CN108286939A - A kind of laser traces measurement optical system Energy Analysis for High based on ZEMAX emulation - Google Patents
A kind of laser traces measurement optical system Energy Analysis for High based on ZEMAX emulation Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
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Abstract
The invention discloses a kind of laser traces based on ZEMAX emulation to measure optical system Energy Analysis for High, for analyzing influence of each optical element to energy obtained by laser traces measuring system in optical system, carry out the foundation of simulation model to required each optical element in whole system respectively in ZEMAX, the optical system principle measured according to laser traces, carry out sequence adjustment, the setting of multiplet parameter, and the structure design between each optical element, the simulation model that laser traces measure optical system is established, energy results are obtained.According to optical element different application conditions and environment, the setting of corresponding parameter is carried out respectively, obtains influence of the optical component parameter to optical system energy.System optimization and reliability assessment are carried out to optical system using simulation result.
Description
Technical field
The present invention relates to a kind of methods of optical system energy emulation, and in particular to laser traces measure the energy of optical system
Amount emulation, is mainly used in field of precision measurement.
Background technology
Laser tracking measurement system has the characteristics that measurement range is big, precision is high, live real-time is good.Laser beam can be with
Project space any point, real time dynamic tracing extraterrestrial target point, to realize that three-dimensional real time dynamic tracing measures.Laser with
Track measuring system is efficiently convenient, is widely used in calibration and shipbuilding, automobile system to numerically-controlled machine tool and coordinate measuring machine
It makes, the fields such as aircraft manufacture.It is always to be difficult to attack traditionally for the obtained energy of the optical system of laser tracking measurement
Gram problem, therefore the precision of laser tracking measurement system is usually relatively low.Currently, domestic this special calibrator (-ter) unit completely according to
Rely import, especially high-precision, high detection speed, high economy online detection instrument have become restriction China it is a series of heavy
The bottleneck problem of big equipment preparation.
ZEMAX Optical Design Program are a kind of software of special optical design, are widely used in photoetching
The imaging designs such as object lens, projection objective, light path emulation and various vehicle light illumination design fields.Due to reliability height, have strong
Big optical design and simulation analysis function.ZEMAX optical design softwares obtain being widely recognized as and favoring for optics circle, are optics
Design, research, tackling key problem, the emulation of device are made that significant contribution.
It is necessary to design a kind of laser traces measurement optical system Energy Analysis for High emulated based on ZEMAX, profit thus
The optical system energy that laser traces measure is analyzed with the powerful optical design of ZEMAX softwares and simulation analysis function,
There is directive significance to the selection of the precision improvement of laser traces measuring system, reliability assessment, light path design and optical element.
Invention content
The purpose of the present invention devises the optical system of laser traces measurement first, and the system is then applied to realize that laser chases after
Track measures；It is then based on the system and establishes laser traces measurement optical system simulation model, this simulation model is utilized to analyze optics
Influence of each optical element to laser interference signal energy in system, the optical element that laser traces are measured with optical system select
It selects, the building of light path, the debugging of system have very importantly theory directive significance.
The technical problem to be solved in the present invention is as follows：
(1) simulation model of the optical system of laser traces measurement is built in ZEMAX.
(2) according to the simulation model for the optical system built, the parameter of each optical element is set, realizes optical system emulation
The optimization of model.
