CN108398186A - Free form surface Offner convex grating spectrum imaging systems - Google Patents
Free form surface Offner convex grating spectrum imaging systems Download PDFInfo
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- CN108398186A CN108398186A CN201810122991.9A CN201810122991A CN108398186A CN 108398186 A CN108398186 A CN 108398186A CN 201810122991 A CN201810122991 A CN 201810122991A CN 108398186 A CN108398186 A CN 108398186A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J2003/1842—Types of grating
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Abstract
The invention discloses a kind of free form surface Offner convex grating spectrum imaging systems, including：Slit, primary mirror, convex refractive grating, three mirrors and detector, aperture diaphragm of the convex refractive grating as system；System is telecentric structure, by slit be incident on primary mirror after reflect, convex surface light is incident on after reflection, diffraction occurs at convex grating for light, and the first-order diffraction light of different wave length is incident on three mirrors, and by three mirrors reflect after reached detector.System uses free-curved-surface shape, primary mirror, convex refractive grating and three mirrors are not present eccentric and tilt, and primary mirror and three mirrors use identical face structure, primary mirror and three mirrors constitute the big free-form surface mirror of a monoblock, and the free-form surface mirror and convex refractive grating are concentric arrangements.The structure of above system is simple, avoids due to mirror tilt and the eccentric difficulty brought to system adjustment and alignment；The very cureless residual aberration of spherical surface Offner convex gratings spectroscopic system can also effectively be corrected.
Description
Technical field
The present invention relates to spectral imaging technology field more particularly to a kind of free form surface Offner convex grating light spectrum image-formings
System.
Background technology
Spectral imaging technology is a kind of novel multi-vitamin technology for information acquisition for being combined imaging technique and spectral technique, it
The two-dimensional space information of detected target and one-dimensional spectral information can be obtained, data cube is formed.Spectral imaging technology exists
Military surveillance and agriculture, woods, water, soil, mine lamp resource investigation etc. have broad application prospects.
Offner convex grating spectrum imaging systems are a kind of common spectral imaging apparatus, are in reflective Offner
Grow up on the basis of relay imaging system, is made of two concave spherical mirrors and a convex spherical grating.However it is current
Offner convex grating systems use spherical structure, remaining especially in the case of big visual field, large-numerical aperture and wide spectrum
Aberration astigmatism hardly results in correction.In addition, since system uses the Heart-to-Heart that diffraction grating destroys Offner systems itself
The symmetry of structure so that eyeglass run-off the straight and bias bring difficulty to system adjustment.
Freeform optics element has unsymmetric structure form, is capable of providing flexible space layout, opposite spherical surface and
Aspherical optical element has expanded optimization degree of freedom, the difference balanced capacity of optical system is improved, to significantly improve optics
The visual field adaptability of system.Free form surface is introduced in Offner convex grating imaging spectrographs, utilizes its optical characteristics energy
Enough effective visual fields for increasing optical system so that Offner imaging systems still keep concentric structure system, realize entire spectrum
The requirement of high-resolution, miniaturization, lightweight and high stability can be realized in single camera；Simultaneously can improve traditional spherical surface at
As the coma of spectroscopic system, astigmatism, Spectral line bend and band curvature.Existing imaging spectrum system coverage area will effectively be solved
Small, the problems such as relative aperture is small, establishes technical foundation for airborne, spaceborne high light spectrum image-forming detection system development, has extremely heavy
The civilian and military application value wanted.
Mainly there are following two schemes at present：
1) Wang Baohua etc. " airborne small-sized high-resolution image spectrometer Optical System Design " Acta Optica, Vol.35,
NO.10 2015.10. its use the Offner convex grating spectrum imaging systems in global face.The program its in order to improve into image quality
Amount, the primary mirror of offner systems and three mirrors are divided into two, and there are certain bias and inclinations, give the alignment and adjustment of system
Prodigious difficulty is brought, and spectral region and slit length are smaller.
2) Jacob Reimers, " Freeform spectrometer enabling increased
Ompactness ", Light:Science&Applications(2017)6,e17026.Although the design also uses free song
Face can preferably correct residual aberration, and design the volume ratio tradition spherical surface Offner spectrum of obtained spectrum imaging system
Imaging system reduces 5 times.But shorter slit length is only 10mm, and spectral region is relatively narrow, and primary mirror and three mirrors separate, and element is deposited
In eccentric and inclination, difficulty is brought to system adjustment.
