CN105424187A - Refrigeration-type long-wave infrared imaging spectrometer based on Dyson structure - Google Patents
Refrigeration-type long-wave infrared imaging spectrometer based on Dyson structure Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于光学技术领域,涉及一种制冷型高光通量长波红外成像光学系统,具体涉及一种基于Dyson结构的制冷型长波红外成像光谱仪。The invention belongs to the field of optical technology, and relates to a cooling type high luminous flux long-wave infrared imaging optical system, in particular to a cooling type long-wave infrared imaging spectrometer based on a Dyson structure.
背景技术Background technique
成像光谱仪是在多光谱遥感成像技术基础上发展起来的新型空间大气光学遥感仪器,它能够以高光谱分辨率获取目标的超多谱段。工作于长波红外波段(8~12μm)的成像光谱仪保密性好、可昼夜连续工作、受天气影响较小、抗干扰能力强,在物质探测识别方面具有明显的优势。由于长波红外波段的遥感信号较弱,这就要求长波红外成像光谱仪的光学系统具有较高的光通量,与此同时,为了获得较高的信噪比,还需要对探测器进行制冷。Imaging spectrometer is a new type of space atmospheric optical remote sensing instrument developed on the basis of multispectral remote sensing imaging technology. It can acquire super multispectral bands of targets with high spectral resolution. Imaging spectrometers operating in the long-wave infrared band (8-12 μm) have good confidentiality, can work continuously day and night, are less affected by weather, and have strong anti-interference capabilities. They have obvious advantages in material detection and identification. Since the remote sensing signal in the long-wave infrared band is weak, this requires the optical system of the long-wave infrared imaging spectrometer to have a high luminous flux. At the same time, in order to obtain a high signal-to-noise ratio, the detector needs to be cooled.
离轴三反光学系统结构简单,可以实现较高的光通量,光谱范围宽,没有光线遮拦,结构采用反射式,避免了色差,且结构自由度较大,可以为后续的光谱仪系统提供理想的狭缝的像。The off-axis three-mirror optical system has a simple structure, which can achieve high luminous flux, wide spectral range, no light blocking, reflective structure, avoids chromatic aberration, and has a large degree of structural freedom. stitched like.
基于同心结构的光栅光谱仪结构简单紧凑,体积小、重量轻,数值孔径大,谱线弯曲和谱带弯曲小,近年来受到了越来越广泛的关注。其中,Dyson结构体积及光通量方面的优势更为突出,可以很好地满足长波红外波段对光谱仪的要求。The grating spectrometer based on the concentric structure has the advantages of simple and compact structure, small volume, light weight, large numerical aperture, small spectral line bending and band bending, and has received more and more attention in recent years. Among them, Dyson has more prominent advantages in terms of structural volume and luminous flux, which can well meet the requirements of spectrometers in the long-wave infrared band.
Dyson结构为折反式,不同波长处的出瞳位置由于折射率的不同而相距较远,在实现冷光阑匹配的问题上具有一定难度。现有技术中,通过对光谱仪和探测器共同封装置冷的方法,将冷光阑置于狭缝之前,回避了冷光阑不匹配的问题,但是这种方法要求较大体积的制冷设备,以及更多维持低温所需要的能源供应。The Dyson structure is catadioptric, and the positions of the exit pupils at different wavelengths are far apart due to the difference in refractive index, which makes it difficult to achieve cold diaphragm matching. In the prior art, the cold diaphragm is placed in front of the slit by co-encapsulating the spectrometer and the detector to avoid the mismatching problem of the cold diaphragm, but this method requires a larger volume of refrigeration equipment and more More energy supply needed to maintain low temperature.
发明内容Contents of the invention
本发明的目的在于提出一种基于Dyson结构的制冷型长波红外成像光谱仪,解决现有技术存在的要求制冷设备体积大和维持低温所需能源多的问题。The purpose of the present invention is to propose a refrigeration-type long-wave infrared imaging spectrometer based on Dyson structure, which solves the problems existing in the prior art that the refrigeration equipment needs to be bulky and the energy needed to maintain low temperature is large.