In order to solve the above technical problems, the technical solution adopted by the present invention is a kind of laser traces based on ZEMAX emulation
The method for measuring optical system, the realization process of this method are as follows：
Fig. 1 is the optical system schematic diagram that laser traces measure, a kind of laser traces measurement optics based on ZEMAX emulation
System, the optical system include laser i.e. LA, analyzer, that is, P1, polarization spectroscope 1 is PBS1, polarization spectroscope 2 is PBS2,
Polarization spectroscope 3 is PBS3, spectroscope 1 is BS1, spectroscope 2 is BS2, cat's -eye reflector, standard ball, quarter-wave plate 1 is
QW1, quarter-wave plate 2 is QW2, quarter-wave plate 3 is QW3, half wave plate, that is, HW, photelectric receiver 1 is PD1, light
Electric receiver 2 is PD2, photelectric receiver 3 is PD3It is PD with photelectric receiver 44；According to laser traces measuring principle, sent out by LA
The laser beam penetrated passes through P1After obtain line polarisation, by PBS1Afterwards, p light penetrates, s light reflections, in PBS1Locate the s light conducts of reflection
Measuring beam, by QW2After be converted into circularly polarized light, change rotation direction after standard ball reflects, again pass by QW2After be converted into p
Light penetrates PBS1Afterwards, by QW3It is converted into circularly polarized light, by BS2Afterwards, the light of transmission is reflected after cat's -eye reflector, circle
Polarised light changes rotation direction, again passes by BS2, a part of light is through BS2QW is again passed by after transmission3Circularly polarized light is converted into s light, warp
Cross PBS1It is reflected, by QW1After be converted into circularly polarized light, by BS1After light splitting, a part of light transmission, a part of light reflection,
Through BS1The light of transmission is after HW by PBS3P light transmissions afterwards form measuring beam Ol1, by PBS3S light reflections afterwards are formed and are surveyed
Measure light beam Ol2, and in BS1The light beam for locating reflection, by PBS2S light reflections afterwards form measuring beam Ol3, by PBS2P light is saturating afterwards
It penetrates, forms measuring beam Ol4；The p light of transmission, which is used as, refers to light beam, by QW1After be converted into circularly polarized light, using BS1Point
Light, through BS1The light of transmission is after HW, using PBS3The p light transmitted afterwards forms reference beam Or1, with measuring beam Ol1It is formed
Interference light is by PD1It receives, the s light of reflection forms reference beam Or2, with measuring beam Ol2Interference light is formed by PD2It receives, and passes through
BS1The light beam of reflection, by PBS2The s of back reflection forms reference beam Or3, with measuring beam Ol3Interference light is formed by PD3It connects
It receives, the p light of transmission forms reference beam Or4, with measuring beam Ol4Interference light is formed by PD4It receives.Through PD1, PD2, PD3And PD4
The interference signal that four tunnel phases differ 90 ° successively is obtained after photoelectric processing.
On the basis of above system, a kind of laser traces measurement optical system energy spectrometer side based on ZEMAX emulation
Method is emulated according to the optical system principle that laser traces measure in ZEMAX.
The specific implementation flow of this method is as follows：
Step 1：Set the optical system parameter that laser traces measure, i.e. wavelength, clear aperture.
Step 2：Using Jones matrix to analyzer P1Carry out analog simulation.If analyzer incident lightPolarization state table
It is shown as：
Wherein：A1, B1Indicate corresponding two components in the x-axis and y-axis of incident light vector reference axis shown in Fig. 2.
Pass through analyzer P1Transmitted light be expressed as：
Wherein：A2, B2Indicate corresponding two components in the x-axis and y-axis of outgoing light vector reference axis shown in Fig. 2.
Analyzer P1Incident light and transmitted light between there is relationship to indicate as follows with matrix：
Wherein：g11, g12, g21, g22It is constant coefficient.
If μ is analyzer P1The x-axis of light transmission shaft and reference axis shown in Fig. 2 at angle, then analyzer P1Jones matrix
As follows：
Input parameter in lens data formula bar in ZEMAX：Analyzer P1Surface type, thickness.According to Jones
Matrix, analyzer P1The x-axis of light transmission shaft and reference axis shown in Fig. 2 at angle μ, establish Jones face type, input relevant parameter.
Step 3：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS1Emulation.
Input parameter in data edition column in ZEMAX：PBS1Radius of curvature, thickness, glass material.Geometry is set, non-
Under ordered mode, the model construction of geometry is completed.Coating is set at interface, coating surface is simulated in ZEMAX, is wrapped
Include metal and multi-layer dielectric coating.Separating for p light and s light is realized by way of plated film, realizes the function of polarization spectroscope.
Multiplet in ordered mode is using ZEMAX configures, and PBS is completed in the path of simulated transmission and reflection1Simulation modeling.