Invention content
The object of the present invention is to provide a kind of free form surface Offner convex grating spectrum imaging systems, it can realize that length is narrow
In the case of seam, high-NA and wide range segment limit, the aberration of system increases significantly with respect to spherical system.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of free form surface Offner convex grating spectrum imaging systems, including：Slit, primary mirror, convex refractive grating, three
Mirror and detector, wherein aperture diaphragm of the convex refractive grating as whole system；
System is telecentric structure, by slit be incident on primary mirror after reflect, be incident on after reflection convex
Diffraction occurs at convex grating for face light, light, and the first-order diffraction light of different wave length is incident on three mirrors, and by after the reflection of three mirrors
Reach detector.
As seen from the above technical solution provided by the invention, using free-curved-surface shape, the structure ten of such system
It is point simple, it avoids due to mirror tilt and the eccentric difficulty brought to system adjustment and alignment；Ball can also effectively be corrected
The very cureless residual aberration of face Offner convex gratings spectroscopic system.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this
For the those of ordinary skill in field, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is that a kind of structure of free form surface Offner convex grating spectrum imaging systems provided in an embodiment of the present invention is shown
It is intended to；
Fig. 2 is result of the system provided in an embodiment of the present invention in the modulation transfer function of 200nm；
Fig. 3 is result of the system provided in an embodiment of the present invention in the modulation transfer function of 800nm；
Fig. 4 is result of the system provided in an embodiment of the present invention in the modulation transfer function of 1000nm；
Fig. 5 is result of the system provided in an embodiment of the present invention in the modulation transfer function of 1500nm.
Specific implementation mode
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete
Ground describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this
The embodiment of invention, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, belongs to protection scope of the present invention.
As shown in Figure 1, providing a kind of free form surface Offner convex grating spectrum imaging systems for the embodiment of the present invention
Structural schematic diagram；It includes mainly：Slit, primary mirror, convex refractive grating, three mirrors and detector.In Fig. 1,101- slits, 102-
Primary mirror, 103- convex refractives grating, tri- mirrors of 104-, 105- detectors.
Aperture diaphragm of the convex surface reflecting grating as whole system in system；System is telecentric structure, by slit
Be incident on primary mirror after reflect, convex surface light is incident on after reflection, diffraction, different waves occur at convex grating for light
Long first-order diffraction light is incident on three mirrors, and reaches detector after being reflected by three mirrors.
In the embodiment of the present invention, the face structure of the primary mirror, convex refractive grating and three mirrors is no longer spherical surface, but is adopted
It is expressed with free-curved-surface-type；Free form surface equation is expressed as XY multinomials, Zernike multinomials or Q-type multinomials；
Wherein：
XY polynomial expressions are as follows：
Wherein, r is radius of curvature, and z is rise, and x, y are the space coordinate put on curved surface, and c is curvature, and k is that curved surface is secondary
Coefficient, cjFor the polynomial coefficient of correspondence；
Zernike polynomial expressions are：
Wherein, z is rise, and x, y are the space coordinate put on curved surface, and k is curved surface quadratic coefficients, CiIt is polynomial for correspondence
Coefficient, ZiBe i-th Zernike；
Q-type polynomial expressions are：
Wherein, z is rise, cbfsIt is the curvature in best fit face, R is radial distance, rnIt is normalization radius, parameter u=
R/rn, κ is the constant of the cone in best fit face, alIt is l ranks QbfsPolynomial coefficient, Ql bfsIt is l ranks QbfsMultinomial.
In the embodiment of the present invention, primary mirror, convex refractive grating and three mirrors are not present eccentric and tilt, and primary mirror and three mirrors
Using identical face structure, primary mirror and three mirrors constitute the big free-form surface mirror of a monoblock, and the free form surface is anti-
It is concentric arrangement to penetrate mirror and convex refractive grating.The structure very simple of system in this way, avoid due to mirror tilt and partially
The difficulty that the heart is brought to system adjustment and alignment.
Above system provided in an embodiment of the present invention, using free-curved-surface shape, the structure very simple of such system is kept away
Exempt from due to mirror tilt and the eccentric difficulty brought to system adjustment and alignment；It is convex spherical surface Offner can also effectively to be corrected
The very cureless residual aberration of concave grating spectroscopic system.