为实现上述目的,本发明的基于Dyson结构的制冷型长波红外成像光谱仪包括:To achieve the above object, the refrigeration type long-wave infrared imaging spectrometer based on Dyson structure of the present invention comprises:
离轴三反前置望远物镜,所述离轴三反前置望远物镜包括三片反射镜和狭缝,三片反射镜将目标景物辐射信息成像在狭缝处;An off-axis three-mirror front telescopic objective lens, the off-axis three-mirror front telescopic objective lens includes three mirrors and a slit, and the three mirrors image the radiation information of the target scene at the slit;
将所述狭缝处所成的像按不同波长色散并将包含有多光谱信息的像成像于一次像面处的Dyson光栅光谱仪,所述Dyson光栅光谱仪包括平凸厚透镜、非球面矫正镜和凹面反射光栅,光线从狭缝入射,依次经过平凸厚透镜和非球面矫正镜后,由凹面反射光栅反射并分光,再依次经非球面矫正镜和平凸厚透镜聚焦在一次像面处;A Dyson grating spectrometer that disperses the image formed at the slit according to different wavelengths and images the image containing multi-spectral information on the primary image plane. The Dyson grating spectrometer includes a plano-convex thick lens, an aspheric correcting mirror and a concave surface Reflective grating, the light is incident from the slit, after passing through the plano-convex thick lens and the aspheric correcting mirror in turn, it is reflected by the concave reflective grating and splits the light, and then successively passes through the aspheric correcting mirror and plano-convex thick lens to focus on the primary image plane;
和二次成像镜组,所述二次成像镜组将距离一次像面较远位置且不同波长处相距较远的出瞳,二次成像于探测器冷光阑处;所述二次成像镜组包括一面带有非球面的半月形透镜、两面都是球面的半月形透镜和一面带有非球面的凸透镜,一次像面处的光线依次经一面带有非球面的半月形透镜和两面都是球面的半月形透镜发散,再经一面带有非球面的凸透镜会聚于探测器处。And the secondary imaging mirror group, the secondary imaging mirror group will be farther away from the primary image surface and the exit pupil at different wavelengths is farther apart, and the secondary imaging is at the cold diaphragm of the detector; the secondary imaging mirror group It includes a half-moon lens with an aspheric surface, a half-moon lens with both spherical surfaces and a convex lens with an aspheric surface. The half-moon lens diverges, and then converges at the detector through a convex lens with an aspheric surface.
所述三片反射镜均为六次非球面反射镜,具体包括六次非球面反射镜A、六次非球面反射镜B和六次非球面反射镜C,目标景物辐射信息依次经六次非球面反射镜A的凹球面、六次非球面反射镜B的凸球面和六次非球面反射镜C的凹球面反射成像在所述狭缝处。The three reflectors are all six-time aspheric reflectors, specifically including six-time aspheric reflector A, six-time aspheric reflector B and six-time aspheric reflector C, and the target scene radiation information is passed through six aspheric reflectors in sequence The concave spherical surface of the spherical mirror A, the convex spherical surface of the six-time aspheric mirror B, and the concave spherical surface of the six-time aspheric mirror C are reflected and imaged at the slit.
所述六次非球面反射镜B为离轴三反前置望远物镜的光阑,所述六次非球面反射镜B位于所述六次非球面反射镜C焦平面附近。The six-time aspheric mirror B is the diaphragm of the off-axis three-mirror front telescopic objective lens, and the six-time aspheric mirror B is located near the focal plane of the six-time aspheric mirror C.
所述制冷型长波红外成像光谱仪还包括转折镜面A,狭缝处的出射光线经转折镜面A入射到Dyson光栅光谱仪中。The cooling-type long-wave infrared imaging spectrometer also includes a turning mirror A, and the outgoing light at the slit enters the Dyson grating spectrometer through the turning mirror A.
所述二次成像镜组还包括转折镜面B,一次像面处的光线依次经一面带有非球面的半月形透镜和两面都是球面的半月形透镜发散后,经转折镜面B入射到一面带有非球面的凸透镜,再经一面带有非球面的凸透镜会聚于探测器处。The secondary imaging mirror group also includes a turning mirror B, and the light at the primary image surface is diverged through a half-moon lens with an aspheric surface and a half-moon lens with both spherical surfaces in turn, and then incident on a side with a half-moon lens through the turning mirror B. A convex lens with an aspheric surface converges at the detector through a convex lens with an aspheric surface.
