CN108619878A - A kind of waste gas purification apparatus of acid gas-containing, dust particles - Google Patents
A kind of waste gas purification apparatus of acid gas-containing, dust particles Download PDFInfo
- Publication number
- CN108619878A CN108619878A CN201810792665.9A CN201810792665A CN108619878A CN 108619878 A CN108619878 A CN 108619878A CN 201810792665 A CN201810792665 A CN 201810792665A CN 108619878 A CN108619878 A CN 108619878A
- Authority
- CN
- China
- Prior art keywords
- flange
- water
- connecting pipe
- end washing
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/75—Multi-step processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
- B01D50/60—Combinations of devices covered by groups B01D46/00 and B01D47/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8678—Removing components of undefined structure
- B01D53/8687—Organic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2247/00—Details relating to the separation of dispersed particles from gases, air or vapours by liquid as separating agent
- B01D2247/04—Regenerating the washing fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/30—Sulfur compounds
- B01D2257/302—Sulfur oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/40—Nitrogen compounds
- B01D2257/404—Nitrogen oxides other than dinitrogen oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention discloses a kind of acid gas-containings, the waste gas purification apparatus of dust particles, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including supercharging air pump, front end washing room, reaction chamber, rear end washing room, cooling tower and waste water clear water tanks, the inlet end of supercharging air pump is connected with the waste gas outlet of external equipment, the outlet side of supercharging air pump is connected with front end washing room, after exhaust gas enters front end washing room, eliminate the sour gas and dust particles in exhaust gas, remaining exhaust gas, which enters in reative cell, to react, organic matter in exhaust gas is reacted away, then, high-temperature gas after reaction sprays and cools using the washing of rear end washing room and cooling tower, it is discharged from gas outlet after reaching discharge standard, whole device is reasonable for structure, it is highly practical.
Description
Technical field
The present invention relates to the technical fields that process gas processing equipment is made in semiconductor fabrication, and in particular to a kind of
The waste gas purification apparatus of acid gas-containing, dust particles.
Background technology
It arranges, also has big outside the harmful exhausts such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication
The dust of amount is discharged into exhaust gas in environment, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment in long-play because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
China Patent Publication No. discloses a kind of waste gas treatment equipment for CN107051092A, including：Spray cleaning device,
Including tower body and spraying mechanism, tower body has accommodating chamber, and tower body is interior to be equipped with cyclone structure layer and filler successively along bottom to top
Accommodating chamber is divided into first chamber, second chamber and third chamber, the bottom of tower body is equipped with to be connected to layer with first chamber
Air inlet and water outlet, the top of tower body are equipped with the gas outlet with third chamber；Spraying mechanism includes the first spray assemblies
With the second spray assemblies；Gas cleaning plant, includes the ontology with purify cavity, and ontology is equipped with the air inlet being connected to purify cavity
Mouth and air outlet, air inlet are connected to gas outlet, and purify cavity includes plasma reaction chamber, and plasma reaction intracavitary is equipped with plasma
Field generator.
China Patent Publication No. is that CN1120740C discloses a kind of waste gas treatment equipment, has coniform inner cylinder 11, spray
Mouth 19 and adsorption paper 31, the coniform inner cylinder 11 the smaller toward following diameter, which is used for along coniform cylinder 11
Top inner peripheral surface simultaneously sprays compressed air towards the direction rotated centered on 11 central shaft of coniform cylinder.Coniform inner cylinder 11 exists
Upper part forms the upper opening for being taken into exhaust gas, is formed in its underpart for being discharged under the composition substance by internal exhaust gas
Portion's opening 12.Adsorption paper 31 configure exhaust gas be discharged from coniform inner cylinder 11 constitute substance by flow path.
Excessively complicated in involved technical solution structure in above-mentioned documents, maintenance cost is higher, what device occupied
Space is also larger, and inconvenience is applied in semiconductor fabrication to process gas processing is made, therefore, to being applied to semiconductor system
Process gas processing equipment needs are made during making and re-start more rational design.
Invention content
It is existing to solve the purpose of the present invention is to provide a kind of acid gas-containing, the waste gas purification apparatus of dust particles
Caused the above-mentioned defects in technology.
