CN205687997U - A kind of connection transformational structure of two-in-one coater - Google Patents
A kind of connection transformational structure of two-in-one coater Download PDFInfo
- Publication number
- CN205687997U CN205687997U CN201620441908.0U CN201620441908U CN205687997U CN 205687997 U CN205687997 U CN 205687997U CN 201620441908 U CN201620441908 U CN 201620441908U CN 205687997 U CN205687997 U CN 205687997U
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- CN
- China
- Prior art keywords
- transitional cavity
- coater
- pump unit
- furnace chamber
- diffusion pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Electroplating Methods And Accessories (AREA)
Abstract
The utility model discloses the connection transformational structure of a kind of two-in-one coater, including two furnace chamber assemblies, two-in-one transitional cavity, diffusion pump unit and the high valve module of conversion, described furnace chamber assembly is arranged on two-in-one transitional cavity both sides, it is connected by the high valve module of conversion between furnace chamber assembly and two-in-one transitional cavity, diffusion pump unit is arranged on the centre position of two-in-one transitional cavity, diffusion pump unit is provided with charging aperture, feed pipe it is provided with at charging aperture, it is provided with flow distribution plate inside two-in-one transitional cavity, now share a set of evacuation and film plating system with two filming equipments, can be when a device product goes out frame, another equipment carries out plated film, time-consuming, save electricity, reduce the cost.
Description
Technical field
This utility model relates to plated film field, particularly to the connection transformational structure of a kind of two-in-one coater.
Background technology
The deficiency of presently used coater is: can form the wind moved upward, film when the material evaporation of plated film or distillation
Material is easy to be stained with on the inwall of coater, must be thoroughly before sheet glass plates after having plated material first another kind of membrane material second again
Cleaning the inwall of coater, otherwise, part first material can react the difficult complex cleaned of formation with second and adhere on inwall, also phase
When the first material of part can stain sheet glass to be coated after again evaporating or distilling, and this all have impact on the outward appearance matter of sheet glass
Amount.Coater cleans necessary power-off, shut-down, and whole big machine cleans also inconvenience, and effect is the most bad.
Cost is high, and utilization rate is low, and practicality is low, is that a filming equipment wants a set of evacuation and film plating system, single plating originally
A kind of product, product plated film unicity.
Utility model content
Technical problem to be solved in the utility model is to provide the connection transformational structure of a kind of two-in-one coater, to solve
The above-mentioned multinomial defect certainly caused in prior art.
For achieving the above object, this utility model provides following technical scheme: the connection of a kind of two-in-one coater turns
Change structure, including two furnace chamber assemblies, two-in-one transitional cavity, diffusion pump unit with change high valve module, described furnace chamber assembly
It is arranged on two-in-one transitional cavity both sides, is connected by the high valve module of conversion between furnace chamber assembly and two-in-one transitional cavity,
Diffusion pump unit is arranged on the centre position of two-in-one transitional cavity, and diffusion pump unit is provided with charging aperture, be provided with at charging aperture into
Material pipe, is provided with flow distribution plate inside two-in-one transitional cavity.
Preferably, the high valve module of described conversion is connected by flange with between furnace chamber assembly and two-in-one transitional cavity.
Preferably, the top of the high valve module of described conversion is provided with valve drive rod.
Preferably, the top of the high valve module of described conversion is provided with positioning seat, and valve drive rod is arranged through positioning seat, location
Seat is connected by multiple connecting rods with the top changing high valve module.
Preferably, it is designed with support bar at described diffusion pump unit and feed pipe, bottom support bar, is provided with supporting pad.
Above technical scheme is used to provide the benefit that: the connection Change-over knot of the two-in-one coater of this utility model structure
Structure, by filming equipment itself want a set of evacuation and film plating system, be now improved as two filming equipments share a set of evacuation and
Film plating system.Can plate different product, utilization rate, save the time, need because producing, equipment running can not be interrupted, now with two platings
Film device shares a set of evacuation and film plating system, can be when a device product goes out frame, and another equipment carries out plated film, saves
Time, saving electricity, reduce the cost.
Change and be connected by flange between high valve module with furnace chamber assembly and two-in-one transitional cavity, improve whole device
Air-tightness, the top changing high valve module is provided with positioning seat, it is ensured that the stability of valve drive rod, diffusion pump unit and charging
Support bar it is designed with, it is ensured that the stability that diffusion pump unit is in operation at pipe.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Wherein, 1--furnace chamber assembly, the two-in-one transitional cavity of 2--, 3--diffusion pump unit, 4--change high valve module, 5--
Feed pipe, 6--valve drive rod, 7--positioning seat, 8--connecting rod, 9--support bar, 10--supporting pad.
Detailed description of the invention
Describe preferred implementation of the present utility model below in conjunction with the accompanying drawings in detail.