所述探测器为制冷型HgCdTe探测器,所述冷光阑位于探测器焦平面前方20mm处。The detector is a cooled HgCdTe detector, and the cold aperture is located 20 mm in front of the focal plane of the detector.
所述平凸厚透镜的材料为ZnSe。The material of the plano-convex thick lens is ZnSe.
所述二次成像透镜组中的一面带有非球面的半月形透镜、两面都是球面的半月形透镜和一面带有非球面的凸透镜的材料为Ge。In the secondary imaging lens group, the materials of the half-moon lens with an aspheric surface on one side, the half-moon lens with both spherical surfaces and the convex lens with an aspherical surface on one side are Ge.
本发明的有益效果为:本发明的基于Dyson结构的制冷型长波红外成像光谱仪中的前置望远物镜接收目标景物的辐射信息,并将它们成像于狭缝处,通过Dyson光谱仪将狭缝处的像按不同波长色散并将包含有多光谱信息的像成于一次像面处,通过二次成像镜组将位于较远位置且相距较远的不同波长的出瞳,二次成像于探测器冷光阑处;采用二次成像的方法,以10μm为中心波长,将不同波长下相距较远的系统出瞳,二次成像于探测器冷光阑位置,实现了100%的冷光阑效率,进而满足单独对探测器进行制冷的技术要求。The beneficial effects of the present invention are: the front telescopic objective lens in the refrigeration type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention receives the radiation information of the target scene, and images them at the slit, and the Dyson spectrometer images the radiation information at the slit. The image is dispersed according to different wavelengths and the image containing multi-spectral information is formed on the primary image plane, and the exit pupils of different wavelengths located at a farther position and farther apart are secondary imaged on the detector through the secondary imaging mirror group At the cold aperture; using the method of secondary imaging, with 10 μm as the center wavelength, the exit pupils of the system that are far apart at different wavelengths are re-imaged at the position of the cold aperture of the detector to achieve 100% efficiency of the cold aperture, and then meet The technical requirements for cooling the detector alone.
附图说明Description of drawings
图1为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中离轴三反望远物镜结构示意图;Fig. 1 is the structure diagram of the off-axis three-mirror telescopic objective lens in the refrigeration type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
图2为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中离轴三反望远物镜像面处的点列图;Fig. 2 is a spot diagram at the off-axis three-mirror telescopic object mirror surface in the cooling type long-wave infrared imaging spectrometer based on Dyson structure of the present invention;
图3为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中Dyson结构的光谱仪结构示意图;Fig. 3 is the spectrometer structure schematic diagram of Dyson structure in the refrigeration type long-wave infrared imaging spectrometer based on Dyson structure of the present invention;
图4为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中二次成像前的成像光谱仪示意图;Fig. 4 is the schematic diagram of the imaging spectrometer before secondary imaging in the refrigeration type long-wave infrared imaging spectrometer based on Dyson structure of the present invention;
图5为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中二次成像原理示意图;5 is a schematic diagram of the principle of secondary imaging in the refrigeration type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
图6为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中理想透镜二次成像光谱仪示意图;6 is a schematic diagram of an ideal lens secondary imaging spectrometer in the cooling type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
图7为本发明的基于Dyson结构的制冷型长波红外成像光谱仪中二次成像透镜组结构示意图;Fig. 7 is a schematic diagram of the structure of the secondary imaging lens group in the refrigeration type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
图8为本发明的基于Dyson结构的制冷型长波红外成像光谱仪整体结构示意图;Fig. 8 is a schematic diagram of the overall structure of the refrigeration-type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
图9为本发明的基于Dyson结构的制冷型长波红外成像光谱仪的分辨率示意图;Fig. 9 is a schematic diagram of the resolution of the refrigeration-type long-wave infrared imaging spectrometer based on the Dyson structure of the present invention;