A kind of waste gas purification apparatus of acid gas-containing, dust particles, including supercharging air pump, front end washing room, reaction chamber,
Rear end washing room, cooling tower and waste water clear water tanks, the inlet end of the supercharging air pump are connected with the waste gas outlet of external equipment, institute
The outlet side for stating supercharging air pump is connected with front end washing room,
The front end washing room includes front end washing chamber and inlet flange, and the inlet flange is through the top of front end washing chamber
Weld together on the left of portion and with front end washing chamber, the lower end of the inlet flange is connected with air leaving cover, equal on the air leaving cover
It is laid with venthole and is immersed in the underwater of front end washing intracavitary, the top right side of the front end washing chamber is welded with outlet flange
One, the outlet flange one is connected by connecting pipe one with reative cell, and the right end of the front end washing chamber is welded with spraying
Lan Yi, the interior underface for being located at outlet flange one together equipped with nozzle of water spray flange one, the bottom of the front end washing chamber
It is welded with drainage flange one；
The reative cell includes reaction chamber, main inlet flange, auxiliary inlet flange and auxiliary charging flange, outlet flange two, institute
It states main inlet flange and auxiliary inlet flange is respectively welded at top center and the top both sides of reaction chamber, the auxiliary charging flange weldering
It is connected on the middle part of reaction chamber, the outlet flange two is welded on the bottom of reaction chamber and by connecting pipe two and rear end washing room
It is connected；
The rear end washing room includes that rear end washing chamber and nozzle flange two, the nozzle flange two are symmetrically set in rear end water
Wash the both sides of chamber and interior equipped with nozzle two, the top left side of the rear end washing chamber is equipped with inlet end and and connecting pipe two-phase
Even, it is equipped with outlet side on the right of top and is connected with cooling tower, the bottom of the rear end washing chamber is equipped with drainage flange two；
The inside of the cooling tower is laid with coldplate, and the external intermediate and top of the cooling tower is respectively welded spray
It is equipped with nozzle three and nozzle four, the cooling in water law orchid three and water spray flange four, the water spray flange three and water spray flange four
The top horizontal of tower is equipped with gas outlet；
The waste water clear water tanks include babinet and water-in flange one and water-in flange two, the water-in flange one and into water law
The top left that orchid two is welded on babinet, the water-in flange one are connected by connecting pipe four with drainage flange one, it is described into
Water flange two-way crosses connecting pipe three and is connected with drainage flange two, and the bosom of the babinet is equipped with filter plate and passes through fixation
Frame two is fixed on the inside of babinet vertically, and the lower right side of the babinet is equipped with water-output flange.
Preferably, the water-output flange is connected with booster water pump, and the water inlet end of the booster water pump is connected with water-output flange,
The water outlet of booster water pump is connected with shunting interface, and the shunting interface is connected with connecting pipe five, connecting pipe six, connecting tube
Road seven, connecting pipe eight, connecting pipe nine, the connecting pipe five and nozzle one connect, the connecting pipe six and connecting tube
The nozzle two that intracavitary portion both sides are washed in road seven with rear end respectively connects, the connecting pipe eight and the connecting pipe nine respectively and
Nozzle three and nozzle four inside cooling tower connect.
Preferably, the front side of the front end washing chamber is correspondingly provided with the observation panel of rectangle, the sight in one installation place of nozzle
Self-clinching nut is uniformly welded on the inside of Cha Kou, the outside at the observation is equipped with transparent panel by lock-screw, described
Gasket is added between transparent panel and front end washing chamber.
Preferably, washing chamber in the front end is internally provided with activated carbon and partition board, and the partition board is equipped with aperture and passes through
Activated carbon is isolated in the bottom that chamber is washed in front end by partition board.
Preferably, the inside of the front end washing chamber and the fixed frame one and self-clinching nut of inside do polytetrafluorethylecoatings coatings
Covering treatment.
Preferably, motor-driven valve one and motor-driven valve two, the company are respectively equipped in the connecting pipe one and connecting pipe two
Baroceptor is equipped in take over road one, the connecting pipe one is externally provided with air gauge, the baroceptor and air gauge, electricity
Dynamic signal between valve one and motor-driven valve two connects.
Preferably, the material of the gasket is the ptfe composite containing glass fibre.
Preferably, the top of the cooling tower and gas outlet installation place are also equipped with filter bag.
Preferably, the material of the coldplate is porous aluminium oxide ceramics.
The advantage of the invention is that：After exhaust gas enters front end washing room, sour gas and dust particles encounter water in exhaust gas
The bottom of front end washing chamber is fallen to afterwards and is flushed in waste water clear water tanks along flow, to eliminate the sour gas in exhaust gas
Body and dust particles, remaining exhaust gas, which enters in reative cell, to react, and then the organic matter in exhaust gas is reacted away, then, reaction
High-temperature gas afterwards sprays and cools using the washing of rear end washing room and cooling tower, reaches after discharge standard from outlet
Mouth discharge, whole device is compact-sized, and scheme is reasonable.
