plate 906 and is fixed on the inside of cabinet 901, the case vertically by fixed frame 2 905
The lower right side of body 901 is equipped with water-output flange 904.
The working principle and the course of work of the utility model: after exhaust gas enters front end washing room 2, in exhaust gas sour gas and
Dust particles fall to the bottom of front end washing chamber 201 after encountering water and are flushed in waste water clear water tanks 9 along water flow, to go
In addition to the sour gas and dust particles in exhaust gas, remaining exhaust gas, which enters in reaction chamber 4, to react, and then will be organic in exhaust gas
Object reacts away, and then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7,
It is discharged after reaching discharge standard from gas outlet 707, whole device is compact-sized, and scheme is reasonable.By at the top of reaction chamber 401
Auxiliary inlet flange 403 and auxiliary charging flange 404 are set, air and CDA catalyst can be passed through, to make having in reaction chamber 401
Machine ingredient obtains sufficient fully reacting.Chamber 601 is washed by the way that spray head 2 603 in rear end washing room 6 is symmetricly set on rear end
The left and right sides, the dust that generates and water after reaction can be allowed to come into full contact with.
Embodiment 2
As shown in Figures 1 to 4, the waste gas purification apparatus of a kind of acid gas-containing, dust particles, including it is supercharging air pump 1, preceding
Hold washing room 2, reaction chamber 4, rear end washing room 6, cooling tower 7 and waste water clear water tanks 9, the inlet end of the supercharging air pump 1 and outer
The waste gas outlet 101 for connecing equipment connects, and the outlet side of the supercharging air pump 1 and front end washing room 2 connect,
The front end washing room 2 includes front end washing chamber 201 and inlet flange 202, and the inlet flange 202 runs through front end
It washes the top left side of chamber 201 and welds together with front end washing chamber 201, the lower end of the inlet flange 202 is connected with out
Gas hood 206, underwater, the front end water for being laid with venthole on the air leaving cover 206 and being immersed in front end washing chamber 201
The top right side for washing chamber 201 is welded with outlet flange 1, and the outlet flange 1 passes through connecting pipe 1 and reaction chamber
4 are connected, and the right end of the front end washing chamber 201 is welded with water spray flange 1, are equipped with spray head in the water spray flange 1
One 210 and it is located at the underface of outlet flange 1, the bottom of front end washing chamber 201 is welded with drainage flange 1；
The reaction chamber 4 include reaction chamber 401, main inlet flange 402, auxiliary inlet flange 403 and auxiliary charging flange 404,
Outlet flange 2 405, the main inlet flange 402 and auxiliary inlet flange 403 be respectively welded at reaction chamber 401 top center and
Top both sides, the auxiliary charging flange 404 are welded on the middle part of reaction chamber 401, and the outlet flange 2 405 is welded on reaction chamber
401 bottom is simultaneously connected by connecting pipe 25 with rear end washing room 6；
The rear end washing room 6 includes rear end washing chamber 601 and spray head flange 2 602, and the spray head flange 2 602 is symmetrical
Simultaneously interior equipped with spray head 2 603 set on the two sides of rear end washing chamber 601, the top left side of the rear end washing chamber 601 is equipped with air inlet
It holds and is connected with connecting pipe 25, outlet side is equipped on the right of top and is connected with cooling tower 7, the bottom of the rear end washing chamber 601
Portion is equipped with drainage flange 2 604；
The inside of the cooling tower 7 is laid with coldplate 701, and the external intermediate and top of the cooling tower 7 is welded respectively
It is connected to water spray flange 3 702 and water spray flange 4 704, is equipped with spray head three in the water spray flange 3 702 and water spray flange 4 704
703 and spray head 4 705, the top horizontal of the cooling tower 7 is equipped with gas outlet 707；
The waste water clear water tanks 9 include cabinet 901 and water-in flange 1 and water-in flange 2 903, the water-in flange
1 and water-in flange 2 903 be welded on the top left of cabinet 901, the water-in flange 1 passes through connecting pipe 4 10
It is connected with drainage flange 1, the water-in flange 2 903 is connected by connecting pipe 38 with drainage flange 2 604, described
The bosom of cabinet 901 is equipped with filter plate 906 and is fixed on the inside of cabinet 901, the case vertically by fixed frame 2 905
The lower right side of body 901 is equipped with water-output flange 904.
In the present embodiment, the water-output flange 904 is connected with booster water pump 17, the water inlet end of the booster water pump 17 and
Water-output flange 904 connects, and the water outlet of booster water pump 17, which is connected with, shunts interface 16, and the shunting interface 16 is connected with connecting tube
Road 5 11, connecting pipe 6 12, connecting pipe 7 13, connecting pipe 8 14, connecting pipe 9 15,5 11 He of connecting pipe
The connection of spray head 1, the connecting pipe 6 12 and connecting pipe 7 13 wash the spray head of 601 inside two sides of chamber with rear end respectively
2 603 connections, the connecting pipe 8 14 and the connecting pipe 9 15 respectively with the spray head 3 703 cooling tower 7 inside and spray
First 4 705 connection.
