CN105424187A - Refrigeration-type long-wave infrared imaging spectrometer based on Dyson structure - Google Patents
Refrigeration-type long-wave infrared imaging spectrometer based on Dyson structure Download PDFInfo
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- CN105424187A CN105424187A CN201510967400.4A CN201510967400A CN105424187A CN 105424187 A CN105424187 A CN 105424187A CN 201510967400 A CN201510967400 A CN 201510967400A CN 105424187 A CN105424187 A CN 105424187A
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- 238000003331 infrared imaging Methods 0.000 title claims abstract description 32
- 238000003384 imaging method Methods 0.000 claims abstract description 58
- 238000005057 refrigeration Methods 0.000 claims abstract description 36
- 210000001747 pupil Anatomy 0.000 claims abstract description 23
- 230000005855 radiation Effects 0.000 claims abstract description 8
- 230000007306 turnover Effects 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 7
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 claims description 4
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 7
- 230000003595 spectral effect Effects 0.000 abstract description 5
- 238000010586 diagram Methods 0.000 description 7
- 230000004075 alteration Effects 0.000 description 4
- 230000004907 flux Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Lenses (AREA)
Abstract
A refrigeration-type long-wave infrared imaging spectrometer based on a Dyson structure belongs to the optical technical field and aims to solve the problems in the prior art that refrigeration equipment with a large volume is required, and a lot of energy sources are required to maintain a low temperature. The refrigeration-type long-wave infrared imaging spectrometer based on the Dyson structure provided by the invention comprises an off-axis three-reverse prepositioned telescope objective, a Dyson grating spectrometer and a secondary imaging lens group, wherein the off-axis three-reverse prepositioned telescope objective comprises three reflecting mirrors and a slit, and radiation information of a target scene is imaged by the three reflecting mirrors at the slit; and the Dyson grating spectrometer disperses images formed at the slit according to different wave lengths and images the image containing multiple pieces of spectral information at a first image plane, and a secondary imaging lens group realizes secondary imaging of exit pupils which are remote from the first image plane and far from each other at the different wave lengths at a cold diaphragm of a detector. The refrigeration-type long-wave infrared imaging spectrometer based on the Dyson structure provided by the invention adopts the method of secondary imaging, realizes the second imaging of the system exit pupils which are far from each other at the different wave lengths at the cold diaphragm of the detector, so that a technical requirement for separate refrigeration of the detector can be satisfied.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of refrigeration mode high light flux LONG WAVE INFRARED imaging optical system, be specifically related to a kind of refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure.
Background technology
Imaging spectrometer is the new spatial atmospheric optics remote sensing instrument grown up on multispectral remote sensing imaging technique basis, and it can obtain super multispectral section of target with high spectral resolution.Work in the imaging spectrometer good confidentiality of long wave infrared region (8 ~ 12 μm), can continuous working round the clock, antijamming capability less by weather effect strong, in material detection and identify, there is obvious advantage.Because the remote sensing signal of long wave infrared region is more weak, this optical system will rectificating ripple Infrared Imaging Spectrometer has higher luminous flux, meanwhile, in order to obtain higher signal to noise ratio (S/N ratio), also needs to freeze to detector.
Simple from axle three reflecting optical system structure, can realize higher luminous flux, spectral range is wide, does not have light to block, and structure adopts reflective, avoids aberration, and the Degree of Structure Freedom is comparatively large, can provide the picture of desirable slit for follow-up spectrometer system.
Grating spectrometer architecture based on concentric structure is simply compact, and volume is little, lightweight, and numerical aperture is large, Spectral line bend and band curvature little, receive in recent years and pay close attention to more and more widely.Wherein, the advantage of Dyson structural volume and luminous flux aspect is more outstanding, can meet the requirement of long wave infrared region to spectrometer well.
Dyson structure is refraction-reflection type, and the exit pupil position at different wave length place is apart from each other due to the difference of refractive index, and in the problem realizing cold stop coupling, tool acquires a certain degree of difficulty.In prior art, by to spectrometer and the cold method of the common seal apparatus of detector, before cold stop is placed in slit, avoid the unmatched problem of cold stop, but this method requires the refrigeration plant of larger volume, and more multidimensional holds the energy supply required for low temperature.
Summary of the invention
The object of the invention is to propose a kind of refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure, the requirement refrigeration plant volume that solution prior art exists is large and maintain the problem that needed for low temperature, the energy is many.