Activated carbon is arranged in inside by washing chamber in front end, can significantly more efficient sour gas and powder by exhaust gas
Dirt granular absorption concentrates below water body and is flushed in waste water clear water tanks that (activated carbon, which continues to stay in front end, washes chamber along flow
Inside).Front side by washing chamber in front end is correspondingly provided with the observation panel of rectangle, the outside at observation in one installation place of nozzle
Transparent panel is installed by lock-screw, convenient for the working condition of the inside of personal observations front end washing chamber, and by saturating
Gasket is added between bright panel and front end washing chamber, avoids exhaust gas that gap is installed between transparent panel and front end washing chamber
The leakage at place, and the material of gasket selects the ptfe composite containing glass fibre, corrosion resistance is stronger, and the service life is more
It is long.By the way that auxiliary inlet flange and auxiliary charging flange is arranged at the top of reaction chamber, it can be passed through air and CDA catalyst, to make
Organic principle in reaction chamber obtain adequately the reaction was complete.By the way that nozzle two in the washing room of rear end is symmetricly set on rear end water
The left and right sides of chamber is washed, the dust generated after reacting and water can be allowed to come into full contact with.By at the top and gas outlet of cooling tower
Installation place is also equipped with filter bag, among can dust after reaction being thoroughly effectively limited in the present invention, will not be discharged
Into air.By the way that the material of coldplate is selected as porous aluminium oxide ceramics, because aluminium oxide ceramics itself has preferable conduction
Property, mechanical strength and heat-resisting quantity, then coordinate the use of the nozzle three and nozzle four in cooling tower, it can be to the high temperature after reaction
Gas cools down.It, can be to coming from front end washing room and rear end washing room by installing filter plate in waste water clear water tanks
Water be filtered, then recycle booster water pump by purified water by shunting interface and connecting line is one-to-one draws to spray
Head improves the utilization rate of water, also avoids nozzle external water source again.
Description of the drawings
Fig. 1 is the whole structural schematic diagram of the present invention.
Fig. 2 is the positive structure diagram of front end washing room in the present invention.
Fig. 3 is the side structure schematic view of front end washing room in the present invention.
Fig. 4 is the structural schematic diagram of rear end washing room in the present invention.
Wherein, 1- supercharging air pumps；The front ends 2- washing room；3- connecting pipes one；4- reative cells；5- connecting pipes two；After 6-
Hold washing room；7- cooling towers；8- connecting pipes three；9- waste water clear water tanks；10- connecting pipes four；11- connecting pipes five；12- connects
Take over road six；13- connecting pipes seven；14- connecting pipes eight；15- connecting pipes nine；16- taps；17- booster water pumps；
101- waste gas outlets；Chamber is washed in the front ends 201-；202- inlet flanges；203- outlets flange one；204- water spray flanges one；205- is arranged
Water law orchid one；206- air leaving covers；207- fixed frames one；208- partition boards；209- activated carbons；210- nozzles one；211- transparent panels；
212- gaskets；213- lock-screws；214- riveting screws；301- motor-driven valves one；302- air gauges；303- baroceptors；
401- reaction chambers；The main inlet flanges of 402-；The auxiliary inlet flanges of 403-；The auxiliary charging flanges of 404-；405- outlets flange two；501- electricity
Dynamic valve two；Chamber is washed in the rear ends 601-；602- water spray flanges two；603- nozzles two；604- drainage flanges two；701- coldplates；
702- water spray flanges three；703- nozzles three；704- water spray flanges four；705- nozzles four；706- filter bags；The gas outlets 707-；
901- babinets；902- water-in flanges one；903- water-in flanges two；904- water-output flanges；905- fixed frames two；906- filter plates.
Specific implementation mode
To make the technical means, the creative features, the aims and the efficiencies achieved by the present invention be easy to understand, with reference to
Specific implementation mode, the present invention is further explained.