The embodiment of the present invention provides a kind of free form surface Offner convex grating spectrum imaging systems, for covering deep ultraviolet,
Visible light uses common Offner spectral imaging technologies spherical reflector and grating certainly to the imaging spectrum system of near-infrared
It is substituted by curved surface, realizes the concentric design of two pieces of speculums and convex grating, avoided speculum and there is eccentric tilt to system
In addition the difficulty that adjustment is brought preferably has corrected the residual aberration that traditional spherical system is not corrected.System provided by the invention
System realizes that spectral region reaches 200-1500nm, covering deep ultraviolet, visible light near infrared band, and slit length 30mm, F number is
3.8.The example of an emulation is provided below：
Design example system first order parameter be：Spectral region reaches 200-1500nm, and covering deep ultraviolet, visible light are to closely
Infrared band, slit length 30mm, F number are 3.8, and Pixel size is 16 μm, and convex refractive grating demand pairs are 150lines/
mm.2~the Fig. 5 of result difference corresponding diagram of system in the modulation transfer function of 200nm, 800nm, 1000nm and 1500nm.
When cutoff frequency 32lines/mm, the transmission function of all visual fields is close to diffraction limit.And the maximum of total system all wavelengths
Spectral line bend and chromatic variation of distortion are respectively less than 1 micron.
Shown in 1~table of parameter list 3 of optical system：
1 systematic parameter of table
| ZP1 | ZP2 | ZP3 | ZP4 | ZP5 | ZP6 |
| -4.98079 | 3.02205e-005 | -0.034777 | -8.58955e-005 | -0.000326955 | 3.16670e-007 |
| ZP7 | ZP8 | ZP9 | ZP10 | ZP11 | ZP12 |
| -8.3489e-008 | -9.52e-008 | -5.68715e-007 | 3.02808e-007 | -2.66883e-009 | 1.84147e-009 |
| ZP13 | ZP14 | ZP15 | ZP16 | ZP17 | ZP18 |
| -5.7374e-009 | 9.78447e-012 | 4.28933e-010 | 4.07408e-012 | -2.26415e-012 | -2.70083e-012 |
| ZP19 | ZP20 | ZP21 | ZP22 | ZP23 | ZP24 |
| -1.9767e-011 | 1.08068e-011 | -3.04047e-012 | -4.57434e-014 | 3.68751e-014 | -2.05097e-014 |
| ZP25 | ZP26 | ZP27 | ZP28 | ZP29 | ZP30 |
| -8.066e-014 | 3.44592e-016 | -2.0572e-014 | 3.46181e-014 | 3.7070e-019 | 1.01334e-017 |
The mirror Zernike multinomial coefficients of 2 primary mirror of table/tri-
| ZP1 | ZP2 | ZP3 | ZP4 | ZP5 | ZP6 |
| -5.68 | 8.36839e-005 | -0.06466 | -0.00024 | -7.69334e-005 | 4.51026e-006 |
| ZP7 | ZP8 | ZP9 | ZP10 | ZP11 | ZP12 |
| -3.156e-006 | -1.63338e-006 | -9.1934e-006 | 6.6617e-006 | -3.40015e-008 | 3.45266e-008 |
| ZP13 | ZP14 | ZP15 | ZP16 | ZP17 | ZP18 |
| -5.1983e-008 | 4.29867e-009 | -2.59823e-008 | -1.68778e-010 | -2.33784e-010 | 1.83266e-010 |
| ZP19 | ZP20 | ZP21 | ZP22 | ZP23 | ZP24 |
| 6.6607e-011 | 1.32048e-010 | 5.14843e-010 | -2.58029e-011 | -2.0609e-012 | 2.44456e-012 |
| ZP25 | ZP26 | ZP27 | ZP28 | ZP29 | ZP30 |
| 1.5797e-011 | 1.86498e-011 | 2.62423e-011 | -2.13928e-011 | -4.05316e-014 | -9.8890e-013 |
3 convex grating Zernike multinomial coefficients of table
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art is in the technical scope of present disclosure, the change or replacement that can be readily occurred in,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims
Subject to enclosing.
Claims (3)
1. a kind of free form surface Offner convex grating spectrum imaging systems, which is characterized in that including：Slit, primary mirror, convex surface are anti-
Penetrate grating, three mirrors and detector, wherein aperture diaphragm of the convex refractive grating as whole system；
System is telecentric structure, by slit be incident on primary mirror after reflect, convex surface light is incident on after reflection,
Diffraction occurs at convex grating for light, and the first-order diffraction light of different wave length is incident on three mirrors, and is reached after being reflected by three mirrors
Detector.