For achieving the above object, the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure of the present invention comprises:
From the anti-preposition telephotolens of axle three, describedly comprise three catoptrons and slit from the anti-preposition telephotolens of axle three, object scene radiation information is imaged on slit place by three catoptrons;
The picture including multispectral information is imaged in the Dyson grating spectrograph at an image planes place by different wave length dispersion by described slit place imaging, described Dyson grating spectrograph comprises plano-convex thick lens, aspheric surface correction mirror and concave reflection grating, light is incident from slit, successively after plano-convex thick lens and aspheric surface correction mirror, reflected and light splitting by concave reflection grating, then focus on an image planes place through aspheric surface correction mirror and plano-convex thick lens successively;
With secondary imaging mirror group, described secondary imaging mirror group is by distance image planes compared with distant positions and different wave length place emergent pupil apart from each other, and secondary imaging is in detector cold stop place; It is all that the semilune lens of sphere and one side are with aspheric convex lens that described secondary imaging mirror group comprises one side with aspheric semilune lens, two sides, the light at an image planes place is all the semilune lens diverges of sphere successively with aspheric semilune lens and two sides through one side, then converges at detector place through one side with aspheric convex lens.
Described three catoptrons are six non-spherical reflectors, specifically comprise six non-spherical reflector A, six times non-spherical reflector B and six time non-spherical reflector C, object scene radiation information successively through the concave spherical surface catoptric imaging of the concave spherical surface of six non-spherical reflector A, the convex spherical of six non-spherical reflector B and six non-spherical reflector C at described slit place.
Described six non-spherical reflector B are the diaphragm from the anti-preposition telephotolens of axle three, and described six non-spherical reflector B are positioned near described six non-spherical reflector C focal planes.
Described refrigeration mode LONG WAVE INFRARED imaging spectrometer also comprises turnover minute surface A, and the emergent ray at slit place incides in Dyson grating spectrograph through turnover minute surface A.
Described secondary imaging mirror group also comprises turnover minute surface B, the light at an image planes place is successively after one side is all the semilune lens diverges of sphere with aspheric semilune lens and two sides, incide one side with aspheric convex lens through turnover minute surface B, then converge at detector place through one side with aspheric convex lens.
Described detector is refrigeration mode HgCdTe detector, and described cold stop is positioned at 20mm place, front, detector focal plane.
The material of described plano-convex thick lens is ZnSe.
One side in described secondary imaging lens combination is all the semilune lens of sphere and one side with the material of aspheric convex lens with aspheric semilune lens, two sides is Ge.
Beneficial effect of the present invention is: the radiation information based on the preposition telephotolens receiving target scenery in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure of the present invention, and they are imaged in slit place, by Dyson spectrometer by slit place picture by different wave length dispersion and by include multispectral information picture be formed in an image planes place, to be positioned at the emergent pupil of different wave length compared with distant positions and apart from each other by secondary imaging mirror group, secondary imaging is in detector cold stop place; Adopt the method for secondary imaging, wavelength centered by 10 μm, by system emergent pupil apart from each other under different wave length, secondary imaging, in detector cold stop position, achieves the cold stop efficiency of 100%, and then meets the technical requirement of freezing to detector separately.
Accompanying drawing explanation
Fig. 1 be of the present invention based in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure from the anti-telephotolens structural representation of axle three;
Fig. 2 is of the present invention based on the point range figure from axle three anti-telephotolens image planes place in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure;
Fig. 3 is the spectrometer architecture schematic diagram based on Dyson structure in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure of the present invention;
Fig. 4 is of the present invention based on the imaging spectrometer schematic diagram before secondary imaging in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure;
Fig. 5 is of the present invention based on secondary imaging principle schematic in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure;
Fig. 6 is the refrigeration mode LONG WAVE INFRARED imaging spectrometer middle ideal lens secondary imaging spectrometer schematic diagram based on Dyson structure of the present invention;
Fig. 7 is of the present invention based on secondary imaging lens group structure schematic diagram in the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure;
Fig. 8 is the refrigeration mode LONG WAVE INFRARED imaging spectrometer one-piece construction schematic diagram based on Dyson structure of the present invention;
Fig. 9 is the resolution schematic diagram of the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure of the present invention;
Wherein: 1, six non-spherical reflector A, 2, six non-spherical reflector B, 3, six non-spherical reflector C, 4, slit, 5, plano-convex thick lens, 51, the plano-convex thick lens plane of incidence, 52, plano-convex thick lens exit facet, 6, aspheric surface correction mirror, 61, the aspheric surface correction mirror plane of incidence, 62, aspheric surface correction mirror exit facet, 7, concave reflection grating, 8, image planes, 9, perfect lens group, 901, simultaneously with aspheric semilune lens, 9011, simultaneously with aspheric semilune lens entrance face, 9012, simultaneously with aspheric semilune lens exit facet, 902, two sides is all the semilune lens of sphere, 9021, two sides is all the semilune lens entrance face of sphere, 9022, two sides is all the semilune lens exit facet of sphere, 903, simultaneously with aspheric convex lens, 9031, simultaneously with the aspheric convex lens plane of incidence, 9032, simultaneously with aspheric convex lens exit facet, 10, cold stop, 11, secondary image planes, 12, turnover minute surface A, 13, turnover minute surface B.