其中:1、六次非球面反射镜A,2、六次非球面反射镜B,3、六次非球面反射镜C,4、狭缝,5、平凸厚透镜,51、平凸厚透镜入射面,52、平凸厚透镜出射面,6、非球面矫正镜,61、非球面矫正镜入射面,62、非球面矫正镜出射面,7、凹面反射光栅,8、一次像面,9、理想透镜组,901、一面带有非球面的半月形透镜,9011、一面带有非球面的半月形透镜入射面,9012、一面带有非球面的半月形透镜出射面,902、两面都是球面的半月形透镜,9021、两面都是球面的半月形透镜入射面,9022、两面都是球面的半月形透镜出射面,903、一面带有非球面的凸透镜,9031、一面带有非球面的凸透镜入射面,9032、一面带有非球面的凸透镜出射面,10、冷光阑,11、二次像面,12、转折镜面A,13、转折镜面B。Among them: 1. Six-time aspheric mirror A, 2. Six-time aspheric mirror B, 3. Six-time aspheric mirror C, 4. Slit, 5. Plano-convex thick lens, 51. Plano-convex thick lens Incident surface, 52. Plano-convex thick lens exit surface, 6. Aspheric correction mirror, 61. Aspheric correction mirror incident surface, 62. Aspheric correction mirror exit surface, 7. Concave reflective grating, 8. Primary image surface, 9 , an ideal lens group, 901, a half-moon lens with an aspheric surface on one side, 9011, an incident surface of a half-moon lens with an aspheric surface on one side, 9012, an exit surface of a half-moon lens with an aspheric surface on one side, 902, both sides are Spherical half-moon lens, 9021, the incident surface of a half-moon lens with both spherical surfaces, 9022, the exit surface of a half-moon lens with both spherical surfaces, 903, a convex lens with an aspheric surface on one side, 9031, an aspherical lens on one side Convex lens incident surface, 9032, convex lens exit surface with aspheric surface on one side, 10, cold stop, 11, secondary image surface, 12, turning mirror surface A, 13, turning mirror surface B.
具体实施方式detailed description
下面结合附图对本发明的实施方式作进一步说明。Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
参见附图8,本发明的基于Dyson结构的制冷型长波红外成像光谱仪包括离轴三反前置望远物镜、Dyson光栅光谱仪、二次成像镜组和探测器;Referring to accompanying drawing 8, the refrigerated long-wave infrared imaging spectrometer based on the Dyson structure of the present invention includes an off-axis three-reverse front telescopic objective lens, a Dyson grating spectrometer, a secondary imaging mirror group and a detector;
参见附图1,所述离轴三反前置望远物镜包括三片反射镜和狭缝4,三片反射镜将目标景物辐射信息成像在狭缝4处;所述三片反射镜为六次非球面反射镜,具体包括六次非球面反射镜A1、六次非球面反射镜B2和六次非球面反射镜C3,目标景物辐射信息依次经六次非球面反射镜A1的凹球面、六次非球面反射镜B2凸球面和六次非球面反射镜C3凹球面反射成像在所述狭缝4处;所述六次非球面反射镜B2为离轴三反前置望远物镜的光阑,所述六次非球面反射镜B2位于所述六次非球面反射镜C3焦平面附近;先设计符合要求的同轴三反结构,之后对各反射镜镜面进行合理的离轴和偏转,以保证光线的互不遮挡。与此同时,通过控制六次非球面反射镜A1镜面和六次非球面反射镜B2镜面间的距离与六次非球面反射镜B2镜面和六次非球面反射镜C3镜面间的距离之和的范围,来保证结构较好的对称性并且为使主光线垂直入射到光谱仪,需保证离轴三反望远物镜中的主光线垂直狭缝4。最后,通过Zemax优化得到离轴三反望远物镜的最佳结构,出瞳位于较远的-404mm处。Referring to accompanying drawing 1, described off-axis three anti-front telescopic objective lens comprises three reflecting mirrors and slit 4, and three reflecting mirrors image target scene radiation information at slit 4; Described three reflecting mirrors are six The secondary aspheric mirrors specifically include the six-time aspheric mirror A1, the six-time aspheric mirror B2 and the six-time aspheric mirror C3. The radiation information of the target scene passes through the concave spherical surface of the six-time aspheric mirror A1, The convex spherical surface of the sub-aspherical mirror B2 and the concave spherical surface of the six-time aspheric mirror C3 are reflected and imaged at the slit 4; the six-time aspheric mirror B2 is the diaphragm of the off-axis three-mirror front telescopic objective lens , the six-time aspheric mirror B2 is located near the focal plane of the six-time aspheric mirror C3; first design a coaxial three-mirror structure that meets the requirements, and then perform reasonable off-axis and deflection on the mirror surfaces of each mirror, so as to Ensure that the light does not block each other. At the same time, by controlling the distance between the six-time aspheric mirror A1 mirror and the six-time aspheric mirror B2 mirror and the distance between the six-time aspheric mirror B2 mirror and the six-time aspheric mirror C3 mirror range, to ensure better symmetry of the structure and to make the chief ray vertically incident on the spectrometer, it is necessary to ensure the vertical slit 4 of the chief ray in the off-axis triple mirror telescopic objective lens. Finally, the optimal structure of the off-axis triple mirror telescopic objective lens is obtained through Zemax optimization, and the exit pupil is located at -404mm far away.