Embodiment 1
As shown in Figures 1 to 4, the waste gas purification apparatus of a kind of acid gas-containing, dust particles, including it is supercharging air pump 1, preceding
Hold washing room 2, reaction chamber 4, rear end washing room 6, cooling tower 7 and waste water clear water tanks 9, the inlet end of the supercharging air pump 1 and outer
The waste gas outlet 101 for connecing equipment connects, and the outlet side of the supercharging air pump 1 and front end washing room 2 connect,
The front end washing room 2 includes front end washing chamber 201 and inlet flange 202, and the inlet flange 202 runs through front end
It washes the top left side of chamber 201 and welds together with front end washing chamber 201, the lower end of the inlet flange 202 is connected with out
Gas hood 206, underwater, the front end water for being laid with venthole on the air leaving cover 206 and being immersed in front end washing chamber 201
The top right side for washing chamber 201 is welded with outlet flange 1, and the outlet flange 1 passes through connecting pipe 1 and reative cell
4 are connected, and the right end of the front end washing chamber 201 is welded with water spray flange 1, and nozzle is equipped in the water spray flange 1
One 210 and positioned at the underface of outlet flange 1, the bottom of front end washing chamber 201 is welded with drainage flange 1；
The reative cell 4 include reaction chamber 401, main inlet flange 402, auxiliary inlet flange 403 and auxiliary charging flange 404,
Outlet flange 2 405, the main inlet flange 402 and auxiliary inlet flange 403 be respectively welded at reaction chamber 401 top center and
Top both sides, the auxiliary charging flange 404 are welded on the middle part of reaction chamber 401, and the outlet flange 2 405 is welded on reaction chamber
401 bottom is simultaneously connected by connecting pipe 25 with rear end washing room 6；
The rear end washing room 6 includes rear end washing chamber 601 and nozzle flange 2 602, and the nozzle flange 2 602 is symmetrical
The both sides that chamber 601 is washed set on rear end are simultaneously interior equipped with nozzle 2 603, and the top left side of the rear end washing chamber 601 is equipped with air inlet
It holds and is connected with connecting pipe 25, outlet side is equipped on the right of top and is connected with cooling tower 7, the bottom of the rear end washing chamber 601
Portion is equipped with drainage flange 2 604；
The inside of the cooling tower 7 is laid with coldplate 701, and the external intermediate and top of the cooling tower 7 is welded respectively
It is connected to water spray flange 3 702 and water spray flange 4 704, nozzle three is equipped in the water spray flange 3 702 and water spray flange 4 704
703 and nozzle 4 705, the top horizontal of the cooling tower 7 is equipped with gas outlet 707；
The waste water clear water tanks 9 include babinet 901 and water-in flange 1 and water-in flange 2 903, the water-in flange
1 and water-in flange 2 903 be welded on the top left of babinet 901, the water-in flange 1 passes through connecting pipe 4 10
It is connected with drainage flange 1, the water-in flange 2 903 is connected by connecting pipe 38 with drainage flange 2 604, described
The bosom of babinet 901 is equipped with filter plate 906 and is fixed on the inside of babinet 901, the case vertically by fixed frame 2 905
The lower right side of body 901 is equipped with water-output flange 904.
The operation principle and the course of work of the present invention：After exhaust gas enters front end washing room 2, sour gas and dust in exhaust gas
Particle falls to the bottom of front end washing chamber 201 after encountering water and is flushed in waste water clear water tanks 9 along flow, to eliminate
Sour gas in exhaust gas and dust particles, remaining exhaust gas, which enters in reative cell 4, to react, and then the organic matter in exhaust gas is anti-
It should fall, then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7, reaches
It is discharged from gas outlet 707 after discharge standard, whole device is compact-sized, and scheme is reasonable.By being arranged at the top of reaction chamber 401
Auxiliary inlet flange 403 and auxiliary charging flange 404, can be passed through air and CDA catalyst, to make in reaction chamber 401 it is organic at
Get adequately the reaction was complete.By the way that nozzle 2 603 in rear end washing room 6 is symmetricly set on the left side that chamber 601 is washed in rear end
Right both sides can allow the dust generated after reacting and water to come into full contact with.