Embodiment
Below in conjunction with accompanying drawing, embodiments of the present invention are described further.
See accompanying drawing 8, the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure of the present invention comprises from the anti-preposition telephotolens of axle three, Dyson grating spectrograph, secondary imaging mirror group and detector;
See accompanying drawing 1, describedly comprise three catoptrons from the anti-preposition telephotolens of axle three and object scene radiation information is imaged on slit 4 place by slit 4, three catoptrons; Described three catoptrons are six non-spherical reflectors, specifically comprise six non-spherical reflector A1, six times non-spherical reflector B2 and six time non-spherical reflector C3, object scene radiation information successively through the concave spherical surface of six non-spherical reflector A1, six non-spherical reflector B2 convex spherical and six non-spherical reflector C3 concave spherical surface catoptric imagings at described slit 4 place; Described six non-spherical reflector B2 are the diaphragm from the anti-preposition telephotolens of axle three, and described six non-spherical reflector B2 are positioned near described six non-spherical reflector C3 focal planes; First design satisfactory three-mirror reflection structure, afterwards each mirror mirror is carried out rational from axle and deflection, to ensure not blocking mutually of light.Meanwhile, by controlling the scope of the distance between six non-spherical reflector A1 minute surfaces and six non-spherical reflector B2 minute surfaces and the distance sum between six non-spherical reflector B2 minute surfaces and six non-spherical reflector C3 minute surfaces, ensure the good symmetry of structure and for making chief ray impinge perpendicularly on spectrometer, need ensure from the chief ray vertical slits 4 in the anti-telephotolens of axle three.Finally, optimized the optimum structure obtained from the anti-telephotolens of axle three by Zemax, emergent pupil is positioned at-404mm far away and locates.
See accompanying drawing 2, from the point range figure of the anti-telephotolens of axle three, wherein circle represents Airy disk, and the scenery under visible each visual field can both be realized ideal imaging.
See accompanying drawing 3, described Dyson grating spectrograph by described slit 4 place imaging by different wave length dispersion and by include multispectral information picture image in image planes 8 place, described Dyson grating spectrograph comprises plano-convex thick lens 5, aspheric surface correction mirror 6 and concave reflection grating 7, light is incident from slit 4, successively after plano-convex thick lens 5 and aspheric surface correction mirror 6 are dispersed, reflected and light splitting by concave reflection grating 7, then focus on image planes 8 place through aspheric surface correction mirror 6 and plano-convex thick lens 5 successively; The introducing of aspheric surface correction mirror 6 is separated with plano-convex thick lens 5 rear surface with detector by slit 4 and the spherical aberration produced to correct.
See accompanying drawing 4, imaging spectrometer structural representation before secondary imaging, now the distance of exit pupil l of system
exp1being respectively: locate as 234mm at 8 μm, is 152mm at 10 μm of places, is 101mm at 12 μm of places.The emergent pupil at obvious different wave length place, not in same position, in order to meet the pupil coupling of whole system, has carried out secondary imaging to system.
See accompanying drawing 5, the process of secondary imaging is that the light at image planes 8 place is imaged on secondary image planes 11 place through desirable lens combination 9 and cold stop 10 successively, and namely described secondary image planes 11 place is detector image planes positions, by an image planes 8I
1image in secondary image planes 11I
2, simultaneously by the emergent pupil EXP of front method, system
1image in detector cold stop 10 position EXP
2, and then realize the requirement of pupil coupling.According to the exit pupil position of imaging optical system before secondary imaging, select 10 μm as centre wavelength, if the focal length of secondary imaging mirror group is f, obtain the correlation parameter of secondary imaging mirror group according to formula (1) and formula (2):
Wherein: f is the focal length of secondary imaging mirror group;
S is the object distance in secondary imaging mirror group;
S ' is the image distance in secondary imaging mirror group;
L
stopfor cold stop 10 is apart from the position of secondary image planes 11;
L
exp1for the position of distance of exit pupil image planes 8.