Step 4：Analog simulation is carried out to quarter-wave plate using Jones matrix.Wave plate is derived according to step 2
Jones matrix is shown below：
Wherein, θ indicate wave plate fast axle and Fig. 2 shown in coordinate system x-axis at angle, δ indicates by produced by wave plate
Phase difference.
Input parameter in lens data formula bar in ZEMAX：QW2Radius of curvature, thickness, glass material.According to
Jones matrix, quarter-wave plate QW2The x-axis of light transmission shaft and reference axis shown in Fig. 2 at angle, θ, produced by wave plate
Phase difference δ, establish Jones face type, input relevant parameter.
Step 5：The simulation model of design standard ball is turned back light path as plane mirror according to the effect of standard ball.
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of plane mirror, thickness, glass material.
Step 6：Using Jones matrix to quarter-wave plate QW3Carry out analog simulation.To quarter-wave plate QW3It carries out
The same step 4 of analog simulation.
Step 7：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes spectroscope BS2Modeling
Emulation.For BS2, BS2Emulation mode and PBS1Emulation mode it is identical, in the data edition column in ZEMAX input ginseng
Number：BS2Radius of curvature, thickness, glass material.Setting geometry completes the model of geometry under non-sequential pattern
Structure.Coating is set at interface, coating surface, including metal and multi-layer dielectric coating are simulated in ZEMAX, passes through plating
The mode of film realizes separating for two-beam.Realize spectroscopical function.Multiplet in ordered mode is using ZEMAX is matched
It sets, the path of simulated transmission and reflection, completes BS2Simulation modeling.
Step 8：The simulation model for designing cat's -eye reflector is rolled over according to the effect of cat's -eye reflector as plane mirror
Turn light path.Input parameter in lens data formula bar in ZEMAX：The radius of curvature of plane mirror, thickness, glass material.
Step 9：Using Jones matrix to quarter-wave plate QW1Carry out analog simulation.To quarter-wave plate QW1It carries out
The same step 4 of analog simulation.
Step 10：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes spectroscope BS1Modeling
Emulation.Spectroscope BS1The same step 7 of modeling and simulating method.
Step 11：Analog simulation is carried out to half wave plate using Jones matrix.Wave plate is derived according to step 2
Jones matrix be shown below：
Wherein, θ indicate wave plate fast axle and coordinate system x-axis at angle, δ indicate by wave plate generate phase difference.
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of HW, thickness, glass material.According to fine jade
This matrix, the x-axis of half wave plate HW light transmission shafts and reference axis shown in Fig. 2 at angle, θ, by phase caused by wave plate
Potential difference δ establishes Jones face type, inputs relevant parameter.
Step 12：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS2Emulation.It is right
In PBS2The same step 3 of emulation.
Step 13：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS3Emulation.It is right
In PBS3The same step 3 of emulation.
According to laser traces measure optical system principle, respectively to required each optical element in whole system into
Row emulation, then sequence adjustment is carried out, the structure design between the setting of multiplet parameter and each optical element obtains
Last simulation architecture figure.
According to optical element different application conditions and environment, the setting of corresponding parameter is carried out respectively, obtains optics member
Influence of the part to optical system.Since the error of optical element is inevitable in the manufacturing, can utilize imitative
True result auxiliary carries out reliability assessment to optical system.
Description of the drawings
The optical system schematic diagram of Fig. 1 laser traces.
Coordinate schematic diagram in Fig. 2 present invention.
Fig. 3 medium wavelengths of the present invention set schematic diagram.
Clear aperture sets schematic diagram in Fig. 4 present invention.
System model emulates schematic diagram in Fig. 5 present invention.
The interference pattern schematic diagram obtained in Fig. 6 present invention.
Specific implementation mode
Below in conjunction with the accompanying drawings and specific implementation mode the present invention is described in further detail.Flow is embodied such as in it
Under：
Step 1：Set the optical system parameter that laser traces measure, i.e. wavelength, clear aperture.According to system requirements, wave
Length is selected as 632.8nm, and clear aperture is selected as 20mm.As shown in Figure 3,4.
Step 2：Using Jones matrix to analyzer P1Carry out analog simulation.If analyzer incident lightPolarization state
It is expressed as：
Wherein：A1, B1Indicate corresponding two components on the x and y-axis of incident light vector reference axis shown in Fig. 2.
Pass through analyzer P1Transmitted lightIt is expressed as：
Wherein：A2, B2Indicate outgoing light vector corresponding two components on the x of reference axis and y-axis.
Analyzer P1Incident light and transmitted light between there is relationship to indicate as follows with matrix：
Wherein：g11, g12, g21, g22It is constant coefficient.
If μ is analyzer P1The x-axis of light transmission shaft and reference axis at angle, then analyzer P1Jones matrix it is as follows：
Input parameter in lens data formula bar in ZEMAX：Analyzer P1Surface type, thickness.According to Jones
Matrix, analyzer P1The x-axis of light transmission shaft and reference axis at angle μ, establish Jones face type, input relevant parameter.
Concrete operation step is as follows：
(1) " Jones Matrix " is selected at surface type.
(2) it is selected as at thickness " Infinity ".
(3) setting corresponding parameter in the position " A (B) (C) (D) real " in ZEMAX, respectively " 0.5,0.5,0.5,
0.5,0.5 ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 3：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS1Emulation.
Input parameter in data edition column in ZEMAX：PBS1Radius of curvature, thickness, glass material.Geometry is set, non-
Under ordered mode, the model construction of geometry is completed.Then coating is set at interface.ZEMAX is utilized in ordered mode
In multiplet configuration, the path of simulated transmission and reflection, complete PBS1Simulation modeling.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 12.7mm ".
(3) type of glass is set as " H-K9L ".
(4) it splits plated film to be set as " PASS_P ", other faces plated film is " AR ".
Step 4：Analog simulation is carried out to quarter-wave plate using Jones matrix.Wave plate is derived according to step 2
Jones matrix is shown below：
Wherein, θ indicate wave plate fast axle and coordinate system x-axis at angle, δ indicates by phase caused by wave plate
Difference.
Input parameter in lens data formula bar in ZEMAX：QW2Radius of curvature, thickness, glass material.According to
Jones matrix, quarter-wave plate QW2The x-axis of light transmission shaft and reference axis shown in Fig. 2 at angle, θ, produced by wave plate
Phase difference δ, establish Jones face type, input relevant parameter.
Concrete operation step is as follows：
(1) " Jones Matrix " is selected at surface type.
(2) it is selected as at thickness " Infinity ".
(3) setting corresponding parameter in the position " A (D) real " in ZEMAX, respectively " 0.7071,0.071 ".In " B (C)
The corresponding parameter of the positions imag " setting, respectively " -0.7071, -0.071 ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 5：The simulation model of design standard ball is turned back light path as plane mirror according to the effect of standard ball.
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of plane mirror, thickness, glass material.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 40mm ".
(3) type of glass is set as " MIRROR ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 6：Using Jones matrix to quarter-wave plate QW3Carry out analog simulation.Lens data in ZEMAX
Input parameter in formula bar：QW3Radius of curvature, thickness, glass material.According to Jones matrix, quarter-wave plate QW3Light transmission
The x-axis of axis and reference axis at angle, θ establish Jones face type by phase difference δ caused by wave plate, input relevant parameter.
Concrete operation step is as follows：
(1) " Jones Matrix " is selected at surface type.
(2) it is selected as at thickness " Infinity ".
(3) setting corresponding parameter in the position " A (D) real " in ZEMAX, respectively " 0.7071,0.071 ".In " B (C)
The corresponding parameter of the positions imag " setting, respectively " -0.7071, -0.071 ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 7：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes that spectroscopical modeling is imitative
Very.For BS2, BS2Emulation mode and PBS1Emulation mode it is identical, input parameter in the data edition column in ZEMAX：
BS2Radius of curvature, thickness, glass material.Setting geometry completes the model structure of geometry under non-sequential pattern
It builds.Coating is set at interface, and the multiplet in ordered mode is using ZEMAX configures, the road of simulated transmission and reflection
Diameter completes BS2Simulation modeling.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 12.7mm ".
(3) type of glass is set as " H-K9L ".
(4) it splits plated film to be set as " I.50 ", other faces plated film is " AR ".
Step 8：The simulation model for designing cat's -eye reflector is rolled over according to the effect of cat's -eye reflector as plane mirror
Turn light path.Input parameter in lens data formula bar first in ZEMAX：The radius of curvature of plane mirror, thickness, glass material
Material.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 40mm ".
(3) type of glass is set as " MIRROR ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 9：Using Jones matrix to quarter-wave plate QW1Carry out analog simulation.Lens data in ZEMAX
Input parameter in formula bar：QW1Radius of curvature, thickness, glass material.According to Jones matrix, quarter-wave plate QW1Light transmission
The x-axis of axis and reference axis at angle, θ establish Jones face type by phase difference δ caused by wave plate, input relevant parameter.
Concrete operation step is as follows：
(1) " Jones Matrix " is selected at surface type.
(2) it is selected as at thickness " Infinity ".
(3) setting corresponding parameter in the position " A (D) real " in ZEMAX, respectively " 0.7071,0.071 ".In " B (C)
The corresponding parameter of the positions imag " setting, respectively " -0.7071, -0.071 ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 10：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes spectroscope BS1Modeling
Emulation.Input parameter in data edition column in ZEMAX：BS1Radius of curvature, thickness, glass material.Geometric form is set
Shape completes the model construction of geometry under non-sequential pattern.Then coating is set at interface, in ordered mode profit
With the multiplet configuration in ZEMAX, BS is completed in the path of simulated transmission and reflection1Simulation modeling.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 12.7mm ".
(3) type of glass is set as " H-K9L ".
(4) it splits plated film to be set as " I.50 ", other faces plated film is " AR ".
Step 11：Analog simulation is carried out to half wave plate using Jones matrix.Wave plate is derived according to step 2
Jones matrix be shown below：
Wherein, θ indicate wave plate fast axle and coordinate system x-axis at angle, δ indicates by phase caused by wave plate
Difference.
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of HW, thickness, glass material.Then root
According to Jones matrix, the x-axis of half wave plate HW light transmission shafts and reference axis at angle, θ, by phase difference caused by wave plate
δ establishes Jones face type, inputs relevant parameter.
Concrete operation step is as follows：
(1) " Jones Matrix " is selected at surface type.
(2) it is selected as at thickness " Infinity ".
(3) setting corresponding parameter in the position " A (B) (C) (D) imag " in ZEMAX, respectively " 0.7071, -0.071, -
0.7071, -0.071 ".
(4) image plane is arranged in paraxial focus, is " edge-light height (Marginal Ray by Solve type changes
Height) ", adjustment thickness makes the marginal ray height in image planes be 0, is paraxial focus.
Step 12：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS2Emulation.
Input parameter in data edition column in ZEMAX：PBS2Radius of curvature, thickness, glass material.Geometry is set, non-
Under ordered mode, the model construction of geometry is completed, then coating is set at interface, ZEMAX is utilized in ordered mode
In multiplet configuration, the path of simulated transmission and reflection.Complete PBS2Simulation modeling.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 12.7mm ".
(3) type of glass is set as " H-K9L ".
(4) it splits plated film to be set as " PASS_P ", other faces plated film is " AR ".
Step 13：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS3Emulation.
Input parameter in data edition column in ZEMAX：PBS3Radius of curvature, thickness, glass material.Geometry is set, non-
Under ordered mode, the model construction of geometry is completed.Then coating at interface is set, ZEMAX is utilized in ordered mode
In multiplet configuration, the path of simulated transmission and reflection.Complete PBS3Simulation modeling.
Concrete operation step is as follows：
(1) radius of curvature is set as " Infinity ".
(2) thickness is set as " 12.7mm ".
(3) type of glass is set as " H-K9L ".
(4) it splits plated film to be set as " PASS_P ", other faces plated film is " AR ".
After the emulation for completing each optical element, according to laser traces measure optical system principle, carry out sequence adjustment,
Measuring beam Ol1, with reference beam Or1Interference light is formed by PD1It receives；Measuring beam Ol2, with reference beam Or2Form interference light
By PD2It receives；Measuring beam Ol3, with reference beam Or3Interference light is formed by PD3It receives；Measuring beam Ol4, with reference beam Or4
Interference light is formed by PD4It receives, corresponding parameter is configured at multiplet, realize that the emulation of entire optical system is completed.
The analogous diagram of entire optical system is as shown in Figure 5.The interference pattern that four road interference signals obtain is as shown in Figure 6.
Light path system emulation is carried out according to the model of foundation, the energy point for four road interference signals of reception may be implemented
Analysis, according to actual demand, changes the correspondence parameter of some optical element, carries out corresponding model emulation, can obtain the parameter
The assessment to system optimization and reliability is realized in influence to the last received energy of whole system.
Claims (3)
1. a kind of laser traces based on ZEMAX emulation measure optical system, it is characterised in that：The optical system includes laser
That is LA, analyzer, that is, P1, polarization spectroscope 1 is PBS1, polarization spectroscope 2 is PBS2, polarization spectroscope 3 is PBS3, spectroscope 1
That is BS1, spectroscope 2 is BS2, cat's -eye reflector, standard ball, quarter-wave plate 1 is QW1, quarter-wave plate 2 is QW2, four
/ mono- wave plate 3 is QW3, half wave plate, that is, HW, photelectric receiver 1 is PD1, photelectric receiver 2 is PD2, photelectric receiver
3 i.e. PD3It is PD with photelectric receiver 44；According to laser traces measuring principle, P is passed through by the laser beam of LA transmittings1After to obtain line inclined
Light, by PBS1Afterwards, p light penetrates, s light reflections, in PBS1Locate the s light of reflection as measuring beam, by QW2After be converted into justifying
Polarised light changes rotation direction after standard ball reflects, again passes by QW2After be converted into p light penetrate PBS1Afterwards, by QW3It is converted into
Circularly polarized light, by BS2Afterwards, the light of transmission is reflected after cat's -eye reflector, and circularly polarized light changes rotation direction, again passes by
BS2, a part of light is through BS2QW is again passed by after transmission3Circularly polarized light is converted into s light, by PBS1It is reflected, by QW1After turn
Circularly polarized light is changed into, by BS1After light splitting, a part of light transmission, a part of light reflection, through BS1The light of transmission after HW by
PBS3P light transmissions afterwards form measuring beam Ol1, by PBS3S light reflections afterwards form measuring beam Ol2, and in BS1Place's reflection
Light beam, by PBS2S light reflections afterwards form measuring beam Ol3, by PBS2P light transmissions afterwards form measuring beam Ol4；It penetrates
P light, which is used as, refers to light beam, by QW1After be converted into circularly polarized light, using BS1Light splitting, through BS1The light of transmission after HW, then
By PBS3The p light transmitted afterwards forms reference beam Or1, with measuring beam Ol1Interference light is formed by PD1It receives, the s light shapes of reflection
At reference beam Or2, with measuring beam Ol2Interference light is formed by PD2It receives, and through BS1The light beam of reflection, by PBS2Back reflection
S form reference beam Or3, with measuring beam Ol3Interference light is formed by PD3It receives, the p light of transmission forms reference beam Or4, with
Measuring beam Ol4Interference light is formed by PD4It receives；Through PD1, PD2, PD3And PD4Four tunnel phases are obtained after photoelectric processing to differ successively
90 ° of interference signal.
