CN108398186B - Free-form surface Offner convex surface grating spectral imaging system - Google Patents
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Abstract
The invention discloses a free-form surface Offner convex grating spectral imaging system, which comprises: the system comprises a slit, a main mirror, a convex reflection grating, a three-mirror and a detector, wherein the convex reflection grating is used as an aperture diaphragm of the system; the system is of an image space telecentric structure, is reflected after being incident on the main mirror through the slit, is incident on the convex light after being reflected, light is diffracted at the convex grating, and first-order diffracted light with different wavelengths is incident on the three mirrors and reaches the detector after being reflected by the three mirrors. The system adopts a free-form surface shape, the main mirror, the convex surface reflection grating and the three mirrors do not have eccentricity and inclination, the main mirror and the three mirrors adopt the same surface shape structure, the main mirror and the three mirrors form a whole large free-form surface reflection mirror, and the free-form surface reflection mirror and the convex surface reflection grating are concentrically arranged. The system has simple structure, and avoids the difficulty of system adjustment and alignment caused by the inclination and eccentricity of the reflector; and residual aberration which is difficult to correct by a spherical Offner convex grating spectrum system can be effectively corrected.
Description
Technical Field
The invention relates to the technical field of spectral imaging, in particular to a free-form surface Offner convex surface grating spectral imaging system.
Background
The spectral imaging technology is a novel multidimensional information acquisition technology combining the imaging technology and the spectral technology, and can acquire two-dimensional space information and one-dimensional spectral information of a detected target to form a data cube. The spectral imaging technology has wide application prospect in military reconnaissance, agriculture, forestry, water, soil and miner lamp resource investigation and the like.
The Offner convex grating spectral imaging system is a common spectral imaging instrument, which is developed on the basis of a reflective Offner relay imaging system and consists of two concave spherical reflectors and a convex spherical grating. However, the current Offner convex grating system adopts a spherical structure, and especially in the case of a large field of view, a large numerical aperture and a wide spectral band, residual aberration astigmatism is difficult to correct. In addition, the system adopts the diffraction grating to destroy the symmetry of the concentric structure of the Offner system, so that the lens is inclined and eccentric, and the difficulty is brought to the system adjustment.
The free-form surface optical element has an asymmetric structural form, can provide flexible spatial layout, expands the optimization degree of freedom relative to spherical and aspheric surface optical elements, and improves the phase difference balance capability of an optical system, thereby obviously improving the visual field adaptability of the optical system. A free-form surface is introduced into the Offner convex grating imaging spectrometer, and the optical characteristics of the free-form surface are utilized to effectively increase the field of view of an optical system, so that the Offner imaging system still keeps a concentric structure system, and the requirements of high resolution, miniaturization, light weight and high stability of a single spectrum camera can be met; meanwhile, coma aberration, astigmatism, spectral line bending and spectral band bending of the traditional spherical imaging spectrum system can be improved. The problems of small coverage area, small relative aperture and the like of the existing imaging spectrum system are effectively solved, a technical foundation is laid for the development of an airborne hyperspectral imaging detection system and a satellite-borne hyperspectral imaging detection system, and the method has extremely important civil and military application values.
At present, there are two main schemes:
1) wangbaohua and the like, design of an optical system of an airborne light and small high-resolution imaging spectrometer, Vol.35, No. 102015.10, and adopts a full-spherical Offner convex grating spectral imaging system. The scheme divides the primary mirror and the three mirrors of the offner system into two in order to improve the imaging quality, has certain eccentricity and inclination, brings great difficulty to the alignment and adjustment of the system, and has small spectral range and slit length.
2) Jacob Reimers, "Freeform spectrometer arrangement in creative amplified action", Light: Science & Applications (2017)6, e 17026. Although the free-form surface is adopted in the design, the residual aberration can be better corrected, and the volume of the designed spectral imaging system is reduced by 5 times compared with that of the traditional spherical Offner spectral imaging system. However, the slit length is only 10mm, the spectral range is narrow, the main mirror and the three mirrors are separated, and the elements have eccentricity and inclination, which brings difficulty to system adjustment.
Disclosure of Invention
The invention aims to provide a free-form surface Offner convex grating spectral imaging system, which can obviously improve the aberration of the system relative to a spherical system under the conditions of a long slit, high numerical aperture and wide spectral range.
The purpose of the invention is realized by the following technical scheme:
a free-form surface Offner convex grating spectral imaging system, comprising: the detector comprises a slit, a main mirror, a convex reflection grating, a three-mirror and a detector, wherein the convex reflection grating is used as an aperture diaphragm of the whole system;
the system is of an image space telecentric structure, is reflected after being incident on the main mirror through the slit, is incident on the convex light after being reflected, light is diffracted at the convex grating, and first-order diffracted light with different wavelengths is incident on the three mirrors and reaches the detector after being reflected by the three mirrors.
