CN108531886B - Detachable chemical vapor deposition spray set - Google Patents
Detachable chemical vapor deposition spray set Download PDFInfo
- Publication number
- CN108531886B CN108531886B CN201710118651.4A CN201710118651A CN108531886B CN 108531886 B CN108531886 B CN 108531886B CN 201710118651 A CN201710118651 A CN 201710118651A CN 108531886 B CN108531886 B CN 108531886B
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- China
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- detachable
- vapor deposition
- chemical vapor
- top plate
- spraying
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
Abstract
The invention discloses a detachable chemical vapor deposition spraying device which mainly comprises a gas mixing cavity, a spraying plate, a spraying pipe and a detachable top plate. The invention has the advantages that the detachable top plate can simplify the existing spraying manufacturing process, reduce the processing requirement on the original spraying surface, and can be detached separately for cleaning, thereby having positive influence on the improvement of the process quality.
Description
Technical Field
The invention relates to chemical vapor deposition equipment, in particular to a spraying device of the chemical vapor deposition equipment.
Background
The Chemical Vapor Deposition (CVD) technology integrates multiple disciplines of precision machinery, semiconductor materials, vacuum electronics, hydromechanics, optics, chemistry and computers, and is special equipment for manufacturing high-end semiconductor materials and optoelectronic devices with high automation degree, high price and high technical integration level. The chemical vapor deposition equipment is used as an ideal method for epitaxial growth of compound semiconductor materials, has the characteristics of high quality, good stability, good repeatability, flexible process, large-scale mass production and the like, becomes key core equipment for producing semiconductor photoelectric devices and microwave devices in the industry, and has wide application prospect and industrialization value.
The chemical vapor deposition spraying device has very harsh reaction environment, usually faces high temperature, corrosive gas, pre-deposition reaction and the like, so that the spraying device of the existing vapor deposition equipment is integrally designed, the spraying needs to be maintained and replaced frequently, the surface deposition pollution including spraying needs to be cleaned frequently, or the spraying is scrapped due to the blockage of the spraying hole, so that the production cost is very expensive. Frequent maintenance and cleaning also greatly wastes production time and reduces production efficiency.
The invention aims to provide a spraying device of chemical vapor deposition equipment, which reduces the time interval of spraying maintenance and production cost.
The technical scheme that this patent adopted is, a detachable chemical vapor deposition spray set, mainly including spray (2), spray air inlet (1), gas mixing chamber (5), shower (6), cooling water inlet (3), cooling water outlet (4), spray water-cooling chamber (7) etc, its characterized in that sprays (2) bottom surface and is provided with removable roof (8), and removable roof (8) are connected with spraying (2) bottom surface laminating through detachable connected mode, removable roof (8) inside is equipped with roof water-cooling chamber (9), and roof cooling water inlet (10) are through cooling water chamber (9) and roof cooling water outlet (11) intercommunication, and the distribution is provided with through hole (12) on removable roof (8), makes convex shower (6) can stretch into in corresponding through hole (12).
Preferably, the detachable top plate (8) of the detachable chemical vapor deposition spraying device is fixedly connected with the bottom surface of the spraying device (2) in a fitting mode through bolts, and the bolts are simply and reliably connected and are convenient to detach and replace.
Preferably, above-mentioned detachable chemical vapor deposition spray set's removable roof (8) with spray (2) bottom surface laminating connected mode for using cylinder automatic control with roof (8) with spray (2) compress tightly or loosen, be convenient for realize automatic and intelligent control, reduce dependent manual operation.
Preferably, the thickness of the detachable top plate (8) of the detachable chemical vapor deposition spraying device is set to be 5-10mm, the excessive thickness of the detachable top plate (8) has great influence on the gas flow of the reaction gas, the cost is also too high, and the detachable top plate is easy to deform if being too thin.
Generally, compared with the prior art, the above technical solution conceived by the present invention has the following beneficial effects:
1. the design of the detachable top plate simplifies the original spraying surface treatment and the processing treatment of the projection of the spraying pipe, reduces the processing requirement on the original spraying surface and reduces the spraying production cost.