In the present embodiment, the front side of the front end washing chamber 201 is correspondingly provided with the sight of rectangle in one 210 installation place of spray head
Cha Kou is uniformly welded with self-clinching nut 214 on the inside of the observation panel, and the outside at the observation is pacified by lock-screw 213
Equipped with transparent panel 211, gasket 212 is added between the transparent panel 211 and front end washing chamber 201.
In the present embodiment, the inside of the front end washing chamber 201 is equipped with active carbon 209 and partition 208, the partition
208 are equipped with aperture and active carbon 209 are isolated in the bottom that chamber 201 is washed in front end by partition 208.
In the present embodiment, motor-driven valve 1 and electronic is respectively equipped in the connecting pipe 1 and connecting pipe 25
Valve 2 501, the connecting pipe 1 is interior to be equipped with baroceptor 303, and the connecting pipe 1 is externally provided with air gauge 302, institute
It states signal between baroceptor 303 and air gauge 302, motor-driven valve 1 and motor-driven valve 2 501 to connect, reaction can be monitored
Gas atmosphere in chamber 401, and after reaction chamber 401 is passed through certain gas utilizes motor-driven valve 1 and motor-driven valve 2 501
Linkage is realized that reaction chamber 401 is independent and is reacted.
In the present embodiment, the top of the cooling tower 7 and 707 installation place of gas outlet are also equipped with filter bag 706, it can
Dust after reaction is allowed effectively to be isolated in the present apparatus.
The working principle and the course of work of the utility model: after exhaust gas enters front end washing room 2, in exhaust gas sour gas and
Dust particles fall to the bottom of front end washing chamber 201 after encountering water and are flushed in waste water clear water tanks 9 along water flow, to go
In addition to the sour gas and dust particles in exhaust gas, remaining exhaust gas, which enters in reaction chamber 4, to react, and then will be organic in exhaust gas
Object reacts away, and then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7,
It is discharged after reaching discharge standard from gas outlet 707, whole device is compact-sized, and scheme is reasonable.
Active carbon 209 is arranged in inside by washing chamber 201 in front end, can the significantly more efficient sour gas by exhaust gas
Body and dust particles absorption concentrate on being flushed in waste water clear water tanks 9 that (active carbon 209 continues to stay in below water body and along water flow
The inside of front end washing chamber 201).Rectangle is correspondingly provided in one 210 installation place of spray head by the front side for washing chamber 201 in front end
Observation panel, the outside at observation are equipped with transparent panel 211 by lock-screw 213, observe front end convenient for personnel and wash chamber 201
Inside working condition, and add gasket 212 by washing between chamber 201 in transparent panel 211 and front end, avoid giving up
Gas installs the leakage from gap between transparent panel 211 and front end washing chamber 201.By being arranged at the top of reaction chamber 401
Auxiliary inlet flange 403 and auxiliary charging flange 404, can be passed through air and CDA catalyst, thus make in reaction chamber 401 it is organic at
Get sufficient fully reacting.By the way that spray head 2 603 in rear end washing room 6 is symmetricly set on the left side that chamber 601 is washed in rear end
Right two sides can allow the dust generated after reacting and water to come into full contact with.By at the top of cooling tower 7 and the installation of gas outlet 707
Place is also equipped with filter bag 706, can effectively thoroughly be limited in dust after reaction among the utility model, will not be arranged
It is put into air.By being porous structure by coldplate 701, then cooperate making for spray head 3 703 and spray head 4 705 in cooling tower
With can cool down to the high-temperature gas after reaction.It, can be to coming from by installing filter plate 906 in waste water clear water tanks 9
Water in front end washing room 2 and rear end washing room 6 is filtered, and then recycles booster water pump 17 by purified water by dividing
Stream interface 16 and connecting line is one-to-one draws the utilization rate that water is improved to spray head, also avoids spray head external water source again.
Based on above-mentioned, in the present invention, after exhaust gas enters front end washing room 2, sour gas and dust in exhaust gas
Grain falls to the bottom of front end washing chamber 201 after encountering water and is flushed in waste water clear water tanks 9 along water flow, to eliminate useless
Sour gas and dust particles in gas, remaining exhaust gas, which enters in reaction chamber 4, to react, and then the organic matter in exhaust gas is reacted
Fall, then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7, reaches row
It is discharged after putting standard from gas outlet 707, whole device is compact-sized, and scheme is reasonable.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all
Change within the scope of the invention or equivalents of the invention is included in the utility model.