According to the technical scheme provided by the invention, the free-form surface is adopted, so that the structure of the system is very simple, and the difficulty in system adjustment and alignment caused by the inclination and eccentricity of the reflector is avoided; and residual aberration which is difficult to correct by a spherical Offner convex grating spectrum system can be effectively corrected.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a free-form surface Offner convex grating spectral imaging system according to an embodiment of the present invention;
FIG. 2 shows the MTF result at 200nm for a system according to an embodiment of the present invention;
FIG. 3 shows the MTF result at 800nm for a system according to an embodiment of the present invention;
FIG. 4 shows the MTF results at 1000nm for a system according to an embodiment of the present invention;
FIG. 5 shows the MTF at 1500nm for a system according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, a schematic structural diagram of a free-form surface Offner convex grating spectral imaging system is provided for an embodiment of the present invention; it mainly comprises: the device comprises a slit, a main mirror, a convex reflection grating, three mirrors and a detector. In FIG. 1, 101-slit, 102-primary mirror, 103-convex reflective grating, 104-triple mirror, 105-detector.
The convex surface reflection grating in the system is used as an aperture diaphragm of the whole system; the system is of an image space telecentric structure, is reflected after being incident on the main mirror through the slit, is incident on the convex light after being reflected, light is diffracted at the convex grating, and first-order diffracted light with different wavelengths is incident on the three mirrors and reaches the detector after being reflected by the three mirrors.
In the embodiment of the invention, the surface shape structures of the main mirror, the convex reflection grating and the three mirrors are not spherical surfaces any more, but are expressed by adopting free-form surface shapes; the free-form surface equation is expressed as an XY polynomial, a Zernike polynomial or a Q-type polynomial; wherein:
the XY polynomial expression is as follows:
wherein r is curvature radius, z is rise, x, y are space coordinates of points on the curved surface, c is curvature, k is curved surface quadratic coefficient, c is curvature radius, andjis the coefficient of the corresponding polynomial;
the Zernike polynomial expression is:
wherein z is rise, x and y are space coordinates of points on the curved surface, k is a curved surface quadratic coefficient, CiIs the coefficient of the corresponding polynomial, ZiIs the ith Zernike term;
the Q-type polynomial expression is:
wherein z is rise, cbfsIs the curvature of the best fit surface, R is the radial distance, RnIs normalized radius, parameter u ═ R/Rnκ is the conic constant of the best fit plane, alIs the first order QbfsCoefficient of polynomial, Ql bfsIs the first order QbfsA polynomial expression.
In the embodiment of the invention, the main mirror, the convex surface reflection grating and the three mirrors do not have eccentricity and inclination, the main mirror and the three mirrors adopt completely same surface structures, the main mirror and the three mirrors form a whole large free-form surface reflection mirror, and the free-form surface reflection mirror and the convex surface reflection grating are concentrically arranged. The structure of the system is very simple, and the difficulty in adjusting and aligning the system due to the inclination and eccentricity of the reflecting mirror is avoided.
The system provided by the embodiment of the invention adopts a free-form surface shape, so that the system has a very simple structure, and the difficulty in system adjustment and alignment caused by the inclination and eccentricity of the reflector is avoided; and residual aberration which is difficult to correct by a spherical Offner convex grating spectrum system can be effectively corrected.
The embodiment of the invention provides a free-form surface Offner convex grating spectral imaging system, which is an imaging spectral system covering deep ultraviolet, visible light and near infrared, and adopts a free-form surface to replace a spherical reflector and a grating in the common Offner spectral imaging technology, so that the concentric design of the two reflectors and the convex grating is realized, the difficulty in system adjustment caused by the eccentric inclination of the reflectors is avoided, and in addition, the residual aberration which cannot be corrected by the traditional spherical system is better corrected. The system provided by the invention realizes the spectrum range of 200-1500nm, covers the bands from deep ultraviolet, visible light to near infrared, has the slit length of 30mm and the F number of 3.8. An example of a simulation is provided below:
the first order parameters of the system for the design example are: the spectral range reaches 200-1500nm, the deep ultraviolet, visible light and near infrared wave bands are covered, the length of the slit is 30mm, the F number is 3.8, the pixel size is 16 mu m, and the line logarithm of the convex surface reflection grating is 150 lines/mm. The results of the modulation transfer function MTFs at 200nm, 800nm, 1000nm and 1500nm for the system are shown in FIGS. 2-5, respectively. At a cut-off frequency of 32lines/mm, the transfer functions for all fields are close to the diffraction limit. And the maximum spectral line bending and color distortion of all wavelengths of the whole system are less than 1 micron.