2. The detachable top plate can be detached for cleaning alone, so that the spraying replacement and maintenance can be avoided, the production cost is reduced, and the production efficiency is improved.
3. The roof cooling water cavity that removable roof top set up can guarantee that the temperature boundary of removable roof is stable and restrain the deformation of removable roof, makes removable roof simple to use reliable.
4. The detachable top plate can be designed with different surface conditions according to needs, for example, the temperature field distribution in the spraying reaction cavity can be optimized by changing the surface emissivity through different roughness, material modification and the like, the process window is increased, and the improvement of the process quality is positively influenced.
Drawings
FIG. 1 is a schematic view of a spray device of a detachable chemical vapor deposition apparatus according to the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-spraying air inlet, 2-spraying, 3-cooling water inlet, 4-cooling water outlet, 5-gas mixing cavity, 6-spraying pipe, 7-spraying water cooling cavity, 8-detachable top plate, 9-top plate water cooling cavity, 10-top plate cooling water inlet, 11-top plate cooling water outlet, 12-through hole, 13-substrate and 14-slide holder.
Detailed Description
The embodiments of the present invention will be further explained with reference to the accompanying drawings, and fig. 1 is a schematic structural diagram of an apparatus according to an embodiment of the present invention. It should be understood that fig. 1 of the present disclosure focuses on illustrating components of an apparatus according to an embodiment of the present invention, that is, the figures are not intended to illustrate each individual component of the apparatus of the present invention.
The technical scheme that this patent adopted is, a detachable chemical vapor deposition spray set, mainly including spray 2, spray air inlet 1, gas mixing chamber 5, shower 6, cooling water inlet 3, cooling water outlet 4, spray water cooling chamber 7 etc, its characterized in that sprays 2 bottom surfaces and is provided with removable roof 8, and removable roof 8 is connected with the laminating of 2 bottom surfaces of spraying through the detachable connected mode, removable roof 8 inside is equipped with roof water cooling chamber 9, and roof cooling water inlet 10 is through cooling water chamber 9 and roof cooling water outlet 11 intercommunication, and the distribution is provided with through hole 12 on removable roof 8, makes convex shower 6 can stretch into corresponding through hole 12. The reaction gas is sequentially input into the reaction cavity through a spray gas inlet 1 of a spray 2, a gas mixing cavity 5, a spray pipe 6 and a through hole 12 of a detachable top plate 8, and substances required by physical and chemical reaction deposition are generated on the surface of a substrate 13 on a slide holder 14.
Preferably, the detachable top plate 8 of the detachable chemical vapor deposition spraying device is fixedly connected with the bottom surface of the spraying device 2 in a fitting mode through bolts, and the bolts are simple and reliable to connect and convenient to detach and replace.
Preferably, above-mentioned detachable chemical vapor deposition spray set's removable roof 8 with spray 2 bottom surfaces laminating connected modes for using cylinder automatic control with roof 8 with spray 2 and compress tightly or loosen, be convenient for realize automatic and intelligent control, reduce the human operation.
Preferably, the thickness of the detachable top plate 8 of the detachable chemical vapor deposition spraying device is set to be 5-10mm, the excessive thickness of the detachable top plate 8 has great influence on the gas flow of the reaction gas, the cost is too high, and the detachable top plate is easy to deform if being too thin.
The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that changes may be made in this disclosure without departing from the spirit and scope of the disclosure as defined in the following claims, which are intended to be covered by the appended claims.
The above-described embodiment is only one of the more preferable embodiments of the present invention, and the present invention is not limited thereto. Any general changes and substitutions by one skilled in the art without departing from the spirit and scope of the invention should be included within the scope of the invention.
Claims (4)
1. The utility model provides a detachable chemical vapor deposition spray set, mainly sprays (2), sprays air inlet (1), gas mixing chamber (5), shower (6), cooling water inlet (3), cooling water outlet (4), sprays water-cooling chamber (7), and its characterized in that sprays (2) bottom surface and is provided with removable roof (8), and removable roof (8) are connected with spraying (2) bottom surface laminating through detachable connected mode, removable roof (8) inside is equipped with roof water-cooling chamber (9), and roof cooling water inlet (10) are through cooling water chamber (9) and roof cooling water outlet (11) intercommunication, and the distribution is provided with through hole (12) on removable roof (8), makes convex shower (6) can stretch into in corresponding through hole (12).