参见附图2,离轴三反望远物镜的点列图,其中圆圈代表着艾里斑,可见各视场下的景物都能够实现理想成像。See Figure 2, the spot diagram of the off-axis triple-mirror telescopic objective lens, in which the circles represent Airy disks, and it can be seen that the scenes in each field of view can achieve ideal imaging.
参见附图3,所述Dyson光栅光谱仪将所述狭缝4处所成的像按不同波长色散并将包含有多光谱信息的像成像于一次像面8处,所述Dyson光栅光谱仪包括平凸厚透镜5、非球面矫正镜6和凹面反射光栅7,光线从狭缝4入射,依次经过平凸厚透镜5和非球面矫正镜6发散后,由凹面反射光栅7反射并分光,再依次经非球面矫正镜6和平凸厚透镜5聚焦在一次像面8处;非球面矫正镜6的引入,是为了矫正由狭缝4和探测器与平凸厚透镜5后表面分离而产生的球差。Referring to accompanying drawing 3, described Dyson grating spectrometer disperses the image formed at the slit 4 according to different wavelengths and forms an image containing multispectral information on the primary image plane 8, and the Dyson grating spectrometer includes plano-convex thickness Lens 5, aspheric correcting mirror 6 and concave reflective grating 7, the light is incident from the slit 4, after being diverged by plano-convex thick lens 5 and aspheric correcting mirror 6, it is reflected and split by the concave reflective grating 7, and then passes through the non-spherical reflective grating 7 in turn. Spherical correction mirror 6 and plano-convex thick lens 5 focus on primary image plane 8; the introduction of aspheric correction mirror 6 is to correct the spherical aberration caused by the separation of slit 4 and detector from the rear surface of plano-convex thick lens 5.
参见附图4,二次成像前成像光谱仪结构示意图,此时系统的出瞳距离lexp1分别为:在8μm处为234mm,在10μm处为152mm,在12μm处为101mm。显然不同波长处的出瞳并不在同一个位置,为了满足整个系统的光瞳匹配,对系统进行了二次成像。Referring to Figure 4, the structural diagram of the imaging spectrometer before secondary imaging, the exit pupil distance l exp1 of the system at this time is 234 mm at 8 μm, 152 mm at 10 μm, and 101 mm at 12 μm. Obviously, the exit pupils at different wavelengths are not in the same position. In order to meet the pupil matching of the entire system, the system is imaged twice.
参见附图5,二次成像的过程是一次像面8处的光线依次经理想透镜组9和冷光阑10成像在二次像面11处,所述二次像面11处即是探测器像面位置,将一次像面8I1成像于二次像面11I2,同时将前方系统的出瞳EXP1成像于探测器冷光阑10位置处EXP2,进而实现光瞳匹配的要求。根据二次成像前成像光学系统的出瞳位置,选择10μm作为中心波长,设二次成像镜组的焦距为f,根据公式(1)和公式(2)得到二次成像镜组的相关参数:Referring to accompanying drawing 5, the process of secondary imaging is that the light at the primary image plane 8 is imaged at the secondary image plane 11 by the ideal lens group 9 and the cold diaphragm 10 in turn, and the secondary image plane 11 is the detector image. The primary image plane 8I 1 is imaged on the secondary image plane 11I 2 , and the exit pupil EXP 1 of the front system is imaged on EXP 2 at the position of the cold diaphragm 10 of the detector, thereby realizing the pupil matching requirement. According to the exit pupil position of the imaging optical system before the secondary imaging, select 10 μm as the central wavelength, set the focal length of the secondary imaging lens group as f, and obtain the relevant parameters of the secondary imaging lens group according to formula (1) and formula (2):
其中:f为二次成像镜组的焦距;Where: f is the focal length of the secondary imaging lens group;
S为二次成像镜组中的物距;S is the object distance in the secondary imaging mirror group;
S’为二次成像镜组中的像距;S' is the image distance in the secondary imaging mirror group;
lstop为冷光阑10距离二次像面11的位置;l stop is the position of the cold diaphragm 10 from the secondary image plane 11;
lexp1为出瞳距离一次像面8的位置。l exp1 is the distance from the exit pupil to the primary image plane 8.