Claims (6)
1. the waste gas purification apparatus of a kind of acid gas-containing, dust particles, it is characterised in that: including supercharging air pump (1), front end water
Chamber wash (2), reaction chamber (4), rear end washing room (6), cooling tower (7) and waste water clear water tanks (9), the supercharging air pump (1) into
The connection of the waste gas outlet (101) of gas end and external equipment, the outlet side of the supercharging air pump (1) and front end washing room (2) connection,
The front end washing room (2) includes that front end washing chamber (201) and inlet flange (202), the inlet flange (202) are run through
The top left side of front end washing chamber (201) simultaneously welds together with front end washing chamber (201), under the inlet flange (202)
End is connected with air leaving cover (206), is laid with venthole on the air leaving cover (206) and is immersed in front end washing chamber (201)
It is underwater, the top right side of front end washing chamber (201) is welded with outlet flange one (203), the outlet flange one (203)
It is connected by connecting pipe one (3) with reaction chamber (4), the right end of front end washing chamber (201) is welded with water spray flange one
(204), described equipped with spray head one (210) and positioned at the underface of outlet flange one (203) in water spray flange one (204)
The bottom of front end washing chamber (201) is welded with drainage flange one (205)；
The reaction chamber (4) includes reaction chamber (401), main inlet flange (402), auxiliary inlet flange (403) and auxiliary charging flange
(404), outlet flange two (405), the main inlet flange (402) and auxiliary inlet flange (403) are respectively welded at reaction chamber
(401) top center and top both sides, auxiliary charging flange (404) are welded on the middle part of reaction chamber (401), the outlet
Flange two (405) is welded on the bottom of reaction chamber (401) and is connected by connecting pipe two (5) with rear end washing room (6)；
The rear end washing room (6) includes rear end washing chamber (601) and spray head flange two (602), the spray head flange two (602)
It is symmetrically set in the two sides of rear end washing chamber (601) and interior equipped with spray head two (603), the top left of rear end washing chamber (601)
Side is equipped with inlet end and is connected with connecting pipe two (5), and outlet side is equipped on the right of top and is connected with cooling tower (7), after described
The bottom of end washing chamber (601) is equipped with drainage flange two (604)；
The inside of the cooling tower (7) is laid with coldplate (701), the external intermediate and top difference of the cooling tower (7)
It is welded with water spray flange three (702) and water spray flange four (704), the water spray flange three (702) and water spray flange four (704) are interior
Equipped with spray head three (703) and spray head four (705), the top horizontal of the cooling tower (7) is equipped with gas outlet (707)；
The waste water clear water tanks (9) include cabinet (901) and water-in flange one (902) and water-in flange two (903), the water inlet
Flange one (902) and water-in flange two (903) are welded on the top left of cabinet (901), and the water-in flange one (902) passes through
Connecting pipe four (10) is connected with drainage flange one (205), and the water-in flange two (903) passes through connecting pipe three (8) and row
Water law orchid two (604) is connected, and the bosom of the cabinet (901) is equipped with filter plate (906) and perpendicular by fixed frame two (905)
It is directly fixed on the inside of cabinet (901), the lower right side of the cabinet (901) is equipped with water-output flange (904).
2. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that: institute
It states water-output flange (904) to be connected with booster water pump (17), the water inlet end and water-output flange (904) of the booster water pump (17) are even
It connects, the water outlet of booster water pump (17), which is connected with, shunts interface (16), and the shunting interface (16) is connected with connecting pipe five
(11), connecting pipe six (12), connecting pipe seven (13), connecting pipe eight (14), connecting pipe nine (15), the connecting pipe
Five (11) and spray head one (210) connection, the connecting pipe six (12) and connecting pipe seven (13) wash chamber with rear end respectively
(601) spray head two (603) connection of internal two sides, the connecting pipe eight (14) and the connecting pipe nine (15) respectively with it is cold
But the internal spray head three (703) of tower (7) and spray head four (705) connection.
3. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that: institute
The front side for stating front end washing chamber (201) is correspondingly provided with the observation panel of rectangle in spray head one (210) installation place, the observation panel it is interior
Side is uniformly welded with self-clinching nut (214), and the outside of the observation panel is equipped with transparent panel by lock-screw (213)
(211), gasket (212) are added between the transparent panel (211) and front end washing chamber (201).
4. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that: institute
The inside for stating front end washing chamber (201) is equipped with active carbon (209) and partition (208), and the partition (208) is equipped with aperture and leads to
Cross the bottom that active carbon (209) is isolated in front end washing chamber (201) by partition (208).
5. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that: institute
It states and is respectively equipped with motor-driven valve one (301) and motor-driven valve two (501), the connection in connecting pipe one (3) and connecting pipe two (5)
Baroceptor (303) are equipped in pipeline one (3), the connecting pipe one (3) is externally provided with air gauge (302), the air pressure transmission
Signal connects between sensor (303) and air gauge (302), motor-driven valve one (301) and motor-driven valve two (501).
6. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that: institute
The top and gas outlet (707) installation place for stating cooling tower (7) are also equipped with filter bag (706).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108619878A (en) * | 2018-07-18 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108619878A (en) * | 2018-07-18 | 2018-10-09 | 安徽京仪自动化装备技术有限公司 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
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