Calculate f=17.67mm, S=-S '=-35.34mm.First represent lens combination with perfect lens, the system added in Fig. 4 carries out secondary imaging, and using f, S ,-S ' optimize a little as variable, obtain secondary imaging mirror group.
The object-side numerical aperture of the perfect lens group 9 after optimization is 0.24, focal distance f '=19.03mm, entrance pupil position is 302.115mm.Using above parameter as restrictive condition, design with Zemax and optimize the secondary imaging lens combination obtained as shown in Figure 7.Described secondary imaging mirror group is by distance image planes 8 compared with distant positions and different wave length place emergent pupil apart from each other, and secondary imaging is in detector cold stop 10 place; It is all that the semilune lens 902 of sphere and one side are with aspheric convex lens 903 that described secondary imaging mirror group comprises one side with aspheric semilune lens 901, two sides, the light at image planes 8 place is dispersed with the semilune lens 902 that aspheric semilune lens 901 and two sides are all spheres through one side successively, then converges at detector place through one side with aspheric convex lens 903;
One side is six aspheric surfaces with aspheric semilune lens entrance face 9011 and one side with aspheric convex lens exit facet 9032, one side with aspheric semilune lens exit facet 9012, two sides be all the semilune lens entrance face 9021 of sphere, two sides be all the semilune lens exit facet 9022 of sphere and one side is all sphere with the aspheric convex lens plane of incidence 9031.
Described detector is refrigeration mode HgCdTe detector, and the service band of refrigeration mode HgCdTe detector is 8 ~ 12 μm, and F number is 2, and Pixel size is 40 μm, and array size is 256 × 256 (M × N).For realizing higher signal to noise ratio (S/N ratio), the porch of refrigeration mode detector has a cold stop 10 usually, and this cold stop 10 is positioned at front, detector focal plane 20mm (l
stop) place.
For avoiding light to block, the emergent light that described refrigeration mode LONG WAVE INFRARED imaging spectrometer also comprises turnover minute surface A12 slit 4 place incides in Dyson grating spectrograph through turnover minute surface A12.Described secondary imaging mirror group also comprises turnover minute surface B13, makes a light in structure not block mutually on the one hand, also reduces the volume of system on the other hand, make structure compacter.See accompanying drawing 8, the present invention can realize cold stop 10 efficiency of 100%.For ensureing that slit 4 place is always desirable picture, in whole optimizing process, be not variable by any optimum configurations in telephotolens.The parameter value in each face of final structure is listed in the table below:
The material of described plano-convex thick lens 5 is ZnSe.
One side in described secondary imaging lens combination is all the semilune lens 902 of sphere and one side with the material of aspheric convex lens 903 with aspheric semilune lens 901, two sides is Ge.
In the optical system that many bodies splice, the image-side numerical aperture of demand fulfillment front optical system is equal with the object-side numerical aperture of rear optical system on the one hand, the entrance pupil of the emergent pupil meeting front optical system and the rear optical system of also will satisfying the demand on the other hand is at same position, such object is in order to while ensureing the making full use of of energy, and avoids vignetting and diaphragm aberration.In the present invention, because Dyson spectrometer is refraction-reflection type structure, the entrance pupil position of different wave length must at same position, therefore need to make the entrance pupil of the emergent pupil of front telephotolens and rear spectrometer be all in infinite distance, now, the path changing of chief ray is very little, do not mated by pupil and the vignetting brought and diaphragm aberration negligible.
According to the transfer curve of imaging spectrometer of the present invention, known system picture element is close to diffraction limit.System, when Nyquist frequency is 12.5/mm place, is 12 μm at wavelength and locates to be 0.55, to meet the requirement of optical system minimum.
See accompanying drawing 9, the resolution schematic diagram of imaging spectral instrument system, system is that 10 μm of resolution located are minimum at wavelength, is 25nm.