Embodiment 2
As shown in Figures 1 to 4, the waste gas purification apparatus of a kind of acid gas-containing, dust particles, including it is supercharging air pump 1, preceding
Hold washing room 2, reaction chamber 4, rear end washing room 6, cooling tower 7 and waste water clear water tanks 9, the inlet end of the supercharging air pump 1 and outer
The waste gas outlet 101 for connecing equipment connects, and the outlet side of the supercharging air pump 1 and front end washing room 2 connect,
The front end washing room 2 includes front end washing chamber 201 and inlet flange 202, and the inlet flange 202 runs through front end
It washes the top left side of chamber 201 and welds together with front end washing chamber 201, the lower end of the inlet flange 202 is connected with out
Gas hood 206, underwater, the front end water for being laid with venthole on the air leaving cover 206 and being immersed in front end washing chamber 201
The top right side for washing chamber 201 is welded with outlet flange 1, and the outlet flange 1 passes through connecting pipe 1 and reative cell
4 are connected, and the right end of the front end washing chamber 201 is welded with water spray flange 1, and nozzle is equipped in the water spray flange 1
One 210 and positioned at the underface of outlet flange 1, the bottom of front end washing chamber 201 is welded with drainage flange 1；
The reative cell 4 include reaction chamber 401, main inlet flange 402, auxiliary inlet flange 403 and auxiliary charging flange 404,
Outlet flange 2 405, the main inlet flange 402 and auxiliary inlet flange 403 be respectively welded at reaction chamber 401 top center and
Top both sides, the auxiliary charging flange 404 are welded on the middle part of reaction chamber 401, and the outlet flange 2 405 is welded on reaction chamber
401 bottom is simultaneously connected by connecting pipe 25 with rear end washing room 6；
The rear end washing room 6 includes rear end washing chamber 601 and nozzle flange 2 602, and the nozzle flange 2 602 is symmetrical
The both sides that chamber 601 is washed set on rear end are simultaneously interior equipped with nozzle 2 603, and the top left side of the rear end washing chamber 601 is equipped with air inlet
It holds and is connected with connecting pipe 25, outlet side is equipped on the right of top and is connected with cooling tower 7, the bottom of the rear end washing chamber 601
Portion is equipped with drainage flange 2 604；
The inside of the cooling tower 7 is laid with coldplate 701, and the external intermediate and top of the cooling tower 7 is welded respectively
It is connected to water spray flange 3 702 and water spray flange 4 704, nozzle three is equipped in the water spray flange 3 702 and water spray flange 4 704
703 and nozzle 4 705, the top horizontal of the cooling tower 7 is equipped with gas outlet 707；
The waste water clear water tanks 9 include babinet 901 and water-in flange 1 and water-in flange 2 903, the water-in flange
1 and water-in flange 2 903 be welded on the top left of babinet 901, the water-in flange 1 passes through connecting pipe 4 10
It is connected with drainage flange 1, the water-in flange 2 903 is connected by connecting pipe 38 with drainage flange 2 604, described
The bosom of babinet 901 is equipped with filter plate 906 and is fixed on the inside of babinet 901, the case vertically by fixed frame 2 905
The lower right side of body 901 is equipped with water-output flange 904.
In the present invention, the water-output flange 904 is connected with booster water pump 17, the water inlet end of the booster water pump 17 and goes out
Water law orchid 904 connects, and the water outlet of booster water pump 17 is connected with shunting interface 16, and the shunting interface 16 is connected with connecting pipe
5 11, connecting pipe 6 12, connecting pipe 7 13, connecting pipe 8 14, connecting pipe 9 15, the connecting pipe 5 11 and spray
First 210 connection, the connecting pipe 6 12 and connecting pipe 7 13 wash the nozzle two of 601 inside both sides of chamber with rear end respectively
603 connections, the connecting pipe 8 14 and the connecting pipe 9 15 respectively with the nozzle 3 703 and nozzle inside cooling tower 7
4 705 connections.
In the present invention, the front side of the front end washing chamber 201 is correspondingly provided with the observation of rectangle in one 210 installation place of nozzle
Mouthful, it is uniformly welded with self-clinching nut 214 on the inside of the observation panel, the outside at the observation is installed by lock-screw 213
There is transparent panel 211, gasket 212 is added between the transparent panel 211 and front end washing chamber 201.
In the present invention, front end washing chamber 201 is internally provided with activated carbon 209 and partition board 208, the partition board 208
It is equipped with aperture and activated carbon 209 is isolated in by the bottom that chamber 201 is washed in front end by partition board 208.
In the present invention, the inside of the front end washing chamber 201 and the fixed frame 1 and self-clinching nut 214 of inside are done
Polytetrafluorethylecoatings coatings covering treatment increases service life.
In the present invention, motor-driven valve 1 and motor-driven valve are respectively equipped in the connecting pipe 1 and connecting pipe 25
2 501, the connecting pipe 1 is interior to be equipped with baroceptor 303, and the connecting pipe 1 is externally provided with air gauge 302, described
Signal connects between baroceptor 303 and air gauge 302, motor-driven valve 1 and motor-driven valve 2 501, can monitor reaction chamber
Gas atmosphere in 401, and after reaction chamber 401 is passed through certain gas, utilize the connection of motor-driven valve 1 and motor-driven valve 2 501
It is dynamic, realize that reaction chamber 401 independent can be reacted.
In the present invention, the material of the gasket 212 is the ptfe composite containing glass fibre, sealing
Property and corrosion resistance are more preferable.
In the present invention, 707 installation place of top and gas outlet of the cooling tower 7 is also equipped with filter bag 706, it can allow
Dust is effectively isolated in the present apparatus after reaction.
In the present invention, the material of the coldplate 701 is porous aluminium oxide ceramics, can coordinate nozzle three and nozzle four
Cool down to high-temperature gas.