计算得到f=17.67mm,S=-S’=-35.34mm。先以理想透镜代表透镜组,加入图4中的系统进行二次成像,并以f、S、-S’作为变量稍加优化,得到二次成像镜组。It is calculated that f=17.67mm, S=-S'=-35.34mm. First, the ideal lens is used to represent the lens group, and the system in Figure 4 is added for secondary imaging, and f, S, -S' are used as variables for slight optimization to obtain the secondary imaging lens group.
优化后的理想透镜组9的物方数值孔径为0.24,焦距f’=19.03mm,入瞳位置为302.115mm。将以上参数作为限制条件,用Zemax设计并优化得到了如图7所示的二次成像透镜组。所述二次成像镜组将距离一次像面8较远位置且不同波长处相距较远的出瞳,二次成像于探测器冷光阑10处;所述二次成像镜组包括一面带有非球面的半月形透镜901、两面都是球面的半月形透镜902和一面带有非球面的凸透镜903,一次像面8处的光线依次经一面带有非球面的半月形透镜901和两面都是球面的半月形透镜902发散,再经一面带有非球面的凸透镜903会聚于探测器处;The object-side numerical aperture of the optimized ideal lens group 9 is 0.24, the focal length f'=19.03mm, and the entrance pupil position is 302.115mm. Taking the above parameters as limiting conditions, Zemax was used to design and optimize the secondary imaging lens group shown in Figure 7. The secondary imaging mirror group will be farther away from the primary image surface 8 and the exit pupils at different wavelengths are farther apart, and the secondary imaging is at the cold diaphragm 10 of the detector; the secondary imaging mirror group includes one side with a non- Spherical half-moon lens 901, both sides are spherical half-moon lens 902 and one side has aspherical convex lens 903, the light at primary image surface 8 passes through one side with aspheric half-moon lens 901 and both sides are spherical The half-moon lens 902 diverges, and then converges at the detector through a convex lens 903 with an aspheric surface;
一面带有非球面的半月形透镜入射面9011和一面带有非球面的凸透镜出射面9032为六次非球面,一面带有非球面的半月形透镜出射面9012、两面都是球面的半月形透镜入射面9021、两面都是球面的半月形透镜出射面9022和一面带有非球面的凸透镜入射面9031都为球面。The incident surface 9011 of a half-moon lens with an aspheric surface and the exit surface 9032 of a convex lens with an aspheric surface are six-degree aspheric surfaces, the exit surface 9012 of a half-moon lens with an aspherical surface, and a half-moon lens with spherical surfaces on both sides The incident surface 9021, the exit surface 9022 of the half-moon lens with both spherical surfaces and the incident surface 9031 of the convex lens with an aspherical surface are all spherical.
所述探测器为制冷型HgCdTe探测器,制冷型HgCdTe探测器的工作波段为8~12μm,F数为2,像元大小为40μm,阵列大小为256×256(M×N)。为实现较高的信噪比,制冷型探测器的入口处通常有一个冷光阑10,该冷光阑10位于探测器焦平面前方20mm(lstop)处。The detector is a refrigerated HgCdTe detector, the working band of the refrigerated HgCdTe detector is 8-12 μm, the F number is 2, the pixel size is 40 μm, and the array size is 256×256 (M×N). In order to achieve a higher signal-to-noise ratio, there is usually a cold diaphragm 10 at the entrance of the cooled detector, and the cold diaphragm 10 is located 20 mm (l stop ) in front of the focal plane of the detector.
