CN108505041A - 一种掺Ti类金刚石涂层的硬质合金圆锯片及其制作方法 - Google Patents

一种掺Ti类金刚石涂层的硬质合金圆锯片及其制作方法 Download PDF

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CN108505041A
CN108505041A CN201710104226.XA CN201710104226A CN108505041A CN 108505041 A CN108505041 A CN 108505041A CN 201710104226 A CN201710104226 A CN 201710104226A CN 108505041 A CN108505041 A CN 108505041A
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周华
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Abstract

本发明提供了一种掺Ti类金刚石涂层的硬质合金圆锯片，包括锯片本体，锯片本体由内向外依次涂覆有Ti/TiC过渡层和类金刚石膜，所述类金刚石膜内掺杂有Ti。采用上述技术方案，薄膜摩擦系数0.1～0.2，有效降低了锯片本体的摩擦系数，薄膜硬度可达25GPa，大幅提高刀头的强度和硬度，同时提高了锯片刀头的耐热性和化学稳定性，最终提高使用寿命。

Description

一种掺Ti类金刚石涂层的硬质合金圆锯片及其制作方法
技术领域
本发明涉及切割刀具技术领域，具体指一种掺Ti类金刚石涂层的硬质合金圆锯片及其制作方法。
背景技术
随着社会发展和居民生活水平的不断提高，木材加工用硬质合金锯片的需求和加工要求也不断提高，为了使用资源节约和能源节约，提高锯片的使用寿命和加工精度成了目前锯片加工行业迫切需要解决的问题。
目前木工锯片行业所用的PCD(聚金刚石)锯片是将金刚石微粉于硬质合金刀头表面后烧结成型后再焊接。单粒PCD金刚石刀头成本昂贵，而且焊接后磨刃时，必须采用电火花打磨，加工成本高，效率低。
类金刚石(DLC)涂层有高硬度、低摩擦系数和良好的化学稳定性。DLC涂层是含有金刚石结构(SP3键)和石墨结构(SP2)的亚稳非晶态物质，DLC涂层中的碳原子主要以SP3和SP2杂化键结合，但是DLC涂层内应力较大，韧性差。在实际使用过程中发生开裂或者剥落。
因此本发明提供了一种利用金属掺杂DLC复合薄膜技术，掺杂金属能以原子固溶、纳米晶或金属碳化物等多种纳米结构非均匀地镶嵌在非晶碳基交联网络结构中，形成典型的纳米晶/非晶复合结构，借助纳米晶/非晶多相复合结构的界面强化增强薄膜机械强度和韧性；利用分散于薄膜中高热稳定性金属或金属碳化物缓解DLC薄膜石墨化程度，提高DLC薄膜热稳定性及抗氧化性。
发明内容
本发明提出一种掺Ti类金刚石涂层的硬质合金圆锯片，将掺Ti的多层类金刚石复合薄膜沉积于木工硬质合金锯片上，多层膜结构为Ti/TiC的过渡层和类金刚石膜结构。
为了解决上述技术问题，本发明的技术方案为：
一种掺Ti类金刚石涂层的硬质合金圆锯片，包括锯片本体，锯片本体由内向外依次涂覆有Ti/TiC过渡层和类金刚石膜，所述类金刚石膜内掺杂有Ti。
作为优选，所述类金刚石膜厚度为1.5～3um。
作为优选，所述类金刚石膜内中Ti含量为10～20％。
本发明还提供了一种掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，步骤包括
(1)对锯片本体进行清洗；
(2)对锯片本体进行预热；
(3)对锯片本体外表面涂覆Ti/TiC过渡层；
(4)在Ti/TiC过渡层外侧进一步涂覆类金刚石膜。
作为优选，所述步骤(1)中，将锯片本体放在丙酮中超声波清洗15～30min，去除表面油污，并烘干。
作为优选，所述步骤(2)中，将预处理好后的锯片放入磁控溅射气相沉积设备中的工件架上，抽真空达到1～3×10-3pa，真空室温度150℃后，通入氩气，氩气流量为50～100SCCM，当真空室气压达到2～5pa时，打开偏压，偏压-500～-1000V，设定偏空比60％，对锯片本体表面进行氩等离子溅射清洗，持续时间20～40min。
作为优选，所述步骤(3)中，调节气压至5～8×10-1pa，开启磁控溅射气相沉积设备上Ti靶和石墨靶的电源，沉积Ti/TiC过渡层。
作为优选，所述步骤(3)中，沉积TiC层时逐渐减小Ti靶的功率，同时逐渐增加石墨靶的功率，Ti靶电流30～50A，石墨靶功率1.5～3kw，沉积时间20～30min。
作为优选，所述步骤(4)中，在沉积过程中，本体真空为1～3×10-3pa，放电气压0.5pa，氩气和甲烷混合气氛，偏压-500～-1000v，Ti靶电流15～30A，石墨靶功率3～8Kw，沉积时间120～180min。
本发明具有以下的特点和有益效果：
采用上述技术方案，薄膜摩擦系数0.1～0.2，有效降低了锯片本体的摩擦系数，薄膜硬度可达25GPa，大幅提高刀头的强度和硬度，同时提高了锯片刀头的耐热性和化学稳定性，最终提高使用寿命。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。
图1为本发明的结构示意图。
图中，1-类金刚石膜；2-Ti/TiC过渡层；3-锯片本体。
具体实施方式
下面结合附图对本发明的具体实施方式作进一步说明。在此需要说明的是，对于这些实施方式的说明用于帮助理解本发明，但并不构成对本发明的限定。此外，下面所描述的本发明各个实施方式中所涉及的技术特征只要彼此之间未构成冲突就可以相互组合。
本发明提供了一种掺Ti类金刚石涂层的硬质合金圆锯片，包括锯片本体3，锯片本体3由内向外依次涂覆有Ti/TiC过渡层2和类金刚石膜1，类金刚石膜1内掺杂有Ti。类金刚石膜1厚度为1.5～3um。类金刚石膜1内中Ti含量为10～20％。
上述技术方案中，Ti/TiC过渡层的存在可以提高类金刚石膜在锯片本体3上的结合力，类金刚石膜中掺杂Ti后，形成Tic-DLC纳米晶/非晶复合结构，借助界面强化增韧的同时保持类金刚石膜高硬度。类金刚石膜摩擦系数0.1～0.2，有效降低了锯片本体的摩擦系数，薄膜硬度可达25GPa，大幅提高刀头的强度和硬度，同时提高了锯片刀头的耐热性和化学稳定性，最终提高使用寿命3～10倍。
本发明还提供了一种掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，步骤包括
(1)对锯片本体进行清洗；
(2)对锯片本体进行预热；
(3)对锯片本体外表面涂覆Ti/TiC过渡层；
(4)在Ti/TiC过渡层外侧进一步涂覆类金刚石膜。
步骤(1)中，将锯片本体放在丙酮中超声波清洗15～30min，去除表面油污，并烘干。
步骤(2)中，将预处理好后的锯片放入磁控溅射气相沉积设备中的工件架上，抽真空达到1～3×10-3pa，真空室温度150℃后，通入氩气，氩气流量为50～100SCCM，当真空室气压达到2～5pa时，打开偏压，偏压-500～-1000V，设定偏空比60％，对锯片本体表面进行氩等离子溅射清洗，持续时间20～40min。通过离子轰击，可以提高基体表面能，预热锯片本体表面，有助于薄膜的生长和降低生长应力。其中磁控溅射气相沉积设备是一种常规的设备，本发明中不进行具体说明。
步骤(3)中，调节气压至5～8×10-1pa，开启磁控溅射气相沉积设备上Ti靶和石墨靶的电源，沉积Ti/TiC过渡层。
步骤(3)中，沉积TiC层时逐渐减小Ti靶的功率，同时逐渐增加石墨靶的功率，Ti靶电流30～50A，石墨靶功率1.5～3kw，制备成分梯度变化的过渡层，减小薄膜内应力，沉积时间20～30min。
步骤(4)中，在沉积过程中，本体真空为1～3×10-3pa，放电气压0.5pa，氩气和甲烷混合气氛，偏压-500～-1000v，Ti靶电流15～30A，石墨靶功率3～8Kw，沉积时间120～180min。
完成类金刚石膜的涂覆后，进行冷却。
以上结合附图对本发明的实施方式作了详细说明，但本发明不限于所描述的实施方式。对于本领域的技术人员而言，在不脱离本发明原理和精神的情况下，对这些实施方式进行多种变化、修改、替换和变型，仍落入本发明的保护范围内。