The operation principle and the course of work of the present invention：After exhaust gas enters front end washing room 2, sour gas and dust in exhaust gas
Particle falls to the bottom of front end washing chamber 201 after encountering water and is flushed in waste water clear water tanks 9 along flow, to eliminate
Sour gas in exhaust gas and dust particles, remaining exhaust gas, which enters in reative cell 4, to react, and then the organic matter in exhaust gas is anti-
It should fall, then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7, reaches
It is discharged from gas outlet 707 after discharge standard, whole device is compact-sized, and scheme is reasonable.
Activated carbon 209 is arranged in inside by washing chamber 201 in front end, can the significantly more efficient sour gas by exhaust gas
Body and dust particles absorption concentrate on being flushed in waste water clear water tanks 9 that (activated carbon 209 continues to stay in below water body and along flow
The inside of chamber 201 is washed in front end).Front side by washing chamber 201 in front end is correspondingly provided with rectangle in one 210 installation place of nozzle
Observation panel, the outside at observation are equipped with transparent panel 211 by lock-screw 213, and chamber 201 is washed convenient for personal observations front end
The working condition of inside avoid giving up and by adding gasket 212 between washing chamber 201 in transparent panel 211 and front end
Leakage of the gas between transparent panel 211 and front end washing chamber 201 from installation gap, and the choosing of the material of gasket 212 contains glass
The ptfe composite of glass fiber, corrosion resistance is stronger, longer life expectancy.It is auxiliary by being arranged at the top of reaction chamber 401
Inlet flange 403 and auxiliary charging flange 404, can be passed through air and CDA catalyst, to make the organic principle in reaction chamber 401
Obtain adequately the reaction was complete.By the way that nozzle 2 603 in rear end washing room 6 is symmetricly set on the left and right that chamber 601 is washed in rear end
Both sides can allow the dust generated after reacting and water to come into full contact with.By in 707 installation place of the top of cooling tower 7 and gas outlet
It is also equipped with filter bag 706, among can dust after reaction being thoroughly effectively limited in the present invention, sky will not be discharged into
In gas.By the way that the material of coldplate 701 is selected as porous aluminium oxide ceramics, because aluminium oxide ceramics itself has preferable conduction
Property, mechanical strength and heat-resisting quantity, then coordinate the use of the nozzle 3 703 and nozzle 4 705 in cooling tower, can be to reaction after
High-temperature gas cool down.It, can be to coming from front end washing room 2 with after by installing filter plate 906 in waste water clear water tanks 9
Water in the washing room 6 of end is filtered, and then recycles booster water pump 17 by purified water by shunting interface 16 and connection
Pipeline is one-to-one to draw the utilization rate that water is improved to nozzle, also avoids nozzle external water source again.
Based on above-mentioned, in the present invention, after exhaust gas enters front end washing room 2, sour gas and dust particles are met in exhaust gas
The bottom of front end washing chamber 201 is fallen to after to water and is flushed in waste water clear water tanks 9 along flow, to eliminate in exhaust gas
Sour gas and dust particles, remaining exhaust gas, which enters in reative cell 4, to react, and then the organic matter in exhaust gas is reacted away,
Then, the high-temperature gas after reaction sprays and cools using the washing of rear end washing room 6 and cooling tower 7, reaches discharge
It is discharged from gas outlet 707 after standard, whole device is compact-sized, and scheme is reasonable.
Therefore, embodiment disclosed above, all things considered are all merely illustrative, not the only.It is all
It is included in the invention within the scope of the present invention or in the change being equal in the scope of the present invention.