2. The detachable chemical vapor deposition spraying device as claimed in claim 1, wherein the detachable top plate (8) is fixedly connected with the bottom surface of the spray (2) in a bolt connection manner.
3. The detachable chemical vapor deposition spraying device as claimed in claim 1, wherein the detachable top plate (8) is attached to the bottom surface of the spray (2) in a manner that the top plate (8) and the spray (2) are automatically controlled to be pressed or loosened by using an air cylinder.
4. The detachable chemical vapor deposition spray device according to claim 1, wherein the detachable top plate (8) has a thickness of 5-10 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118651.4A CN108531886B (en) | 2017-03-01 | 2017-03-01 | Detachable chemical vapor deposition spray set |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710118651.4A CN108531886B (en) | 2017-03-01 | 2017-03-01 | Detachable chemical vapor deposition spray set |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108531886A CN108531886A (en) | 2018-09-14 |
| CN108531886B true CN108531886B (en) | 2020-09-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710118651.4A Active CN108531886B (en) | 2017-03-01 | 2017-03-01 | Detachable chemical vapor deposition spray set |
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| Country | Link |
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| CN (1) | CN108531886B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112359342B (en) * | 2020-09-30 | 2022-11-11 | 中钢新型材料股份有限公司 | Graphite spare surface deposit carborundum equipment |
| CN114214608B (en) * | 2021-12-30 | 2024-02-23 | 东部超导科技（苏州）有限公司 | Sprayer for producing superconducting tape |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002025996A (en) * | 2000-07-05 | 2002-01-25 | Semiconductor Leading Edge Technologies Inc | Gas injector for semiconductor manufacturing device |
| CN102230165A (en) * | 2011-06-16 | 2011-11-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spray header structure for chemical vapor deposition epitaxial equipment |
| CN204570032U (en) * | 2015-04-14 | 2015-08-19 | 广东昭信半导体装备制造有限公司 | The spray equipment of chemical vapor depsotition equipment |
| CN104995719A (en) * | 2013-01-25 | 2015-10-21 | 应用材料公司 | Showerhead having a detachable gas distribution plate |
| CN205529030U (en) * | 2016-03-16 | 2016-08-31 | 钧石(中国)能源有限公司 | Removable gaseous shower head |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101559470B1 (en) * | 2009-06-04 | 2015-10-12 | 주성엔지니어링(주) | Chemical Vapor Deposition Apparatus |
-
2017
- 2017-03-01 CN CN201710118651.4A patent/CN108531886B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002025996A (en) * | 2000-07-05 | 2002-01-25 | Semiconductor Leading Edge Technologies Inc | Gas injector for semiconductor manufacturing device |
| CN102230165A (en) * | 2011-06-16 | 2011-11-02 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spray header structure for chemical vapor deposition epitaxial equipment |
| CN104995719A (en) * | 2013-01-25 | 2015-10-21 | 应用材料公司 | Showerhead having a detachable gas distribution plate |
| CN204570032U (en) * | 2015-04-14 | 2015-08-19 | 广东昭信半导体装备制造有限公司 | The spray equipment of chemical vapor depsotition equipment |
| CN205529030U (en) * | 2016-03-16 | 2016-08-31 | 钧石(中国)能源有限公司 | Removable gaseous shower head |
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| Publication number | Publication date |
|---|---|
| CN108531886A (en) | 2018-09-14 |
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Address after: 528251 1, No. 5, Nanzhou street, Ping Zhou, Nanhai District, Foshan, Guangdong Applicant after: Guangdong Zhongyuan Semiconductor Technology Co., Ltd. Address before: 528251 Zhaoxin Semiconductor Co., Ltd., Jingu Photoelectric Industry Community, Nangang Road, Pingzhou, Nanhai District, Foshan City, Guangdong Province Applicant before: Guangdong RealFaith Semiconductor Equipment Co., Ltd. |
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