为避免光线遮拦,所述制冷型长波红外成像光谱仪还包括转折镜面A12狭缝4处的出射光经转折镜面A12入射到Dyson光栅光谱仪中。所述二次成像镜组还包括转折镜面B13,一方面使得结构中个光线互不遮挡,另一方面也减小了系统的体积,使结构更加紧凑。参见附图8,本发明能够实现100%的冷光阑10效率。为保证狭缝4处始终为理想的像,在整个优化过程中,不将望远物镜中的任何参数设置为变量。最终结构各个面的参数值列于下表:In order to avoid light blocking, the cooling type long-wave infrared imaging spectrometer also includes a turning mirror A12. The exit light at the slit 4 enters the Dyson grating spectrometer through the turning mirror A12. The secondary imaging mirror group also includes a turning mirror B13, on the one hand, the light rays in the structure do not block each other, on the other hand, it also reduces the volume of the system and makes the structure more compact. Referring to FIG. 8 , the present invention can achieve 100% efficiency of the cold diaphragm 10 . In order to ensure that the slit 4 is always an ideal image, during the entire optimization process, no parameters in the telephoto objective lens are set as variables. The parameter values for each face of the final structure are listed in the table below:
所述平凸厚透镜5的材料为ZnSe。The material of the plano-convex thick lens 5 is ZnSe.
所述二次成像透镜组中的一面带有非球面的半月形透镜901、两面都是球面的半月形透镜902和一面带有非球面的凸透镜903的材料为Ge。In the secondary imaging lens group, the materials of the half-moon lens 901 with an aspheric surface on one side, the half-moon lens 902 with both spherical surfaces and the convex lens 903 with an aspherical surface on one side are Ge.
在多体拼接的光学系统中,一方面需要满足前方光学系统的像方数值孔径与后方光学系统的物方数值孔径相等,另一方面也要满足需要满足前方光学系统的出瞳与后方光学系统的入瞳在同一位置,这样的目的是为了保证能量的充分利用的同时,避免渐晕以及光阑像差。在本发明中,因为Dyson光谱仪为折反式结构,不同波长的入瞳位置必然不会在同一位置,因此需要令前方望远物镜的出瞳以及后方光谱仪的入瞳都为于无穷远,此时,主光线的路径改变很小,由光瞳不匹配而带来的渐晕以及光阑像差可以忽略不计。In the multi-body splicing optical system, on the one hand, the image-side numerical aperture of the front optical system must be equal to the object-side numerical aperture of the rear optical system; on the other hand, the exit pupil of the front optical system and the rear optical system must also be satisfied. The entrance pupils are at the same position, the purpose of which is to avoid vignetting and aperture aberration while ensuring full utilization of energy. In the present invention, because the Dyson spectrometer is a catadioptric structure, the entrance pupil positions of different wavelengths must not be at the same position, so it is necessary to make the exit pupil of the front telescopic objective lens and the entrance pupil of the rear spectrometer both at infinity. When , the path of the chief ray changes very little, and the vignetting and aperture aberration caused by the pupil mismatch can be ignored.
根据本发明的成像光谱仪的传递函数曲线,可知系统像质接近衍射极限。系统在尼奎斯特频率为12.5/mm处时,在波长为12μm处最低为0.55,满足光学系统的要求。According to the transfer function curve of the imaging spectrometer of the present invention, it can be seen that the image quality of the system is close to the diffraction limit. When the system is at the Nyquist frequency of 12.5/mm, the minimum value is 0.55 at the wavelength of 12 μm, which meets the requirements of the optical system.
参见附图9,成像光谱仪系统的分辨率示意图,系统在波长为10μm处的分辨率最低,为25nm。Referring to FIG. 9 , a schematic diagram of the resolution of the imaging spectrometer system, the resolution of the system at a wavelength of 10 μm is the lowest, which is 25 nm.
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CN116625527A (en) * | 2023-07-18 | 2023-08-22 | 中国科学院光电技术研究所 | Infrared cold diaphragm matching on-line detection method |
CN116625527B (en) * | 2023-07-18 | 2023-11-17 | 中国科学院光电技术研究所 | Infrared cold diaphragm matching on-line detection method |
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