Claims (9)
1. the waste gas purification apparatus of a kind of acid gas-containing, dust particles, it is characterised in that：Including supercharging air pump (1), front end water
Chamber wash (2), reaction chamber (4), rear end washing room (6), cooling tower (7) and waste water clear water tanks (9), the supercharging air pump (1) into
The waste gas outlet (101) of gas end and external equipment connects, the outlet side of the supercharging air pump (1) and front end washing room (2) connection,
The front end washing room (2) includes that front end washing chamber (201) and inlet flange (202), the inlet flange (202) are run through
The top left side of front end washing chamber (201) simultaneously welds together with front end washing chamber (201), under the inlet flange (202)
End is connected with air leaving cover (206), is laid with venthole on the air leaving cover (206) and is immersed in front end washing chamber (201)
It is underwater, the top right side of front end washing chamber (201) is welded with outlet flange one (203), the outlet flange one (203)
It is connected with reative cell (4) by connecting pipe one (3), the right end of the front end washing chamber (201) is welded with water spray flange one
(204), the underface in the water spray flange one (204) equipped with nozzle one (210) and positioned at outlet flange one (203), it is described
The bottom of front end washing chamber (201) is welded with drainage flange one (205)；
The reative cell (4) includes reaction chamber (401), main inlet flange (402), auxiliary inlet flange (403) and auxiliary charging flange
(404), outlet flange two (405), the main inlet flange (402) and auxiliary inlet flange (403) are respectively welded at reaction chamber
(401) top center and top both sides, the auxiliary charging flange (404) are welded on the middle part of reaction chamber (401), the outlet
Flange two (405) is welded on the bottom of reaction chamber (401) and is connected with rear end washing room (6) by connecting pipe two (5)；
The rear end washing room (6) includes rear end washing chamber (601) and nozzle flange two (602), the nozzle flange two (602)
It is symmetrically set in the both sides of rear end washing chamber (601) and interior equipped with nozzle two (603), the top left of the rear end washing chamber (601)
Side is equipped with inlet end and is connected with connecting pipe two (5), and outlet side is equipped on the right of top and is connected with cooling tower (7), after described
The bottom of end washing chamber (601) is equipped with drainage flange two (604)；
The inside of the cooling tower (7) is laid with coldplate (701), the external intermediate and top difference of the cooling tower (7)
It is welded with water spray flange three (702) and water spray flange four (704), the water spray flange three (702) and water spray flange four (704) are interior
Equipped with nozzle three (703) and nozzle four (705), the top horizontal of the cooling tower (7) is equipped with gas outlet (707)；
The waste water clear water tanks (9) include babinet (901) and water-in flange one (902) and water-in flange two (903), the water inlet
Flange one (902) and water-in flange two (903) are welded on the top left of babinet (901), and the water-in flange one (902) passes through
Connecting pipe four (10) is connected with drainage flange one (205), and the water-in flange two (903) passes through connecting pipe three (8) and row
Water law orchid two (604) is connected, and the bosom of the babinet (901) is equipped with filter plate (906) and is erected by fixed frame two (905)
The lower right side of the straight inside for being fixed on babinet (901), the babinet (901) is equipped with water-output flange (904).
2. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
It states water-output flange (904) and is connected with booster water pump (17), the water inlet end and water-output flange (904) of the booster water pump (17) are even
It connects, the water outlet of booster water pump (17) is connected with shunting interface (16), and the shunting interface (16) is connected with connecting pipe five
(11), connecting pipe six (12), connecting pipe seven (13), connecting pipe eight (14), connecting pipe nine (15), the connecting pipe
Five (11) and nozzle one (210) connection, the connecting pipe six (12) and connecting pipe seven (13) wash chamber with rear end respectively
(601) nozzle two (603) connection of internal both sides, the connecting pipe eight (14) and the connecting pipe nine (15) respectively with it is cold
But the internal nozzle three (703) of tower (7) and nozzle four (705) connection.
3. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
The front side for stating front end washing chamber (201) is correspondingly provided with the observation panel of rectangle in nozzle one (210) installation place, the observation panel it is interior
Side is uniformly welded with self-clinching nut (214), and the outside at the observation is equipped with transparent panel by lock-screw (213)
(211), gasket (212) is added between the transparent panel (211) and front end washing chamber (201).
4. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
That states front end washing chamber (201) is internally provided with activated carbon (209) and partition board (208), and the partition board (208) is equipped with aperture and leads to
Cross the bottom that activated carbon (209) is isolated in front end washing chamber (201) by partition board (208).
5. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
The fixed frame one (207) and self-clinching nut (214) of the inside and inside of stating front end washing chamber (201) do polytetrafluorethylecoatings coatings and cover
Lid processing.
6. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
It states and is respectively equipped with motor-driven valve one (301) and motor-driven valve two (501), the connection in connecting pipe one (3) and connecting pipe two (5)
Baroceptor (303) is equipped in pipeline one (3), the connecting pipe one (3) is externally provided with air gauge (302), the air pressure transmission
Signal connects between sensor (303) and air gauge (302), motor-driven valve one (301) and motor-driven valve two (501).
7. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
The material for stating gasket (212) is the ptfe composite containing glass fibre.
8. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
The top and gas outlet (707) installation place for stating cooling tower (7) are also equipped with filter bag (706).