Fig. 1 shows detailed description of the invention of the present utility model: the connection transformational structure of a kind of two-in-one coater, including two
Platform furnace chamber assembly 1, two-in-one transitional cavity 2, diffusion pump unit 3 and change high valve module 4, described furnace chamber assembly 1 is arranged on two
Unification transitional cavity 2 both sides, are connected by the high valve module 4 of conversion between furnace chamber assembly 1 and two-in-one transitional cavity 2, diffusion
Pump assembly 3 is arranged on the centre position of two-in-one transitional cavity 2, and diffusion pump unit 3 is provided with charging aperture, is provided with charging at charging aperture
Pipe 5, two-in-one transitional cavity 2 is internal is provided with flow distribution plate.
Change high valve module 4 to be connected by flange with between furnace chamber assembly 1 and two-in-one transitional cavity 2；Conversion high threshold
The top of assembly 4 is provided with valve drive rod 6；The top changing high valve module 4 is provided with positioning seat 7, and valve drive rod 6 is through location
Seat 7 is arranged, and positioning seat 7 is connected by multiple connecting rods 8 with the top changing high valve module 4；Diffusion pump unit 3 and feed pipe 5
Place is designed with support bar 9, is provided with supporting pad 10 bottom support bar 9.
The connection transformational structure of the two-in-one coater of this utility model structure, is wanted a set of taking out by filming equipment itself
Empty and film plates system, is now improved as two filming equipments and shares a set of evacuation and film plating system.Can plate different product, utilization rate,
The saving time, needing because producing, equipment running can not be interrupted, and now shares a set of evacuation and film plating system with two filming equipments,
Can be when a device product go out frame, another equipment carries out plated film, time-consuming, saving electricity, reduces the cost.
Change and be connected by flange between high valve module with furnace chamber assembly and two-in-one transitional cavity, improve whole device
Air-tightness, the top changing high valve module is provided with positioning seat, it is ensured that the stability of valve drive rod, diffusion pump unit and charging
Support bar it is designed with, it is ensured that the stability that diffusion pump unit is in operation at pipe.
Above-described is only preferred implementation of the present utility model, it is noted that for the ordinary skill of this area
For personnel, on the premise of creating design without departing from this utility model, it is also possible to making some deformation and improvement, these all belong to
In protection domain of the present utility model.
Claims (5)
1. the connection transformational structure of a two-in-one coater, it is characterised in that include two furnace chamber assemblies, two-in-one adapter cavity
Body, diffusion pump unit and change high valve module, described furnace chamber assembly is arranged on two-in-one transitional cavity both sides, furnace chamber assembly and two
Being connected by the high valve module of conversion between unification transitional cavity, diffusion pump unit is arranged on the interposition of two-in-one transitional cavity
Putting, diffusion pump unit is provided with charging aperture, is provided with feed pipe, is provided with flow distribution plate inside two-in-one transitional cavity at charging aperture.
The connection transformational structure of two-in-one coater the most according to claim 1, it is characterised in that described conversion high threshold group
It is connected by flange between part with furnace chamber assembly and two-in-one transitional cavity.
The connection transformational structure of two-in-one coater the most according to claim 1, it is characterised in that described conversion high threshold group
The top of part is provided with valve drive rod.
The connection transformational structure of two-in-one coater the most according to claim 1, it is characterised in that described conversion high threshold group
The top of part is provided with positioning seat, and valve drive rod is arranged through positioning seat, and positioning seat and the top changing high valve module are passed through many
Individual connecting rod is connected.
The connection transformational structure of two-in-one coater the most according to claim 1, it is characterised in that described diffusion pump unit
Be designed with support bar at feed pipe, be provided with supporting pad bottom support bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620441908.0U CN205687997U (en) | 2016-05-14 | 2016-05-14 | A kind of connection transformational structure of two-in-one coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620441908.0U CN205687997U (en) | 2016-05-14 | 2016-05-14 | A kind of connection transformational structure of two-in-one coater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205687997U true CN205687997U (en) | 2016-11-16 |
Family
ID=57262588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620441908.0U Expired - Fee Related CN205687997U (en) | 2016-05-14 | 2016-05-14 | A kind of connection transformational structure of two-in-one coater |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205687997U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111286705A (en) * | 2018-12-06 | 2020-06-16 | 北京华业阳光新能源有限公司 | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating equipment |
-
2016
- 2016-05-14 CN CN201620441908.0U patent/CN205687997U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111286705A (en) * | 2018-12-06 | 2020-06-16 | 北京华业阳光新能源有限公司 | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating equipment |
| CN111286705B (en) * | 2018-12-06 | 2024-05-03 | 北京华业阳光新能源有限公司 | Double-chamber three-station multi-target co-sputtering magnetron sputtering coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 528200 two of the No. 7 Liangui Middle Road, luosun Lianhe Industrial Zone, Nanshan District, Foshan, Guangdong (residence declaration) Patentee after: FOSHAN FOXIN VACUUM TECHNOLOGY Co.,Ltd. Address before: 528200 one of 2 of Lugang village and Fenggang Industrial Zone, Shihshan Town, Nanhai District, Foshan, Guangdong. Patentee before: FOSHAN FOXIN VACUUM TECHNOLOGY Co.,Ltd. |
|
| CP02 | Change in the address of a patent holder | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161116 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |