CN108375618B - 智能氮氧传感器及其检测方法 - Google Patents
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Abstract
本发明涉及氮氧传感器的技术领域,尤其涉及一种智能氮氧传感器及其检测方法。基体层、印刷功能层和闭合结构腔,基体层包括上层氧化锆基板、中层氧化锆基板和底层氧化锆基板;印刷功能层包括共用外电极、主泵内电极、副泵内电极、混合电势敏感电极、测量泵内电极、参比空气电极、绝缘包裹层一、绝缘包裹层二、加热线路和8个电极触点,闭合结构腔包括第一测量腔、第二测量腔和参比空气通道,这种智能氮氧传感器感应芯片不仅能通过电流型工作原理精确测量尾气中NOX的总量,还能通过混合电势特征检测尾气中NO/NO2的比例,这样就能准确计算出尾气中NO和NO2各自的浓度。
Description
技术领域
本发明涉及一种传感器,尤其涉及一种智能氮氧传感器及其检测方法。
背景技术
柴油发动机在富氧条件下高温燃烧会产生大量的氮氧化物,在柴油机尾气处理中,选择催化反应(SCR)方法由于其能高效处理NOx而被广泛地使用,在此方法中会添加尿素作为反应物质,因此需要在SCR处理的前端和后端强制加入氮氧传感器来精确测量NOx的浓度以满足尾气后处理系统精确控制和车载诊断的功能。目前唯一大批量应用的氮氧传感器是基于电流型工作原理的,是以NOX分解后氧含量的增量作为依据判断和检测NOX总含量的,在对以NO为主要成分的尾气气氛测量时,其精度可以确保稳定,但当对以NO2为主要成分或者占有相当比例的尾气进行测量时,因为NO2中的氧量比NO多一倍,其测量值是不准确的。
由于国Ⅳ排放后处理一半不安装DOC,SCR前端的原排气中NO2占NOX总量的10%左右,且NO2在SCR中充分参与和NH3的快反应,到SCR后端基本没有NO2,现有的氮氧传感器不会因为NOX中的NO2而测量不准确。但排放升级到国Ⅵ后,柴油发动机后处理安装DOC几乎成为必选,SCR前端尾气中NO2占NOX总量接近甚至超过50%,这就造成SCR后端NOX可能全部是NO2的情况,尤其是在国Ⅳ排放法规对NOX限值要求很低的情况下,现有的电流型氮氧传感器已无法满足测量精度的要求,急需一种对NO和NO2均有较高测量精度的氮氧传感器。
发明内容
本发明旨在解决上述缺陷,提供一种智能氮氧传感器感应芯片。
为了克服背景技术中存在的缺陷,本发明解决其技术问题所采用的技术方案是:这种智能氮氧传感器感应芯片包括基体层、印刷功能层和闭合结构腔,基体层包括上层氧化锆基板、中层氧化锆基板和底层氧化锆基板;印刷功能层包括共用外电极、主泵内电极、副泵内电极、混合电势敏感电极、测量泵内电极、参比空气电极、绝缘包裹层一、绝缘包裹层二、加热线路和8个电极触点;闭合结构腔包括第一测量腔、第二测量腔和参比空气通道,共用外电极通过引线和电极触点相连并印刷连接在上层氧化锆基板的上端面;主泵内电极和副泵内电极以及引线印刷连接在上层氧化锆基板的下端面、并通过上层氧化锆基板上的通孔与印刷在上端面的电极触点一、电极触点二连接;所述混合电势敏感电极和测量泵内电极印刷连接在底层氧化锆基板的上端面、并通过引线延伸至端头与两侧的电极触点三、电极触点四连接;参比空气电极及引线也印刷连接在底层氧化锆基板的上端面、并通过底层氧化锆基板上的过孔与下端面电极触点五连接;所述的绝缘包裹层一、绝缘包裹层二直接印刷连接在底层氧化锆基板的下端面、并把印刷连接的加热线路包裹起来,而电极触点五、电极触点六、电极触点七则裸露在端头外面;中层氧化锆基板上通过冲切加工设有第一测量腔、第二测量腔和参比空气通道,并且还设有第一扩散障碍层和第二扩散障碍层。