9. the waste gas purification apparatus of a kind of acid gas-containing according to claim 1, dust particles, it is characterised in that：Institute
The material for stating coldplate (701) is porous aluminium oxide ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810792665.9A CN108619878A (en) | 2018-07-18 | 2018-07-18 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810792665.9A CN108619878A (en) | 2018-07-18 | 2018-07-18 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108619878A true CN108619878A (en) | 2018-10-09 |
Family
ID=63689986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810792665.9A Pending CN108619878A (en) | 2018-07-18 | 2018-07-18 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108619878A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07246316A (en) * | 1994-03-09 | 1995-09-26 | Tetsuto Tamura | Underwater cooler for high-temperature pcb waste gas |
| CN203971651U (en) * | 2014-06-17 | 2014-12-03 | 深圳市鸿利昌机械制造有限公司 | A kind of rinsing type exhaust gas treating tower |
| CN104772013A (en) * | 2015-03-31 | 2015-07-15 | 刘艳 | Method and device for stage purification waste gas with use of ozone |
| CN206435006U (en) * | 2016-12-10 | 2017-08-25 | 新昌县智昌科技有限公司 | A kind of waste gas purification environmental protection equipment |
| CN206715603U (en) * | 2017-05-24 | 2017-12-08 | 山东冠县华恒工贸有限公司 | A kind of stove flue-gas purification equipment |
| CN107899346A (en) * | 2017-11-22 | 2018-04-13 | 郑州艾莫弗信息技术有限公司 | Industrial waste gas high-efficiency filtering and purifying device |
| CN208678768U (en) * | 2018-07-18 | 2019-04-02 | 安徽京仪自动化装备技术有限公司 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
-
2018
- 2018-07-18 CN CN201810792665.9A patent/CN108619878A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07246316A (en) * | 1994-03-09 | 1995-09-26 | Tetsuto Tamura | Underwater cooler for high-temperature pcb waste gas |
| CN203971651U (en) * | 2014-06-17 | 2014-12-03 | 深圳市鸿利昌机械制造有限公司 | A kind of rinsing type exhaust gas treating tower |
| CN104772013A (en) * | 2015-03-31 | 2015-07-15 | 刘艳 | Method and device for stage purification waste gas with use of ozone |
| CN206435006U (en) * | 2016-12-10 | 2017-08-25 | 新昌县智昌科技有限公司 | A kind of waste gas purification environmental protection equipment |
| CN206715603U (en) * | 2017-05-24 | 2017-12-08 | 山东冠县华恒工贸有限公司 | A kind of stove flue-gas purification equipment |
| CN107899346A (en) * | 2017-11-22 | 2018-04-13 | 郑州艾莫弗信息技术有限公司 | Industrial waste gas high-efficiency filtering and purifying device |
| CN208678768U (en) * | 2018-07-18 | 2019-04-02 | 安徽京仪自动化装备技术有限公司 | A kind of waste gas purification apparatus of acid gas-containing, dust particles |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108619866A (en) | It is a kind of for acid gas-containing, dust particles exhaust gas front-end purification unit | |
| CN208553653U (en) | A kind of Horizental showering tower for pickling exhaust-gas treatment | |
| CN207042213U (en) | A kind of chemical fibre exhaust gas purification and treatment device | |
| CN108619879A (en) | It is a kind of for sour gas, dust particles exhaust gas rear end purifier | |
| CN208678768U (en) | A kind of waste gas purification apparatus of acid gas-containing, dust particles | |
| CN108619878A (en) | A kind of waste gas purification apparatus of acid gas-containing, dust particles | |
| CN206474009U (en) | Absorbent charcoal adsorber and charcoal absorption desorption system | |
| CN208678810U (en) | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere | |
| CN216566327U (en) | Industrial gas innocent treatment device | |
| CN208678767U (en) | It is a kind of suitable for sour gas, the washing spray device of dust atmosphere | |
| CN208678769U (en) | It is a kind of for sour gas, the rear end purification device of the exhaust gas of dust particles | |
| CN108619877A (en) | A kind of washing spray device being suitable for sour gas, dust atmosphere | |
| CN108355481A (en) | A kind of industrial waste gas dedusting depassing unit | |
| CN211926605U (en) | Cooling treatment device for high-temperature waste gas | |
| CN202700237U (en) | Cleaner for automotive air filter element | |
| CN207071313U (en) | A kind of new acid-fume absorber | |
| CN207071312U (en) | A kind of industrial tail gas cleaning equipment with gas detection function | |
| CN217490324U (en) | Membrane separation pressure swing adsorption nitrogen making machine for coal mine industry | |
| CN206082089U (en) | Electroplate white fog improve in dedicated high efficiency with refrigerated scrubbing tower | |
| CN108939905A (en) | A kind of rear end reaction and washing spray device suitable for sour gas, dust atmosphere | |
| CN220590968U (en) | Novel dust collecting equipment | |
| CN216093023U (en) | Tail gas recovery equipment for metal silicon smelting | |
| CN203803261U (en) | Environmental-friendly steelmaking smoke processing equipment | |
| CN212374885U (en) | Nitrogen purification equipment applying efficient catalyst | |
| CN220116471U (en) | Dry-method chlorine removal system for blast furnace gas |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |