CN205529030U - Removable gaseous shower head - Google Patents
Removable gaseous shower head Download PDFInfo
- Publication number
- CN205529030U CN205529030U CN201620201845.1U CN201620201845U CN205529030U CN 205529030 U CN205529030 U CN 205529030U CN 201620201845 U CN201620201845 U CN 201620201845U CN 205529030 U CN205529030 U CN 205529030U
- Authority
- CN
- China
- Prior art keywords
- gas
- gas distribution
- distribution board
- hole
- distribution plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Nozzles (AREA)
Abstract
The utility model discloses a removable gaseous shower head, including gas introduction pipe, apron, a gas distribution board and the 2nd gas distribution board, be equipped with first gaseous surge chamber between an apron and the gas distribution board, be equipped with the gaseous surge chamber of second between a gas distribution board and the 2nd gas distribution board, be equipped with a plurality of first through -hole and the second through -hole that runs through upper surface and lower surface on a gas distribution board, the 2nd gas distribution board, wherein lap, a gas distribution board passes through locking device and the 2nd gas distribution board swing joint. The utility model discloses first gaseous surge chamber and the gaseous surge chamber of second for gas distributes more evenly in the cavity, and pass through locking device swing joint between the shower plate, the maintenance of dismantlement formula is carried out to shower plate to the convenience.
Description
Technical field
This utility model relates to solaode preparation field, particularly relates to a kind of removable gas shower
Head.
Background technology
At present, plasma reinforced chemical vapour deposition method (PECVD) is used to prepare silica-base film material
It has been used widely.In hetero-junction solar cell preparation process, because using the silicon chip after making herbs into wool,
And the silica-base film very thin thickness of preparation, PECVD device is required higher, i.e. PECVD device exists
On silicon chip after making herbs into wool, electrode structure must namely be proposed by the silica-base film uniformity of preparation very well
Requirements at the higher level, are first that the airflow homogeneity of electrode ejection must be got well, next to that the electric field of electrode divides
Cloth must be uniformly.
The spray head of prior art is owing to using welding to be formed, therefore the situations such as gap, sealing-off easily occurs,
Thus the leakage of gas can be caused, and through type pore on shower plate so that gas flow rate is slack-off, leads
Cause gas be distributed in deposition chamber and mix uneven, can adhere to greatly after processing procedure a period of time on shower plate
The granule of amount, treats that granule is gradually piled up and forms big particulate matter, fall to pollute in processing procedure chamber cavity,
Affect aura.
Utility model content
For the problems referred to above, this utility model provides a kind of removable gas spray, solves spray
Drenching head therefore the situations such as gap, sealing-off easily occur, thus can cause the leakage of gas, gas distribution is uneven
Phenomenon.
For solving above-mentioned technical problem, this utility model be the technical scheme is that a kind of removable
Gas spray, including gas introduction tube, cover plate, the first gas distribution plate and the second gas distribution plate,
Be provided with the first gas buffer room between described cover plate and the first gas distribution plate, the first gas distribution plate and
The second gas buffer room, described first gas distribution plate, the second gas it is provided with between second gas distribution plate
Body distribution plate is provided with multiple first through holes and the second through hole running through upper and lower surface；Described lid
Plate, the first gas distribution plate are flexibly connected by locking device and the second gas distribution plate.
Further, described first through hole and the second through hole equidistantly stagger arrangement.
Further, described first through hole with and the second through hole be vertebral body structure wide at the top and narrow at the bottom.
Further, described locking device is that bolt connects.
From the above-mentioned description to this utility model structure, compared to the prior art, this utility model
Have the advantage that
A kind of removable gas spray of this utility model, the first gas buffer room and the second gas buffer
Room so that gas is distributed more uniform in the chamber.Wherein the first through hole and the second through hole are the most wrong
Begin to rehearse cloth, and through hole is wide at the top and narrow at the bottom, centre conical surface transition so that gas from a upper surge chamber to
Next surge chamber and reative cell gas flow rate increase, and pressure declines, improve gas at surge chamber and
Combination in reative cell and uniformity.And it is flexibly connected by locking device between shower plate, side
Just shower plate is carried out dismountable maintenance.
Accompanying drawing explanation
The accompanying drawing of the part constituting the application is used for providing being further appreciated by of the present utility model, this
The schematic description and description of utility model is used for explaining this utility model, is not intended that this reality
With novel improper restriction.In the accompanying drawings:
Fig. 1 is a kind of removable gas spray structural representation of this utility model；
Fig. 2 is this utility model cover plate, the first gas distribution plate, the first gas buffer room, the second gas
Body distribution plate, the distribution schematic diagram of the second gas buffer room；
Fig. 3 is that this utility model states cover plate, the first gas distribution plate and the connection of the second gas distribution plate
Schematic diagram；
Fig. 4 be on this utility model the first gas distribution plate, the second gas distribution plate upper first pupil and
The distribution schematic diagram of the second through hole.
Detailed description of the invention
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with
Drawings and Examples, are further elaborated to this utility model.Should be appreciated that this place is retouched
The specific embodiment stated, only in order to explain this utility model, is not used to limit this utility model.
Embodiment
As Figure 1-Figure 4, it show solution spray head therefore the situations such as gap, sealing-off has easily occurred,
Thus the leakage of gas can be caused, and the phenomenon that gas distribution is uneven, a kind of removable gas of this utility model
Spray head, distributes including gas introduction tube 14, cover plate the 11, first gas distribution plate 12 and the second gas
Plate 13, is provided with the first gas buffer room 21, the first gas between cover plate 11 and the first gas distribution plate 12
The second gas buffer room 22, described first gas it is provided with between distribution plate 12 and the second gas distribution plate 13
Distribution plate the 12, second gas distribution plate 13 is provided with multiple first through holes running through upper and lower surface
31 and second through hole 31, the first through hole 31 and second leads to 32 holes and equidistantly staggers arrangement, and the first through hole 31
Wide at the top and narrow at the bottom with the second through hole 32, centre conical surface transition, the first through hole 31 and mistake of the second through hole 32
Begin to rehearse cloth and structure wide at the top and narrow at the bottom so that gas is from first gas buffer room the 21 to the second gas buffer
Room 22 and reative cell gas flow rate increase, and pressure declines, and improves gas in surge chamber and reative cell
Combination and uniformity, thus solve in prior art through type pore on shower plate so that gas
Flow velocity is slack-off, causes gas to be distributed in deposition chamber and mixes uneven phenomenon.Cover plate 11 and first
Gas distribution plate 12 connects the second gas distribution plate 13 by the multiple bolt in edge 41, treats that the second gas divides
Matching board 13 works and can pull down fastening bolt 41 after a period of time that the second gas distribution plate 13 carries out maintenance is clear
Clean, to ensure that reaction chamber is not contaminated, solve prior art and gap easily occur, sealing-off from
And the leakage of gas can be caused.
This utility model is relative to prior art in sum, the first gas buffer room 21 and the second gas
Surge chamber 22 so that gas is distributed more uniform in the chamber, and by locking between shower plate
Device is flexibly connected, and conveniently shower plate is carried out dismountable maintenance.
The foregoing is only preferred embodiment of the present utility model, not new in order to limit this practicality
Type, all any amendment, equivalent and improvement made within spirit of the present utility model and principle
Deng, within should be included in protection domain of the present utility model.
Claims (4)
1. a removable gas spray, including gas introduction tube, cover plate, the first gas distribution plate and
Two gas distribution plates, it is characterised in that:
The first gas buffer room, the first gas distribution it is provided with between described cover plate and the first gas distribution plate
The second gas buffer room it is provided with, described first gas distribution plate, between plate and the second gas distribution plate
Two gas distribution plates are provided with multiple first through holes and the second through hole running through upper and lower surface；
Described cover plate, the first gas distribution plate are flexibly connected by locking device and the second gas distribution plate.
A kind of removable gas spray, it is characterised in that: described first leads to
Hole and the second through hole equidistantly stagger arrangement.
A kind of removable gas spray, it is characterised in that: described first leads to
Hole with and the second through hole be vertebral body structure wide at the top and narrow at the bottom.