根据本发明的另一个实施例,进一步包括所述混合电势敏感电极设置在第一测量腔内。
根据本发明的另一个实施例,进一步包括所述第一扩散障碍层置于第一测量腔的前端,第二扩散障碍层置于第一测量腔的后端。
根据本发明的另一个实施例,进一步包括所述混合电势敏感电极由NiO和ZrO2构成,质量比例为2:1到1:1。
根据本发明的另一个实施例,进一步包括还包括共用外电极与主泵内电极之间连接的主泵单元VP0,共用外电极与副泵内电极之间连接的副泵单元VP1,共用外电极与测量泵内电极之间连接的测量泵单元VP2,主泵内电极与参比空气电极之间连接第一测量腔室氧浓差电池单元V0,参比空气电极与副泵内电极之间连接第二腔室氧浓差电池单元V1,参比空气电极与测量泵内电极之间连接的测量泵催化分解电极氧浓差电池单元V2,主泵内电极与混合电势敏感电极之间连接混合电势测量单元Vr,还包括加热单元。
根据本发明的另一个实施例,进一步包括该方法包括:
第一步,汽车尾气经过第一扩散障碍层扩散到第一测量腔,主泵VP0通过反馈调节使第一测量腔的氧浓度V0维持到一恒定值,使尾气中HC、CO、H2被氧化并确保NO和NO2保持稳定,主泵单元产生的极限电流IP0就跟尾气空燃比值成正比;
第二步,在第一测量腔固定氧浓度条件下,检测混合电势敏感电极和主泵内电极之间的电势差Vr,就能得到NO/NO2相对含量比,Vr= NO/NO2;
第三步,第一测量腔的气氛经过第二扩散障碍层扩散到第二测量腔,通过副泵VP1作用将第二测量腔的氧浓度V1维持在一个较低的恒定值并使NO2转化为NO,而副泵单元产生的极限电流IP1决定了进入第二测量腔的氧量;
第四步,通过测量泵VP2作用将第二测量腔内催化分解电极至周围氧浓度进一步降低至V2,使得NO在测量泵内电极作用下刚好能完全分解成N2和O2,分解的氧气被测量泵泵出并形成泵电流IP2,那么该测量泵电流IP2的大小与NOx总量浓度成正比,IP2=NOx;
第五步,通过计算测量泵电流IP2和副泵单元极限电流IP1的比例,就能精确测出NOX总量浓度;再根据混合电势检测单元的电势差Vr,就能分别计算出NO和NO2的浓度值。
本发明的有益效果是:这种智能氮氧传感器不仅能通过电流型工作原理精确测量尾气中NOX的总量,还能通过混合电势特征检测尾气中NO/NO2的比例,这样就能准确计算出尾气中NO和NO2各自的浓度。
附图说明
下面结合附图和实施例对本发明进一步说明。
图1是本发明氧传感器感应芯片的结构示意图;
图2是氧传感器的结构示意图;
其中:1、上层氧化锆基板,11、共用外电极,12、主泵内电极,13、副泵内电极,111、电极触点,121、电极触点一,131、电极触点二,2、中层氧化锆基板,21、第一测量腔,22、第二测量腔,23、参比空气通道,211、第一扩散障碍层,221、第二扩散障碍层,3、底层氧化锆基板,31、混合电势敏感电极,32、测量泵内电极,33、参比空气电极,311、电极触点三,321、电极触点四,331、电极触点五,41、绝缘包裹层一,42、绝缘包裹层二,43、加热线路,431、电极触点六,432、电极触点七。
具体实施方式
如图1所示,是一种用于智能氮氧传感器感应芯片,图2提供了一种兼具混合电势和电流信号特征的智能氮氧传感器,其不仅能通过电流型工作原理精确测量尾气中NOX的总量,还能通过混合电势特征检测尾气中NO/NO2的比例,这样就能准确计算出尾气中NO和NO2各自的浓度。
本发明氮氧传感器由三层基板集成第一测量腔、第二测量腔、参比空气通道和加热单元。特别之处在于其测量部分除了主泵单元、副泵单元和测量泵单元之外,还有一个混合电势检测单元,共有6个电极组成;而其加热部分由2个电极组成。混合电势检测单元设置在第一测量腔,由以NiO为催化材料的敏感电极和主泵单元内电极作为参比电极组成。第一测量腔和外界之间以及第一和第二测量腔之间设置有扩散障碍层。
如图1所示,图中包括基体层、印刷功能层和闭合结构腔,基体层包括上层氧化锆基板1、中层氧化锆基板2和底层氧化锆基板3;印刷功能层包括共用外电极11、主泵内电极12、副泵内电极13、混合电势敏感电极31、测量泵内电极32、参比空气电极33、绝缘包裹层一41、绝缘包裹层二42、加热线路43和8个电极触点;闭合结构腔包括第一测量腔21、第二测量腔22和参比空气通道23,共用外电极11通过引线和电极触点111相连并印刷连接在上层氧化锆基板1的上端面;主泵内电极12和副泵内电极13以及引线印刷连接在上层氧化锆基板1的下端面、并通过上层氧化锆基板1上的通孔与印刷在上端面的电极触点一121、电极触点二131连接;所述混合电势敏感电极31和测量泵内电极32印刷连接在底层氧化锆基板3的上端面、并通过引线延伸至端头与两侧的电极触点三311、电极触点四321连接;参比空气电极33及引线也印刷连接在底层氧化锆基板3的上端面、并通过底层氧化锆基板3上的过孔与下端面电极触点五331连接;绝缘包裹层一41、绝缘包裹层二42直接印刷连接在底层氧化锆基板3的下端面、并把印刷连接的加热线路43包裹起来,而电极触点五331、电极触点六431、电极触点七432则裸露在端头外面;所述中层氧化锆基板2上通过冲切加工设有第一测量腔21、第二测量腔22和参比空气通道23,并且还设有第一扩散障碍层211和第二扩散障碍层221。
共用外电极11、主泵内电极12、副泵内电极13、测量泵内电极32、参比空气电极33、混合电势敏感电极31为功能信号测量电极。
混合电势敏感电极31设置在第一测量腔21内。
第一扩散障碍层211置于第一测量腔21的前端,第二扩散障碍层221置于第一测量腔21的后端。
如图2所示,图中包括图1中感应芯片,并且在感应芯片的共用外电极11与主泵内电极12之间连接的主泵单元VP0,共用外电极11与副泵内电极13之间连接的副泵单元VP1,共用外电极11与测量泵内电极32之间连接的测量泵单元VP2,主泵内电极12与参比空气电极33之间连接第一测量腔室氧浓差电池单元V0,参比空气电极33与副泵内电极13之间连接第二腔室氧浓差电池单元V1,参比空气电极33与测量泵内电极32之间连接的测量泵催化分解电极氧浓差电池单元V2,主泵内电极12与混合电势敏感电极31之间连接混合电势测量单元Vr,还包括加热单元。
氮氧传感器的6个测量电极分别为主泵外电极(同时也是副泵和测量泵外电极)、主泵内电极(同时也是混合电势单元参考电极)、混合电势单元敏感电极、副泵内电极、测量泵内电极和参比空气电极。加热单元仅由2个电极组成,其工作状态时的温度是由PID控制器以主泵单元内电极与参比空气电极之间的第一测量腔浓差电池单元的内阻为基准进行调节和控制,进而维持在800度左右并保持稳定。在实际工作和控制中另外一个特点是,保持第一测量腔和第二测量腔浓度的恒定,使得信号控制器的闭环控制逻辑更加简单,而每个传感器个体信号和测量值的准确度通过主泵极限电流、副泵极限电流和测量泵电流的大小进行标定和计算。
如图2所示,在工作时,汽车尾气的检测方法为:
第一步,汽车尾气经过第一扩散障碍层散211到第一测量腔21,主泵VP0通过反馈调节使第一测量腔21的氧浓度V0维持到一恒定值,使尾气中HC、CO、H2被氧化并确保NO和NO2保持稳定,主泵单元产生的极限电流IP0就跟尾气空燃比值成正比;
第二步,在第一测量腔21固定氧浓度条件下,检测混合电势敏感电极31和主泵内电极12之间的电势差Vr,就能得到NO/NO2相对含量比,Vr= NO/NO2;
第三步,第一测量腔21的气氛经过第二扩散障碍层221扩散到第二测量腔22,通过副泵VP1作用将第二测量腔22的氧浓度V1维持在一个较低的恒定值并使NO2转化为NO,而副泵单元产生的极限电流IP1决定了进入第二测量腔的氧量;
第四步,通过测量泵VP2作用将第二测量腔22内催化分解电极至周围氧浓度进一步降低至V2,使得NO在测量泵内电极32作用下刚好能完全分解成N2和O2,分解的氧气被测量泵泵出并形成泵电流IP2,那么该测量泵电流IP2的大小与NOx总量浓度成正比,IP2=NOx。
第五步,通过计算测量泵电流IP2和副泵单元极限电流IP1的比例,就能精确测出NOX总量浓度;再根据混合电势检测单元的电势差Vr,就能分别计算出NO和NO2的浓度值。
保持第一测量腔氧浓度V0、第二测量腔氧浓度V1的恒定,使得信号控制器的闭环控制逻辑更加简单,而每个传感器个体信号和测量值的准确度通过副泵极限电流IP1、测量泵电流IP2和混合电势信号Vr的大小进行标定和计算。主泵极限电流IP0通过标定可准确检测尾气空燃比值。
混合电势检测NOx浓度的技术路线是采用金属氧化物MOS作为敏感电极、ZrO2作为氧离子导体、贵电极Pt作为参比电极,氮氧化物会在敏感电极发生催化反应影响氧离子的传输,形成响应电势。具体为NOx通过敏感电极层扩散至三相界面,NOx和O2在敏感电极(SE)和参比电极(RE)侧的三相界面处会发生不同的电化学氧化还原反应:
RE(Pt)侧:
SE(MOS)侧:
在SE端有NOx的吸附和反应,而Pt-RE则无此作用。因此即使在同一样气下,SE和RE之间也会产生电势。但由于NO反应会消耗氧离子提供电子,而NO2恰好相反。因此在NO和NO2混合气氛响应时,两者会出现抵消的情况。据此响应原理,在混合气氛下敏感电极和参比电极之间产生的电势差在一定程度上可以反应出NO和NO2的比例。
本发明智能氮氧传感器实现了NO和NO2各自浓度的精确检测,兼具混合电势信号和电流信号,但在感应元件电极数量和引脚位置排布跟传统纯电流型传感器相比没有发生变化,使得整体总成器件的封装更具兼容性,容易大批量生产和推广使用。
Claims (3)
1.一种智能氮氧传感器,包括感应芯片,感应芯片包括基体层、印刷功能层和闭合结构腔,基体层包括上层氧化锆基板(1)、中层氧化锆基板(2)和底层氧化锆基板(3);印刷功能层包括共用外电极(11)、主泵内电极(12)、副泵内电极(13)、混合电势敏感电极(31)、测量泵内电极(32)、参比空气电极(33)、绝缘包裹层一(41)、绝缘包裹层二(42)、加热线路(43)和8个电极触点;闭合结构腔包括第一测量腔(21)、第二测量腔(22)和参比空气通道(23),其特征在于:所述共用外电极(11)通过引线和电极触点(111)相连并印刷连接在上层氧化锆基板(1)的上端面;所述主泵内电极(12)和副泵内电极(13)以及引线印刷连接在上层氧化锆基板(1)的下端面、并通过上层氧化锆基板(1)上的通孔与印刷在上端面的电极触点一(121)、电极触点二(131)连接;所述混合电势敏感电极(31)和测量泵内电极(32)印刷连接在底层氧化锆基板(3)的上端面、并通过引线延伸至端头与两侧的电极触点三(311)、电极触点四(321)连接;所述参比空气电极(33)及引线也印刷连接在底层氧化锆基板(3)的上端面、并通过底层氧化锆基板(3)上的过孔与下端面电极触点五(331)连接;所述的绝缘包裹层一(41)、绝缘包裹层二(42)直接印刷连接在底层氧化锆基板(3)的下端面、并把印刷连接的加热线路(43)包裹起来,而电极触点五(331)、电极触点六(431)、电极触点七(432)则裸露在端头外面;所述中层氧化锆基板(2)上通过冲切加工设有第一测量腔(21)、第二测量腔(22)和参比空气通道(23),并且还设有第一扩散障碍层(211)和第二扩散障碍层(221),所述混合电势敏感电极(31)设置在第一测量腔(21)内,所述混合电势敏感电极(31)由NiO和ZrO2构成,质量比例为2:1到1:1,还包括共用外电极(11)与主泵内电极(12)之间连接的主泵单元VP0,共用外电极(11)与副泵内电极(13)之间连接的副泵单元VP1,共用外电极(11)与测量泵内电极(32)之间连接的测量泵单元VP2,主泵内电极(12)与参比空气电极(33)之间连接第一测量腔室氧浓差电池单元V0,参比空气电极(33)与副泵内电极(13)之间连接第二腔室氧浓差电池单元V1,参比空气电极(33)与测量泵内电极(32)之间连接的测量泵催化分解电极氧浓差电池单元V2,主泵内电极(12)与混合电势敏感电极(31)之间连接混合电势测量单元Vr,还包括加热单元。
2.如权利要求1所述的智能氮氧传感器,其特征在于:所述第一扩散障碍层(211)置于第一测量腔(21)的前端,第二扩散障碍层(221)置于第一测量腔(21)的后端。
3.如权利要求1所述的智能氮氧传感器的检测方法,其特征在于:该方法包括:
第一步,汽车尾气经过第一扩散障碍层(211)扩散到第一测量腔(21),主泵VP0通过反馈调节使第一测量腔(21)的氧浓度V0维持到一恒定值,使尾气中HC、CO、H2被氧化并确保NO和NO2保持稳定,主泵单元产生的极限电流IP0就跟尾气空燃比值成正比;
第二步,在第一测量腔(21)固定氧浓度条件下,检测混合电势敏感电极(31)和主泵内电极(12)之间的电势差Vr,就能得到NO/NO2相对含量比,Vr=NO/NO2;
第三步,第一测量腔(21)的气氛经过第二扩散障碍层(221)扩散到第二测量腔(22),通过副泵VP1作用将第二测量腔(22)的氧浓度V1维持在一个较低的恒定值并使NO2转化为NO,而副泵单元产生的极限电流IP1决定了进入第二测量腔的氧量;
第四步,通过测量泵VP2作用将第二测量腔(22)内催化分解电极至周围氧浓度进一步降低至V2,使得NO在测量泵内电极(32)作用下刚好能完全分解成N2和O2,分解的氧气被测量泵泵出并形成泵电流IP2,那么该测量泵电流IP2的大小与NOx总量浓度成正比,IP2=NOx;
第五步,通过计算测量泵电流IP2和副泵单元极限电流IP1的比例,就能精确测出NOX总量浓度;再根据混合电势检测单元的电势差Vr,就能分别计算出NO和NO2的浓度值。
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