Claims (9)

1.一种掺Ti类金刚石涂层的硬质合金圆锯片，包括锯片本体，其特征在于，锯片本体由内向外依次涂覆有Ti/TiC过渡层和类金刚石膜，所述类金刚石膜内掺杂有Ti。
2.根据权利要求1所述的掺Ti类金刚石涂层的硬质合金圆锯片，其特征在于，所述类金刚石膜厚度为1.5～3um。
3.根据权利要求1所述的掺Ti类金刚石涂层的硬质合金圆锯片，其特征在于，所述类金刚石膜内中Ti含量为10～20％。
4.一种掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，步骤包括
(1)对锯片本体进行清洗；
(2)对锯片本体进行预热；
(3)对锯片本体外表面涂覆Ti/TiC过渡层；
(4)在Ti/TiC过渡层外侧进一步涂覆类金刚石膜。
5.根据权利要求4所述的掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，所述步骤(1)中，将锯片本体放在丙酮中超声波清洗15～30min，去除表面油污，并烘干。
6.根据权利要求4所述的掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，所述步骤(2)中，将预处理好后的锯片放入磁控溅射气相沉积设备中的工件架上，抽真空达到1～3×10-3pa，真空室温度150℃后，通入氩气，氩气流量为50～100SCCM，当真空室气压达到2～5pa时，打开偏压，偏压-500～-1000V，设定偏空比60％，对锯片表面进行氩等离子溅射清洗，持续时间20～40min。
7.根据权利要求4所述的掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，所述步骤(3)中，调节气压至5～8×10-1pa，开启磁控溅射气相沉积设备上Ti靶和石墨靶的电源，沉积Ti/TiC过渡层。
8.根据权利要求7所述的掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，所述步骤(3)中，沉积TiC层时逐渐减小Ti靶的功率，同时逐渐增加石墨靶的功率，Ti靶电流30～50A，石墨靶功率1.5～3kw，沉积时间20～30min。
9.根据权利要求7所述的掺Ti类金刚石涂层的硬质合金圆锯片的制作方法，其特征在于，所述步骤(4)中，在沉积过程中，本体真空为1～3×10-3pa，放电气压0.5pa，氩气和甲烷混合气氛，偏压-500～-1000v，Ti靶电流15～30A，石墨靶功率3～8Kw，沉积时间120～180min。
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CN111621744A (zh) * 2020-03-20 2020-09-04 北京师范大学 一种刀具涂层及其沉积方法
CN116288153A (zh) * 2023-03-30 2023-06-23 上海应用技术大学 一种钛/镧共掺的类金刚石涂层及其制备方法
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