A kind of removable gas spray, it is characterised in that: described locking dress
It is set to bolt connect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620201845.1U CN205529030U (en) | 2016-03-16 | 2016-03-16 | Removable gaseous shower head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620201845.1U CN205529030U (en) | 2016-03-16 | 2016-03-16 | Removable gaseous shower head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205529030U true CN205529030U (en) | 2016-08-31 |
Family
ID=56781820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620201845.1U Active CN205529030U (en) | 2016-03-16 | 2016-03-16 | Removable gaseous shower head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205529030U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107012447A (en) * | 2017-04-20 | 2017-08-04 | 京东方科技集团股份有限公司 | A kind of disperser and deposition chambers |
| CN107137986A (en) * | 2017-06-13 | 2017-09-08 | 四川建源节能科技有限公司 | A kind of air filter |
| CN108531886A (en) * | 2017-03-01 | 2018-09-14 | 广东昭信半导体装备制造有限公司 | A kind of detachable chemical vapor deposition spray equipment |
| CN109487238A (en) * | 2018-12-17 | 2019-03-19 | 北京北方华创微电子装备有限公司 | Air inlet grill component and atomic layer deposition apparatus |
| CN113549899A (en) * | 2021-07-22 | 2021-10-26 | 东北大学 | Spraying structure of MOCVD equipment |
| WO2022088682A1 (en) * | 2020-11-02 | 2022-05-05 | 长鑫存储技术有限公司 | Disassembling and assembling device for gas distribution plate of etching machine, and etching machine |
-
2016
- 2016-03-16 CN CN201620201845.1U patent/CN205529030U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108531886A (en) * | 2017-03-01 | 2018-09-14 | 广东昭信半导体装备制造有限公司 | A kind of detachable chemical vapor deposition spray equipment |
| CN108531886B (en) * | 2017-03-01 | 2020-09-25 | 广东众元半导体科技有限公司 | Detachable chemical vapor deposition spray set |
| CN107012447A (en) * | 2017-04-20 | 2017-08-04 | 京东方科技集团股份有限公司 | A kind of disperser and deposition chambers |
| CN107012447B (en) * | 2017-04-20 | 2019-09-17 | 京东方科技集团股份有限公司 | A kind of disperser and deposition chambers |
| CN107137986A (en) * | 2017-06-13 | 2017-09-08 | 四川建源节能科技有限公司 | A kind of air filter |
| CN109487238A (en) * | 2018-12-17 | 2019-03-19 | 北京北方华创微电子装备有限公司 | Air inlet grill component and atomic layer deposition apparatus |
| WO2022088682A1 (en) * | 2020-11-02 | 2022-05-05 | 长鑫存储技术有限公司 | Disassembling and assembling device for gas distribution plate of etching machine, and etching machine |
| CN113549899A (en) * | 2021-07-22 | 2021-10-26 | 东北大学 | Spraying structure of MOCVD equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205529030U (en) | Removable gaseous shower head | |
| CN206355692U (en) | One kind processing coating filter | |
| CN205198998U (en) | Falling film evaporation ware of high cloth liquid rate | |
| CN205914298U (en) | Vertical spraying equipment's of static powder confession powder system | |
| CN102437002B (en) | A even gas dish for inlet structure | |
| CN102881551B (en) | Plasma processing system with airflow limiting mechanism and method using same | |
| CN201949948U (en) | Jet pipe assembly and wet processing apparatus equipped with the jet pipe assembly | |
| CN207371997U (en) | A kind of coating film on glass cleaning device | |
| CN202089475U (en) | Conveying tank | |
| CN102898045A (en) | Point arranging apparatus for vacuum glass and point arranging method thereof | |
| CN106807164A (en) | A kind of high efficiency filter deduster | |
| CN206359681U (en) | The turning commutation unpowered equal cotton distributor of cotton feeding pipe | |
| CN216378490U (en) | Melt blowing equipment | |
| CN110449014A (en) | The washing sterilizer of self-priming double-venturi structure and its application | |
| CN108585534B (en) | Bubbling device for glass etching | |
| CN208577581U (en) | A kind of processing equipment of high-concentration ammonia nitrogenous wastewater | |
| CN205886471U (en) | Horizontal washing tower | |
| CN206304582U (en) | A kind of efficient liquid phase homogenizer | |
| CN205687997U (en) | A kind of connection transformational structure of two-in-one coater | |
| CN207872182U (en) | A kind of liquid-leakage preventing jet tray | |
| CN205711354U (en) | A kind of pre-wetting apparatus | |
| CN205170518U (en) | Piece formula aerator | |
| CN203295363U (en) | Protective film spraying working platform | |
| CN204973593U (en) | Scrubbing tower with keep off and flow wall | |
| CN204767668U (en) | Bi -polar business turn over flitch frame filter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211210 Address after: No.17, Quanyuan Road, Jinjiang Economic Development Zone (wuliyuan), Quanzhou City, Fujian Province, 362000 Patentee after: FUJIAN JINSHI ENERGY Co.,Ltd. Address before: 362000 Xiantang Community, Changtai Street, Licheng District, Quanzhou City, Fujian Province Patentee before: GS-SOLAR (CHINA) Co.,Ltd. |
|
| TR01 | Transfer of patent right |