2. measuring optical system energy spectrometer using the laser traces based on ZEMAX emulation that system described in claim 1 carries out
Method, it is characterised in that：According to the optical system principle that laser traces measure, emulated in ZEMAX；
The specific implementation flow of this method is as follows：
Step 1：Set the optical system parameter that laser traces measure, i.e. wavelength, clear aperture；
Step 2：Using Jones matrix to analyzer P1Carry out analog simulation；If analyzer incident lightPolarization state indicate
For：
Wherein：A1, B1Indicate incident light vector corresponding two components in the x-axis and y-axis of reference axis；
Pass through analyzer P1Transmitted light be expressed as：
Wherein：A2, B2Indicate outgoing light vector corresponding two components in the x-axis and y-axis of reference axis；
Analyzer P1Incident light and transmitted light between there is relationship to indicate as follows with matrix：
Wherein：g11, g12, g21, g22It is constant coefficient；
If μ is analyzer P1The x-axis of light transmission shaft and reference axis at angle, then analyzer P1Jones matrix it is as follows：
Input parameter in lens data formula bar in ZEMAX：Analyzer P1Surface type, thickness；According to Jones matrix,
Analyzer P1The x-axis of light transmission shaft and reference axis at angle μ, establish Jones face type, input relevant parameter；
Step 3：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS1Emulation；In ZEMAX
Data edition column in input parameter：PBS1Radius of curvature, thickness, glass material；Geometry is set, in non-sequential pattern
Under, complete the model construction of geometry；Coating is set at interface, simulates coating surface in ZEMAX, including metal and
Multi-layer dielectric coating；Separating for p light and s light is realized by way of plated film, realizes the function of polarization spectroscope；In progressive die
Formula utilizes the multiplet in ZEMAX to configure, and PBS is completed in the path of simulated transmission and reflection1Simulation modeling；
Step 4：Analog simulation is carried out to quarter-wave plate using Jones matrix；Jones of wave plate is derived according to step 2
Matrix is shown below：
Wherein, θ indicate wave plate fast axle and coordinate system x-axis at angle, δ indicates by phase difference caused by wave plate；
Input parameter in lens data formula bar in ZEMAX：QW2Radius of curvature, thickness, glass material；According to Jones's square
Battle array, quarter-wave plate QW2The x-axis of light transmission shaft and reference axis at angle, θ establish fine jade by phase difference δ caused by wave plate
This face type inputs relevant parameter；
Step 5：The simulation model of design standard ball is turned back light path as plane mirror according to the effect of standard ball；
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of plane mirror, thickness, glass material；
Step 6：Using Jones matrix to quarter-wave plate QW3Carry out analog simulation；To quarter-wave plate QW3It is simulated
Emulate same step 4；
Step 7：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes spectroscope BS2Modeling and simulating；
For BS2, BS2Emulation mode and PBS1Emulation mode it is identical, input parameter in the data edition column in ZEMAX：BS2
Radius of curvature, thickness, glass material；Setting geometry completes the model construction of geometry under non-sequential pattern；
Coating is set at interface, coating surface, including metal and multi-layer dielectric coating are simulated in ZEMAX, passes through plated film
Mode realizes separating for two-beam；Realize spectroscopical function；Multiplet in ordered mode is using ZEMAX configures, mould
The path of quasi- transmission and reflection, completes BS2Simulation modeling；
Step 8：The simulation model for designing cat's -eye reflector is turned back light as plane mirror according to the effect of cat's -eye reflector
Road；Input parameter in lens data formula bar in ZEMAX：The radius of curvature of plane mirror, thickness, glass material；
Step 9：Using Jones matrix to quarter-wave plate QW1Carry out analog simulation；To quarter-wave plate QW1It is simulated
Emulate same step 4；
Step 10：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes spectroscope BS1Modeling and simulating；
Spectroscope BS1The same step 7 of modeling and simulating method；
Step 11：Analog simulation is carried out to half wave plate using Jones matrix；The fine jade of wave plate is derived according to step 2
This matrix is shown below：
Wherein, θ indicate wave plate fast axle and coordinate system x-axis at angle, δ indicate by wave plate generate phase difference；
Input parameter in lens data formula bar in ZEMAX：The radius of curvature of HW, thickness, glass material；According to Jones's square
Battle array, the x-axis of half wave plate HW light transmission shafts and reference axis at angle, θ establish fine jade by phase difference δ caused by wave plate
This face type inputs relevant parameter；
Step 12：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS2Emulation；For PBS2
The same step 3 of emulation；
Step 13：It is modeled in the non-sequential and sequence ray trace pattern of ZEMZX, realizes PBS3Emulation；For PBS3
The same step 3 of emulation.
3. the laser traces according to claim 1 based on ZEMAX emulation measure optical system Energy Analysis for High, special
Sign is：According to laser traces measure optical system principle, respectively to required each optical element in whole system into
Row emulation, then sequence adjustment is carried out, the structure design between the setting of multiplet parameter and each optical element obtains
Last simulation architecture figure.
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