The parameters of the optical system are shown in tables 1 to 3:
TABLE 1 System parameters
| ZP1 | ZP2 | ZP3 | ZP4 | ZP5 | ZP6 |
| -4.98079 | 3.02205e-005 | -0.034777 | -8.58955e-005 | -0.000326955 | 3.16670e-007 |
| ZP7 | ZP8 | ZP9 | ZP10 | ZP11 | ZP12 |
| -8.3489e-008 | -9.52e-008 | -5.68715e-007 | 3.02808e-007 | -2.66883e-009 | 1.84147e-009 |
| ZP13 | ZP14 | ZP15 | ZP16 | ZP17 | ZP18 |
| -5.7374e-009 | 9.78447e-012 | 4.28933e-010 | 4.07408e-012 | -2.26415e-012 | -2.70083e-012 |
| ZP19 | ZP20 | ZP21 | ZP22 | ZP23 | ZP24 |
| -1.9767e-011 | 1.08068e-011 | -3.04047e-012 | -4.57434e-014 | 3.68751e-014 | -2.05097e-014 |
| ZP25 | ZP26 | ZP27 | ZP28 | ZP29 | ZP30 |
| -8.066e-014 | 3.44592e-016 | -2.0572e-014 | 3.46181e-014 | 3.7070e-019 | 1.01334e-017 |
TABLE 2 Primary/triple mirror Zernike polynomial coefficients
| ZP1 | ZP2 | ZP3 | ZP4 | ZP5 | ZP6 |
| -5.68 | 8.36839e-005 | -0.06466 | -0.00024 | -7.69334e-005 | 4.51026e-006 |
| ZP7 | ZP8 | ZP9 | ZP10 | ZP11 | ZP12 |
| -3.156e-006 | -1.63338e-006 | -9.1934e-006 | 6.6617e-006 | -3.40015e-008 | 3.45266e-008 |
| ZP13 | ZP14 | ZP15 | ZP16 | ZP17 | ZP18 |
| -5.1983e-008 | 4.29867e-009 | -2.59823e-008 | -1.68778e-010 | -2.33784e-010 | 1.83266e-010 |
| ZP19 | ZP20 | ZP21 | ZP22 | ZP23 | ZP24 |
| 6.6607e-011 | 1.32048e-010 | 5.14843e-010 | -2.58029e-011 | -2.0609e-012 | 2.44456e-012 |
| ZP25 | ZP26 | ZP27 | ZP28 | ZP29 | ZP30 |
| 1.5797e-011 | 1.86498e-011 | 2.62423e-011 | -2.13928e-011 | -4.05316e-014 | -9.8890e-013 |
TABLE 3 Zernike polynomial coefficients for convex gratings
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (1)
1. A free-form surface Offner convex grating spectral imaging system, comprising: the detector comprises a slit, a main mirror, a convex reflection grating, a three-mirror and a detector, wherein the convex reflection grating is used as an aperture diaphragm of the whole system;
the system is of an image space telecentric structure, is reflected after being incident on the main mirror through the slit, is incident on the convex reflection grating after being reflected, light is diffracted at the convex reflection grating, and first-order diffracted lights with different wavelengths are incident on the three mirrors and reach the detector after being reflected by the three mirrors;
the main mirror, the convex reflection grating and the three mirrors do not have eccentricity and inclination, the main mirror and the three mirrors adopt completely same surface shape structures, the main mirror and the three mirrors form a whole large free-form surface reflector, and the free-form surface reflector and the convex reflection grating are concentrically arranged; the spectral range of the imaging system reaches 200-1500nm, the imaging system covers the deep ultraviolet, visible light and near infrared wave bands, the length of the slit is 30mm, the F number is 3.8, the pixel size is 16 mu m, and the line number of the line pairs of the convex reflection grating is 150 lines/mm; when modulation transfer functions MTF of the system at 200nm, 800nm, 1000nm and 1500nm are at a cut-off frequency of 32lines/mm, the transfer functions of all fields are close to a diffraction limit, and the maximum spectral line bending and color distortion of all wavelengths of the whole system are smaller than 1 micron;
the primary mirror, the convex reflection grating and the three mirrors are expressed by free-form surface types; the free-form surface equation is expressed as an XY polynomial or a Q-type polynomial; wherein:
the XY polynomial expression is as follows:
wherein r is curvature radius, z is rise, x, y are space coordinates of points on the curved surface, c is curvature, k is curved surface quadratic coefficient, c is curvature radius, andjis the coefficient of the corresponding polynomial;
the Q-type polynomial expression is:
wherein z is rise, cbfsIs the curvature of the best fit surface, R is the radial distance, RnIs normalized radius, parameter u ═ R/Rnκ is the conic constant of the best fit plane, alIs the first order QbfsCoefficient of polynomial, Ql bfsIs the first order QbfsA polynomial expression.
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| CN106706131A (en) * | 2017-01-19 | 2017-05-24 | 中国科学院上海技术物理研究所 | Double-incident slit high-resolution imaging spectral system |
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