2. a kind of free form surface Offner convex grating spectrum imaging systems according to claim 1, which is characterized in that institute
It states primary mirror, convex refractive grating and three mirrors and is all made of free-curved-surface-type expression；Free form surface equation be expressed as XY multinomials,
Zernike multinomials or Q-type multinomials；Wherein：
XY polynomial expressions are as follows：
Wherein, r is radius of curvature, and z is rise, and x, y are the space coordinate put on curved surface, and c is curvature, and k is curved surface quadratic coefficients,
cjFor the polynomial coefficient of correspondence；
Zernike polynomial expressions are：
Wherein, CiFor the polynomial coefficient of correspondence, ZiBe i-th Zernike；
Q-type polynomial expressions are：
Wherein, z is rise, cbfsIt is the curvature in best fit face, R is radial distance, rnIt is normalization radius, parameter u=R/rn,
κ is the constant of the cone in best fit face, alIt is l ranks QbfsPolynomial coefficient, Ql bfsIt is l ranks QbfsMultinomial.
3. a kind of free form surface Offner convex grating spectrum imaging systems according to claim 1 or 2, feature exist
In primary mirror, convex refractive grating and three mirrors are not present eccentric and tilt, and primary mirror and three mirrors use identical face shape knot
Structure, primary mirror and three mirrors constitute the big free-form surface mirror of a monoblock, and the free-form surface mirror and convex refractive grating are
Concentric arrangement.
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| CN201810122991.9A CN108398186B (en) | 2018-02-07 | 2018-02-07 | Free-form surface Offner convex surface grating spectral imaging system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110196101A (en) * | 2019-06-18 | 2019-09-03 | 中国科学院光电研究院 | A kind of wide spectrum monochromatic light road optical spectrum imaging device |
| CN110941136A (en) * | 2020-01-03 | 2020-03-31 | 深圳市锐思华创技术有限公司 | Laser projection system applying directional diffusion sheet |
| WO2020140340A1 (en) * | 2018-12-31 | 2020-07-09 | 苏州大学 | Compact, catadioptric, and athermal imaging spectrometer |
| CN113701882A (en) * | 2021-08-31 | 2021-11-26 | 中国科学院长春光学精密机械与物理研究所 | Spectrometer optical system and design method thereof |
Citations (3)
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| CN203881441U (en) * | 2014-03-28 | 2014-10-15 | 中国科学院上海技术物理研究所 | Free-form surface-based imaging spectrometer optical splitting system |
| CN106706131A (en) * | 2017-01-19 | 2017-05-24 | 中国科学院上海技术物理研究所 | Double-incident slit high-resolution imaging spectral system |
| CN108227165A (en) * | 2018-01-18 | 2018-06-29 | 北京理工大学 | Off-axis three anti-imaging spectrometer of free form surface |
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2018
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| CN203881441U (en) * | 2014-03-28 | 2014-10-15 | 中国科学院上海技术物理研究所 | Free-form surface-based imaging spectrometer optical splitting system |
| CN106706131A (en) * | 2017-01-19 | 2017-05-24 | 中国科学院上海技术物理研究所 | Double-incident slit high-resolution imaging spectral system |
| CN108227165A (en) * | 2018-01-18 | 2018-06-29 | 北京理工大学 | Off-axis three anti-imaging spectrometer of free form surface |
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| JACOB REIMERS等: "Freeform spectrometer enabling increased compactness", 《NATURE》 * |
| LIDONG WEI 等: "Optical design of Offner-Chrisp imaging spectrometer with freeform surfaces", 《PROCEEDINGS OF SPIE》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020140340A1 (en) * | 2018-12-31 | 2020-07-09 | 苏州大学 | Compact, catadioptric, and athermal imaging spectrometer |
| US11579423B2 (en) | 2018-12-31 | 2023-02-14 | Soochow University | Compact, catadioptric and athermal imaging spectrometer |
| CN110196101A (en) * | 2019-06-18 | 2019-09-03 | 中国科学院光电研究院 | A kind of wide spectrum monochromatic light road optical spectrum imaging device |
| CN110941136A (en) * | 2020-01-03 | 2020-03-31 | 深圳市锐思华创技术有限公司 | Laser projection system applying directional diffusion sheet |
| CN113701882A (en) * | 2021-08-31 | 2021-11-26 | 中国科学院长春光学精密机械与物理研究所 | Spectrometer optical system and design method thereof |
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