Claims (8)
1., based on the refrigeration mode LONG WAVE INFRARED imaging spectrometer of Dyson structure, it is characterized in that, comprising:
From the anti-preposition telephotolens of axle three, describedly comprise three catoptrons and slit (4) from the anti-preposition telephotolens of axle three, object scene radiation information is imaged on slit (4) place by three catoptrons;
The picture including multispectral information is imaged in the Dyson grating spectrograph at image planes (8) place by different wave length dispersion by described slit (4) place imaging, described Dyson grating spectrograph comprises plano-convex thick lens (5), aspheric surface correction mirror (6) and concave reflection grating (7), light is incident from slit (4), successively after plano-convex thick lens (5) and aspheric surface correction mirror (6), reflected and light splitting by concave reflection grating (7), image planes (8) place is focused on successively again through aspheric surface correction mirror (6) and plano-convex thick lens (5),
With secondary imaging mirror group, described secondary imaging mirror group will apart from image planes (8) compared with distant positions and different wave length place emergent pupil apart from each other, and secondary imaging is in detector cold stop (10) place; Described secondary imaging mirror group comprise one side with aspheric semilune lens (901), two sides be all sphere semilune lens (902) and simultaneously with aspheric convex lens (903), the light at image planes (8) place is dispersed with the semilune lens (902) that aspheric semilune lens (901) and two sides are all spheres through one side successively, then converges at detector place through one side with aspheric convex lens (903).
2. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, it is characterized in that, described three catoptrons are six non-spherical reflectors, specifically comprise six non-spherical reflector A (1), six non-spherical reflector B (2) and six non-spherical reflector C (3), object scene radiation information successively through the concave spherical surface catoptric imaging of the concave spherical surface of six non-spherical reflector A (1), the convex spherical of six non-spherical reflector B (2) and six non-spherical reflector C (3) at described slit (4) place.
3. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 2, it is characterized in that, described six non-spherical reflector B (2) are the diaphragm from the anti-preposition telephotolens of axle three, and described six non-spherical reflector B (2) are positioned near described six non-spherical reflector C (3) focal planes.
4. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, it is characterized in that, described refrigeration mode LONG WAVE INFRARED imaging spectrometer also comprises turnover minute surface A (12), and the emergent ray at slit (4) place incides in Dyson grating spectrograph through turnover minute surface A (12).
5. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, it is characterized in that, described secondary imaging mirror group also comprises turnover minute surface B (13), after the semilune lens (902) that the light at image planes (8) place is all sphere through one side with aspheric semilune lens (901) and two sides are successively dispersed, incide one side with aspheric convex lens (903) through turnover minute surface B (13), then converge at detector place through one side with aspheric convex lens (903).
6. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, is characterized in that, described detector is refrigeration mode HgCdTe detector, and described cold stop (10) is positioned at 20mm place, front, detector focal plane.
7. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, is characterized in that, the material of described plano-convex thick lens (5) is ZnSe.
8. the refrigeration mode LONG WAVE INFRARED imaging spectrometer based on Dyson structure according to claim 1, it is characterized in that, the one side in described secondary imaging lens combination is all the semilune lens (902) of sphere and one side with the material of aspheric convex lens (903) with aspheric semilune lens (901), two sides is Ge.
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Cited By (4)
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| CN107064016A (en) * | 2017-04-14 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | A kind of grating dispersion imaging spectrometer |
| CN110703410A (en) * | 2019-09-03 | 2020-01-17 | 佛山科学技术学院 | Non-blocking long-focus star sensor optical system |
| CN112219108A (en) * | 2018-05-07 | 2021-01-12 | 珀金埃尔默健康科学有限公司 | Spectrometer and instrument comprising a spectrometer |
| CN116625527A (en) * | 2023-07-18 | 2023-08-22 | 中国科学院光电技术研究所 | Infrared cold diaphragm matching on-line detection method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064016A (en) * | 2017-04-14 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | A kind of grating dispersion imaging spectrometer |
| CN107064016B (en) * | 2017-04-14 | 2019-11-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of grating dispersion imaging spectrometer |
| CN112219108A (en) * | 2018-05-07 | 2021-01-12 | 珀金埃尔默健康科学有限公司 | Spectrometer and instrument comprising a spectrometer |
| CN110703410A (en) * | 2019-09-03 | 2020-01-17 | 佛山科学技术学院 | Non-blocking long-focus star sensor optical system |
| CN116625527A (en) * | 2023-07-18 | 2023-08-22 | 中国科学院光电技术研究所 | Infrared cold diaphragm matching on-line detection method |
| CN116625527B (en) * | 2023-07-18 | 2023-11-17 | 中国科学院光电技术研究所 | Infrared cold diaphragm matching on-line detection method |
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